• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1308-1311
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• 2004

It is very important that get polishing characteristic that to be stable that accomplish planarization of high efficiency in chemical mechanical polishing, and there is repeatability Groove of pad causes much effects in flow of slurry among various factors that influence in polishing characteristic, is expected to cause change of lubrication state and polishing characteristic in contact between wafer and pad. Therefore, divided factors of pad groove by groove pattern, groove profile, groove dimensions. This research wishes to study effect that dimension of pad groove gets in polishing performance. When changed dimension (width, depth, pitch of groove) of groove, measured change of removal rate and friction force. According as groove dimension changes, could confirm that removal rate and friction force change. While result of this experiment studies effect of pad groove in CMP, it is expected to become small help.

• 대한기계학회논문집B
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• 제31권8호
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• pp.711-717
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• 2007

Shape optimization of a staggered herringbone groove micromixer using three-dimensional Navier-Stokes analysis has been carried using Kriging model. The analysis of the degree of mixing is performed by the calculation of spatial data statistics. The calculation of the variance of the mass fraction at various nodes on a plane in the channel is used to quantify mixing. A numerical optimization technique with Kriging model is applied to optimize the shape of the grooves on a single wall of the channel. Three design variables, namely, the ratio of groove width to groove pitch, the ratio of the groove depth to channel height ratio and the angle of the groove, are selected for optimization. A mixing index is used as the objective function. The results of the optimization show that the mixing is very sensitive to the shape of the groove which can be used in controlling mixing in microdevices.

• 한국가스학회지
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• 제10권3호
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• pp.34-40
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• 2006

본 논문은 LPG 충전노즐의 밀봉성능에 밀접한 관련을 맺고 있는 구형 그루브와 도브테일 그루브에 장착된 O-링의 최적화 설계를 위해 수행된 연구이다. O-링 그루브에 대한 최적설계 해석결과를 얻기 위해 비선형 유한요소해석 프로그램 MARC와 다구찌 설계법을 이용하였다. O-링을 최적의 조건으로 설치할 수 있도록 설계하기 위해 4개의 그루브 모델과 3개의 소재를 고려하였다. 그루브의 설계 파라미터로 폴리머 소재, 그루브의 깊이와 폭, O-링의 직경을 선정하였다. FEM 해석결과에 의하면, 최적설계에 가장 큰 영향을 미치는 기여도는 O-링의 직경과 소재특성으로 그루브의 폭, 깊이, 압축률에 비하여 높다는 사실을 알 수 있다. 가스 공급압력 1.764MPa에 적합한 O-링을 안전하게 설치되어야 할구형 그루브는 모델 3이, 그리고 도브테일 그루브는 모델 4가 가장 우수한 것으로 해석되었다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.353-362
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• 2000

Herringbone groove journal bearing (HGJB) is developed to improve the static and dynamic performances of hydrodynamic journal bearing. In this study, static and dynamic compressible isothermal lubrication problems are analyzed by the finite element method together with the Newton-Raphson iterative procedure. This analysis is introduced for prediction of the static and dynamic characteristics of air lubricated HGJB for various bearing configurations. The bearing load characteristics and dynamic characteristics are dependent on geometric parameters such as asymmetric ratio, groove depth ratio, groove width ratio and groove angle.

• Tribology and Lubricants
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• 제18권3호
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• pp.181-186
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• 2002

A numerical analysis is undertaken to show the influence of bearing design parameters on the load capacity of air lubricated spiral grooved thrust bearing. The governing equation derived from the mass balance is solved by the finite difference method. Optimal values for various design parameters are obtained to maximize the load capacity. The design parameters are the groove angle, the groove width ratio, the groove height ratio, and the seal ratio.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.257-262
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• 2001

A numerical analysis is undertaken to show tile influence of bearing design parameters on tile load capacity of air lubricated spiral grooved thrust bearing. The governing equation derived from the mass balance is solved by the finite difference method. Optimal values for various design parameters are obtained to maximize the load capacity. The design parameters are the groove angle, the groove width ratio, the groove height ratio, arid the seal ratio.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.963-966
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• 2000

Abrasive jet machining(AJM) process is similar to the sand blasting, and effectively removes hard and brittle materials. AJM has applied to rough working such as deburring and rough finishing. As the needs for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro groove cutting of glass. Diameter of hole and width of line in this groove cutting is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro groove cutting in glass, but the size of machined groove was increased about 2~4${\mu}{\textrm}{m}$. therefore, this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD parts.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.294-299
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• 2001

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for various materials, capable of producing micro structures larger than 100 m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film.

• Journal of Magnetics
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• 제22권2호
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• pp.281-285
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• 2017

To suppress the wall slip effect and improve the yield stress measurement precision of magnetorheological fluid, measurement disks with different grooves are first manufactured. Then, the influence of groove characteristics on the yield stress of magnetorheological fluid is investigated by the method of experiments. Finally, the optimization wall grooves of measurement disks are obtained, and the yield stress of a self-prepared magnetorheological fluid is measured. Results indicate that the groove type and groove width have a slight influence on the shear yield stress, whereas the measured yield stress increases with enhanced groove density, and the optimized groove depth is 0.3 mm. The measured shear yield stress of self-prepared MR fluid can be improved by 18 % according to the optimized grooved disks, and the maximum yield stress can reach up to 65 kPa as the magnetic flux density is 0.5 T.

• 대한기계학회논문집A
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• 제22권4호
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• pp.859-867
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• 1998

An oil lubricated Herringbone aroove jounal bearing(HGJB) with eight-circular-profile grooves on the non-rotating bearing surface is analyzed numerically and experimentally. The load carrying capacity, attitude angle, stiffness and damping coefficients are obtained numerically for the various bearing configurations. The onset speed of instability is also examined for the various eccentricity ratios. The configuration parameters of HGJB, such as groove depth ratio, groove width ratio, and groove angle, are dependent on each other because the grooves are generated by using eight small balls rolling over the inner surface of the sleeve with press fit. Therefore, it is not allowed to suggest a set of optimal design parameters such as the one for the rectangular profile HGJB. The overall results from numerical and experimental analysis prove that the circular profile HGJB has an excellent stability characteristics and the higher load carrying capacity than the plain journal bearing.