• Transactions on Electrical and Electronic Materials
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• v.10 no.2
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• pp.35-39
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• 2009

A novel Helmholtz coil inductively coupled plasma(H-ICP) etcher is proposed and characterized for deep nano-scale CMOS technology. Various hardware tests are performed while varying key parameters such as distance between the top and bottom coils, the distance between the chamber ceiling and the wafer, and the chamber height in order to determine the optimal design of the chamber and optimal process conditions. The uniformity was significantly improved by applying the optimum conditions. The plasma density obtained with the H-ICP source was about $5{\times}10^{11}/cm^3$, and the electron temperature was about 2-3 eV. The etching selectivity for the poly-silicon gate versus the ultra-thin gate oxide was 482:1 at 10 sccm of $HeO_2$. The proposed H-ICP was successfully applied to form multiple 60-nm poly-silicon gate layers.

• The Journal of Internal Korean Medicine
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• v.21 no.5
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• pp.839-844
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• 2000

Objectives : The purpose of study was to investigate the effect of ILlB(intravascular laser irradiation of blood) on serum lipoprotein(a) Methods : The 12 case is diagnosed as cerebrovascular diseases on computed tomograghy. The 18 case is not observed abnormality on computed tomograghy but, they have neurological sign. Blood test was enforced on the first medical examination, The 15 case with plasma lipoprotein(a) greater than 30 mg/dl have been classified into abnormal group and the 15 case of less than 30 mg/dl have been classified into control group. after ten times ILlB, It was observed that the change of plasma lipoprotein(a) and a fibrinogen of blood clotting factor. Conclusions : 1. After ten times ILlB, plasma lipoprotein(a) numerical value was decreased on 13 case of abnormal group. 2. Plasma lipoprotein(a) numerical value was decreased on 5 case of control group. 3. The twenty in fifteen patient's with hyperlipoproteinemias have been fibrinogenemias and after ILIB treatment, in the all of 16 case with hyperfibrinogenemia in the first medical examination to both abnormal and control group, plasma fibrinogen numerical value was decreased.

• Proceedings of the KIEE Conference
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• 1992.07b
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• pp.949-951
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• 1992

A low pressure DC plasma jet has been used to obtain diamond films from a mixture of $CH_4$ and $H_2$ with high deposition rate (>1$\mu\textrm{m}$/min). The effects of the deposition conditions such as torch geometry, substrate temperature, gas mixing ratio, chamber pressure, axial magnetic field on the diamond film properties such as morphology, purity, uniformity of the film and deposition rate, etc. have been examined with the aid of Scanning Electron Microscopy, X-Ray Diffraction, and Raman Spectroscopy. Both the growth rate and particle size increased rapidly for low methane concentrations but saturated and the morphology changed from octahedral to cubic structure when the concentration exceeded 1.0 %. Higher growth rates (>1.5${\mu}m$/min) can be obtained by applying an axial magnetic field to the DC plasma jet. Diamond obtained from the magnetized plasma jet also shows a sharp peak at 1332.5$cm^{-1}$ in the Raman Spectra and this result implies that higher growth rate with a good quality diamond films can he obtained by applying an external magnetic field to the plasma jet.

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.3
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• pp.57-60
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• 2008

Purpose: The radial speed of plasma current sheath was measured at the plasma focus apparatus. Methods: The measurement was used to time-resolved spectroscopic method and Rogowski coils. Results: Radial current sheath speed was measured with $10^5$ cm/s at Helium and Argon pressure between 5 to 100 torr and discharging voltage of 15 kV. When the gas pressure was increased, the current sheath speeds were decreased. Conclusions: At the optimum condition of plasma focus apparatus, the radial speed is guessed $10^7$ cm/s as a results of the measurement of current sheath speed.

• Journal of Korean Ophthalmic Optics Society
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• v.12 no.1
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• pp.69-74
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• 2007

The axial speed of plasma current sheath was measured with Rogowski coils and compared with the theory of snowplow model. Current sheath speed is measured with $10^6cm/s$. The speed of light gas, $H_2$ and He were similar to the theory of model, but the heavy gas, Ar was not similar to the theory. The disagreement of the heavy gas was guessed as a results of the instability of the current sheath.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1898-1900
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• 1996

The Laser aided diagnostic method makes it possible to diagnose plasma characteristics which have never been done by other one. The aim of this study is to measure the electron density profile of an arc plasma by Mach-Zenhder interferometer. The two laser beams (He-Ne and Argon Lasers), which are different in wavelength, pass across an arc plasma and meet a change of refractivity which makes fringe shifts. From this effects we could find densities of electron and neutral particle.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.222.2-222.2
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• 2014

대기압 플라즈마는 기존의 저압 플라즈마에 비해 제작이 간단하고 조작이 간편하기 때문에 응용 가능 분야가 넓다는 장점이 있지만 다양한 외부 요인으로 인한 안정성의 문제로 저압 플라즈마의 모든 응용범위를 대신하기에는 문제점이 있다. 현재 이 문제점을 해결하기 위한 연구가 활발히 진행 중에 있으며, 기판 및 유리 세정, Bio-medical, 물질 합성 등 다양한 분야에 대한 응용 연구도 진행 중에 있다. 본 연구에서는 본 연구실에서 자체 개발한 전원 장치를 이용하여 대기압 플라즈마를 발생 시켰으며, He, Ar Gas를 이용하여 PDMS 기판과 유리 기판에 표면 처리 한 후 친수성 비교 분석 실험을 실시하였다. Optical Emission Spectroscopy(OES)장치와 ICCD camera를 이용하여 플라즈마 진단과 특성 분석을 실시하였으며 Computer Numerical Control (CNC) x-y-z 3축 stage를 이용하여 플라즈마 발생을 제어함으로서 재현성을 높은 플라즈마 표면 처리 연구를 진행 하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.226-226
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• 2011

소형 대기압 플라즈마 소스는 그 형태에 따라 DBD (Dielectric Barrier Discharge)나 Plasma Needle, 혹은 Plasma Jet 등으로 구별되며, 구동 파형의 특성에 따라 DC, RF (Radio Frequency), 혹은 Pulsed 방식 등으로 나뉜다. 또한 코로나 방전도 소형 대기압 플라즈마 장치에서 사용된다. DBD는 1857년 Siemens에 의해 최초로 보고 되었고 산업 분야에서 대규모로 사용되어 왔다. 본 연구에서는 대향 방전 DBD 대신 유전체 양쪽 면에 전극이 도포된 면방전 형태의 DBD 구조 내부로 He 가스가 흐를 때의 방전에 대한 광학적 진단을 수행하였다. 전극간의 거리와 가스 유속의 변화에 따라 방전 특성이 어떻게 달라지에 대해서 Optical Emission Spectroscopy (OES)를 통하여 생성되는 radical 종의 변화를 측정하고 ICCD (intensified charge coupled device) image를 통해 방전이 시간에 따라 어떻게 진행되는지를 진단하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.2
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• pp.184-189
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• 2002

Carbon nitride films were grown on Si (100) substrate by a laser-electric discharge method with/without a magnetic field assistance. The magnetic field leads to vapor plume plasma expending upon the ambient arc discharge plasma area. Influence of the magnetic field has resulted in increased of a crystallite size int he films due to bombardment (heating) of Si substrates by energetic carbon and nitrogen species generated during cyclotron motion of electrons in the discharge zone. The surface morphology of the films with a deposition time of 2 hours was studied using a scanning electron microscopy (SEM). In order to determine the structural crystalline parameters, X-ray diffraction (XRD) was used to analysis the grown films.

• Journal of Powder Materials
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• v.10 no.3
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• pp.168-171
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• 2003

Interpenetrating phase composites of $TiB_2$-Cu system were produced via Spark-Plasma Sintering (SPS) oi nanocomposite powders. Under simultaneous action of pressure, temperature and electric current titanium diboride nanoparticles distributed in copper matrix move, agglomerate and form a fine-grained skeleton. Increasing SPS-temperature and he]ding time promote densification due to local melting of copper matrix When copper melting is avoided the compacts contain 17-20% porosity but titanium diboride skeleton is still formed representing the feature of SPS . High degree of densification and formation of titanium diboride network result in increased hardness of high-temperature SPS-compacts.