• 한국인터넷방송통신학회논문지
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• 제20권3호
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• pp.135-140
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• 2020

반도체 공정에서 필수적인 공정가스가 유해가스이기 때문에 이를 친환경적으로 해결하는 것이 필수과제이다. 현재 반도체 공정에서 사용되는 세정기술은 대부분이 1970년대 개발된 과산화수소를 근간으로 하는 습식 세정으로, 표면의 입자를 제거하기 위한 SC-1 세정액은 암모니아와 과산화수소 혼합액을 사용하고 있다. 따라서 환경적 문제를 유발하며, 또한 과도한 용수 사용으로 인한 경제적 문제도 심각하다. 이러한 이유로 본 연구를 통한 개발 제품은 챔버 출구에서 나오는 공정 유해가스를 진공펌프에 입력되기 전 가스를 분해하여 해가 없는 가스로 만들거나 소각과 동시에 펌프에 가스의 성분이 증착되어 반도체 공정의 환경적 문제를 해결하고자 한다. 본 논문에서는 반도제 공정에서 필수 불가결하게 사용되는 유해가스(N2, CF4, SF6⋯. 등)를 사람에게 무해한 가스로 치환하거나 플라스마로 소각하여 환경을 살리고 생산성 향상이 되도록 제안된 CPS (Confined Plasma Source)를 연구하고자 한다.

• 한국가스학회지
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• 제21권1호
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• pp.80-86
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• 2017

본 논문에서는 유해배출물질 저감장치인 DPF의 문제를 해소하기 위하여 제안된 것으로서, 양방향으로 분기되는 배기가스 유로를 통하여 자동차의 엔진 구동시 발생되는 배기가스를 효율적으로 유도하고 2개의 DPF 장치를 장착함으로서 교번작용을 통한 유해배출물질 정화 및 재생연소특성을 효율적으로 적용할 수 있도록 개발한다. DPF 내부에 입자상물질 적층현상으로 인한 배기가스의 내부압력 증가를 피할 수 있고, 출력저하 및 연비효율이 떨어지는 등의 문제를 획기적으로 개선하여 고효율의 출력을 유도할 수 있는 자동차 배기가스 정화 시스템을 제공하려는데 그 목적이 있다.

• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 설비공학논문집
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• 제20권4호
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• pp.238-244
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• 2008

This study investigates on the improvement of inhalation effect of hood which attached new device named as "gas-guide-device" in local exhaust ventilation system for the effective elimination of harmful material and dust in manufacturing factory. The gas-guide-device having a diamond shape is composed of width (b) and two sides of a device (X, Y) and its size is selected the industrial hood under application in manufacturing factory after due consideration. In order to investigate the effect of gas-guide-device, numerical and experimental study is performed that the flow velocity is calculated and is measured by a commercial program "COMSOL $Multiphysics^{TM}$" and a hot wire type of anemometer, respectively. The numerical and experimental results are revealed is a similar pattern and flow velocity has improved to hood attached gas-guide-device. Also, the numerical method and result is also verified the dependance. Moreover, the optimum shape and size of gas-guide-device is revealed that the width (b) and the ratio of two sides of gas-guide-device (X, Y) has 125mm and 4 to 6.

• 한국수소및신에너지학회논문집
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• 제28권2호
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• pp.174-180
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• 2017

Recently, the world faces the environmental problem such as air pollution due to harmful gas discharged from car and abnormal climate due to the green-house gases increased by the discharge of $CO_2$. Compressed Natural Gas (CNG), one of alternative for this problem, is less harmful, compared to the existing fossil fuel, as gaseous fuel, and less carbon in fuel ingredients and carbon dioxide generation rate relatively favorable more than the existing fuel. However, CNG fuel has the weakness of slow flame propagation speed and difficult fast burn. On the other hand, hydrogen does not include carbon in fuel ingredients, and does not discharge harmful gas such as CO and HC. Moreover, it has strength of quick burning velocity and ignition is possible with small ignition energy source and it's has wide Lean Flammability Limit. If using this hydrogen with CNG fuel, the characteristics of output and discharge gas is improved by the mixer's burning velocity improved, and, at the same time, is possible to have stable lean combustion with the reduction of $CO_2$ expected. Therefore, this research tries to identify the characteristics of engine and emission gas when mixing CNG fuel and hydrogen in each portion and burning them in spark igniting engine, and grasp the lean combustion limit and emission gas characteristics according and use it as the basic data of hydrogen-CNG premixed engine.

• 한국수소및신에너지학회논문집
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• 제27권4호
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• pp.357-364
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• 2016

Recently, the world faces the environmental problem such as air pollution due to harmful gas discharged from car and abnormal climate due to the green-house gases increased by the discharge of $CO_2$. Compressed Natural Gas (CNG), one of alternative for this problem, is less harmful, compared to the existing fossil fuel, as gaseous fuel, and less carbon in fuel ingredients and carbon dioxide generation rate relatively favorable more than the existing fuel. However, CNG fuel has the weakness of slow flame propagation speed and difficult fast burn. On the other hand, hydrogen does not include carbon in fuel ingredients, and does not discharge harmful gas such as CO and HC. Moreover, it has strength of quick burning velocity and ignition is possible with small ignition energy source and it's has wide Lean Flammability Limit. If using this hydrogen with CNG fuel, the characteristics of output and discharge gas is improved by the mixer's burning velocity improved, and, at the same time, is possible to have stable lean combustion with the reduction of $CO_2$ expected. Therefore, this research tries to identify the characteristics of engine and emission gas when mixing CNG fuel and hydrogen in each portion and burning them in spark igniting engine, and grasp the combustion stability and emission gas characteristics according and use it as the basic data of hydrogen-CNG premixed engine.

• 한국자동차공학회논문집
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• 제10권4호
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• pp.43-50
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• 2002

In the present study, reduction of harmful exhaust gas in a diesel engine using stratified injection system of dual fuel (diesel fuel and methanol) was tried. The nozzle and fuel injection pump of conventional injection system were remodeled to inject dual fuel in order from the same injector. The quantity of each fuel was controlled by micrometers, which were mounted at rack of injection pumps. The injection ratio of dual fuel was certificated by volumetric ratio in injection quantity test. Cylinder pressure and exhaust gas were measured and analyzed under various supply condition of duel fuel. We confirmed that combustion of dual fuel was performed successful1y by using modified injection system in a D.I. diesel. Soot and NOx are simultaneously reduced by stratified injection without large deterioration of thermal efficiency, but THC and CO are relatively increased.

• 접착 및 계면
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• 제21권2호
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• pp.51-57
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• 2020

최근 산업활동을 통해 배출되는 유해 오염물질 제거에 대한 관심이 증가하고 있다. 본 연구에서는 수증기 활성화 법을 이용하여 활성탄소섬유를 제조하고, 이의 유해가스 흡착 및 전기화학적 감응 특성을 분석하였다. 활성탄소섬유의 균일한 기공 구조, 활성 반응 면적 및 반응 위치를 조절하기 위하여, 활성화 온도(750-850 ℃) 및 활성화 시간(30-240 min)을 조절하였고, 다양한 활성화 조건을 통해 제조된 활성탄소섬유의 SO₂와 NO 가스 흡착 및 가스 센서를 통한 감응 특성을 분석하였다. 특히, 850 ℃에서 45 min동안 수증기 활성화 반응을 통해 제조된 활성탄소섬유가 가장 높은 비표면적(1,041.9 ㎡/g)과 기공 특성(0.42 ㎤/g)을 보였으며, 우수한 SO₂ (1.061 mg/g) 및 NO (1.210 mg/g) 가스 흡착 특성을 보였다.

• 환경위생공학
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• 제23권3호
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• pp.9-22
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• 2008

This study was conducted to develop a system that processes harmful gases and dust, which being generated in the production of micro-inorganic fabric. This can be obtained by melt spinning raw materials such as agalmatolite, fluorspar, limestone, silica under high temperature at $1500-1600^{\circ}C$ in a glass recuperator using a dry method by Cyclone Reactor or Envelope Type (ET) type Bag Filter. If the number of the members of Korea Glass Industry Association reaches up to 45, the damage of the harmful gas being generated in recuperator should not be small. In addition, research of existing facilities showed the most of harmful gas treatment facilities which adopt wet treatment or semi-dry treatment process. This was caused the problems for wastewater and the second pollutive materials. Moreover, in the dust collecting facility behind recuperator, it is also problematic that electric dust collector requires enormous initial investment. We have researched various methods to show both economic and efficient new processes for the preventive facilities of recuperator. As the result of the experiments, the removal efficiencies of HF and SOx were 99% and 87%, respectively. Although it was insignificant reaction, a pretty much interesting result that NOx showed an absorption reaction with $Ca(OH)_2$(removal efficiency was more than 25%) was obtained.

• 한국농공학회논문집
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• 제62권1호
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• pp.71-81
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• 2020

Enclosed pig house are creating an environment with high concentrations of gas and dust. Poor conditions in pig farms reduce pig weight and increase disease and accidents for livestock workers. In the pig house, the high concentration of harmful gas may cause asphyxiation accidents to workers and chronic respiratory disease by long-term exposure. As pig farm workers have been aging and feminized, the damage to the health of the harsh environment is getting serious, and real-time monitoring is needed to prevent the damage. However, most of the measuring devices related to humidity, harmful gas, and fine dust except temperature sensors are exposed to high concentrations of gas and dust inside pig house and are difficult to withstand for a long time. The purpose of this study is to develop an wearable based device to monitor the hazardous environment exposed to workers working in pig farms. Based on the field monitoring and previous researches, the measurement range and basic specifications of the equipment were selected, and wearable based device was designed in terms of utilization, economic efficiency, size and communication performance. Selected H₂S and NH₃ sensors showed the average error of 5.3% comparing to standard gas concentrations. The measured data can be used to manage the working environment according to the worker's location and to obtain basic data for work safety warning.