• Title/Summary/Keyword: He + air plasma

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Modeling the Chemical Kinetics of Atmospheric Plasma

  • Kim, Ho-Yeong;Lee, Hyeon-U;Kim, Gyu-Cheon;Lee, Jae-Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.270-270
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    • 2012
  • Low temperature atmospheric pressure plasmas (APPs) have been known to be effective for living cell inactivation in the water [1]. Many earlier research found that pH level of the solution was changed from neutral to acidic after plasma treatment. The importance of the effect of acidity of the solution for cell treatments has already been reported by many experiments. In addition, several studies have demonstrated that the addition of a small amount of oxygen to pure helium results in higher sterilization efficiency of APPs [2]. However, it is not clear yet which species are key factors for the cell treatment. To find key factors, we used GMoo simulation. We elucidate the processes through which pH level in the solution is changed from neutral to acidic after plasma exposure and key components with pH and air variation with using GMoo simulation. First, pH level in a liquid solution is changed by He+ and He(21S) radicals. Second, O3 density decreases as pH level in the solution decreases and air concentration decreases. It can be a method of removing O3 that cause chest pain and damage lung tissue when the density is very high. H2O2, HO2 and NO radicals are found to be key factors for cell inactivation in the solution with pH and air variation.

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Generation of Low Temperature Plasma at Atmospheric Pressure and its Application to Si Etching in Open Air (대기압 비평형 플라스마의 발생 및 규소(Si)식각에의 응용)

  • Lee, Bong-Ju
    • Journal of the Korean Ceramic Society
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    • v.39 no.4
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    • pp.409-412
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    • 2002
  • Under atmospheric pressure, apparently homogeneous and stable plasma can be generated from insulator barrier rf plasma generators each of which has an rf powered cathode and a grounded anode covered with a dielectric insulating material. In order to characterize the generating plasma under atmospheric pressure, some basic characteristic have been evaluated by the Langmuire probe method as well as by optical emission spectroscopy. From the result of plasma characteristics, the generated plasma was verified to be nonequilibrium; T(electron)>T(excitation)>T(gas). High rate Si(100) etching (($1.5{\mu}m$/min) were achieved by using He plasma containing a small amount of $CF_4$.

Attenuation Effects of Plasma on Ka-Band Wave Propagation in Various Gas and Pressure Environments

  • Lee, Joo Hwan;Kim, Joonsuk;Kim, Yuna;Kim, Sangin;Kim, Doo-Soo;Lee, Yongshik;Yook, Jong-Gwan
    • Journal of electromagnetic engineering and science
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    • v.18 no.1
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    • pp.63-69
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    • 2018
  • This work demonstrates attenuation effects of plasma on waves propagating in the 26.5-40 GHz range. The effect is investigated via experiments measuring the transmission between two Ka-band horn antennas set 30 cm apart. A dielectric-barrier-discharge (DBD) plasma generator with a size of $200mm{\times}100mm{\times}70mm$ and consisting of 20 layers of electrodes is placed between the two antennas. The DBD generator is placed in a $400mm{\times}300mm{\times}400mm$ acrylic chamber so that the experiments can be performed for plasma generated under various conditions of gas and pressure, for instance, in air, Ar, and He environments at 0.001, 0.05, and 1 atm of pressure. Attenuation is calculated by the difference in the transmission level, with and without plasma, which is generated with a bias voltage of 20 kV in the 0.1-1.4 kHz range. Results show that the attenuation varies from 0.05 dB/m to 9.0 dB/m depending on the environment. Noble gas environments show higher levels of attenuation than air, and He is lossier than Ar. In all gas environments, attenuation increases as pressure increases. Finally, electromagnetic models of plasmas generated in various conditions are provided.

Development and Characterization of Helium Microwave Plasma Torch (헬륨 마이크로파 플라즈마 토치의 개발과 특성에 관한 연구)

  • Jo, Kyung Hyun;Pak, Yong Nam
    • Journal of the Korean Chemical Society
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    • v.44 no.6
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    • pp.573-580
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    • 2000
  • MPT, which has been developed recently, is very tolerant to aqueous samples. Several types of MPT have been investigated and is found that the double concentric tube could sustain a stable plasma at a low plasma gas flow rate. However, the tip of torch is easily ruined. Triple concentric torch has shown the best stability and the plasma shape, much like that of ICP, especially when the central channel is quartz. The plasma is exposed and mixed with air as is suggested from the background spectrum, which leads to quenching of He MPT. Sensitivity of helium MPT equipped with a membrane desolvator has shown 10 times lower than that of Argon MPT for most of elements except for the ones with relatively high excitation energy. He MPT requires small plasma flow rate (about 1.6 L/min), stable and simple to use. Excitational temperature and electron number density measured are 4950 K and 3.28 ${\times}$ $10^{14}cm^{-3}$, respectively.

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Development and spectroscopic characteristics of the high-power wave guide He Plasma (도파관식 고출력 헬륨 플라즈마의 개발과 분광학적 특성 연구)

  • Lee, Jong-Man;Cho, Sung-Il;Woo, Jin-Chun;Pak, Yong-Nam
    • Analytical Science and Technology
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    • v.25 no.5
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    • pp.265-272
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    • 2012
  • Okamoto cavity was modified to generate high power (2.45 GHz, 2 kW) He, N2 and Ar plasmas with WR-340 waveguide. Many factors which influence to the plasma generation were optimized and investigated for the spectroscopic properties of the He plasma generated. Some of the important factors are the diameter of the inner conductor, the distance between the inner and outer conductors and the distance between the tip of the inner conductor and the torch. After optimization for the He, two torches (a commercial mini torch for ICP and a tangential flow torch made locally) were compared and showed similar results for the helium plasma gas flow of 25 L/min~30 L/min. A tall torch (extended) was used to block the air in-flow and reduced the background intensity at 340 nm region (NH band). Emission intensity was measured for determination of halogen element in the aqueous solution with power and carrier gas flow rate. Electron number density and the excitation temperature were on the order of $3.67{\times}10^{11}/cm^3$ and 4,350 K, respectively. These values are similar or a bit smaller than other microwave plasmas. It has been possible to analyze aqueous samples. The detection limit for Cl (479.45 nm) was obtained to be 116 mg/L and needs analytical optimization for the better performance.

Measurement of excited species in discharges using Laser Absorption spectroscopy

  • Sakai, Yosuke
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.5-8
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    • 2000
  • The population density of excited species in dc, rf and laser ablation plume plasmas has been measured using laser absorption spectroscopy. It was shown that, when the plasma was modulated by on and off with, the sensitivity and signal to noise (S/N) ratio became high. For example, the atomic O(3$^{5}$ S$^{o}$ $_2$) Population density, No* in $O_2$/He mixtures was obtained by the highest S/N ratio at a frequency of 2.7kHz. In a 20Torr room air, the lowest No* level to be detectable was shown to be an order of 10$^{7}$ cm$^{-3}$ . The population densities of resonance Ar(1S$_2$) and Xe(1S$_4$) levels were also measured in barrier discharges and laser ablation plasmas.

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Application of cold plasma treatment as a method to improve the physical properties of defatted mustard meal-based edible films (탈지 겨자씨 소재 가식성 필름의 물리적 특성 향상을 위한 콜드 플라즈마의 적용)

  • Jeong, Ha Eun;Oh, Yoon Ah;Min, Sea Cheol
    • Korean Journal of Food Science and Technology
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    • v.53 no.5
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    • pp.634-639
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    • 2021
  • This study investigated the effects of cold plasma (CP) treatment on the properties of biopolymer films prepared with defatted mustard meal (DMM films). CP treatments using N2, O2, He, Ar, and dry air did not affect the tensile properties, water vapor permeability, color, and morphology of DMM films, whereas the treatments using He and Ar improved their printability. The tensile strength (TS) of O2- or air-CP-treated DMM films and the elastic modulus (EM) of O2-, He-, Ar-, or air-CP-treated films were lower than those of the untreated films. An increase in the power of Ar-CP treatment resulted in an increase in EM. The optimum treatment power and time for minimizing yellowness changes by Ar-CP treatment were 420 W and 40 min, respectively. The results demonstrated the potential application of CP treatment to improve the film properties of DMM films and possibly other agricultural by-product-based biopolymer films, making the films more applicable to food packaging.

Surface Treatment of IHX Materials for VHTR (원자력 중간열교환기 열수송계 소재의 표면처리)

  • Lee, Byeong-U;Lee, Myeong-Hun;Bang, Gwang-Hyeon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.11a
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    • pp.35-50
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    • 2012
  • $900^{\circ}C$이상 초고온 He-gas 분위기 또는 용융불화염 (molten salts, FLINAK) 환경에서 사용될 VHTR(Very High Temperature Reactor)의 IHX(Intermediate heat exchanger)용 열수송 구조재료로 가장 가능성이 높은 합금인 Inconel 617 및 Hastelloy X 상에 습식화학적, 물리적기상합성법(Vacuum arc-plasma과 RF magnetron sputtering) 및 pack cementation에 의한 표면개질 및 마이크로 초내열(refractory ceramics) 코팅층(TiN, TiCN, TiAlN, $Al_2O_3$, $TiO_2$)을 형성시켰다. 고온 장기사용 시 문제가 될 수 있는 고온에서의 조직변화, 미세구조와 상(phase)형성, 고온 부식 및 그에 따른 마모(wear resistance) 손상 등 이들 소재의 내열, 내식 및 내마모 물성을 개선하는 연구를 수행하였다. TiAlN 박막의 경우 공기분위기에서 N이 분해되나 치밀한 산화물($TiO_2/Al_2O_3$ layer)을 형성하여 내식성 있는 보호피막을 형성함으로 기판과의 열팽창 계수로 인한 박리가 발생하지 않아 보호피막으로 적합하였다. Pack cementation법에 의한 aluminiding(Al-Ni합금)도 He 및 공기분위기에서 고온물성의 저하를 가져오는 $Cr_2O_3$의 생성을 충분히 억제하고 있었으며 He 및 air 분위기에서 사용이 가능한 박막으로 여겨진다. 내열 및 내식성에 대한 실험을 종합한 결과, 공기분위기에서 사용할 수 없는 박막은 He-gas 및 FLINAK(LiF-NaF-KF) 용융염 분위기에서도 사용할 수 없었으며, He-gas, FLINAK 및 air 분위기에서 모두 사용이 가능한 박막으로는 Inconel 617에서는 $(TiO_2-)Al_2O_3$, TiAlN 및 Al-Ni이었고 Hastelloy에서는 Al-Ni 및 $Al_2O_3$가 가장 적당하였다.

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Cold Plasma Treatment Effects on the Physicochemical and Biodegradable Properties of a Corn Biomass-containing Polyester Film (옥수수 바이오매스를 함유한 폴리에스터 필름의 물리 화학적 특성과 생분해 특성에 대한 콜드 플라즈마 처리의 영향)

  • Song, Ah Young;Oh, Yoon Ah;Oh, Se Jun;Min, Sea Cheol
    • Korean Journal of Food Science and Technology
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    • v.47 no.2
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    • pp.224-232
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    • 2015
  • The effects of cold plasma (CP) treatments on the physicochemical and biodegradable properties of a corn biomass-containing polyester (CBPE) film were studied. The CBPE film was treated with CP generated by $N_2$, $O_2$, He, Ar, or dry air at 400-900 W and 667 Pa for 10-40 min. The glass transition temperature of the CBPE film ($-30.2--28.6^{\circ}C$) was not affected by the CP treatment, while the elastic modulus and water vapor permeability decreased (p<0.05). The ink printability was improved by the treatment and the improved printability was maintained during storage for 56 days at room temperature. Roughness of the film increased after treatments and the level of roughness appeared to increase during storage. Heat and microbial biodegradability of the CBPE film was improved by the air-CP treatment (p<0.05). These results have demonstrated the potential of applying CP treatments to improve the flexibility, printability, and biodegradability of CBPE films.

Optical emission analysis of hybrid air-water discharges

  • Pavel, Kostyuk;Park, J.Y.;Han, S.B.;Koh, H.S.;Gou, B.K.;Lee, H.W.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.521-522
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    • 2006
  • In this paper, hybrid air-water discharges were used to develop an optimal condition for providing a high level of water decomposition for hydrogen yield. Electrical and optical phenomena accompanying the discharges were investigated along with feeding gases, flow rates, and point-to-plane electrode gap distance. The primary focus of this experiment was put on the optical emission of the near UV range, with the energy threshold sufficient for water dissociation and excitation. The $OH(A^{2+},'=0\;X^2,"=0$) band's optical emission intensity indicated the presence of plasma chemical reactions involving hydrogen formation. In the gaseous atmosphere saturated with water vapor the OH(A-X) band intensity was relatively high compared to the liquid and transient phases although the optical emission strongly depended on the flow rate and type of feeding gas. In the gaseous phase discharge phenomenon for Ar carrier gas transformed into a gliding arc via the flow rate growth. OH(A-X) band's intensity increased according to the flow rate or residence time of He feeding gas. Reciprocal tendency was acquired for $N_2$ and Ar carrier gases. The peak value of OH(A-X) intensity was observed in the proximity of the water surface, however in the cases of Ar and $N_2$ with 0.5 SLM flow rate peaks shifted to the region below the water surface. Rotational temperature ($T_{rot}$) was estimated to be in the range of 900-3600 K, according to the carrier gas and flow rate, which corresponds to the arc-like-streamer discharge.

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