• 제목/요약/키워드: H-bonding

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Direct Wafer Bonding법에 의한 InP 기판과 $\textrm{Si}_3\textrm{N}_4$/InP의 접합특성 (The Characteristics of the Wafer Bonding between InP Wafers and $\textrm{Si}_3\textrm{N}_4$/InP)

  • 김선운;신동석;이정용;최인훈
    • 한국재료학회지
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    • 제8권10호
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    • pp.890-897
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    • 1998
  • n-InP(001)기판과 PECVD법으로 ${Si}_3N_4$(200nm)막이 성장된 InP 기판사이의 direct wafer bonding을 분석하였다. 두 기판을 접촉시켰을 때 이들 사이의 결합력에 크게 영향을 주는 표면 상태를 접촉각 측정과 AFM을 통해서 분석하였다. InP 기판은 $50{\%}$ 불산용액으로 에칭하였을 때 접촉각이 $5^{\circ}$, RMS roughness는 $1.54{\AA}$이었다. ${Si}_3N_4$는 암모니아수 용액으로 에칭하였을 때 RMS roughness가 $3.11{\AA}$이었다. Inp 기판과 ${Si}_3N_4$/InP를 각각 $50{\%}$ 불산 용액과 암모니아수 용액에 에칭한 후 접촉시켰을 때 상당한 크기의 초기 겹합력을 관찰할 수 있었다. 기계적으로 결합된 시편을 $580^{\circ}C$-$680^{\circ}C$, 1시간동안 수소 분위기와 질소분우기에서 열처리하였다. SAT(Scanning Acoustic Tomography)측정으로 두 기판 사이의 결합여부를 확인하였다. shear force로 측정한 InP 기판과 ${Si}_3N_4$/InP사이의 결합력은 ${Si}_3N_4$/InP 계면의 결합력만큼 증가되었다. TEM과 AES를 이용해서 di-rect water bonding 계면과 PECVD계면을 분석하였다.

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도재소부전장관(陶材燒付前奬冠) 파절수리시(破折修理時) 표면처리(表面處理) 방법(方法)에 따른 수복(修復)레진의 유지력(維持力)에 관(關)한 연구(硏究) (COMPARISON OF RETENTIVE FORCE OF REPAIR RESIN BY VARIOUS SURFACE TREATMENT METHODS IN THE REPAIR OF FRACTURED PORCELAIN FUSED TO METAL CROWN)

  • 임헌송;허성주;조인호
    • 대한치과보철학회지
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    • 제30권1호
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    • pp.73-83
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    • 1992
  • Now composite resin restoration is clinically accepted in the repair of fractured PFM case, many mechanical surface treatment methods are performed to increase retentive force. The main purpose of this study was to compare the retentive force among the possible surface treatments and to insure the best method for the clinical application to the fractures porecelain and the exposed metal surface. To compare and to analyze the retentive force of repair resin, porcelain specimen were divided into 2 groups, etching group and non-etching group, and etching group were treated with 37% $H_3PO_4$, 1.23% APF, 10% HF and non-etching groups were treated with diamond bur, micro-sandblasasting. Also, metal specimens were divided by 2 groups : one was non-precious metal group which was treated with diamond bur, micro-sandblasting and tin plating and electrolytic etching, the other was precious metal group which was composed of micro-sandblasting treatment only and tin plating treatment with micro-sandblasting. Each specimen had been restored for 48 hours and the bond strength of each specimen was calculated with Universal testing machine. The results were as follows : 1. Porcelain specimen had higher bonding strength than metal specimen for the repair resin(P<0.01). 2. In porcelain specimen, 10% HF etching group had the highest bonding strength among etching and non-etching group. 3. Metal specimen treated with micro-sandblasting had highest bonding strength among the non-sandblasting had hightest bonding strength among the non-precious group, tin plating group had higher bonding strength than micro-sandblasting group between the precious metal groups. 4. Bonding strength of tin plating was increased in precious metal group only.

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반도체 패키징용 에폭시 기반 접합 소재 및 공정 기술 동향 (Epoxy-based Interconnection Materials and Process Technology Trends for Semiconductor Packaging)

  • 엄용성;최광성;최광문;장기석;주지호;이찬미;문석환;문종태
    • 전자통신동향분석
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    • 제35권4호
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    • pp.1-10
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    • 2020
  • Since the 1960s, semiconductor packaging technology has developed into electrical joining techniques using lead frames or C4 bumps using tin-lead solder compositions based on traditional reflow processes. To meet the demands of a highly integrated semiconductor device, high reliability, high productivity, and an eco-friendly simplified process, packaging technology was required to use new materials and processes such as lead-free solder, epoxy-based non cleaning interconnection material, and laser based high-speed processes. For next generation semiconductor packaging, the study status of two epoxy-based interconnection materials such as fluxing and hybrid underfills along with a laser-assisted bonding process were introduced for fine pitch semiconductor applications. The fluxing underfill is a solvent-free and non-washing epoxy-based material, which combines the underfill role and fluxing function of the Surface Mounting Technology (SMT) process. The hybrid underfill is a mixture of the above fluxing underfill and lead-free solder powder. For low-heat-resistant substrate applications such as polyethylene terephthalate (PET) and high productivity, laser-assisted bonding technology is introduced with two epoxy-based underfill materials. Fluxing and hybrid underfills as next-generation semiconductor packaging materials along with laser-assisted bonding as a new process are expected to play an active role in next-generation large displays and Augmented Reality (AR) and Virtual Reality (VR) markets.

5층열장벽 피막의 고온 물성에 관한연구 (A Syudy on the High Temprerties of the 5Layer Functionally Gradient Thermal Barrier Coating)

  • 한주철;정철;송요승;윤종구;노병호;이구현
    • 한국표면공학회지
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    • 제31권1호
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    • pp.12-23
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    • 1998
  • The Thermal Barrier Coating(TBC) has been used to improve the heat barrier and tribological properties of the aircraft engine and the automobile engine in high temperature. Especially, the high temperature tribological propertied of the cylinder haed and the piston crown of diesel engine was emphasized. Therefore, the purpose of this work was to evaluate the microstructure, tribological propeer in high tempearmal shock resistance and bonding strength of five layer functionally gradient TBC for the applications. The five layerwere composed with 100% ceramic insulating later, 75(ceramic):25 (metal) layer, 50:50 layer, 25:75 layer and 100% metal bonding layer to redude the thermal stress. the YSL and MSL poweders were the insulation ceramics powers. The NiCrAly, Inconel625 and SUS powders were the bonding and mixingg powders for plasma spray process. According to the result of high temperature wear test, the wera resistance of YSZ/NiCrAlY siytem was most out standing at 600 and $800^{\circ}C$. At $400^{\circ}C$, the wear resistance of YSZ/Inconel system was better than others. Wear volume at other temperature because of the low temperature degration of zirconia. The thermal shock mechanism of 5 later is the vertical crack gegration in insulating layer. this means that the initial cracks were generated in the top layer, and then developed into the composite layers during thermal shock test. Finally, these cracks werereached to the interface of coating and substrate and also, these vertioal cracks join with the horizontal cracks of the each layers. The bonding strength of YSZ/NiCrAlY and YSZ/Inconel 5 layer system is better than other 5layer systems. The theramal shock resistance of thermal barrier coating s with 5 layer system is better than that of 3 layers and 2 layers.

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미세 Si 입자를 고려한 Al-1%Si 본딩 와이어의 신선공정해석 (FE-simulation of Drawing Process for Al-1%Si Bonding Wire Considering Fine Si Particle)

  • 고대철;황원호;이상곤;김병민
    • 소성∙가공
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    • 제15권6호
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    • pp.421-427
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    • 2006
  • Drawing process of Al-1%Si bonding wire considering fine Si particle is analyzed in this study using FE-simulation. Al-1%Si boding wire requires electric conductivity because Al-1%Si bonding wire is used for interconnection in semiconductor device. About 1% of Si is added to Al wire for dispersion-strengthening. Distribution and shape of fine Si particle have strongly influence on the wire drawing process. In this study, therefore, the finite-element model based on the observation of wire by continuous casting is used to analyze the effect of various parameters, such as the reduction in area, the semi-die angle, the aspect ratio, the inter-particle spacing and orientation angle of the fine Si particle on wire drawing processes. The effect of each parameter on the wire drawing process is investigated from the aspect of ductility and defects of wire. From the results of the analysis, it is possible to obtain the important basic data which can be guaranteed in the fracture prevention of Al-1 %Si wire.

확산접합된 페라이트/마르텐사이트강의 미세조직 및 기계적 특성에 미치는 열처리 효과 (Effects of the Heat Treatment on the Microstructure and Mechanical Properties of the Diffusion-Bonded Ferritic/Martensitic Steel)

  • 사인진;김성환;홍성훈;장창희
    • 한국압력기기공학회 논문집
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    • 제11권1호
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    • pp.12-19
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    • 2015
  • As a measure of improving the mechanical properties of a diffusion bonded joint of a ferritic/martensitic steel (FMS), the post-bonding heat treatment (PBHT) is applied. In the temperature range of normalizing condition ($950-1,050^{\circ}C$), diffusion bonding is employed with compressive stress (6 MPa). Due to the martensite structure distributed in the matrix, Vicker's hardness values of the as-bonded are much higher than those of the as-received. Through the PBHT for 1 h at $720^{\circ}C$, hardness values are recovered to as low as those of the as-received condition. Also, tensile properties of PBHT are similar to those of the as-received at up to the test temperature of $550^{\circ}C$, when the diffusion bonding is carried out over $1,000^{\circ}C$. Based on the creep-rupture testing performed at $650^{\circ}C$ in air environment, the joint efficiency of the PBHTed specimens is about 80% in, which is higher than that of the as-bonded specimens.

Solenoid Type 3-D Passives(Inductors and Trans-formers) For Advanced Mobile Telecommunication Systems

  • Park, Jae Y.;Jong U. Bu
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제2권4호
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    • pp.295-301
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    • 2002
  • In this paper, solenoid-type 3-D passives (inductors and transformers) have been designed, fabricated, and characterized by using electroplating techniques, wire bonding techniques, multi-layer thick photoresist, and low temperature processes which are compatible with semiconductor circuitry fabrication. Two different fabrication approaches are performed to develop the solenoid-type 3-D passives and relationship of performance characteristics and geometry is also deeply investigated such as windings, cross-sectional area of core, spacing between windings, and turn ratio. Fully integrated inductor has a quality factor of 31 at 6 GHz, an inductance of 2.7 nH, and a self resonant frequency of 15.8 GHz. Bonded wire inductor has a quality factor of 120, an inductance of 20 nH, and a self resonant frequency of 8 GHz. Integrated transformers with turn ratios of 1:1 and n:l have the minimum insertion loss of about 0.6 dB and the wide bandwidth of a few GHz.

The Isosteric Heats of Adsorption of Amines on Paraffin and Polyethyleneglycol

  • 손종락;김종택
    • 대한화학회지
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    • 제16권4호
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    • pp.208-213
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    • 1972
  • Isostric heats of adsorption of amines on paraffin and polyethyleneglycol were measured by gas chromatography. Value with polyethyleneglycol were significantly higher than those with paraffin due to the N-H...O bonding. The contribution of C-H...O bonding to the isosoteric heats of adsorption was negligible. The additional heats of adsorption observed as the sample size increased also increased as the number of amino hydrogen atoms decreased. This tendency was more significant with polyethyleneglycol indicating that strong directing force of amino hydrogen of primary and secondary amines to the surface hinder lateral attractive interaction which could be favored with free orientation.

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