• Title/Summary/Keyword: Groove Dimensions

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The Effects of Groove Dimensions of Pad on CMP Characteristics (패드 그루브의 치수가 CMP 연마특성에 미치는 영향)

  • Park Ki-Hyun;Kim Hyoung-Jae;Choi Jae-young;Seo Heon-deok;Jeong Hae-do
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.3 s.234
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    • pp.432-438
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    • 2005
  • CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.

The Effect of Pad Groove Dimension on Polishing Performance in CMP (CMP에서 패드 그루브의 채수가 연마특성에 미치는 영향)

  • Park, Ki-Hyun;Kim, Hyung-Jae;Jeong, Young-Seok;Jeong, Hae-Do;Park, Jae-Hong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.1308-1311
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    • 2004
  • It is very important that get polishing characteristic that to be stable that accomplish planarization of high efficiency in chemical mechanical polishing, and there is repeatability Groove of pad causes much effects in flow of slurry among various factors that influence in polishing characteristic, is expected to cause change of lubrication state and polishing characteristic in contact between wafer and pad. Therefore, divided factors of pad groove by groove pattern, groove profile, groove dimensions. This research wishes to study effect that dimension of pad groove gets in polishing performance. When changed dimension (width, depth, pitch of groove) of groove, measured change of removal rate and friction force. According as groove dimension changes, could confirm that removal rate and friction force change. While result of this experiment studies effect of pad groove in CMP, it is expected to become small help.

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Design of Bar Horn for Ultrasonic Bonding (초음파 접합용 바혼의 설계)

  • Kim, Sun-Rak;Lee, Jae-Hak;Yoo, Choong-D.
    • Journal of Welding and Joining
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    • v.27 no.5
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    • pp.68-73
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    • 2009
  • The bar horn is designed to increase uniformity of the displacement on the output face through simulation and experiments. Three-dimensional modal analysis is conducted using the finite element method to calculate the vibration mode and displacement on the output face, and the design of experiment (DOE) technique is employed to determine the optimum dimensions of the groove and slot so that the high amplitude uniformity of the bar horn is produced. Displacement of the bar horn was measured using the Laser Doppler Vibrometer (LDV), and the experimental results show good agreements with the predicted results. High uniformity of the bar horn is achieved with the dimensions of the groove and slot determined using the design equations.

Numerical Analysis on the Oil Film Behaviors of Connecting Rod Bearings Based on the Elastohydrodynamic Lubrication (탄성유체윤활에서 작동하는 커넥팅 로드 베어링의 윤활막 거동에 관한 수치적 연구)

  • 김청균;김한구
    • Transactions of the Korean Society of Automotive Engineers
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    • v.12 no.4
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    • pp.36-41
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    • 2004
  • The purpose of this paper is analyzing the oil film pressure distribution and the minimum oil film thickness for a connecting rod bearing using an A VL's EXCITE program. It is very important to understand optimized oil supplying holes and oil groove dimensions for supporting sufficiently inertia forces and gas pressures from the combustion chamber for a Diesel engine. The computed results indicate that the optimized oil groove width of a bearing and oil hole of a journal are recommended for high performance of a connecting rod bearing at the elastohydrodynamic lubrication zone. These results as design parameters are very useful data for a bearing designer as a firm reference of an automotive engine.

Numerical Analysis on the Oil Film Behaviors of Connecting Rod Bearings Based on the Elastohydrodynamic Lubrication (탄성유체윤활에서 작동하는 커넥팅 로드 베어링의 윤활막 거동에 관한 수치적 연구)

  • 김청균;김한구
    • Transactions of the Korean Society of Automotive Engineers
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    • v.12 no.4
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    • pp.34-34
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    • 2004
  • The purpose of this paper is analyzing the oil film pressure distribution and the minimum oil film thickness for a connecting rod bearing using an A VL′s EXCITE program. It is very important to understand optimized oil supplying holes and oil groove dimensions for supporting sufficiently inertia forces and gas pressures from the combustion chamber for a Diesel engine. The computed results indicate that the optimized oil groove width of a bearing and oil hole of a journal are recommended for high performance of a connecting rod bearing at the elastohydrodynamic lubrication zone. These results as design parameters are very useful data for a bearing designer as a firm reference of an automotive engine.

A Study on the Thermal Distortion Analysis of Welded Structures having K/X Groove using shell elements (쉘 요소를 이용한 K및 X개선 용접구조물의 열변형 해석방법에 관한 연구)

  • Ha, Yunsok;Choi, Jiwon
    • Journal of Welding and Joining
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    • v.30 no.6
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    • pp.120-125
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    • 2012
  • Because ships and offshore structures have very large dimensions and complicated shapes, it is difficult to determine the deformation or internal stress in the structure by simple lab tests. Thus, a rigorous analysis by using the computer simulation technology is essential for obtaining their distortions by considering the entire production process characteristics. The rapid development of computer technology made it possible to analyze the heat transfer phenomena, deformation and phase transformation in the welded joint. For large shell structures, shell elements modeling contributed primarily to this development. But if a welding is done by multi-pass, shell elements whose thickness are unchangeable can hard to describe the local situation. Recently, it was researched how to introduce the imaginary temperature for V grooved multi-layer butt welding in strain-boundary method (a kind of shrinkage methodologies). In the present study, we formulated the imaginary temperature for the double bevel and double V groove by considering the thickness change of each pass through the bead and the thickness directions simultaneously and also demonstrated the feasibility of the formula by applying it to the thermal distortion analysis of the erection process of crane pedestal.

An Experimental Study on the Thermal Performance of a Flat-Ship Heat Pipe with Inner Grooves and Screen Mesh Cover (내부에 그루브와 스크린 메쉬를 갖는 평판 스트립형 히트파이프의 열성능에 대한 실험적 연구)

  • Park Soo Yong;Boo Joon Hong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.29 no.7 s.238
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    • pp.805-813
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    • 2005
  • The thermal performance of a flat-strip heat pipe with inner grooves and the screen mesh cover was investigated experimentally. The heat pipes were made of 2024 aluminum alloy of which the dimensions were 30 (W) $\times$ 4 (T) $\times$ 150 (L) mm. The cross sectional dimensions of inner groove were 0.4$\times$0.9 mm and the space between grooves was 0.6 mm. To enhance the capillary force, foe screen meshes were attached to cover the grooved inner surface. In the grooved heat pipes without screen mesh cover, the maximum thermal load of 180 W (12 W/$cm^2$) was achieved for operating temperature below $130^{\circ}C$ at horizontal position. The heat pipes with screen mesh cover showed the thermal resistances less than one third of those without screen mesh cover, and showed less fluctuation in the thermal resistance values. Furthermore, the thermal performance of the former exhibited less dependence on the tilt angle and the fill charge ratio.

The Effect of Dimensions and Location of Oil Grooves on the Static Performance of a Cylindrical Journal Bearing (급유홈의 크기와 위치가 원통형 저널 베어링의 정적성능에 미치는 영향)

  • Son, Sang-Ik;Kim, Kyung-Woong
    • Tribology and Lubricants
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    • v.26 no.4
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    • pp.209-218
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    • 2010
  • In this study, the effect of dimensions and location of oil grooves on the static performance of a cylindrical journal bearing is analyzed numerically. Axial length, circumferential length and location of oil grooves are considered as parameters. Cavitation occurs within the diverging region of a journal bearing. The distribution of cavitation region where cavitation occurs varies with dimensions and location of oil grooves and affects the performance of a journal bearing. Elrod's cavitation algorithm which implements JFO boundary conditions based on the principle of mass conservation at the interfaces between cavitation and full film region is adopted in order to consider the effect of cavitation. The result shows that parameters, especially location of oil grooves have a great effect on the static performance of a journal bearing.

Optimized Design of O-ring Groove in LPG Filling Unit Using Taguchi Experimental Method (다구찌 실험법을 이용한 LPG 충전노즐 O-링 그루브의 최적화 설계연구)

  • Kim Chung-Kyun
    • Journal of the Korean Institute of Gas
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    • v.10 no.2 s.31
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    • pp.40-46
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    • 2006
  • In this paper, the optimized design of a rectangular O-ring groove has been analyzed for a maximum Cauchy stress and maximum strain using the Taguchi method. This method may efficiently optimize the design parameters for an O-ring groove of a LPG filling unit. The computed FEM results indicate that the optimized design parameters can only be drawn by nine experimental numbers of iterations when the Taguchi design technique has been employed with a finite element method. This means that the Taguchi design method is very useful for the optimization design of O-ring rectangular groove geometry. Based on the computed FEM results by the Taguchi design technique, the dimensions of a groove geometry are given as h=2.5 mm, d=2.74 mm, c=0.15 mm, and w=3.0 mm. In this study, the initial compression ratio of O-rings is recommended as 8.7% for a gas supply pressure of 18 $kg/cm^2$.

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A Study on the Development of Integral Forging Process for Cask of Nuclear Fuel (핵연료 용기의 일체형 단조공정 개발에 관한 연구)

  • Kim, M.W.;Cho, J.R.;Kim, D.K.;Kim, D.Y.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2006.05a
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    • pp.369-372
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    • 2006
  • Monolithic forging of cask is required continuously. Body-base monolithic forging of cask has advantage of an economical manufacturing process and better reliability for nuclear applications. Through the finite element analysis and parametric study of design variables, those are die angle, groove length and flange thickness, the optimal dimensions of preform and die sets are determined in order to develop a suitable forging process for body-base monolithic forging. To verify the result of finite element analysis, the physical model of 1/30 scale of actual product using plasticine was carried out. The result of this experiment, deformed shapes were very similar to the finite element analysis. As a result of this work, the special piercing method was developed using blank material consisting of a flange, groove and squared part.

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