• 제목/요약/키워드: Groove Dimensions

검색결과 26건 처리시간 0.034초

패드 그루브의 치수가 CMP 연마특성에 미치는 영향 (The Effects of Groove Dimensions of Pad on CMP Characteristics)

  • 박기현;김형재;최재영;서헌덕;정해도
    • 대한기계학회논문집A
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    • 제29권3호
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    • pp.432-438
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    • 2005
  • CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.

CMP에서 패드 그루브의 채수가 연마특성에 미치는 영향 (The Effect of Pad Groove Dimension on Polishing Performance in CMP)

  • 박기현;김형재;정영석;정해도;박재홍
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.1308-1311
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    • 2004
  • It is very important that get polishing characteristic that to be stable that accomplish planarization of high efficiency in chemical mechanical polishing, and there is repeatability Groove of pad causes much effects in flow of slurry among various factors that influence in polishing characteristic, is expected to cause change of lubrication state and polishing characteristic in contact between wafer and pad. Therefore, divided factors of pad groove by groove pattern, groove profile, groove dimensions. This research wishes to study effect that dimension of pad groove gets in polishing performance. When changed dimension (width, depth, pitch of groove) of groove, measured change of removal rate and friction force. According as groove dimension changes, could confirm that removal rate and friction force change. While result of this experiment studies effect of pad groove in CMP, it is expected to become small help.

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초음파 접합용 바혼의 설계 (Design of Bar Horn for Ultrasonic Bonding)

  • 김선락;이재학;유중돈
    • Journal of Welding and Joining
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    • 제27권5호
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    • pp.68-73
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    • 2009
  • The bar horn is designed to increase uniformity of the displacement on the output face through simulation and experiments. Three-dimensional modal analysis is conducted using the finite element method to calculate the vibration mode and displacement on the output face, and the design of experiment (DOE) technique is employed to determine the optimum dimensions of the groove and slot so that the high amplitude uniformity of the bar horn is produced. Displacement of the bar horn was measured using the Laser Doppler Vibrometer (LDV), and the experimental results show good agreements with the predicted results. High uniformity of the bar horn is achieved with the dimensions of the groove and slot determined using the design equations.

탄성유체윤활에서 작동하는 커넥팅 로드 베어링의 윤활막 거동에 관한 수치적 연구 (Numerical Analysis on the Oil Film Behaviors of Connecting Rod Bearings Based on the Elastohydrodynamic Lubrication)

  • 김청균;김한구
    • 한국자동차공학회논문집
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    • 제12권4호
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    • pp.36-41
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    • 2004
  • The purpose of this paper is analyzing the oil film pressure distribution and the minimum oil film thickness for a connecting rod bearing using an A VL's EXCITE program. It is very important to understand optimized oil supplying holes and oil groove dimensions for supporting sufficiently inertia forces and gas pressures from the combustion chamber for a Diesel engine. The computed results indicate that the optimized oil groove width of a bearing and oil hole of a journal are recommended for high performance of a connecting rod bearing at the elastohydrodynamic lubrication zone. These results as design parameters are very useful data for a bearing designer as a firm reference of an automotive engine.

탄성유체윤활에서 작동하는 커넥팅 로드 베어링의 윤활막 거동에 관한 수치적 연구 (Numerical Analysis on the Oil Film Behaviors of Connecting Rod Bearings Based on the Elastohydrodynamic Lubrication)

  • 김청균;김한구
    • 한국자동차공학회논문집
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    • 제12권4호
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    • pp.34-34
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    • 2004
  • The purpose of this paper is analyzing the oil film pressure distribution and the minimum oil film thickness for a connecting rod bearing using an A VL′s EXCITE program. It is very important to understand optimized oil supplying holes and oil groove dimensions for supporting sufficiently inertia forces and gas pressures from the combustion chamber for a Diesel engine. The computed results indicate that the optimized oil groove width of a bearing and oil hole of a journal are recommended for high performance of a connecting rod bearing at the elastohydrodynamic lubrication zone. These results as design parameters are very useful data for a bearing designer as a firm reference of an automotive engine.

쉘 요소를 이용한 K및 X개선 용접구조물의 열변형 해석방법에 관한 연구 (A Study on the Thermal Distortion Analysis of Welded Structures having K/X Groove using shell elements)

  • 하윤석;최지원
    • Journal of Welding and Joining
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    • 제30권6호
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    • pp.120-125
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    • 2012
  • Because ships and offshore structures have very large dimensions and complicated shapes, it is difficult to determine the deformation or internal stress in the structure by simple lab tests. Thus, a rigorous analysis by using the computer simulation technology is essential for obtaining their distortions by considering the entire production process characteristics. The rapid development of computer technology made it possible to analyze the heat transfer phenomena, deformation and phase transformation in the welded joint. For large shell structures, shell elements modeling contributed primarily to this development. But if a welding is done by multi-pass, shell elements whose thickness are unchangeable can hard to describe the local situation. Recently, it was researched how to introduce the imaginary temperature for V grooved multi-layer butt welding in strain-boundary method (a kind of shrinkage methodologies). In the present study, we formulated the imaginary temperature for the double bevel and double V groove by considering the thickness change of each pass through the bead and the thickness directions simultaneously and also demonstrated the feasibility of the formula by applying it to the thermal distortion analysis of the erection process of crane pedestal.

내부에 그루브와 스크린 메쉬를 갖는 평판 스트립형 히트파이프의 열성능에 대한 실험적 연구 (An Experimental Study on the Thermal Performance of a Flat-Ship Heat Pipe with Inner Grooves and Screen Mesh Cover)

  • 박수용;부준홍
    • 대한기계학회논문집B
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    • 제29권7호
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    • pp.805-813
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    • 2005
  • The thermal performance of a flat-strip heat pipe with inner grooves and the screen mesh cover was investigated experimentally. The heat pipes were made of 2024 aluminum alloy of which the dimensions were 30 (W) $\times$ 4 (T) $\times$ 150 (L) mm. The cross sectional dimensions of inner groove were 0.4$\times$0.9 mm and the space between grooves was 0.6 mm. To enhance the capillary force, foe screen meshes were attached to cover the grooved inner surface. In the grooved heat pipes without screen mesh cover, the maximum thermal load of 180 W (12 W/$cm^2$) was achieved for operating temperature below $130^{\circ}C$ at horizontal position. The heat pipes with screen mesh cover showed the thermal resistances less than one third of those without screen mesh cover, and showed less fluctuation in the thermal resistance values. Furthermore, the thermal performance of the former exhibited less dependence on the tilt angle and the fill charge ratio.

급유홈의 크기와 위치가 원통형 저널 베어링의 정적성능에 미치는 영향 (The Effect of Dimensions and Location of Oil Grooves on the Static Performance of a Cylindrical Journal Bearing)

  • 손상익;김경웅
    • Tribology and Lubricants
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    • 제26권4호
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    • pp.209-218
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    • 2010
  • In this study, the effect of dimensions and location of oil grooves on the static performance of a cylindrical journal bearing is analyzed numerically. Axial length, circumferential length and location of oil grooves are considered as parameters. Cavitation occurs within the diverging region of a journal bearing. The distribution of cavitation region where cavitation occurs varies with dimensions and location of oil grooves and affects the performance of a journal bearing. Elrod's cavitation algorithm which implements JFO boundary conditions based on the principle of mass conservation at the interfaces between cavitation and full film region is adopted in order to consider the effect of cavitation. The result shows that parameters, especially location of oil grooves have a great effect on the static performance of a journal bearing.

다구찌 실험법을 이용한 LPG 충전노즐 O-링 그루브의 최적화 설계연구 (Optimized Design of O-ring Groove in LPG Filling Unit Using Taguchi Experimental Method)

  • 김청균
    • 한국가스학회지
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    • 제10권2호
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    • pp.40-46
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    • 2006
  • 본 논문은 다구찌 실험 설계법을 이용하여 O-링을 장착하는데 필요한 사각 그루브의 최적설계를 위해 FEM으로 최대코시응력과 최대변형률에 대하여 해석하였다. 다구찌 설계방법은 LPG 충전노즐의 내경측에 밀봉을 위해 설치하는 O-링 그루브의 설계변수를 최적화 하는데 대단히 유용하다. FEM과 함께 다구찌 설계기법을 적용하여 계산된 해석결과에 따르면, 최적화 설계치수를 단지 9번의 반복 실험법에 의해 설계변수의 치수를 최적의 조건으로 얻을 수 있다는 측면에서 간편한 최적설계 기술이다. 이것은 다구찌 설계 실험법이 사각형상의 O-링 그루브를 설계하는 간단한 방법으로 대단히 유용하다는 것이다. 다구찌 설계기법에 기초한 해석결과에 의하면, O-링 그루브의 기하학적 형상에 대한 최적치수는 h=2.5mm, d=2.74 mm, c=0.15 mm, w=3.0 mm으로 각각 요약될 수 있다. 본 연구는 공급된 LPG 가스압력이 18 $kg/cm^2$인 상태에서 밀봉성과 안전성을 고려하면 초기압축률은 8.7%로 유지하는 것이 가장 효과적이라는 사실을 제공한다.

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핵연료 용기의 일체형 단조공정 개발에 관한 연구 (A Study on the Development of Integral Forging Process for Cask of Nuclear Fuel)

  • 김민우;조종래;김동권;김동영
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2006년도 춘계학술대회 논문집
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    • pp.369-372
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    • 2006
  • Monolithic forging of cask is required continuously. Body-base monolithic forging of cask has advantage of an economical manufacturing process and better reliability for nuclear applications. Through the finite element analysis and parametric study of design variables, those are die angle, groove length and flange thickness, the optimal dimensions of preform and die sets are determined in order to develop a suitable forging process for body-base monolithic forging. To verify the result of finite element analysis, the physical model of 1/30 scale of actual product using plasticine was carried out. The result of this experiment, deformed shapes were very similar to the finite element analysis. As a result of this work, the special piercing method was developed using blank material consisting of a flange, groove and squared part.

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