• Journal of the Korean Institute of Telematics and Electronics S
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• v.35S no.6
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• pp.55-65
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• 1998

In industrial fields, RTP(rapid thermal processing) system is widely used for improving the oxidation and the annealing in semiconductor manufacturing process. The main control factors are temperature control of wafer and uniformity in the wafer. In this paper, we propose an $H^{\infty}$ controller design of RTP system satisfying robust stability and performance using weighted mixed sensitivity miniimization and loop shaping technique. And we need reduction technique because of the difficulty of implementation with the obtained high order controller for original model and reduced models, namely, Hankel, square-root balanced, and Schur balanced methods. An example is proposed to show the validity of the proposed method.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.52 no.2
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• pp.74-80
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• 2003

In this paper, a robust two-degree-of-freedom(TDF) the speed control system using $H_{\infty}$ optimization method and real genetic algorithm is proposed for the robust stability and the robust performance in dc servo motor system. This control system composed of feedback and feedforward controller. The feedback(FB) controller with $H_{\infty}$ optimization method is designed for real genetic algorithm that is model matching problem using mixed sensitivity function. The feedforward(FF) controller with $H_{\infty}$optimization method is minimized the error between transfer function of the optimal model and the overall transfer function. The proposed robust two-degree-of-freedom speed control system is simulated to the dc servo motor. By the simulation, feedback controller can obtain the robust stability property and feedforward controller can obtain the robust performance property under modelling error. The performance of the dc servo motor is analyzed by the experiment setting. The validity of the proposed method is verified through being compared with pid(proportional integrated differential)control system design method for the dc servo motor.

• Proceedings of the KIEE Conference
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• 1996.07b
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• pp.1018-1020
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• 1996

In this paper, when a robust active noise controller for a small cavity to control the noise induced in the cavity is designed, the Graphical method based on the robust stability and performance requirements is studied. The problem of designing controller that achieve these robust performance conditions is related to minimizing the $H_{\infty}$ norm of the mixed sensitivity function by using $H_{\infty}$ control theory. Also, For design the controller, the loopshaping method which control the weight functions to satisfy the design specification without loss of a robust performance can be used. Therefore, we determined the acceptable design specification with the system characteristics of the small cavity and obtained its robust controller with the robust performance specifications by stability margin.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.6-37
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• 2001

In this paper, a robust levitation controller for an attractive MAGLVE system is designed. The design of an H$\infty$ controller based on LMI method is proposed for the control of a simple magnetic levitation system. Attractive MAGLEV system is highly nonlinear and open-loop unstable, and has a very restricted equilibrium region, Also, this system has to tolerate various disturbances caused by propulsion. Thus a robust feedback controller is needed to control the system efficiently. We first formulate a mathematical model for the single magnet levitation system. Then we set up an H$\infty$ control problem as a mixed sensitivity problem where the augmented plant is constructed with frequency weighting function ...

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.356-359
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• 1995

This paper uses a new method to improve the performance criterion of an active suspension car. The used control strategy is based on robust H$_{\infty}$ control theory taking into consideration the chasis flexibility. It will be shown that the modeling errors can be lumped into an unstructured uncertainty and the robust controller designed in the presence of these perturbations could maintain the stability and performance even for the controlled true system..

• Nuclear Engineering and Technology
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• v.52 no.7
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• pp.1443-1451
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• 2020

The objective of this study is to design a robust power control system for a small pressurized water reactor (PWR) to achieve stable power operations under conditions of external disturbances and internal model uncertainties. For this purpose, the multiple-input multiple-output transfer function models of the reactor core at five power levels are derived from point reactor kinetics equations and the Mann's thermodynamic model. Using the transfer function models, five local reactor power controllers are designed using an H infinity (H_∞) mixed sensitivity method to minimize the core power disturbance under various uncertainties at the five power levels, respectively. Then a multimodel approach with triangular membership functions is employed to integrate the five local controllers into a multimodel robust control system that is applicable for the entire power range. The performance of the robust power system is assessed against 10% of full power (FP) step load increase transients with coolant inlet temperature disturbances at different power levels and large-scope, rapid ramp load change transient. The simulation results show that the robust control system could maintain satisfactory control performance and good robustness of the reactor under external disturbances and internal model uncertainties, demonstrating the effective of the robust power control design.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.10
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• pp.1501-1513
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• 2001

Disturbance observer, adaptive robust control, and enhanced internal model control are model based disturbance attenuation methods famous for robust motion controller which can satisfy desired performance and robustness of high-speed/high-accuracy positioning systems. In this paper, these are shown to be the same scheme with different parameterizations. To do this, a generalized framework, called as RIC(robust internal-loop compensator) is proposed and the conventional schemes are analyzed in the RIC framework. Through this analysis, it can be shown that there are inherent similarities between the schemes and advantages of the RIC in the viewpoint of controller design. This is verified through simulations and experiments.