• Nuclear Engineering and Technology
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• v.56 no.1
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• pp.70-77
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• 2024

A low energy ion irradiation system based on the deuterium arc ion source with a high perveance of 1 µP for a single extraction aperture has been successfully developed for the investigation of ion irradiation on plasma-facing components including the first mirror of plasma optical diagnostics system. Under the optimum operating condition for mirror testing, the ion source has a beam energy of 200 eV and a current density of 3.7 mA/cm². The ion source comprises a magnetic cusp-type plasma source, an extraction system, a target system with a Faraday cup, and a power supply control system to ensure stable long time operation. Operation parameters of plasma source such as pressure, filament current, and arc power with D₂ discharge gas were optimized for beam extraction by measuring plasma parameters with a Langmuir probe. The diode electrode extraction system was designed by IGUN simulation to optimize for 1 µP perveance. It was successfully demonstrated that the ion beam current of ~4 mA can be extracted through the 10 mm aperture from the developed ion source. The target system with the Faraday cup is also developed to measure the beam current. With the assistance of the power control system, ion beams are extracted while maintaining a consistent arc power for more than 10 min of continuous operation.

• CELLMED
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• v.2 no.3
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• pp.24.1-24.5
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• 2012

Obesity is psychological and socioeconomic problems as well as health problems related to physical disease and disorder. The obesity epidemic, including a marked increase in the prevalence of obesity among pregnant women, represents a critical public health problem throughout the world. Gung-Gui-Tang (GGT), a prescription of traditional Korean medicine, has been used to treat dizziness due to loss of blood as well as static blood after childbirth. However, the therapeutic potential of GGT on postpartum obesity has not been fully elucidated in an experimental model. In our research, GGT inhibited the increases of body weight and adipose tissues in postpartum mice fed a high-fat diet. GGT also inhibited the elevations of plasma lipid profiles such as triglyceride, low-density lipoprotein cholesterol, total cholesterol, and glutamate pyruvate transaminase. Overall, these results provide evidence that GGT can help to inhibit postpartum obesity and open new perspective to recover the shape of mother into the moment of conception.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.84-84
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• 2003

The effects of Ti addition on microstructure and mechanical properties of (Al+Xat.%Ti)2at%B (X=0.5, 1, 2) fabricated by mechanical alloying and spark plasma sintering (SPS) were investigated. These alloys were prepared by high energy ball milling (attritor) and then fracture toughness was investigated by using a charpy impact tester. The SPS method was used to consolidate (Al+Xat.%Ti)fat.%B with the pressure of 50MPa. The powders were successfully consolidated to alloy which the theoretical density is 99%. It was confirmed that the fracture toughness of Al-Bat.% matrix composites was increased by the addition of Ti.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.306-309
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• 2004

Recently, the environmental problem has received considerable attention. so, many lamps have been developing for environmental requirement and energy efficiency. also, at glow discharge lamp researchers try to reduce energy spending that is power saving lamp. this kind requirement agree with strong points of electrodeless fluorescent lamp has received to now lighting sauce. At low pressure as mTorr I.C.P make high density plasma easily, is good to maintain discharge, has high ionization and does not have failing lighting and losing ability of electron radiation by oxidation and volatilization of electrodes, because this tape does not have electrodes. This point of I.C.P can use at electrodeless fluorescent lamp in this study ICP display elements and Ar, Ne, Kr are researched for optical characteristic. each gas is looked into optical characteristic, also mixed gases is experiment for optical characteristic.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.129-134
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• 2004

The development of fabrication processes of polycrystalline-silicon-thin-film transistors (poly-Si TFTs) at low temperatures is reviewed. Rapid crystallization through laser-induced melt-regrowth has an advantage of formation of crystalline silicon films at a low thermal budget. Solid phase crystallization techniques have also been improved for low temperature processing. Passivation of $SiO_2$/Si interface and grain boundaries is important to achieve high carrier transport properties. Oxygen plasma and $H_2O$ vapor heat treatments are proposed for effective reduction of the density of defect states. TFTs with high performance is reported.

• International Journal of Industrial Entomology and Biomaterials
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• v.22 no.2
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• pp.95-100
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• 2011

The effect of diet supplementation of Antheraea pernyi (A. pernyi) silk fibroin on the lipid metabolism and antioxidant defense status in high fat-fed mice was investigated. The animals were given normal control diet (NC group), high fat diet (HF group), or high fat diet supplemented with A. pernyi silk fibroin powder (HFS group) for 7 weeks. After the experimental period, the HF group showed significant increase in body weight, plasma and hepatic total cholesterol levels, and hepatic triglyceride concentration, and decreased activities of hepatic antioxidant enzymes relative to NC group. However, the HFS group exhibited marked reduction in body weight, plasma cholesterol and hepatic triglyceride levels, hepatic lipogenic enzyme activities, and lipid peroxidation rate, and higher high-density lipoprotein (HDL)-cholesterol level, fecal triglyceride content, and antioxidant enzymes activities compared with that of HF group. These findings demonstrate that dietary feeding of A. pernyi silk fibroin could improve the lipid metabolism and antioxidant defense system via regulation of hepatic antioxidant and lipogenic enzymes activities. Hence, this silk fibroin may be beneficial as a functional biomaterial for the development of therapeutic agent against high fat diet-induced hyperlipidemia and its related diseases.

• Journal of the Korean institute of surface engineering
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• v.50 no.5
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• pp.366-372
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• 2017

Plasma electrolytic oxidation(PEO) has attracted attention as a surface treatment which has high wear resistance and corrosion resistance. PEO is generally considered as cost-effective, environmentally friendly and superior in terms of coating performance. Most of studies about the PEO processes have been applied to light metals such as Al and Mg. Because the strength of Al and Mg is weaker than that of steel, there is a limit to the application. In this study, PEO process was used to form oxide coatings on Hot dipped aluminized(HDA) steel and the characteristics of the coating film according to the PEO current density were studied. The morphology was observed by SEM and component was analyzed by using EDS. The corrosion behaviors of PEO coating films were estimated by exposing salt spray test at 5 wt.% NaCl solution and measuring polarization curves in deaerated 3 wt.% NaCl solution. With the increase of PEO process current density, the pore size of the coating surface and the thickness of coating increased. It was confirmed that no Fe component was present on the coating surface. PEO coating films obviously showed good corrosion resistance compared with HDA. It is considered that the PEO coating acts as a barrier to protect the base material from external factors causing corrosion.

• Journal of the Korean institute of surface engineering
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• v.51 no.6
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• pp.415-420
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• 2018

The possibility of an improvement in heat dissipation performance of aluminum alloy heat sink for shipboard LED luminaries through plasma electrolytic oxidation (PEO) was investigated. Four different PEO coatings were produced on aluminum alloy 5052 in silicate based alkaline solution by varying current density ($50{\sim}200mA/cm^2$). On voltage-time response curves, three stages were clearly distinguished at all current densities, namely an initial linear increase, slowdown of increase rate, and steady state(constant voltage). It was found that the increase in current density caused the breakdown voltage to increase. Two different surface morphologies - coralline porous structure and pancake structure - were confirmed by SEM examination. The coralline porous structure was predominant in the coatings produced at lower current densities (50 and $100mA/cm^2$) while under high current densities(150 and $200mA/cm^2$) the pancake structure became dominant. The coating thickness was measured and found to be in a range between about $13{\mu}m$ and $44{\mu}m$, showing increasing thickness with increasing current density. As a result, $100mA/cm^2$ was proposed as an effective process parameter to improve the heat dissipation performance of aluminum alloy heat sink, which could lower the LED operating temperature by about 30%.

• Korean Journal of Materials Research
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• v.34 no.6
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• pp.303-308
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• 2024

The semiconductor and display industries require the development of plasma resistant materials for use in high density plasma etching process equipment. Yttria (Y₂O₃) is a ceramic material mainly used to ensure good plasma resistance properties, which requires a dense microstructure. In commercial production, a sintering process is applied to reduce the sintering temperature of Y₂O₃. In this study, the effect of the addition of glass frit to the sintered specimen was examined when manufacturing yttria sintered specimens for semiconductor process equipment parts. The Y₂O₃ specimen was shaped into a Ø50 mm size and then sintered at 1,600 ℃ for 1~8 h. The characteristics, X-ray diffraction pattern, densities, contraction rate of the specimen, and swelling of the surface of the Y₂O₃ specimens were investigated as a function of the sintering time and glass frit addition. The Y₂O₃ specimen exhibited a density of over 4.9 g/cm³ as the sintering time increased, and the swelling phenomenon characteristics were improved by glass frit, by controlling particle size.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.230-230
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• 2013

플라즈마를 활용한 미세 패턴의 건식 식각은 반도체 소자 공정에 있어서 가장 중요한 기술 중 하나이다. 한편, 매년 발행되는 ITRS Roadmap 에 따르면 DRAM 의 1/2 pitch 는 감소하는 동시에 Contact A/R (Aspect Ratio) 는 증가하고 있다. 이러한 추세 속에서 기존의 공정을 그대로 활용할 경우 식각물의 프로파일 왜곡 혹은 휨 현상이 발생하고 식각 속도가 저하되며 이러한 특성들이 결과적으로는 생산성의 저하로 이어질 수 있다. 이러한 현상을 최소화하기 위해서는 무엇보다 독립된 plasma parameter 들이 식각물의 프로파일 혹은 식각 속도 등에 어떠한 영향을 주는 지에 대한 학문적 이해가 필요하다. 본 논문에서는 최소 CD (Critical Dimenstion) 100nm, 최대 A/R 30 인 HARC (High Aspect Ration Contact hole) 의 식각 특성이 plasma parameter 에 따라 어떻게 변하는지 확인해 보고자 한다. 산화물의 식각은 대표적인 high density plasma source 중의 하나인 ICP에서 진행하였으며 기존에 알려진 plasma parameter 에 더하여 자장의 인가가 산화물의 식각 특성에 어떠한 영향을 주는지 살펴보고자 전자석을 ICP 에 추가로 설치하여 실험을 진행하였다. 결과적으로, plasma parameter 에 따른 혹은 자장의 세기 변화에 따른 산화물의 식각 실험을 플라즈마 진단 실험과 병행하여 진행함으로써 다양한 인자에 따른 산화물의 식각 메커니즘을 정확하게 이해하고자 하였다. 실험 내용을 요약하면 다음과 같다. 먼저, 전자석의 전류 인가 조건에 따라 축 방향 혹은 반경 방향으로의 자장의 분포가 달라질 수 있음을 확인하였고 플라즈마 진단 결과 축 방향 혹은 반경 방향으로의 자장이 증가하였을 때 고밀도의 플라즈마가 형성될 수 있음은 물론 반경 방향으로의 플라즈마 밀도의 균일도가 향상됨을 확인할 수 있었다. 또한 ICP 조건에서 바이어스 주파수, 압력, 바이어스 파워, 소스 파워, 가스 유량 등의 plasma parameter 가 산화물의 식각 특성에 미치는 영향 및 메커니즘을 규명하였고 이 과정을 통해 최적화된 프로파일을 바탕으로 축 방향 혹은 반경 방향으로 증가하는 자장을 인가하였을 때 (M-ICP 혹은 자화 유도 결합 플라즈마) ICP 대비 산화물의 식각 속도가 증가함은 물론 PR-to-oxide 의 선택비가 개선될 수 있음을 확인할 수 있었다. 자장의 인가에 따른 산화물의 정확한 식각 메커니즘은 향후의 실험 진행을 통해 이해하고 이를 통해 궁극적으로는 산화물의 식각 공정이 나아가야 할 올바른 방향을 제시하고자 한다.