• Proceedings of the Korean Ceranic Society Conference
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• 2000.10a
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• pp.119.1-119
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• 2000

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.27 no.6
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• pp.95-99
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• 2013

Furnace is currently the most important doping process using POCl3 in solar cell. However furnace need an expensive equipment cost and it has to purge a poisonous gas. Moreover, furnace typically difficult appling for selective emitters. In this study, we developed a new atmospheric pressure plasma source, in this procedure, we research the atmospheric pressure plasma doping that dopant is phosphoric acid($H_3PO_4$). Metal tube injected Ar gas was inputted 5 kV of a low frequency(scores of kHz) induced inverter, so plasma discharged at metal tube. We used the P type silicon wafer of solar cell. We regulated phosphoric acid($H_3PO_4$) concentration on 10% and plasma treatment time is 90 s, 150 s, we experiment that plasma current is 70 mA. We check the doping depth that 287 nm at 90 s and 621 nm at 150 s. We analysis and measurement the doping profile by using SIMS(Secondary Ion Mass Spectroscopy). We calculate and grasp the sheet resistance using conventional sheet resistance formula, so there are 240 Ohm/sq at 90 s and 212 Ohm/sq at 150 s. We analysis oxygen and nitrogen profile of concentration compared with furnace to check the doped defect of atmosphere.

• Journal of Digital Convergence
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• v.12 no.4
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• pp.277-283
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• 2014

Fuzzy modeling is generally using the given data and the fuzzy rules are established by the input variables and the space division by selecting the input variable and dividing the input space for each input variables. The premise part of the fuzzy rule is presented by selection of the input variables, the number of space division and membership functions and in this paper the consequent part of the fuzzy rule is identified by polynomial functions in the form of linear inference and modified quadratic. Parameter identification in the premise part devides input space Min-Max method using the minimum and maximum values of input data set and C-Means clustering algorithm forming input data into the hard clusters. The identification of the consequence parameters, namely polynomial coefficients, of each rule are carried out by the standard least square method. In this paper, membership function of the premise part is dividing input space by using trapezoid-type membership function and by using gas furnace process which is widely used in nonlinear process we evaluate the performance.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.126-129
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• 2007

The particle formation using pyrolysis has many advantages over other particle manufacturing techniques. The particles by pyrolysis have relatively uniform size and chemical composition. Also, we can easily produce high purity particles. Thus, we studied the formation of silicon particles by pyrolysis of 50% $SiH_4$ gas diluted in Ar gas. A pyrolysis furnace was used for the thermal decomposition of $SiH_4$ gas at $800^{\circ}C$ and atmospheric pressure. The aerosol flow from furnace is separated into two ways. The one is to the Scanning Mobility Particle Sizer (SMPS) for particle size distribution measurement and the other is to the particle deposition system. The produced silicon particles are deposited on the wafer in the deposition chamber. SEM measurement was used to compare the particle size distribution results from the SMPS. Depending on the experimental conditions, particles of high concentration in the $30\sim80$ nm size range were generated.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.213-213
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• 2000

Direct laser vaporization of transition-metal(Co, Ni)/graphite composite pellet produced single wall carbon naotubes(SWNT) in the condensing vapor in a heated flow cylinder-type tube furnace, Transition metal/graphite composite pellet target was made by mixing graphite, Co, and Ni in 98:1:1 atomic weight ratios, pressing the mixed powder, and curing it. The target was placed in a tube furnace maintained at 1200$^{\circ}C$ and Ar inert collision gas continuously flowed into the tube. The 2nd harmonic, 532nm wavelength light from Nd-YAG laser was used to vaporize the tube. The carbon nanotubes produced by the laser vaporization were accumulated on quartz tube wall. The raw carbon nanotube materials were purified with surfactants(Triton X-100) in a ultrasonicator. These carbon nanotubes were analyzed using SEM, XRD, and Raman spectroscopic method. The carbon nanotube growth on the Ni-patterned Si substrate was investigated by the CVD process. Transition-metal, Ni and CH4 gas were used as a catalyst and a reactant gas, respectively. The structure and the phonon frequencies of the carbon nanotubes formed on the patterned Si substrate were measured by SEM and Raman spectrometer.

• 한국연소학회:학술대회논문집
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• 2006.10a
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• pp.293-298
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• 2006

There are many researches in progress on co-firing of coal and biomass to reduce carbon dioxide produced from the coal consumption. This study carried out 200 Kg/h combustion test furnace by mixing coal with timber. Coal was mixed with domestic and imported-wood around 10% to 20% based on input energy. For the mixed fuel, combustion temperature, unburned carbon and the composition of flue gas were analyzed. In addition, the tendency of slagging and fouling was examined using a probe. According to the result of the experiment, combustion temperature was depended on the kind of wood and mixing ratio. The unburned carbon loss was higher with increase of wood biomass mixing ratio, as a result, the total heat loss of furnace was slightly increased. The emission of NOx and SOx were decreased by $3{\sim}20%$ and $21{\sim}60%$ respectively. There are no difference of slagging and fouling tendency between biomass co-firing and coal burning only.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.91-96
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• 2001

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size $SiO_{2}$ particles are synthesized by the injection of TEOS vapor, ions and reaction gas in furnace. Ions were generated by Corona discharge electrode and these ions charge $SiO_{2}$ particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions, it's morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 kV to 5.0 kV, it is observed that the mean diameter of $SiO_{2}$ particle decreases from 94 nm to 42 nm.

• Proceedings of the Korea Concrete Institute Conference
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• 2006.05b
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• pp.569-572
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• 2006

This study was performed to investigate the characteristics of carbonation for latex modified concrete with fly ash and blast furnace slag. The experimental variables consisted of ground granulated blast-furnace slag contents (0%, 30%, 50%), fly ash contents (0, 30%) latex contents (0, 5, 10, 15%). Two different methods of carbonation test such as $CO_2$ gas and 5% sulphuric acid digestion resistance test were varied in this study.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.5
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• pp.710-715
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• 2002

The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the injection of TEOS vapor, irons and reaction gas in a furnace. Ions are generated by corona discharge and these ions charge SiO$_2$particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions. Their morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 to 5.0 kV, it is observed that the melon diameter of SiO$_2$particle decreases from 94 nm to 42 nm.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.6
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• pp.111-117
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• 2008

An automation process of filter unit is presented for the application of the assembling procedure and dry furnace work. By that automation procedure, it is expected to enhance working environment such as reducing laboring load, harmful gas, and burning scald. Furthermore, this automation process also minimizes via standardization of manufacturing process so that it may increase productivity and reliability. An automation process of filter unit is presented for the application of the assembling procedure and dry furnace work. Filter automation process also gives a good quality and productivity by simplifying to only one line from the complicated process such as filter cutting$\rightarrow$ adhering$\rightarrow$fabricating in a very small space. It is found that a new conceptual design of dry furnace shows the better quality like uniform heat distribution compared to the conventional design. It is also found that the present design gives a better working environment by adding cooling system.