• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• Current Optics and Photonics
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• v.6 no.3
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• pp.297-303
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• 2022

Multiple fiber Bragg gratings (FBGs) have been proposed and demonstrated for gas-flow measurements in a flow channel, using the temperature-difference method. This sensor consists of two FBG temperature sensors and two coil heaters. Coil heaters are used to heat the FBGs. The flow rate of the gas can be obtained by monitoring the difference in the Bragg-wavelength shifts of the two FBGs, which has features that exclude the effect of temperature fluctuations. In this study, experiments are conducted to measure the wavelength shift based on the flow rate, and to evaluate the gas-flow rate in a gas tube. Experimental results show that the sensor has a linear characteristic over a flow-rate range from 0 to 25 ℓ/min. The measured sensitivity of the sensor is 3.2 pm/(ℓ/min) at a coil current of 120 mA.

• Journal of Navigation and Port Research
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• v.32 no.9
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• pp.717-722
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• 2008

We have proposed and demonstrated an gas-flow sensor using optical fiber bragg grating(FEG). The flow sensor has no electronics and no mechanical parts in its sensing part and the structure is th11s simple and immune to electromagnetic interference(EMI). The FEG sensor was consisted qf the sensing element and a coil heater. The metal coil was used to supply the current to the FEG. While some currents supply to the coil, the refractive index of the FEG under the coil is changed and thus the wavelength shift of fiber optic sensor was induced In this work, the wavelength shift according to flow-rate was experimentally studied and was used to evaluate the gas flow-rate in a gas tube. As a result, it was possible to measure the flow-rate in a linear range from 5 to $20{\ell}/min$ with a resolution of approximately $1{\ell}/min$ at the applied currents of 100 mA and 120 mA. The measured sensitivities were $15.3\;pm/\ell/min$ for 100 mA and $20.2\;pm/\ell/min$ for 120 mA.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.154-161
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• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• Journal of Mechanical Science and Technology
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• v.17 no.1
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• pp.139-145
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• 2003

Diode laser sensor is conducted to measure the gas temperature in the liquid-gas 2-phase counter flow flame. C$\_$10/H/ sub 22/ and city gas were used as liquid fuel and gas fuel, respectively. Two vibrational overtones of H$_2$O were selected and measurements were carried out in the spray flame region stabilized the above gaseous premixed flame. The path-averaged temperature measurement using diode laser absorption method succeeded in the liquid fuel combustion environment regardless of droplets of wide range diameter. The path-averaged temperature measured in the post flame of liquid-gas 2-phase counter flow flame showed qualitative reliable results. The successful demonstration of time series temperature measurement in the liquid-gas 2-phase counter flow flame gave us motivation of trying to establish the effective control system in practical combustion system. These results demonstrated the ability of real-time feedback from combustor inside using the non-intrusive measurement as well as the possibility of application to practical combustion system. Failure case due to influence of spray flame was also discussed.

• Transactions of the Korean Society of Automotive Engineers
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• v.8 no.2
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• pp.41-49
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• 2000

To understand the signal fluctuation of a wide-range oxygen sensor installed at the exhaust confluence point, when a misfiring is triggered in a cylinder, the steady state and the transient response characteristics of the sensor to the flow of the misfired gas were investigated quantitatively. It was recognized that the steady state output voltage of the sensor increased higher when it contacted the misfired gas even though the fueling condition was the same as the normal combustion case and this characteristic enabled the application of the wide-range oxygen sensor for the misfire detection. The transient response was compared at different engine speeds and it was found that the response speed increased with the engine speed. The signal fluctuation was also estimated quantitatively, using these steady state and transient response of the sensor, and the estimated signal showed satisfactory correlation with the measurements.

• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.1067-1070
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• 1999

Anesthesia gas to pour to patients affects the flow and volume as the pressure difference of an oxygen and an anesthesia gas. An anesthesia gas, being injurious and polluting an environment, must control the pressure of an oxygen gas because of being used by closing up tight. But a pressure sensor to use for measuring an oxygen gas appears other pressure as the characteristic and the error difference of elements to use for implementing an system. A medical machine such as an anesthesia ventilator must be accurate because of using for the person's body. So we intend to implement an system for a sensor pressure measurement not to be change regardless of an environment. This papers is the target that a sensor pressrue measurement to be changed in environment is equal to actual sensor pressure measurement. So an implemented system is using analog filter and digital filter to reduce a noise. And we are using auto-zeroing and calibration to correct a sensor pressure which is changed in environment. Through such a process we increase the accuracy and the confidence of an anesthesia ventilator by controlling the flow of an anesthesia gas.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.609-611
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• 1997

Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at $600^{\circ}C$ for 60min. Aluminum oxide improved adhesion of Pt thin films to $SiO_2$ layer without any chemical reactions to Pt thin films under high annealing temperatures. Output voltages increased as gas flow rate and gas conductivity increased because heat loss of heater, which was integrated with a sensing resistor in the flow sensor, increased. Output voltage of flow sensor fabricated on membrane structure was 101mV at $O_2$ flow rate of 2000sccm, heating power of 0.8W while flow sensor fabricated on Si substrate without membrane had output voltage of 78mV under the same conditions.

• Journal of the Semiconductor & Display Technology
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• v.7 no.3
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• Journal of the Korean Institute of Gas
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• v.21 no.5
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• pp.45-55
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• 2017

Release and fire/explosion tests of flammable gas are extremely dangerous. Furthermore, it is difficult to select the site where the experiment can be performed. In these reasons, gas flow analysis(CFD) has been used as much as possible. However, with the opening of the Energy Safety Empirical Research Center in Yeongwol-gun, Gangwon-do in October 2016, it was possible to conduct releases and detection tests of small scale combustible gas as well as large scale / high pressure / ultra low temperature experiments. In this study, LPG leaked after the calibration and placement of the sensor, the sensor detected LPG and the data were visualized as a contour map. And the differences between the actual release(28s, max 3.7[m]) and the analysis were analyzed compared to the FLACS analyzed under the same conditions.