• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.406-406
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• 2012

반도체 공정의 대부분은 plasma를 사용한 공정이 주를 이루고 있다. 이러한 공정에서 최근 선폭의 초 미세화가 진행되면서 pulse modulation plasma에 대한 관심을 가지게 되고 있다. Pulse modulation plasma는 RF 인가 시 일정 간격으로 on, off 시켜주게 된다. 이 때, chamber 내부에서 발생하는 plasma역시 on, off 되게 되는데 이러한 현상을 이용하면 plasma 내의 전자온도가 떨어져서 식각 공정 시 선택비의 개선을 기대할 수 있다. 실제 장비회사에서는 pulse를 이용하기 위한 장비개선 연구가 한창이다. 본 연구에서는 유도결합플라즈마 chamber에서 source와 bias에 RF pulse modulation plasma를 발생시켜 기존 CW (Continuous wave) 방전시킨 plasma의 밀도와 전자온도를 측정하여 차이를 비교, 분석 해보았다.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.290-290
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• 2011

유도결합플라즈마 장비의 공정에서 안테나의 역할은 매우 중요하다. 유도결합플라즈마의 식각 공정에서도 충분한 식각과 균등한 식각 결과를 얻기 위해 안테나의 역할은 중요한 요인 중 하나이다. 안테나와 공정 웨이퍼간의 거리에 따라 발생하는 플라즈마 밀도나 전자 온도 등이 변화하고 그에 따른 식각정도나 균등성도 달라진다. 본 연구에서는 플라즈마 특성 변화를 관찰하기 위해 기존 유도결합플라즈마 식각 장비의 안테나와 웨이퍼간 거리와 내부 안테나를 웨이퍼와 가깝게 하였을 때의 플라즈마 밀도, 안테나의 전류와 식각률 등을 측정하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2005년도 제29회 학술발표회 초록집
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• pp.164-164
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• 2005

• Korean Journal of Pharmacognosy
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• 제29권3호
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• pp.209-216
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• 1998

In the course of phytochemical studies of Rumex acetosella L. (Polygonaceae), the MeOH extract of the whole plants was fractionated with $CH_2Cl_2$ and $H_2O$, and the $CH_2Cl_2$ layer was fractionated again with 90% MeOH and hexane. Whereas $H_2O$ layer was fractionated with EtOAc and then with n-BuOH again. By repeated column chromatography, compound 1 was isolated from the 90% MeOH fraction, compounds 1, 2, 3, 4 and 5 were from the ethylacetate fraction, and compound 5 was from the n--BuOH fraction. On the basis of physico-chemical, spectroscopic evidences and in comparison with authentic samples, the structures of them were confirmed to emodin, citreorosein, $chrysophanol-8-O-{\beta}-D-glucopyranoside$, luteolin and $luteolin-7-O {\beta}-D-glucopyranoside$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• 제51권4호
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• pp.152-157
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• 2002

This paper describes an effect of a single- and a quadruple-lightning impulse currents on electrical characteristics of ZnO blocks, and an expert system to diagnose arrestor deterioration. To deduce the parameters needed for diagnosing arrester deterioration, an accelerate deterioration teat is carried out. In the experiment, leakage current components are measured. Also, wave height distribution of the leakage current according to the progress of arrester deterioration is analyzed. From the experimental results, the wave height distribution of the leakage current showed conspicuous difference even in an immaterial leakage current increase. Therefore, the use of wave height distribution of the leakage current in deterioration diagnostic technique makes more accurate diagnosis than the conventional method by using only a leakage currant value. Finally, the expert system based on the experimental results is developed and the system can diagnose arrestor deterioration by measuring the leakage current and its wade height distribution.

• Journal of the Korean Society of Physical Medicine
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• 제17권1호
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• pp.1-9
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• 2022

PURPOSE: This study examined the effects of ankle kinesio taping on the balanced control capabilities of normal adults, stroke patients, and musculoskeletal patients. METHODS: One thousand articles were searched, and 100 of them were selected as taping papers. Subsequently, 33 papers classified according to balance, muscle strength and pain were analyzed according to the effect size and age group. RESULTS: The effect of ankle kinesio taping on balance control was examined by dividing the effect size into three groups according to the type of disease. Studies with normal adults had a large effect size of 1.213, whereas the effect size of stroke studies was .377, which was small. Studies on musculoskeletal disorders had a large effect size of 1.429. All three groups did not include 0 in the 95% confidence interval, indicating a significant effect. CONCLUSION: The effect of kinesio taping on balance control was positive in all subjects, including normal adults, stroke patients, and musculoskeletal patients. On the other hand, in terms of the effect size of kinesio taping on balance control, musculoskeletal patients and normal adults had larger effect sizes than stroke patients.

• The Journal of Korean Physical Therapy
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• 제35권6호
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• pp.185-189
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• 2023

Purpose: This study investigated the immediate biomechanical effects of unilateral mastication for 10 minutes on the temporomandibular joint (TMJ) with 21 healthy adult participants. Methods: The gum group chewed gum on the right side for 10 minutes, and the control group rested for 10 minutes. Biomechanical data were obtained using a three-dimensional infrared camera before and after intervention. An independent t-test assessed the variation of kinematic data to identify differences between before and after intervention. Results: Among biomechanical variables, the gum group's length of the left forehead middle region and the temporomandibular joint angle decreased compared to the control group (p<0.05). Conclusion: Caution with unilateral masticatory activity is recommended, as unilateral mastication causes biomechanical changes due to excessive load on the soft tissues of the contralateral TMJ.

• Proceedings of the Korean Society of Medical Physics Conference
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• 한국의학물리학회 2002년도 Proceedings
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• pp.241-243
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• 2002

New types of protocols have been recently in development, all based on an absorbed dose-to-water with the aim of improving the accuracy of measurements of absorbed dose to water. IAEA TRS-277, the air-kerma standard-based present protocol, and IAEA TRS-398 and AAPM TG-51, the absorbed dose-to-water standard-based new one, were studied and compared theoretically and experimentally for photon beams of 6, 10, and 15 MV. NE 2571 and 3 Farmer types of ionization chambers in widely commercial use were used to determine an absorbed dose to water at the reference depth in water. Two different kinds of calibration factors were given respectively for every chamber calibrated in $\^$60/CO gamma ray beams from a Korean Secondary Standard Dosimetry Laboratory (KFDA). This work shows that there is around 1 % of difference of absorbed doses measured between two different types of calibration systems owing to different physical parameters and reference conditions used. We hope this work to help form the basis on development of new type of protocol in Korea.

• Journal of the Korean Society of Physical Medicine
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• 제17권4호
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• pp.15-25
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• 2022

PURPOSE: This study examined the effect of bridge exercise-abdominal draw-in maneuver (ADIM) with hip adductor co-contraction on the TrA thickness and whether it is effective as a core stability exercise. METHODS: The subjects of this study, 33 men with no history in the past and who provided prior consent, were selected through interviews with male students of S University. The subjects performed five movements, including bridge exercise and ADIM, and performed two demonstrations and two exercises in advance. The abdominal muscles were measured using ultrasonography once in each movement, and the abdominal muscle tone was measured using a soft tissue tone measurement. RESULTS: There was a significant difference in the thickness between the TrA and Internal Oblique Muscles at various bridge positions (p < .05), and no significant difference with the External Oblique Muscle (p < .05). There was no significant difference in muscle tone in the Rectus abdominis part (p > .05), but a significant difference in the Oblique Muscle part (p < .05). The muscle tone of the Oblique Muscles by position showed a significant difference in Bridge, BHa, and BA compared to the rest position (p < .05), but no significant difference with BHaA (p > .05). CONCLUSION: The thickness of TrA could be increased through bridge exercise, and TrA could be activated properly using ADIM and may be an effective exercise for core stabilization.

• Journal of the Korean Society of Physical Medicine
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• 제17권2호
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• pp.11-20
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• 2022

PURPOSE: This study investigated the immediate effects of gluteus medius strengthening training and relaxation therapy on the static balance, muscle strength asymmetry, and proprioception. METHODS: In this research, 38 healthy adults were assigned randomly to strengthening groups (SG) and relaxation groups (RG). The static balance, muscle strength asymmetry, and proprioception were measured as a pre-measurement. The same measurements were performed after the intervention and follow-up. An independent sample t-test was used to compare each group, and one-way repeated ANOVA was used to compare the changes within the group. RESULTS: In the static balance, the comparison between groups SG was more significant than RG, and only SG showed significant differences in the intra-group comparisons. There was no significant difference in muscle strength asymmetry between SG and RG. On the other hand, the comparison within the group revealed only SG to be significant. In proprioception, SG produced more significant results than RG, and only SG had significant values in the within-group comparison. CONCLUSION: Strengthening training affects the changes in static balance, muscle strength asymmetry, and proprioception.