• 제목/요약/키워드: Gas-Phase

검색결과 3,253건 처리시간 0.028초

UV/O2 가스상 세정을 이용한 실리콘 웨이퍼상의 PEG 반응기구의 관찰 (Investigation of PEG(polyethyleneglycol) Removal Mechanism during UV/O2 Gas Phase Cleaning for Silicon Technology)

  • 권성구;김도현;김기동;이승헌
    • 한국전기전자재료학회논문지
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    • 제19권11호
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    • pp.985-993
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    • 2006
  • An experiment to find out the removal mechanism of PEG(polyethyleneglycol) by using UV-enhanced $O_2$ GPC (gas phase cleaning) at low substrate temperature below $200^{\circ}C$ was executed under various process conditions, such as substrate temperature, UV exposure, and $O_2$ gas. The possibility of using $UV/O_2$ GPC as a low-temperature in-situ cleaning tool for organic removal was confirmed by the removal of a PEG film with a thickness of about 200 nm within 150 sec at a substrate temperature of $200^{\circ}C$. Synergistic effects by combining photo-dissociation and photo oxidation can only remove the entire PEG film without residues within experimental splits. In $UV/O_2$ GPC with substrate temperatures higher than the glass transition temperature, the substantial increase in the PEG removal rate can be explained by surface-wave formation. The photo-dissociation of PEG film by UV exposure results in the formation of end aldehyde by dissociation of back-bone chain and direct decomposition of light molecules. The role of oxygen is forming peroxide radicals and/or terminating the dis-proportionation reaction by forming peroxide.

OMACON형 LM-MHD 시스템에서의 에너지전환특성 시뮬레이션 (Simulation of Energy Conversion Characteristics of OMACON LM-MHD Systems)

  • 김창녕
    • 한국시뮬레이션학회논문지
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    • 제6권2호
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    • pp.1-14
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    • 1997
  • The characteristics of the flow and energy conversion in OMACON liquid-metal MHD system are investigated. Numerical simulation of two-phase flow in the OMACON system without magnetic field was carried out by the Phoenics code and the energy conversion characteristics are studied in association with the fact that the mechanical energy loss at the nozzle of the OMACON system are to be converted into electrical energy. In this system, working fluid (gas) is injected through the mixer located at the bottom of the riser, and is mixed with hot liquid metal. Therefore in the riser two-phase flow is developed under the influence of the gravity. In this study, the interaction between the gas and liquid is considered by the use of IPSA(InterPhase Slip Algorithm) where standard drag coefficient has been used. It has been assumed that in the flow regime the liquid is continuous and the gas is dispersed. For the liquid and gas, the continuity equations, momentum equations and energy equations are solved respectively in association with void fraction in the flow field. In order to calculate the energy conversion efficiency, firstly the ratio of the mechanical energy loss of liquid metal flow at the nozzle to the input thermal energy is considered. Secondly flow pattern of liquid metal in the generator has been analyzed, and the characteristics of the conversion of the mechanical energy into the electrical energy has been investigated. For an representative case where Hartmann number is 540 and magnetic field is 0.35 T, the present analysis shows that the energy conversion efficiency is 0.653. This result is considered to be reasonable in comparison with published experimental results.

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고온 가스질화 된 STS 430 스테인리스강의 냉간 가공성에 미치는 항온변태 열처리 시간 변화의 영향 (Effect of Isothermal Transformation Heat-treatment Time on Cold Workability of STS 430 Stainless Steel after High Temperature Gas Nitriding)

  • 김정민;현양기;송상우;김기동;손영호;성장현
    • 열처리공학회지
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    • 제27권1호
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    • pp.15-22
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    • 2014
  • This study is to investigate the phase changes and cold workability after isothermal transformation at $780^{\circ}C$ by using the high temperature gas nitrided (HTGN) STS 430 ferritic stainless steel specimens. The phase diagram of STS 430 steel obtained by calculation showed that the phase appeared at $1100^{\circ}C$ showed as ${\alpha}+{\gamma}{\rightarrow}{\gamma}{\rightarrow}{\gamma}+Cr_2N{\rightarrow}{\gamma}+Cr_2N+CrN$ with increasing nitrogen concentration. Also, the transformation of ${\gamma}{\rightarrow}Cr_2N$ during heat treatment isothermally at $780^{\circ}C$, nitrogen pearlite with lamellar type was fully formed at the nitrogen permated surface layer for 10 hrs. However, this transformation was not completed for 1 hr, resulting nitrogen pearlite plus martensite. The cold rolled specimen of isothermally transformed at $780^{\circ}C$ for 10 hrs after high temperature gas nitriding decreased the layer thickness of nitrogen pearlite inducing the deformation of hard $Cr_2N$ phase. the dissolution rate of $Cr_2N$ phase increased rapidly with increasing cold rolling ratio. Specimens with the microstructure of nitrogen pearlite (isothermally transformed at $780^{\circ}C$ for 10 hrs) were possible to cold rolling without crack formation. However, the mixed structures of nitrogen pearlite + martensite (isothermally transformed at $780^{\circ}C$ for 1 hr) were impossible to cold deformation without cracking.

輻射가 關與하는 氣體-固體粒子 캐비티 流動에서의 熱傳達 (Heat Transfer in Radiatively Participating Gas-Particle Cavity Flows)

  • 이종욱;이준식;이택식
    • 대한기계학회논문집
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    • 제12권3호
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    • pp.551-560
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    • 1988
  • 본 연구에서는 해석하려는 시스템의 유동 및 열전달 현상의 개념도를 Fig.1 에 나타내었다. 고체 입자는 윗부분 홈으로부터 분사되어, 선택적 투과면을 통해서 입사되는 복사열을 흡수 하며, 기체는 아래 또는 위의 홈 부분으로부터 들어와서 고체 입자와의 대류열전달로 가열이 된다. 기차게 아래 홈에서부터 분사되는 경우 대류에 의해 가열된 기체가 역성층화로 인해 부력을 받게 되어, 고체 입자의 하강 속도가 감 소할 때 입자의 체류 시간의 증가에 따른 복사열의 흡수효과에 대하여 고찰하였으며 입자의 크기, 투사 복사량, 분사속도, 입자의 질량유량 등을 파라미터로 하여 이들의 변화에 따른 영향을 규명하였다. 2-방연계를 고려한 2-방정식 모델을 구성하고 고체 입자에 대하여는 Lagrangian 방법으로 기술하였으며 수치해석에 있어 유한차분법을 도 입하고 두 상간의 상호연계는 PSI-Cell 방법을 이용하였고 복사 열유속은 2-유속 모델 (two-flux model)을 도입하여 계산하였다.

QSAR 방법을 이용한 가스 상태의 등온흡착선 예측 (Prediction of Gas Phase Sorption Isotherms on The Basis of QSAR Method)

  • 김종오
    • 대한토목학회논문집
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    • 제11권3호
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    • pp.11-18
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    • 1991
  • 휘발성 유기물질(VOC)은 많은 경로를 통해 발생되는데, 독성이 있을뿐 아니라 발암물질을 포함하고 있으므로, 이들 물질 제거는 매우 중요하다. 본 연구에서는 휘발성 유기물질 처리를 위해 활성탄을 사용할 경우 처리와 설계를 위해 흡착능력의 연구가 반드시 필요하다. 그러므로, 본 연구에서는 사용할 화합물에 대한 가스 상태의 등온흡착선을 물리적 특성과 액화상태의 등온흡착선으로 부터 예측하였다. 이를 위해 이용된 방법이 quantitative structure-activity relationships(QSAR) 방법이다. 가스 상태의 등온흡착선을 분자연결제수($^2{\chi}$)와 헨리의 계수, 또는 용해도와 가스 상태의 평형농도에 의해서 예측 할 수 있었다. 연구결과, Freundlich 모델을 근거로한 가스 상태의 등온흡착선은 ${\log}\;a_g=0.238\;^2{\chi}+0.573\;{\log}\;H_a+4.330(r^2=0.94)$ 이었다. 결과적으로, 저흡착능력 범위에서 Freundlich 이론을 근거로한 이 방법은 시간소비적 실험을 통하지 않고도 가스 상태의 등온흡착선을 예측할 수 있다는 것을 제시하고 있다.

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CARS를 이용한 희박 예혼합 가스터빈 연소기내 온도 측정 (2);당량비가 위상별 온도에 미치는 영향 (Phase-resolved CARS Temperature Measurements in a Lean Premixed Gas Turbine Combustor (2);Effect of equivalence ratio on phase-resolved gas temperature)

  • 이종호;문건필;박철웅;한재원;전충환;장영준
    • 한국연소학회:학술대회논문집
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    • 대한연소학회 2003년도 제27회 KOSCO SYMPOSIUM 논문집
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    • pp.103-108
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    • 2003
  • The effect of equivalence ratio and fuel/air mixing quality on the phase-resolved gas temperatures at different phases of the oscillating pressure cycle was experimentally investigated. An atmospheric pressure, optically accessible and laboratory-scale dump combustor operating on methane with heat release rate of 1.59kW was used. Temperature measurements were made using coherent anti-Stokes Raman spectroscopy (CARS) at several spatial locations for typical unstable combustion conditions. Analysis was conducted using parameters such as phase-resolved averaged temperature, normalized standard deviation and temperature probability distribution functions (PDFs). Also the probability on the occurrence of high temperature (over 1900K) was investigated to get the information on the perturbation of equivalence ratio and NOx emission characteristics. It was shown that most of temperature histograms exhibit Gaussian profile which has short breadth of temperature fluctuation at equivalence ratio of 0.6, while beta profile was predominant for the cases of other equivalence ratios (${\Phi}$=0.55, 0.50). The characteristics on the occurrence of high temperature also displayed periodic wave form which is very similar to the pressure signal. And the amplitude of this profile goes larger as the fuel/air mixing quality become poorer. These also provided additional information on the perturbation of equivalence ratio at flame as well as NOx emission characteristics.

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전산유체 기법을 이용한 용존공기부상법에서의 접촉도 조건변화에 따른 충돌효율평가 (Collision Efficiency Estimation in the DAF Contact Zone using Computational Fluid Dynamics)

  • 김성훈;유제선;박희경
    • 상하수도학회지
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    • 제18권2호
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    • pp.201-207
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    • 2004
  • Dissolved air flotation (DAF) is a solid-liquid separation process that uses fine rising bubbles to remove particles in water. Most of particle-bubble collision occurs in the DAF contact zone. This initial contact considered by the researchers to play a important role for DAF performance. It is hard to make up conceptual model through simple mass balance for estimating collision efficiency in the contact zone because coupled behavior of the solid-liquid-gas phase in DAF system is 90 complicate. In this study, 2-phase(gas-liquid) flow equations for the conservation of mass, momentum and turbulence quantities were solved using an Eulerian-Eulerian approach based on the assumption that very small particle is applied in the DAF system. For the modeling of turbulent 2-phase flow in the reactor, the standard $k-{\varepsilon}$ mode I(liquid phase) and zero-equation(gas phase) were used in CFD code because it is widely accepted and the coefficients for the model are well established. Particle-bubble collision efficiency was calculated using predicted turbulent energy dissipation rate and gas volume fraction. As the result of this study, the authors concluded that bubble size and recycle ratio play important role for flow pattern change in the reactor. Predicted collision efficiency using CFD showed good agreement with measured removal efficiency in the contact zone. Also, simulation results indicated that collision efficiency at 15% recycle ratio is higher than that of 10% and showed increasing tendency of the collision efficiency according to the decrease of the bubble size.

점성슬러리 기포탑에서 작은 기포의 체류량 특성 (Holdup Characteristics of Small Bubbles in a Viscous Slurry Bubble Column)

  • 진해룡;송양호;강용;정헌;이호태
    • Korean Chemical Engineering Research
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    • 제49권1호
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    • pp.83-88
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    • 2011
  • 점성슬러리 기포탑에서 작은 기포의 체류량 특성에 대해 고찰하였다. 정압 강하방법(Static pressure drop method)에 의해 구한 기포탑 내부전체 기포체류량과 이중저항탐침법(dual resistivity probe method)에 의해 구한 큰 기포의 체류량으로부터 기포탑 내부에 체류하는 작은 기포의 체류량을 구할 수 있었다. 기체유속, 연속액상의 점도 그리고 슬러리 상중에 포함된 고체입자의 분율이 전체 기체체류량, 큰 기포의 체류량 그리고 작은 기포의 체류량에 미치는 영향을 검토하였다. 점성슬러리 기포탑에서 작은 기포의 체류량은 기체의 유속이 증가하면 증가하였으나 연속액상의 점도와 슬러리상에 포함된 고체입자의 분율이 증가하면 감소하였다. 기포탑 내부에 체류하는 전체 기포 체류량 중 작은 기포 체류량의 분율은 기체유속이 증가하면 증가하였으나 연속액상의 점도와 슬러리상에 포함된 고체입자의 분율이 증가하면 감소하였다. 기포탑 내부에 체류하는 작은 기포는 큰 기포의 상승속도에 영향을 미치지 못하였다.

Theoretical Studies of the Gas-Phase Identity Nucleophilic Substitution Reactions of Cyclopentadienyl Halides

  • Lee, Ik-Choon;Li, Hong-Guang;Kim, Chang-Kon;Lee, Bon-Su;Kim, Chan-Kyung;Lee, Hai-Whang
    • Bulletin of the Korean Chemical Society
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    • 제24권5호
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    • pp.583-592
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    • 2003
  • The gas phase identity nucleophilic substitution reactions of halide anions (X = F, Cl, Br) with cyclopentadienyl halides (1) are investigated at the B3LYP/6-311+G**, MP2/6-311+G** and G2(+)MP2 levels involving five reaction pathways: σ-attack $S_N2$, β-$S_N$2'-syn, β-$S_N$2'-anti, γ-$S_N$2'-syn and γ-$S_N$2'-anti paths. In addition, the halide exchange reactions at the saturated analogue, cyclopentyl halides (2), and the monohapto circumambulatory halide rearrangements in 1 are also studied at the same three levels of theory. In the σ-attack $S_N2$ transition state for 1 weak positive charge develops in the ring with X = F while negative charge develops with X = Cl and Br leading to a higher energy barrier with X = F but to lower energy barriers with X = Cl and Br than for the corresponding reactions of 2. The π-attack β-$S_N$2' transition states are stabilized by the strong $n_C-{\pi}^{*}_{C=C}$ charge transfer interactions, whereas the π-attack γ-$S_N$2' transition states are stabilized by the strong $n_C-{\sigma}^{*}_{C-X}$ interactions. For all types of reaction paths, the energy barriers are lower with X = F than Cl and Br due to the greater bond energy gain in the partial C-X bond formation with X = F. The β-$S_N$2' paths are favored over the γ-$S_N$2' paths only with X = F and the reverse holds with X = Cl and Br. The σ-attack $S_N2$ reaction provides the lowest energy barrier with X = Cl and Br, but that with X = F is the highest energy barrier path. Activation energies for the circumambulatory rearrangement processes are much higher (by more than 18 kcal $mol^{-1}$) than those for the corresponding $S_N2$ reaction path. Overall the gas-phase halide exchanges are predicted to proceed by the σ-attack $S_N2$ path with X = Cl and Br but by the β-$S_N$2'-anti path with X = F. The barriers to the gas-phase halide exchanges increase in the order X = F < Br < Cl, which is the same as that found for the gas-phase identity methyl transfer reactions.

연소 전 이산화탄소 회수기술을 위한 실리카겔 공극 내에서의 이산화탄소+수소 혼합가스 하이드레이트의 상평형 (Gas Hydrate Phase Equilibria of $CO_2+H_2$ Mixture in Silica Gel Pores for the Development of Pre-combustion Capture)

  • 강성필;장원호;조완근
    • 청정기술
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    • 제15권4호
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    • pp.258-264
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    • 2009
  • 가스하이드레이트를 이용하여 이산화탄소+수소 혼합가스로부터 이산화탄소를 선택적으로 분리, 회수하기 위한 공정개발의 가능성을 살펴보고자 상평형 조건을 측정하였다. 100 nm의 공극 직경을 갖는 실리카겔 공극 내에서 형성되는 가스하이드레이트-물-기체의 삼상평형 하이드레이트 해리조건을 측정하였으며, 274.15 K에서 하이드레이트-기체의 이상조건 상태로 유지한 상태에서 이산화탄소의 농도변화에 따른 기상 및 하이드레이트상의 가스 조성을 분석하였다. 일정한 온도조건에서 기상의 이산화탄소 농도가 증가할수록 평형해리압력은 감소하는 경향을 보였으며, 순수 물에서의 상평형 압력과 비교하면 실리카겔 공극에서의 하이드레이트 상평형은 모세관효과에 의해 생성저해 현상이 발생하였다. 42 mol% 이산화탄소와 58 mol% 수소 혼합가스로부터 얻어지는 가스하이드레이트상의 조성은 이산화탄소 95 mol% 상으로 측정되었는데, 이는 기존의 순수 물을 이용하여 가스하이드레이트를 제조함으로써 이산화탄소를 농축, 분리하는 방법에 비해 매우 향상된 결과를 보여주고 있다. 하이드레이트 슬러리를 제조하여 2단 반응으로 분리하는 기존 방법에 비해 공정을 단순화할 수 있는 이 방법은 고정층 반응기로 쉽게 적용이 가능하므로 유용한 연소 전 이산화탄소 회수방법으로 이용할 수 있을 것으로 기대된다.