• 센서학회지
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• 제30권4호
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• pp.210-217
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• 2021

Gas sensors based on semiconducting metal oxides have attracted considerable attention for various applications owing to their facile, cheap, and small-scale manufacturing processes. Hematite (α-Fe₂O₃) is widely considered as a promising candidate for a gas-sensing material owing to not only its abundance in the earth's crust and low price but also its chemical stability and suitable bandgap energy. However, only a few studies have been performed in this direction because of the low gas response and sluggish response of hematite-based gas sensors. Nanostructures present a representative solution to both overcome these disadvantages and exploit the desirable features to produce high-performance gas sensors. However, several challenges remain for adopting gas sensors based on metal oxide nanostructures, such as improving cost efficiency and facilitating mass production. This review summarizes the recent studies on gas sensors based on hematite nanostructures. It also provides useful insights into various strategies for enhancing the gas-sensing properties of gas sensors based on hematite nanostructures.

• 센서학회지
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• 제29권6호
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• pp.382-387
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• 2020

Hydrogen (H₂) is considered as a new clean energy resource for replacing petroleum because it produces only H₂O after the combustion process. However, owing to its explosive nature, it is extremely important to detect H₂ gas in the ambient atmosphere. This has triggered the development of H₂ gas sensors. 2-dimensional (2D) graphene has emerged as one of the most promising candidates for chemical sensors in various industries. In particular, graphene exhibits outstanding potential in chemoresistive gas sensors for the detection of diverse harmful gases and the control of indoor air quality. Graphene-based chemoresistive gas sensors have attracted tremendous attention owing to their promising properties such as room temperature operation, effective gas adsorption, and high flexibility and transparency. Pristine graphene exhibits good sensitivity to NO₂ gas at room temperature and relatively low sensitivity to H₂ gas. Thus, research to control the selectivity of graphene gas sensors and improve the sensitivity to H₂ gas has been performed. Noble metal decoration and metal oxide decoration on the surface of graphene are the most favored approaches for effectively controlling the selectivity of graphene gas sensors. Herein, we introduce several strategies that enhance the sensitivity of graphene gas sensors to H₂ gas.

• 센서학회지
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• 제33권1호
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• pp.48-55
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• 2024

Metal-oxide-based semiconductor gas sensors are widely used because of their advantages, such as high response and simple sensing mechanism. Recently, with the rapid progress in sensor networks, computing power, and microsystem technology, sensor applications are expanding to various fields, such as food quality control, environmental monitoring, healthcare, and artificial olfaction. Therefore, the development of highly selective gas sensors is crucial for practical applications. This article reviews the developments in novel sensor design consisting of sensing films and physical and chemical filters for highly selective gas sensing. Unlike conventional sensors, the sensor structures with filters can separate the sensing and catalytic reactions into independent processes, enabling selective and sensitive gas sensing. The main objectives of this study are directed at introducing the role of various filters in gas-sensing reactions and promising sensor applications. The highly selective gas sensors combined with a functional filter can open new pathways toward the advancement of high-performance gas sensors and electronic noses.

• 센서학회지
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• 제33권5호
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• pp.359-365
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• 2024

Chemiresistive semiconductor metal oxide (SMO) gas sensors detect gases based on resistance changes caused by gas adsorption/desorption on SMOs. These sensors have witnessed significant advancements with the development of microelectromechanical systems (MEMS) and nanotechnology. MEMS technology has facilitated mass production, miniaturization, and uniformity across sensors. Whereas, nanotechnology has contributed to the development of high-sensitivity gas sensing materials with large surface areas, catalytic coatings, and hybrid SMO junctions. However, SMOs require activation via external energy to overcome their bandgap energy and generate hot electron carriers, which are essential for high sensitivity and fast response/recovery times. Traditionally, embedded heaters have been used for this purpose; however, micro-and nano-heaters are plagued by high power consumption and low durability, which limit their use in mobile applications. Consequently, photoactivated gas sensing using light sources (e.g., lamps and LEDs) has garnered attention as an alternative approach. This study reviewed the progress from early lamp and LED-based research to recent studies on monolithic micro-LED (µLED) based gas sensors. µLED gas sensors facilitate room-temperature operation and ultra-low power consumption within the microwatt range. Consequently, they are highly suitable for integration into consumer electronics, smart farms, smart factories, and mobile gas sensors.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.65-65
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• 2011

We report the application of conducting metal oxide electrodes for semiconducting metal oxide gas sensors. Pt interdigitated electrodes have been commonly used for metal oxide gas sensor because of the low resistivity, excellent thermal and chemical stability of Pt. However, the high cost of Pt is an obstacle for the wide use of metal oxide gas sensors compared with its counterpart electrochemical gas sensors. Meanwhile, relatively low-cost conducting metal oxides are widely being used for light-emitting diodes, flat panel displays, solar cell and etc. In this work, we have fabricated $WO_3$ and $SnO_2$ thin film gas sensors using interdigitated electrodes of conducting metal oxides. Thin film gas sensors based on conducting metal oxides exhibited superior gas sensing properties than those using Pt interdigitated electrodes. The result was attributed to the low contact resistance between the conducting metal oxide and the sensing material. Consequently, we demonstrated the feasibility of conducting metal oxide interdigitated electrodes for novel gas sensors.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1631-1636
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• 1989

A space charge model for semiconductor reduced gas sensors has been roposed and applied to gas sensing mechanism. SnO2-x and SnO2-x/Pt thin film were deposited by vacuum evaporating method. And Hall effect and gas sensitivity characteristics of these sensors were measured. From the space charge model and carrier concentration, the number of the adsorbed gas atom on the solid surface was calculated quantitatively. The gas sensing model was compared with CO gas sensitivities of the fabricated thin film gas sensors.

• 센서학회지
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• 제29권1호
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• pp.1-6
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• 2020

Gas sensors that operate at room temperature have been extensively studied because of sensor stability, lift time, and power consumption. To design effective room-temperature gas sensors, various nanostructures, such as nanoparticles, nanotubes, nanodomes, or nanofibers, are utilized because of their large-surface-to-volume ratio and unique surface properties. In addition, two-dimensional materials, including MoS₂, SnS₂, WS₂, and MoSe, and ultraviolet-activated methods have been studied to develop ideal room-temperature gas sensors. Herein, a brief overview of state-of-the-art research on room-temperature gas sensors and their sensing properties, including nanostructured materials, two-dimensional materials, the ultraviolet-activated method, and ionic-activated gas sensors, is provided.

• 센서학회지
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• 제31권4호
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• pp.187-193
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• 2022

The accurate detection of environmental and biomarker gas species has attracted increasing attention due to their broad applications, such as air quality monitoring, disease diagnosis, and explosive chemicals detection. To accurately detect target gas species using chemiresistive gas sensors, using nanocatalysts on semiconducting metal oxides (SMOs) is considered the most promising approach. This review summarizes recent studies on methods for nanocatalysts functionalization on SMOs to achieve the highly selective gas sensors. To this end, we discuss various nanocatalyst decorated metal oxide-based chemiresistive gas sensors and provide an insight to construct highly accurate gas sensors.

• 한국전기전자재료학회논문지
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• 제19권5호
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• pp.405-410
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• 2006

We fabricated gas sensors using carbon nanotubes (CNTs) as electron emitters for the purpose of detecting inert gases. By using the silicon-glass anodic bonding and glass patterning technologies with the typical Si process, we improved the compactness of the sensors and the reliability in process. The proposed sensor, based on, an electrical discharge theory known as Paschen's law in principle, works by figuring the variation of the discharge current depending on gas concentration. In the experiment, the initial breakdown characteristics were measured for air and Ar as a function of gas pressure. As the result, even though it should be realized that there are many other factors which have an effect on the breakdown of a gap, the sensors led to similar result as predicted by Paschen's law, and they showed a possibility as gas sensors which enable to detect the gas density ranged to the vacuum pressure from 1 to $10^{-3}$ Torr.

• 센서학회지
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• 제18권3호
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• pp.217-221
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• 2009

Different methods of material engineering, used for improvement of solid state gas sensors parameters are reviewed in this report. The wide possibilities of material engineering in optimization of gas sensing properties were demonstrated on the example of $SnO_2,\;TiO_2\;and\;In_2O_3$-based sensors.