• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.82.1-82.1
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• 2010

수소화된 비정질 실리콘 박막을 이용한 반도체는 현재 태양전지, 트랜지스터, 매트릭스 배열 및 이미지 센서 등의 분야에서 이용되고 있다. 자세히 이야기 하면, 여러 가지의 광전효과 물질에 대한 특성이 있으며, 가시광선영역에 대하여 > $10^5cm^{-1}$이상의 매우 높은 광흡수계수와 낮은 온도를 갖는 증착공정 등이 있다. 박막의 밴드갭은 약 1.6~1.8eV로서 태양전지의 흡수층과 passivation층으로 적절하다. 여러 가지 종류의 태양전지 중 비정질 실리콘 박막/결정질 실리콘 기판의 구조로 이루어진 이종접합 태양전지는 저온에서 공정이 가능한 대표적인 것으로서 HIT(Heterojunction with Intrinsic Thin layer)구조로 산요사에 의해 제안된 것이다. 이것은 결정질 실리콘 기판과 도핑된 비정질 실리콘 박막사이에 얇은 진성층 비정질실리콘 박막을 삽입함으로서, 캐리어 전송을 좋게하여 실리콘 기판 표면의 passivation효과를 증대시키는 결과를 가지고 온다. 실험실 규모에서는 약 20%이상의 효율을 보이고 있으며, 모듈에서는 19.5%의 높은 효율을 보이고 있어 실리콘 기판을 이용한 고효율 태양전지로서 각광을 받고 있다. 이러한 이종접합 태양전지의 대부분은 단결정 실리콘을 사용하고 있는데, 점차적으로 다결정 실리콘 기판으로 추세가 바뀌고 있어, 여기에 맞는 표면 passivation 공정 및 분석이 필요하다. 본 발표에서는 다결정 실리콘 기판위에 진성층 비정질 실리콘 박막을 유도결합 플라즈마 화학기상 증착법(ICP-CVD)을 이용하여 제조하여 passivation 효과를 분석한다. 일반적으로 ICP는 CCP(coupled charged plasma)에 비해 약 100배 이상 높은 플라즈마 밀도를 가지고 있으며, 이온 충돌같은 표면으로 작용하는 것들이 기존 방식에 비해서 작다라는 장점이 있다. 먼저, 유리기판을 사용하여 ICP-CVD 챔버내에 이송 한 후 플라즈마 파워, 온도 및 가스비(SiH4/H2)에 따른 진성층 비정질 실리콘 박막을 증착 한 후, 밴드갭, 전도도 및 결합구조 등에 대한 결과를 분석한 후, 최적의 값을 가지고 250um의 두께를 갖는 다결정 실리콘을 기판위에 증착을 한다. 두께(1~20nm)에 따라 표면의 passivation이 되는 정도를 QSSPCD(Quasi steady state Photoconductive Decay)법에 의하여 소수캐리어의 이동거리, 재결합율 및 수명 등에 대한 측정 및 분석을 통하여 다결정 실리콘 기판의 passivation effect를 확인한다. 제시된 데이터를 바탕으로 향후 다결정 HIT셀 제조를 통해 태양전지 효율에 대한 특성을 비교하고자 한다.

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.299.1-299.1
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• 2007

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.7
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• pp.600-604
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• 2005

We studied that structural and optical properties of ZnO films depend on oxygen contents. ZnO films were deposited on Si (111) substrates at room temperature by rf sputtering system and the thickness of films was 100 nm. The ZnO films were annealed in thermal furnace for 2 h at 800 and $900^{\circ}C$ in $H_2O,\;N_2$, and air ambient gases to control oxygen contents. We used AES, PL, XRD, AFM. As our result, crystal quality and luminescence improved until O/Zn is 1. However, when O/Zn ratio Is larger than 1, the structural and optical properties were getting worse.

• Korean Journal of Materials Research
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• v.3 no.5
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• pp.482-496
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• 1993

Radiation damage and contamination of silicons etched in the $CF_4+H_2$ and $CHF_3$ magnetron discharges have been characterized using Schottky diode characteristics, TEM, AES, and SIMS as a function of applied magnetic field strength. It turned out that, as the magnetic field strength increased, the radiation damage measured by cross sectional TEM and by leakage current of Schottky diodes decreased colse to that of wet dtched samples especially for $CF_4$ plasma etched samples, For $CF_4+H_2$and $CHF_3$ etched samples, hydrogen from the plasmas introduced extended defects to the silicon and this caused increased leakage current to the samples etched at low magnetic field strength conditions by hydrogen passivation. The thickness of polymer with the increasing magnetic field strength and showed the minimum polymer residue thickness near the 100Gauss where the silicon etch rate was maximum. Also, other contaminants such as target material were found to be minimum on the etched silicon surface near the highest etch rate condition.

• Asian Journal of Turfgrass Science
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• v.16 no.1
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• pp.11-18
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• 2002

This research was designed to know optimize soil sampling time, soil sampling depth and fertilizers according to season and soil condition in the golf course. One of the results was revealed that sampling point and depth have to be consistent for much fluctuation by sampling. Especially, Soil pH is decreased by soil depth remarkably. Top soil (0-5 cm depth) pH is higher than the sub soils (5-10 cm, 10-15 cm depth). It was confirmed that soil pH would increase when the state of soil is appropriate to H$^{+}$ ion concentration. Therefore, Soil pH modification is always not determined by lime content rather than soil conditions, i.e., Organic matter content, moisture content, and soil air content. More effective fertilizing time according to soil pH correction is the middle of october, and it's quantity is 100 g/$m^2$ silicate and 200 g/$m^2$ lime (Pel-Lime Mini) in this experiment. Recommended soil sampling method for acidity measurement is dividing by soil depth into each 5 cm respectively, rather than mixing 15 cm total soil.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.2
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• pp.95-102
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• 2001

Hafnium oxide thin films for gate dielectric were deposited at $300^{\circ}C$ on p-type Si (100) substrates by plasma enhanced chemical vapor deposition (PECVD) and annealed in $O_2$ and $N_2$ ambient at various temperatures. The effect of hydrogen treatment in 4% $H_2$ at $350^{\circ}C$ for 30 min on the electrical properties of $HfO_2$for gate dielectric was investigated. The flat-band voltage shifts of $HfO_2$capacitors annealed in $O_2$ambient are larger than those in $N_2$ambient because samples annealed in high oxygen partial pressure produces the effective negative charges in films. The oxygen loss in $HfO_2$films was expected in forming gas annealed samples and decreased the excessive oxygen contents in films as-deposited and annealed in $O_2$ or $N_2$ambient. The CET of films after hydrogen forming gas anneal almost did not vary compared with that before hydrogen gas anneal. Hysteresis of $HfO_2$films abruptly decreased by hydrogen forming gas anneal because hysteresis in C-V characteristics depends on the bulk effect rather than $HfO_2$/Si interface. The lower trap densities of films annealed in $O_2$ambient than those in $N_2$were due to the composition of interfacial layer becoming closer to $SiO_2$with increasing oxygen partial pressure. Hydrogen forming gas anneal at $350^{\circ}C$ for samples annealed at various temperatures in $O_2$and $N_2$ambient plays critical role in decreasing interface trap densities at the Si/$SiO_2$ interface. However, effect of forming gas anneal was almost disappeared for samples annealed at high temperature (about $800^{\circ}C$) in $O_2$ or $N_2$ambient.

• Korean Journal of Soil Science and Fertilizer
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• v.10 no.1
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• pp.69-74
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• 1977

This study has been conducted to identify physico-chemical and clay mineralogical characteristics of bentonites produced in Korea for the purpose of finding good quality bentonite for agricultural ure. The results are summarized as follows: 1. Bentonites are mainly composed of montmorillonite developed from tuffs in a lava flow. 2. Chemical properties of bentonites are: pH in $H_2O$(1:1), 7:cation exchange capacity, 60-96me/100g; content of $SiO_2$, 54-72%; ratio of $SiO_2$ to $Al_2O_3$, 4.1-10.0;oven dry loss of $H_2O$ is higher than the ingnition loss of $H_2O$. 3. The x-ray diffrection patterns of powder bentonites show peaks at $14-15{\AA}$, $4.4{\AA}$, and $2.5{\AA}$, and that of swellen one show $17{\AA}$ when treated with ethylene glycol. 4. Distribution areas of the good quality bentonites were (1) Dogu-Dong, Donghae-Myeon, Yeonil-Gun, Gyeongsangbug-Do (2) Hamyeon-Ri, Yangnam-Myeon, Weolseong-Gun, Gyeongsanbug-Do. (3) Joam-Ri, Gangdong-Myeon, Weolseong-Gun, Gyeongsangbug-Do. (4) Sanha-Ri, Gangdong-Myeon, Ulju-Gun, Gyeongsangnam-Do. (5) Sinhyeon-Ri, Gangdong-Myeon, Ulju-Gun, Gyeongsangnam-Do. (6) Yonghang-Ri, Pyeongchang-Myeon, Pyeongchang-Gun, Gangweon-Do.

• Journal of the Korean Ceramic Society
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• v.39 no.5
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• pp.511-516
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• 2002

Hexagonal $YMnO_3$ thin films were prepared from $Y(NO_3)_3{\cdot}5H_2O$ and $Mn(CH_3CO_2)_2{\cdot}4H_2O$ as starting materials on the Si(100) substrates by the sol-gel method. The crystal structure and the electrical properties of the $YMnO_3$ thin films were investigated as a function of heat treatment temperature, the amount of water(Rw) of hydrolysis and the addition of catalysis. The crystallization of the $YMnO_3$ thin film began at 700${\circ}C$ and completed at 800${\circ}C$ for 1 h. The c-axis (0001) preferred orientation of hexagonal $YMnO_3$ was detected for the $YMnO_3$ thin films with Rw=6 and that was decreased for the $YMnO_3$ thin films with Rw=1 and Rw=12. The crystallinity and preferred orientation of the $YMnO_3$ thin films were depended on the addition of acid and/or alkali catalysis, which, in turn, the preferred orientation of c-axis was decreased and the orthorhombic phase of $YMnO_3$ was detected to the specimens with the addition of catalysis. The $YMnO_3$ thin film with Rw=6 showed good leakage current density of $1.2{\times}10-8 A/cm^2$ at the applied voltage of 0.2V and the leakage current density was not changed drastically with applied voltage.

• Journal of Environmental Science International
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• v.20 no.2
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• pp.251-260
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• 2011

$TiO_2$- and $SiO_2$-supported $Co_3O_4$, Pt and $Co_3O_4$-Pt catalysts have been studied for CO and $C_3H_8$ oxidations at temperatures less than $250^{\circ}C$ which is a lower limit of light-off temperatures to oxidize them during emission test cycles of gasoline-fueled automotives with TWCs (three-way catalytic converters) consisting mainly of Pt, Pd and Rh. All the catalysts after appropriate activation such as calcination at $350^{\circ}C$ and reduction at $400^{\circ}C$ exhibited significant dependence on both their preparation techniques and supports upon CO oxidation at chosen temperatures. A Pt/$TiO_2$ catalyst prepared by using an ion-exchange method (IE) has much better activity for such CO oxidation because of smaller Pt nanoparticles, compared to a supported Pt obtained via an incipient wetness (IW). Supported $Co_3O_4$-only catalysts are very active for CO oxidation even at $100^{\circ}C$, but the use of $TiO_2$ as a support and the IW technique give the best performances. These effects on supports and preparation methods were indicated for $Co_3O_4$-Pt catalysts. Based on activity profiles of CO oxidation at $100^{\circ}C$ over a physical mixture of supported Pt and $Co_3O_4$ after activation under different conditions, and typical light-off temperatures of CO and unburned hydrocarbons in common TWCs as tested for $C_3H_8$ oxidation at $250^{\circ}C$ with a Pt-exchanged $SiO_2$ catalyst, this study may offer an useful approach to substitute $Co_3O_4$ for a part of platinum group metals, particularly Pt, thereby lowering the usage of the precious metals.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.5
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• pp.808-815
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• 2008

The composites were fabricated 61[vol.%] ${\beta}$-SiC and 39[vol.%] $TiB_2$ powders with the liquid forming additives of 8, 12, 16[wt%] $Al_2O_3+Y_2O_3$ as a sintering aid by pressureless annealing at 1650[$^{\circ}C$] for 4 hours. The present study investigated the influence of the content of $Al_2O_3+Y_2O_3$ sintering additives on the microstructure, mechanical and electrical properties of the pressureless annealed SiC-$TiB_2$ electroconductive ceramic composites. Reactions between SiC and transition metal $TiB_2$ were not observed in the microstructure and the phase analysis of the pressureless annealed SiC-$TiB_2$ electroconductive ceramic composites. Phase analysis of SiC-$TiB_2$ composites by XRD revealed mostly of ${\alpha}$-SiC(6H), ${\beta}$-SiC(3C), $TiB_2$, and In Situ YAG($Al_2Y_3O_{12}$). The relative density of SiC-$TiB_2$ composites was lowered due to gaseous products of the result of reaction between SiC and $Al_2O_3+Y_2O_3$. There is another reason which pressureless annealed temperature 1650[$^{\circ}C$] is lower $300{\sim}450[^{\circ}C]$ than applied pressure sintering temperature $1950{\sim}2100[^{\circ}C]$. The relative density, the flexural strength, the Young's modulus and the Vicker's hardness showed the highest value of 82.29[%], 189.5[Mpa], 54.60[Gpa] and 2.84[Gpa] for SiC-$TiB_2$ composites added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at room temperature. Abnormal grain growth takes place during phase transformation from ${\beta}$-SiC into ${\alpha}$-SiC was correlated with In Situ YAG phase by reaction between $Al_2O_3$ and $Y_2O_3$ additive during sintering. The electrical resistivity showed the lowest value of 0.0117[${\Omega}{\cdot}cm$] for 16[wt%] $Al_2O_3+Y_2O_3$ additives at 25[$^{\circ}C$]. The electrical resistivity was all negative temperature coefficient resistance (NTCR) in the temperature ranges from $25^{\circ}C$ to 700[$^{\circ}C$]. The resistance temperature coefficient of composite showed the lowest value of $-2.3{\times}10^{-3}[^{\circ}C]^{-1}$ for 16[wt%] additives in the temperature ranges from 25[$^{\circ}C$] to 100[$^{\circ}C$].