• 센서학회지
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• 제32권5호
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• pp.290-294
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• 2023

Among various types of harmful gases, hydrogen sulfide is a strong toxic gas that is mainly generated during spillage and wastewater treatment at industrial sites. Hydrogen sulfide can irritate the conjunctiva even at low concentrations of less than 10 ppm, cause coughing, paralysis of smell and respiratory failure at a concentration of 100 ppm, and coma and permanent brain loss at concentrations above 1000 ppm. Therefore, rapid detection of hydrogen sulfide among harmful gases is extremely important for our safety, health, and comfortable living environment. Most hydrogen sulfide gas sensors that have been reported are electrical resistive metal oxide-based semiconductor gas sensors that are easy to manufacture and mass-produce and have the advantage of high sensitivity; however, they have low gas selectivity. In contrast, the electrochemical sensor measures the concentration of hydrogen sulfide using an electrochemical reaction between hydrogen sulfide, an electrode, and an electrolyte. Electrochemical sensors have various advantages, including sensitivity, selectivity, fast response time, and the ability to measure room temperature. However, most electrochemical hydrogen sulfide gas sensors depend on imports. Although domestic technologies and products exist, more research is required on their long-term stability and reliability. Therefore, this study includes the processes from electrode material synthesis to sensor fabrication and characteristic evaluation, and introduces the sensor structure design and material selection to improve the sensitivity and selectivity of the sensor. A sensor case was fabricated using a 3D printer, and an Ag reference electrode, and a Pt counter electrode were deposited and applied to a Polytetrafluoroethylene (PTFE) filter using PVD. The working electrode was also deposited on a PTFE filter using vacuum filtration, and an electrochemical hydrogen sulfide gas sensor capable of measuring concentrations as low as 0.6 ppm was developed.

• 센서학회지
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• 제31권6호
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• pp.397-402
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• 2022

In this short review, we explore the recent progress in metal-based gas-sensing techniques. The strong interaction between the metal films and hydrogen gas can be considered to play a considerably important role in the gas-sensing technique. The physical and chemical reactions in Pd-Pd hydride systems were studied in terms of the phase transition and lattice expansion of the metals. Two types of represented detection, electrical and optical, were introduced and discussed along with their advantages.

• 한국진공학회지
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• 제20권3호
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• pp.195-199
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• 2011

RF 마그네트론 스퍼터와 DC 마그네트론 스퍼터를 병행하여 ITO/Au/ITO, ITO/Cu/ITO, 그리고 ITO/Ni/ITO 박막을 유리기판 위에 증착하였다. 증착 후 진공열처리를 통하여 층간 금속 층이 ITO박막의 메탄올 검출 민감도에 미치는 영향을 분석하였다. 모든 박막센서의 두께는 100 nm로 동일하게 ITO 50 nm/metal 10 nm/ITO 40 nm로 제작되었고 메탄올 농도는 100에서 1,000 ppm까지 달리하였다. ITO/Au/ITO 박막센서가 가장 높은 민감도를 보임으로써 ITO/Au/ITO 다층박막이 기존의 ITO메탄올 센서를 대체할 수 있는 센서임을 확인하였다.

• 한국전기전자재료학회논문지
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• 제30권9호
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• pp.589-595
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• 2017

MOS-FET structured gas sensors were manufactured using MWCNTs for application as NOx gas sensors. As the gas sensors need to be heated to facilitate desorption of the gas molecules, heat dispersion plays a key role in boosting the degree of uniformity of molecular desorption. We report the desorption of gas molecules from the sensor at $150^{\circ}C$ for different sensor electrode gaps (30, 60, and $90{\mu}m$). The COMSOL analysis program was used to verify the process of heat dispersion. For heat analysis, structure of FET gas sensor modeling was proceeded. In addition, a property value of the material was used for two-dimensional modeling. To ascertain the degree of heat dispersion by FEM, the governing equations were presented as partial differential equations. The heat analysis revealed that although a large electrode gap is advantageous for effective gas adsorption, consideration of the heat dispersion gradient indicated that the optimal electrode gap for the sensor is $60{\mu}m$.

• 한국가스학회지
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• 제13권5호
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• pp.15-19
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• 2009

본 연구에서는 반도체식, 전기화학식, 접촉연소식의 가장 많이 사용되는 세 가지 수소센서 타입에 대하여 수소의 갑작스런 노출에 대한 과도응답을 실험적으로 연구하였다. 실험은 1% 농도의 수소-질소 혼합가스를 표준가스로 하여, 혼합가스의 온도 및 상대습도를 $25^{\circ}C{\sim}50^{\circ}C$ 및 50%~100%로 변화시키며 수행되었다. 혼합가스의 온도는 수소센서 출력신호의 크기에 영향을 미치며, 특히 접촉연소식 타입에 더 크게 영향을 미치는 것으로 판명되었다. 그러나, 혼합가스의 상대습도가 센서응답에 미치는 영향은 본 실험 연구에서는 나타나지 않았다. 따라서, 수소의 정확한 농도결정이 중요한 경우에는, 함께 측정된 온도에 기초하여 수소센서의 신호레벨을 보정할 필요가 있다.

• 센서학회지
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• 제25권3호
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• pp.178-183
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• 2016

Semiconductor gas sensors based on metal oxide are widely used in a number of applications, from health and safety to energy efficiency and emission control. Nanomaterials including nanowires, nanorods, and nanoparticles have dominated the research focus in this field owing to their large number of surface sites that facilitate surface reactions. Recently, metal oxide hollow structures using soft templates have been developed owing to their high sensing properties with large-area uniformity. Here, we provide a brief overview of metal oxide hollow structures and their gas-sensing properties from the aspects of template size, morphology, and additives. In addition, a gas-sensing mechanism and perspectives are presented.

• 센서학회지
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• 제17권1호
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• pp.35-40
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• 2008

Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.

• 센서학회지
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• 제16권5호
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• pp.355-360
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• 2007

Highly sensitive thick film ethanol gas sensors based on a nanocrystalline $In_{2}O_{3}$ were fabricated by painting method on alumina substrates. The crystal structure of the $In_{2}O_{3}$ powder was characterised by XRD analysis. The microstructure of the films were characterised using FE-SEM. The experimental results of the ethanol gas sensing characteristics indicated that the undoped $In_{2}O_{3}$ thick film has a high sensitivity. The sensitivity of the film heat treated at $400^{\circ}C$ for 2 hrs. was as high as 32.73 at an operating temperature of $200^{\circ}C$ to 1000 ppm ethanol gas in air.

• 한국세라믹학회지
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• 제55권1호
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• pp.1-20
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• 2018

Semiconducting nanomaterials have attracted considerable interest in recent years due to their high sensitivity, selectivity, and fast response time. In addition, for portable applications, they have low power consumption, lightweight, simple in operation, a low maintenance cost. Furthermore, it is easy to manufacture microelectronic sensor structures with metallic oxide sensitive thin layers. The use of semiconducting metal oxides to develop highly sensitive chemiresistive sensing systems remains an important scientific challenge in the field of gas sensing. According to the sensing mechanisms of gas sensors, the overall sensor conductance is determined by surface reactions and the charge transfer processes between the adsorbed species and the sensing material. The primary goal of the present study is to explore the possibility of using semiconducting mixed metal oxide nanostructure as a potential sensor material for selective gases.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.51-54
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• 2020

To develop gas-distinguishing sensor system, it is highly required to integrate multiple sensors for effective detection of a single targeted gas or mixture of gases. In addition, it is important to collect the reliable data from individual sensors into one integrated measuring device. Collecting the data of toxic gases on the spot should be done without inhalation. We suggest simple wirelessly running system for data collection that guarantees both reliability of data sources and safety. Here, we made a multi-gas measuring instrument(device) combined with Bluetooth module which provides a safe and precise big data accumulation system.