• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 추계종합학술대회 논문집
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• pp.629-632
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• 1998

This paper presents a new and simple technique to realize high Q inductor on low resistivity silicon wafer with 6 $\Omega$.cm. This technique is very compatible with bipolar and CMOS standard silicon process. By forming the deep and narrow trenches on the low resistivity wafer substrate under inductor pattern, oxidizing and filling with undoped polysilicon, the low resistivity silicon wafer acts as high resistivity wafer being suitable for the fabrication of high Q inductor. By using this technique the quality factor (Q) for 8-turn spiral inductor was improved up to max. 10.3 at 2 ㎓ with 3.0 $\mu\textrm{m}$ of metal thickness. The experiment results show that Q on low resistivity silicon wafer with the trench technique have been improved more than 2 times compared to the conventional low resistivity silicon wafer without trenches.

• 한국결정성장학회지
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• 제18권4호
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• pp.137-139
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• 2008

Floating zone, neutron transmutation-doped and magnetic Czochralski silicon crystals are being widely used for fabrication power devices. To improve the quality of these devices and to decrease their production cost, it is necessary to use large-diameter wafers with high and uniform resistivity. Recent developments in the crystal growth technology of Czochralski silicon have enable to produce Czochralski silicon wafers with sufficient resistivity and with well-controlled, suitable concentration of oxygen. In addition, using Czoehralski silicon for substrate materials may offer economical benefits, First, Czoehralski silicon wafers might be cheaper than standard floating zone silicon wafers, Second, Czoehralski wafers are available up to diameter of 300 mm. Thus, very large area devices could be manufactured, which would entail significant saving in the costs, In this work, the conventional Czochralski silicon crystals were grown with higher oxygen concentrations using high pure polysilicon crystals. The silicon wafers were annealed by several steps in order to obtain saturated oxygen precipitation. In those wafers high resistivity over $5,000{\Omega}$ cm is kept even after thermal donor formation annealing.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2004년도 임시총회 및 추계학술발표회
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• pp.446-449
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• 2004

High resolution geophysical imaging to delineate costal aquifer and seawater- freshwater interface has been applied in Baesu-eup, Yeonggwang-gun, Jeolla province Electrical resistivity information from vertical electrical sounding and 2-D electrical resistivity survey is key parameter to map equivalent Nacl concentration map over the survey area. Seismic velocity from refraction tomographic survey, on the other hand, gives more reliable information on the subsurface stratagraphy than electrical resistivity methods which frequently suffer from low resolution due to masking effect. We imaged high-resolution 3-D structure of costal aquifer by correlating the electrical resistivity with seismic velocity, and mapped equivalent NaCl concentration map using resistivity and hydro-geological information from well logging.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.55-58
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• 2002

In this paper, the volume resistivity properties of silicone rubber investigated due to temperature dependence. And the measurement of volume resistivity is measured from 1, 5 and 10 minutes when the each applied voltage, for example, DC 100[V], 250[V], 500[V] and 1000[V], is applied. according to the step voltage application method. As a result, The volume resistivity is higher high voltage than low voltage at the room temperature, but is higher low voltage than high voltage at high temperature.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.254-255
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• 2007

This paper describes underwater discharge phenomena which are less studied than gas, solid and dielectric liquid. Since discharge phenomena were affected by various factors, we investigated the effect of water resistivity in point-plane gap by impulse voltage. In discharge photograph, it is hard to discover the streamer development in positive polarity at high reisistivity. On the other hand, the streamer originated at the tip of rod and developed toward the plane with increasing voltage. It is found that the breakdown voltage of both polarities in lower resistivity are lower than that of high resistivity. High current flowing in lower resistivity before the breakdown induce more streamer and enhance the probability of breakdown.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2006년도 Proceedings of ISRS 2006 PORSEC Volume II
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• pp.728-731
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• 2006

Ground subsidence near abandoned underground coal mines has become a serious social problem in Korea. The purpose of this study is to perform a comparative analysis between the ground subsidence area and the electrical resistivity measured by field survey at Samcheok City. A raster database composed of ground subsidence areas and electrical resistivity data was constructed for GIS. To analyze correlation between the two constructed raster datasets, we used a frequency ratio model. The results show that low and high electrical resistivity anomaly zones coincide with the existing subsidence areas. We infer that the high anomaly zone means saturated and low anomaly zone means vacant. It suggests that electrical resistivity might be a useful factor for analyzing ground subsidence hazard zone.

• 조명전기설비학회논문지
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• 제28권6호
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• pp.68-74
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• 2014

The electrical parameters of soils are highly dependent on the various factors such as types of soil, chemical compositions, moisture content, temperature, frequency, and so on. The analysis of soil parameters is of fundamental importance in design of grounding systems. In this paper, we present the experimental results of frequency-dependent impedance, resistivity, permittivity of soils as functions of types of soil and moisture content. The impedance and resistivity of soils are decreased as the moisture content and the frequency increase. In particular, the variation of the soil resistivity with the frequency is pronounced in the conditions of high resistivity and low moisture content. On the contrary, the permittivity of soils are sharply decreased with increasing the frequency below 10kHz and the frequency-dependent permittivity of soils are highly changed in the conditions of high moisture and low resistivity.

• E2M - 전기 전자와 첨단 소재
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• 제9권7호
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• pp.727-732
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• 1996

In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

• 지구물리와물리탐사
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• 제10권4호
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• pp.369-376
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• 2007

해수침투가 우려되는 해안지역의 소유역에 설치된 모니터링용 관측정을 이용하여 전기비저항 토모그래피 탐사를 수행하였다. 전기비저항 탐사는 지하 매질의 전기비저항 분포를 통해 지반상태 및 층서구조 등을 밝히는 효과적인 방법이지만, 매질의 전기전도도가 매우 높은 해안지역에서는 신호대 잡음비가 가장 높은 배열법을 사용하는 경우에도 관측정 주변의 전기비저항 특성 파악이 힘들다. 따라서 본 연구에서는 해수침투 관측을 목적으로 설치된 해안지역의 서로 다른 두 곳의 관측정 주변 대수층에 대하여, 신호대 잡음비가 낮아 시추공 주변의 대수층 특성 파악이 어려운 지표 전기비저항 탐사의 한계를 극복하기 위하여 시추공-지표간 전기비저항 토모그래피 탐사를 수행하였다. 탐사자료를 이용한 역산 결과는 각 시추공의 시추 주상도, 전기전도도 검층 및 노말 전기비저항 검층 자료를 이용하여 시추공 주변의 파쇄구간과 비교하여 검증하였다. 또한 이들 중 한 곳의 관측정 주변 대수층에 대하여는, 동일한 탐사 방법을 이용하여 간조와 만조시에 각각 탐사를 실시하였다. 탐사 결과 관측정 주변 대수층에 대하여 높은 해상도의 전기비저항 분포 단면을 획득할 수 있었으며, 조석에 의한 대수층을 통한 해수침투와 관련된 수리특성 파악이 가능함을 확인하였다. 따라서 본 연구에서 사용된 시추공-지표간 전기비저항 토모그래피 탐사 결과를 시추 주상도, 전기전도도 검층 및 노말 전기비저항 검층 결과와 함께 분석하는 경우, 해안지역의 관측정 및 그 주변 대수층의 수리지질 구조를 효과적으로 파악할 수 있는 것으로 나타났다.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2009년도 춘계 학술발표회
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• pp.673-676
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• 2009

Non-point pollutants, which mainly originate from high traffic roads and rural areas, contaminate the environment by flowing into various rivers and lakes and thus are of interest as an environmental issue. Accordingly, efforts have been made to design and maintain efficient filter systems for the control of the non-point pollutants. Meanwhile, clay-type materials are widely used for the absorption of chemicals included in pollutants and the absorption performances of various clays have been reported in the literature. Thus, the present study proposes a non-destructive monitoring method for the performance of a clay-type filter using electrical resistivity measurement. A series of experimental tests is performed on celite-based particulate filters with infiltrating non-point source pollutants having the same characteristics as pollutants on high traffic roads. Each test measures permeability, resistivity of the filter materials and resistivity of the filtrated water. As the particulate filter materials filtrate pollutants and absorb heavy chemicals (e.g., $Cr^{6+}$, lead, nickel, among others), ionic concentration increases resulting as the electrical resistivity decrease. When the filter systems approach the end of their lifetime, the electrical resistivity of the filter material converges to a very low value due to lowered filter absorption efficiency. Hence, the electrical resistivity of the filtrated water also converges to a low value due to high concentrations of heavy metals. The permeability converges to a very low value because of significantly reduced porosity due to clogging and absorption of pollutants on the filter material. The experimental results show that electrical resistivity monitoring of filter materials is a promising approach to estimation of filter performance and its life expectancy.