• 한국진공학회지
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• 제18권6호
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• pp.453-458
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• 2009

SiOC 박막을 BTMSM과 산소의 혼합가스를 사용하여 CVD 방법으로 증착하였다. 박막의 특성은 가스 유량비에 따라서 변하였다. 유전상수는 MIS 구조를 이용하여 C-V 측정법에 의하여 얻었다. 결합의 말단을 구성하는 Si-$CH_3$ 결합 사이의 공간효과에 의해서 기공이 만들어지며, 기공의 형성에 의해서 박막의 두께가 증가하였다. 그러나 분극의 감소에 의해서 만들어지는 SiOC 박막은 두께가 감소하면서 유전상수도 감소되었다. 열처리 후 유전상수는 수산기의 기화에 의해서 감소되었다. 박막의 두께는 분극의 감소에 의한 유전상수의 감소와 연관이 있었다. 굴절률은 박막의 두께에 반비례하는 경향성이 있으며, 박막의 두께와 굴절률의 경향성은 열처리 후에도 변하지 않았다.

• 한국산학기술학회논문지
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• 제1권2호
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• pp.1-8
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• 2000

본 연구에서는 상용 순수 티타늄 소재를 사용하여 안경테를 레이저 빔 용접으로 제조하기 위하여 광섬유로 전송되는 가변 펄스곡 80 ㎲-10 ms. 최대 평균출력 200 W, 첨두출력 12 kW와 최대 펄스에너지 50J성능의 초정밀 Nd:YAG 레이저 용접장치를 설계 제작하고 이 장치를 사용하여 안경테 제조를 위한 최적 용접조건을 선정하기 위한 실험을 수행하였다. 안경테를 위한 T이음 및 맞대기 이음형상을 용접할 때 평균출력, 광섬유 형태, 초점위치 등에서 용입상태와 용접결함을 조사하여 최적 용접조건을 선정하였고 안경테 부품 장석(temple hinge)과 다리, 톱바를 레이저 용접으로 시제품을 제작하였다.

• 대한기계학회논문집B
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• 제24권3호
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• pp.402-410
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• 2000

As the combustion process of CWM consists of the water evaporation, the release and combustion of volatile matter, and the combustion of char for every particle, it is more complex than that of existent liquid fuel. Though the many studies on CWM combustion have been carried out by the single droplet using hanging methods or the multiple droplet using atomization methods, any report don't presents definite solution about the effects by the initial water evaporation and combustion of volatile. When CWM is suddenly exposed in the high temperature surroundings, the internal water evaporates and then each droplet builds up pores. Besides, porosity rate changes along the temperature of surroundings, the composition ratio of CWM, and the initial diameter of droplet. In result, because it affects the whole combustion rate, the combustion of CWM has complex mechanism as compared with the combustion of liquid or gas fuel. Therefore, concentrating on porous structure of CWM, this study has proceeded to acquire the basic data on the CWM injection combustion and closely examines the effects of the first stage combustion on the whole combustion by measuring the diameter variations, pore rate, mass fraction burned, and the internal temperature changes of CWM droplet. The results demonstrate that $60{\sim}70%$ of initial mass is reduced during water evaporation and volatile combustion period, and swelling rate, mass faction burned, and density variation are greatly concerned with atomization of CWM etc.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.167-169
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• 2009

We have carried out quantitative structure and property analysis of the nanoporous structures of low dielectric constant (low-k) carbon-doped silicon oxide (SiCOH) films, which were deposited with plasma enhanced chemical vapor deposition (PECVD) using vinyltrimethylsilane (VTMS), divinyldimethylsilane (DVDMS), and tetravinylsilane (TVS) as precursor and oxygen as an oxidant gas. We found that the SiCOH film using VTMS only showed well defined spherical nanopores within the film after thermal annealing at $450^{\circ}C$ for 4 h. The average pore radius of the generated nanopores within VTMS SiCOH film was 1.21 nm with narrow size distribution of 0.2. It was noted that thermally labile $C_{x}H_{y}$ phase and Si-$CH_3$ was removed to make nanopore within the film by thermal annealing. Consequently, this induced that decrease of average electron density from 387 to $321\;nm^{-3}$ with increasing annealing temperature up to $450^{\circ}C$ and taking a longer annealing time up to 4 h. However, the other SiCOH films showed featureless scattering profiles irrespective of annealing conditions and the decreases of electron density were smaller than VTMS SiCOH film. Because, with more vinyl groups are introduced in original precursor molecule, films contain more organic phase with less volatile characteristic due to the crosslinking of vinyl groups. Collectively, the presenting findings show that the organosilane containing vinyl group was quite effective to deposit SiCOH/$C_{x}H_{y}$ dual phase films, and post annealing has an important role on generation of pores with the SiCOH film.

• Progress in Superconductivity
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• 제8권2호
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• pp.186-192
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• 2007

High $J_c\;YBa_2Cu_3O_{7-x}$ superconducting films have been fabricated $LaAlO_3(100)$ substrate by MOD method using dichloroacetic acid(DCA) as chelating solvent for preparing precursor solution. Heating rate was varied in order to optimize the calcination heat treatment condition in DCA-MOD method. Coated films were calcined at lower temperature up to $500^{\circ}C$ in flowing humid oxygen atmosphere. The heating rate was calcined from $13.3^{\circ}C/min\;to\;0.28^{\circ}C/min$. Conversion heat treatment was performed $800^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. Surface and cross sectional SEM microstructures showed that particle sizes were increased with heating rate at a calcination step. The amount of pores was increased with heating rate in the calcined films. Dense microstructure and sharp texture were developed in an YBCO films after conversion heat treatment. A high critical current density (Jc) of $1.26MA/cm^2$ (@77 K and self-field) was obtained for the YBCO film which was prepared with a heating rate of $0.28^{\circ}C/min$.

• 공업화학
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• 제9권4호
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• pp.523-528
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• 1998

본 연구에서는 고체전해질셀 내에서 작업전극으로 사용된 $V_2O_5$의 전기화학적 특성을 알아보기 위해 YSZ를 고체전해질로 사용하여 전기화학셀(1-Butene+$O_2$, $V_2O_5{\mid}YSZ{\mid}Ag$, $O_2$)을 구성하였다. 상대전극인 Ag는 소성에 따라 sintering이 일어나고 $3{\mu}m$ 이상의 기공을 갖는 구조를 얻었다. 작업전극은 소성조건에 따라 부분산화반응에 영향을 주는 (010)면이 발생되었다. $V_2O_5$의 1-부텐에 대한 주요생성물은 부타디엔이었고 SEP (solid electrolyte potentiometry) 기술을 이용하여 작업전극상에 흡착된 화학종의 화학포텐셜을 측정하였다. 가스조성에 따른 개로전위 (OCV; open circuit voltage)를 측정하여 표면 산소종에 혼합전위의 발생을 확인하였다.

• Bulletin of the Korean Chemical Society
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• 제34권2호
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• pp.519-523
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• 2013

When atomic layer deposition (ALD) is performed on a porous material by using an organometallic precursor, minimum exposure time of the precursor for complete coverage becomes much longer since the ALD is limited by Knudsen diffusion in the pores. In the previous report by Min et al. (Ref. 23), shrinking core model (SCM) was proposed to predict the minimum exposure time of diethylzinc for ZnO ALD on a porous cylindrical alumina monolith. According to the SCM, the minimum exposure time of the precursor is influenced by volumetric density of adsorption sites, effective diffusion coefficient, precursor concentration in gas phase and size of the porous monolith. Here we modify the SCM in order to consider undesirable adsorption of byproduct molecules. $TiO_2$ ALD was performed on the cylindrical alumina monolith by using titanium tetrachloride ($TiCl_4$) and water. We observed that the byproduct (i.e., HCl) of $TiO_2$ ALD can chemically adsorb on adsorption sites, unlike the behavior of the byproduct (i.e., ethane) of ZnO ALD. Consequently, the minimum exposure time of $TiCl_4$ (~16 min) was significantly much shorter than that (~71 min) of DEZ. The predicted minimum exposure time by the modified SCM well agrees with the observed time. In addition, the modified SCM gives an effective diffusion coefficient of $TiCl_4$ of ${\sim}1.78{\times}10^{-2}\;cm^2/s$ in the porous alumina monolith.

• 한국재료학회지
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• 제24권1호
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• pp.60-65
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• 2014

Fe-based amorphous coatings were fabricated on a soda-lime glass substrate by the vacuum kinetic spray method. The effect of the gas flow rate, which determines particle velocity, on the deposition behavior of the particle and microstructure of the resultant films was investigated. The as-fabricated microstructure of the film was studied by field emission scanning electron microscopy (FE-SEM) and high resolution transmission electron microscopy (HR-TEM). Although the activation energy for transformation from the amorphous phase to crystalline phase was lowered by severe plastic deformation and particle fracturing under a high strain rate, the crystalline phases could not be found in the coating layer. Incompletely fractured and small fragments 100~300 nm in size, which are smaller than initial feedstock material, were found on the coating surface and inside of the coating. Also, some pores and voids occurred between particle-particle interfaces. In the case of brittle Fe-based amorphous alloy, particles fail in fragmentation fracture mode through initiation and propagation of the numerous small cracks rather than shear fracture mode under compressive stress. It could be deduced that amorphous alloy underwent particle fracturing in a vacuum kinetic spray process. Also, it is considered that surface energy caused by the formation of new surfaces and friction energy contributed to the bonding of fragments.

• Carbon letters
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• 제4권1호
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• pp.1-9
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• 2003

Recently, the control of pore-characteristics of nano-porous materials has been studied extensively because of their unique applications, which includes size-selective separation, gas adsorption/storage, heterogeneous catalysis, etc. The most widely adopted techniques for controlling pore characteristics include the utilization of pillar effect by metal oxide and of templates such as zeolites. More recently, coordination polymers constructed by transition metal ions and bridging organic ligands have afforded new types of nano-porous materials, porous metal-organic framework(porous MOF), with high degree and uniformity of porosity. The pore characteristics of these porous MOFs can be designed by controlling the coordination number and geometry of selected metal, e.g transition metal and rare-earth metal, and the size, rigidity, and coordination site of ligand. The synthesis of porous MOF by the assembly of metal ions with di-, tri-, and poly-topic N-bound organic linkers such as 4,4'-bipyridine(BPY) or multidentate linkers such as carboxylates, which allow for the formation of more rigid frameworks due to their ability to aggregate metal ions into M-O-C cluster, have been reported. Other porous MOF from co-ligand system or the ligand with both C-O and C-N type linkage can afford to control the shape and size of pores. Furthermore, for the rigidity and thermal stability of porous MOF, ring-type ligand such as porphyrin derivatives and ligands with ability of secondary bonding such as hydrogen and ionic bonding have been studied.

• 한국세라믹학회지
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• 제50권4호
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• pp.301-307
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• 2013

SiC hollow fiber was fabricated by curing, dissolution and sintering of Al-PCS fiber, which was melt spun the polyaluminocarbosilane. Al-PCS fiber was thermally oxidized and dissolved in toluene to remove the unoxidized area, the core of the cured fiber. The wall thickness ($t_{wall}$) of Al-PCS fiber was monotonically increased with an increasing oxidation curing time. The Al-PCS hollow fiber was heat-treated at the temperature between 1200 and $2000^{\circ}C$ to make a SiC hollow fibers having porous structure on the fiber wall. The pore size of the fiber wall was increased with the sintering temperature due to the decomposition of the amorphous $SiC_xO_y$ matrix and the growth of ${\beta}$-SiC in the matrix. At $1400^{\circ}C$, a nano porous wall with a high specific surface area was obtained. However, nano pores grew with the grain growth after the thermal decomposition of the amorphous matrix. This type of SiC hollow fibers are expected to be used as a substrate for a gas separation membrane.