• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.648-653
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• 1996

Hydrogenated amorphous carbon(a-C:H) films are prepared by rf plasma CVD in a $CH_4$ source gas system diluted with Ar of $H_2$. The spectra of emissive and reactive species in the plasma are detected using in stiu optical emission spectroscopy. Inaddition, the relationship between the film properties which can be varied by the deposition parameters and the Raman spectra is studied. In the $CH_4/H_2$ gas system, the emission intensities of CH and $H \tau$ decrease and those of $H \alpha$, $H \beta$, $C_2$ and Ar increase with increasing $H_2$ concentration, The formation of $C_2$ and CH in the $CH_4/Ar/H_2$ gas system is greatly suppressed by hydrogen addition and the excess of hydrogen addition is found to form graphite structure. The $C_2$ formation in the gas phase enhances a-C:H film formation.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.9
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• pp.421-426
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• 2005

A wire-plate discharge system with a slit barrier has been proposed and investigated experimentally by focusing on the discharges on the slit barrier and ozone generation characteristics. This wire-plate discharge system with a slit barrier can generate an intensive corona discharges, and produce corona discharge twice, once from the corona wire electrode and second time from the surface and the slits of the slit dielectric barrier. As a result this propose wire-plate discharge system with the slit barrier can produce greatly increased ozone than without the slit barrier. This type of wire-plate discharge system with the slit barrier could be used for effective ozone generation as a means with retard to the removal of pollutant gas

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.648-652
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• 2004

A comparative investigation of an experimental and a simulation of chemical kinetics for NOx removal from dielectric barrier discharges is presented. Several types of dielectric barrier discharges were implemented depending upon the configuration of electrodes. The simulation was based on an approximate mathematical model for plasma cleaning of waste gas. The influence of non uniform distributions of species due to the production of primary active particles in the streamer channel was taken into account. A comparison of observed experimental to the calculated removal efficiency of NOx showed acceptable agreement.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1854-1856
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• 1996

This study describes the minimum ignition limit for LPG-Ai-r mixtures by switching sparks in radio-frequency limits using RF power supply and IEC type ignition spark apparatus. As a result, the minimum ignition limit voltage is increased in proportional to the rate of increasing of frequency in LPG-Air mixed gas. Especially, increment between 10[kHz] and 30[kHz] is typical. It is considered that ignition is caused by one discharge until 10 [kHz] and, beyond 10[kHz] ignition is caused by more than two discharges. The reason is analysed that energy loss is caused by existing pause interval between discharges.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.5
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• pp.717-720
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• 2012

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.1
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• pp.40-46
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• 2007

A laboratory scale experiment on phenol conversion properties by pulsed corona discharge process was carried out. Effects of operating parameters such as applied voltage, input oxygen, and electrode geometry on phenol conversion and solution properties were investigated. Electrical discharges generated in liquid phase increased the liquid temperature by heat transfer from current flow, decreased the pH value by producing various organic acids from phenol degradation, and increased conductivity by generating charge carriers and organic acids. The oxygen supply enhanced the phenol conversion through the ozone generation dissolution and the production of OH radicals. Series type electrode configuration induced more ozone production than reference type configuration because it produced gas phase discharges as well as liquid phase discharges. Therefore, the higher phenol conversion and TOC(total organic carbon) removal efficiency were obtained in series type configuration.

• Journal of the Speleological Society of Korea
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• no.76
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• pp.37-42
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• 2006

The Dielectric Barrier Discharge (DBD) is a nonequilibrium gas discharge that is generated in the space between two electrodes, which are separated by an insulating dielectric layer. The dielectric layer can be put on either of the two electrodes or be inserted in the space between two electrodes. If an AC or pulse high voltage is applied to the electrodes that is operated at applied frequency from 50Hz to several MHz and applied voltages from a few to a few tens of kilovolts rms, the breakdown can occur in working gas, resulting in large numbers of micro-discharges across the gap, the gas discharge is the so called DBD. Compared with most other means for nonequilibrium discharges, the main advantage of the DBD is that active species for chemical reaction can be produced at low temperature and atmospheric pressure without the vacuum set up, it also presents many unique physical and chemical process including light, heat, sound and electricity. This has led to a number of important applications such as ozone synthesizing, UV lamp house, CO2 lasers, et al. In recent years, due to its potential applications in plasma chemistry, semiconductor etching, pollution control, nanometer material and large area flat plasma display panels, DBD has received intensive attention from many researchers and is becoming a hot topic in the field of non-thermal plasma.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2006.05a
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• pp.278-280
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• 2006

A hybrid discharge type ozonizer, which is superposed silent and surface discharges, has been designed and manufactured to apply for Nitrogen Oxides(NO) gas removal. The ozonizer consists of three electrodes, and is classified three types of ozonizer by changing applied voltage. Investigation was carried out variance with the flow rate of supplied oxygen gas, discharge power and the sorts of superposed discharge type ozonizer. Moreover, $NO(1200[ppm])/N_2$ gas removal investigation was also conducted to apply for environment improvement field. Two kinds of NO gas removal investigations were conducted. It distinguishes the investigations into NO gas reaction method. According to these studies, maximum removal rate of 100[%] in NO gas was obtained, and 8334[ppm] and 3249[mg/h] of maximum ozone concentration and generation were also obtained respectively.

• The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.7 no.2
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• pp.31-35
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• 1993

The radial density distributions of the positive column of strongly modulated low -pressure gas discharges in mercury - rare gas mixtures at 10 tom pressure have been studied theoretically. The current was modulated inusoidally with a modulation depth of 50%. Calculations have shown that the radial profile of the excited atoms is ditferent form 0th Bessel function $J_0$(2.4r/R) and the invertion of the radial distribution of the excited atom can occur at some frequency. The hybrid method of FDM and 2nd order Runge-Kutta meth od is used for solving differenzial equations.

• Applied Science and Convergence Technology
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• v.27 no.1
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• pp.19-22
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• 2018

The ion energy and angle distributions (IEADs) in the DC magnetron sputtering systems are investigated for the variation of gas pressure using particle-in-cell simulation. Even for the condition of collisionless ion sheath at low pressure, it is possible to change the IEAD significantly with the change of gas pressure. The bombarding ions to the target with low energy and large incident angle are observed at low pressure when the sheath voltage drop is low. It is because the electron transport is hindered by the magnetic field at low pressure because of few collisions per electron gyromotion while the ions are not magnetized. Therefore, the space charge effect is the most dominant factor for the determination of IEADs in low-pressure magnetron sputtering discharges.