• Title/Summary/Keyword: Gas Force

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Effects of the buffer layer annealing and post annealing temperature on the structural and optical properties of ZnO nanorods grown by a hydrothermal synthesis

  • Sin, Chang-Mi;Ryu, Hyeok-Hyeon;Lee, Jae-Yeop;Heo, Ju-Hoe;Park, Ju-Hyeon;Lee, Tae-Min;Choe, Sin-Ho;Fei, Han Qi
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.24.1-24.1
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    • 2009
  • The zinc oxide (ZnO) material as the II-VI compound semiconductor is useful in various fields of device applications such as light-emitting diodes (LEDs), solar cells and gas sensors due to its wide direct band gap of 3.37eV and high exciton binding energy of 60meV at room temperature. In this study, the ZnO nanorods were deposited onto homogenous buffer layer/Si(100) substrates by a hydrothermal synthesis. The Effects of the buffer layer annealing and post annealing temperature on the structural and optical properties of ZnO nanorods grown by a hydrothermal synthesis were investigated. For the buffer layer annealing case, the annealed buffer layer surface became rougher with increasing of annealing temperature up to $750^{\circ}C$, while it was smoothed with more increasing of annealing temperature due to the evaporation of buffer layer. It was found that the roughest surface of buffer layer improved the structural and optical properties of ZnO nanorods. For the post annealing case, the hydrothermally grown ZnO nanorods were annealed with various temperatures ranging from 450 to $900^{\circ}C$. Similarly in the buffer layer annealing case, the post annealing enhanced the properties of ZnO nanorods with increasing of annealing temperature up to $750^{\circ}C$. However, it was degraded with further increasing of annealing temperature due to the violent movement of atoms and evaporation. Finally, the buffer layer annealing and post annealing treatment could efficiently improve the properties of hydrothermally grown ZnO nanorods. The morphology and structural properties of ZnO nanorods grown by the hydrothermal synthesis were measured by atomic force microscopy (AFM), field emission scanning electron microscopy (SEM), and x-ray diffraction (XRD). The optical properties were also analyzed by photoluminescence (PL) measurement.

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Fabrication and Magnetic Properties of Ultrathin Co-based Amorphous Alloy (코발트계 극박형 비정질합금의 형성과 자기적 성질)

  • 노태환
    • Journal of the Korean Magnetics Society
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    • v.8 no.5
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    • pp.255-260
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    • 1998
  • Fabrication condition and magnetic properties of ultrathin Co-based amorphous alloy have been investigated. When the ejection gas pressure was lower than 0.05 kgf/$\textrm{cm}^2$ at the roll speed of 55 m/s, ultrathin ribbons with the thickness less than 10 ${\mu}{\textrm}{m}$ were successfully obtained. The ribbon thickness decreased linearly with the decrease in ejection pressure. Moreover the significant decrease in ribbon width was accompanied with the decrease of thickness in the range of ejection pressure to form an ultrathin ribbon. This behavior was attributed to the decrease of effective ejection pressure in the both end-sides of rectangular nozzle due to the larger friction between molten metal and nozzle wall. The effective permeability at low frequency (1 kHz) decreased largely with the decrease in ribbon thickness, while the coercive force increased with the thickness decrease. It was considered that these behaviors were due to the enhancement of surface effect leading to the suppression of wall motion. However effective permeability at high frequency (1 MHz) increased with the decrease in ribbon thickness, and this was ascribed to the easier magnetization rotation owing to the reduction of eddy current.

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Ion Plating에 의한 알루미늄 산화막 형성

  • 김종민;권봉준;황도진;김명원
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.154-154
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    • 1999
  • 금속산화막은 전자부품 및 광학적 응용에 널리 사용되고 있다. 특히 알루미늄의 산화막은 유전체의 재료로 커패시터에 많이 사용되고 있다. 이러한 알루미늄 산화막을 plasma를 이용한 ion plating에 의해 형성하였다.Activated Reactive Evaporation은 화합물의 증착율을 높이는데 좋은 증착법이다. 이러한 증착법에는 reactive ion plating와 ion-assisted deposition 그리고 ion beam sputtering 등이 있다. 본 연구에서는 알루미늄 산화막을 증착시키기 위해 plasma를 이용한 electron-beam법을 사용하였다. Turbo molecular pump로 챔버 내의 진공을 약 10-7torr까지 낸린 후 5$\times$10-5torr까지 O2와 Ar을 주입시켰다. 각 기체의 분압은 RGA(residual gas analyzer)로 조사하여 일정하게 유지시켰다. plasma를 발생시키기 위해 filament에서 열전자를 방출시키고 1kV 정도의 electrode에 의해 가속시켜 이들 기체들과 반응시켜 plasma를 발생시켰다. 금속 알루미늄을 5kV정도의 고전압과 90mA의 전류로 electron beam에 의해 증발시켰다. 기판의 흡착율을 높ㅇ기 위해 기판에 500V로 bias 전압을 걸어 주었다. 증발된 금속 알루미늄 증기들이 plasmaso의 산소 이온들과 활성 반응을 이루어 알루미늄 기판 위에 Al2O3막을 형성하였다. 알루미늄 산화막을 분석하기 위해 XPS(X-ray Photoelectron Spectroscopy)로 화학적 조성을 조사하였는데, 알루미늄의 2p전자의 binding energy가 76.5eV로 측정되었다. 이는 대부분 증착된 알루미늄이 산소 이온과 반응하여 Al2O3로 형성된 것이다. SEM(Scanning electron Microscopy)과 AFM(Atomim Force microscopy)으로 증착박 표면의 topology와 roughness를 관찰하였다. grain의 크기는 10nm에서 150nm이었고 증착막의 roughness는 4.2nm이었다. 그리고 이 산화막에 전극을 형성하여 유전 상수와 손실률 등을 측정하였다. 이와 같이 plasma를 이용한 3-beam에 의한 증착은 금속의 산화막을 얻는데 유용한 기술로 광학 재료 및 유전 재료의 개발 및 연구에 많이 사용될 것으로 기대된다.

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Dry Etching of ITO Thin Films by the Addition of Gases in Cl2/BCl3 Inductivity Coupled Plasma

  • Joo, Young-Hee;Woo, Jong-Chang;Choi, Kyung-Rok;Kim, Han-Soo;Wi, Jae-Hyung;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.3
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    • pp.157-161
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    • 2012
  • In this study, we investigated the etching characteristics of ITO thin films and the effects of inert gases added to $Cl_2/BCl_3$ inductivity coupled plasma. The maximum etch rate of ITO thin film was 130.0 nm/min upon the addition of Ar (6 sccm) to the $Cl_2/BCl_3$ (4:16 sccm) plasma, which was higher than that with He or $N_2$ added to the plasma. The ion bombardment by $Ar^+$ sputtering was due to the relatively low volatility of the by-products formed in the $Cl_2/BCl_3$ (4:16 sccm) plasma. The surface of the etched ITO thin film was characterized by x-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). From the XPS results, it is concluded that the proper addition of Ar and He to the $Cl_2/BCl_3$ plasma removes carbon and by-products from the surface of the etched ITO thin film.

The Role of Na-K Pump in the Modulation of Vascular Tone in the Rabbit (혈관 긴장도 조절에 미치는 Na-K Pump에 관한 연구)

  • Kim, Ki-Whan;Kim, Jun
    • The Korean Journal of Physiology
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    • v.16 no.1
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    • pp.1-11
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    • 1982
  • Force development of smooth muscle cells is directly regulated by the concentration of free calcium ions in the sarcoplasm, and the sarcoplasmic concentration of calcium ion can be modulated by electrogenic Na-K pump. The role of Na-K pump on vascular tone was studied in isolated rabbit renal artery. Helical strips of arterial muscle were prepared from left renal arteries. All experiments were performed in $HCO_3^--buffered$ Tyrode solution which was aerated with $3%CO_2-97%\;O_2$ mixed gas and kept at $35^{\circ}C$. In some experiments, rabbit was injected intraperitoneally $18{\sim}24$ hours prior to the experiments, with a large dose(5 mg/kg body wt) of reserpine, in order to eliminate the catecholamines present in intrinsic adrenergic nerve terminate. Treatment used in this experiment that inhibits Na-K pump was the exposure of strips to K-free Tyrode solution. Contractile response to K free Tyrode solution developed slowly and the time required for maximum contracture was $20{\sim}30$ minutes. This K-free contracture was rapidly relaxed by the addition of potassium to the bathing solution. No K-free contracture occurred in a Ca-free Tyrode solution. But contraction developed rapidly when calcium ion was added to the bathing solution after 30 minute exposure of the strip to Ca-free Tyrode solution. This contracture was completely inhibited by Ca-antagonist, verapamil. The K-free contracture was abolished by ${\alpha}-adrenergic$ blocker, phentolamine, as well as by the catecholamine depletion from adrenergic nerve terminals. Even in reserpinized strip, the exogenous norepinephrine-induced contraction in K-free Tyrode solution was rapidly suppressed by the addition of potassium ion. The results of this experiment suggest that K free contracture develops by norepinephrine release from adrenergic nerve terminals, while the relaxation of K-free contracture is induced by the activation of electrogenic Na-K pump.

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A Study on the Structure Analysis Optimization of Die Cam Drive Considering the Thin Plate Hardening (박판판재 경화를 고려한 다이 캠 드라이브의 구조해석 최적화에 대한연구)

  • Lee, Jong-Bae;Kim, Seon-Sam;Woo, Chang-Ki
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.9
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    • pp.5769-5777
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    • 2015
  • According to the forming or bending deformation in the press die, the thin plate occurs a work-hardening, the sheet hardening and cam unit's deformation causes incomplete forming during the cam molding process by the reacting spring forces. This study treated the input parameters of the stress and strain as given properties and also used Cam forming pressure considering the sheet hardening in the forming process of the aluminum sheet. The Hyperstudy are operated be linked with the Abaqus of the finite element analysis tool and the shape of Cam were carried out with non-linear shape optimization analysis. As a result removing the deformation of plate, the cam shape were optimized under conditions reduced deformation, having a minimum stress range and the minimum deformation. Therefore, a stress-strain curve and a normal distribution of stress-thickness can be obtained and optimization could be obtained for the shape of the stress and strain on the die plate hardened cam considering the thickness and reaction force of gas spring as iteration process.

Sensitivity improvement of $CeO_2$ oxygen sensor by betterment of surface characteristics through chemical mechanical polishing process (CMP 공정을 통한 표면 특성 개선에 의한 $CeO_2$ 산소 센서 감도 향상 연구)

  • Jung, Pan-Gum;Jun, Young-Kil;Ko, Pil-Ju;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.65-65
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    • 2007
  • Microstructure and surface roughness of the sensing materials should be improved to use them in advanced sensor applications because the uneven surface roughness degrades the light reflection, pattern resolution, and devices performance. Chemical mechanical polishing (CMP) processing was selected for improving the surface roughness of $CeO_2$ which is one of the well known materials for the oxygen gas sensors. Surface roughness and removal rate of spin coated $CeO_2$ thin films were examined with a change of CMP process parameters such as down force and table speed. The optimized process condition, reflected by the surface roughness with the hillock-free surface as well as the excellent removal rate with the good uniformity, was obtained. The effects of the improved surface roughness on the sensing property of $CeO_2$ thin films were also confirmed. The improved sensitivity of $CeO_2$ thin films for oxygen sensors were obtained after CMP process by the improved surface characteristics. Therefore, we conclude that sensing property of $CeO_2$ thin film is strongly dependent on the surface roughness of $CeO_2$ thin films by using CMP process.

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Optimized Decomposition of Ammonia Borane for Controlled Synthesis of Hexagonal Boron Nitride Using Chemical Vapor Deposition

  • Han, Jaehyu;Kwon, Heemin;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.285-285
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    • 2013
  • Recently, hexagonal boron nitride (h-BN), which is III-V compound of boron and nitride by strong covalent sp2 bonds has gained great interests as a 2 dimensional insulating material since it has honeycomb structure with like graphene with very small lattice mismatch (1.7%). Unlike graphene that is semi-metallic, h-BN has large band gap up to 6 eV while providing outstanding properties such as high thermal conductivity, mechanical strength, and good chemical stability. Because of these excellent properties, hBN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Low pressure and atmospheric pressure chemical vapor deposition (LPCVD and APCVD) methods have been investigated to synthesize h-BN by using ammonia borane as a precursor. Ammonia borane decomposes to polyiminoborane (BHNH), hydrogen, and borazine. The produced borazine gas is a key material that is a used for the synthesis of h-BN, therefore controlling the condition of decomposed products from ammonia borane is very important. In this paper, we optimize the decomposition of ammonia borane by investigating temperature, amount of precursor, and other parameters to fabricate high quality monolayer h-BN. Synthesized h-BN is characterized by Raman spectroscopy and its absorbance is measured with UV spectrophotometer. Topological variations of the samples are analyzed by atomic force microscopy. Scanning electron microscopy and Scanning transmission Electron microscopy are used for imaging and analysis of structures and surface morphologies.

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Development Test of Alcohol Burner for Turbopump Real-propellant Test Facility (터보펌프 실매질 시험설비를 위한 알코올버너 개발시험)

  • Kim, Jin-Sun;Han, Yeoung-Min;Ko, Youngsung
    • Journal of the Korean Society of Propulsion Engineers
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    • v.18 no.5
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    • pp.79-86
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    • 2014
  • A turbopump real-propellant test facility(TPTF) is to verify the performance of a turbopump unit(TPU) based on liquid oxygen and kerosene. One of the most important sub-facilities is a hot-gas generation system which makes the driving force of the TPU with an alcohol burner. The alcohol burner generates the required flow rates and temperature at the facility using high pressure air and ethanol. In the study, the verification tests of the alcohol burner which was manufactured entirely with domestic technology were performed and fabrication technique and operation skill for the burner could be obtained ahead of the construction of the facility. Two burners will be operated simultaneously for the real-propellant test of 75tf class turbopump and satisfy the power requirement from the turbine of the TPU.

Performance Evaluation of Nano-Lubricants at Thrust Slide-Bearing of Scroll Compressors (나노 윤활유를 이용한 스크롤 압축기 스러스트 베어링의 윤활특성 평가)

  • Cho, Sang-Won;Kim, Hong-Seok;Ahn, Young-Chull;Lee, Jung-Eun;Lee, Jae-Keun;Lee, Hyeong-Kook;Lee, Byeong-Chul;Kim, Dong-Han;Park, Jin-Sung
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.1219-1224
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    • 2006
  • This paper presents the friction and anti-wear characteristics of nano-oil with n mixture of a refrigerant oil and carbon nano-particles in the thrust slide-bearing of scroll compressors. Frictional loss in the thrust slide-bearing occupies a large part of total mechanical loss in scroll compressors. The characteristics of friction and anti-wear Lising nano-oil is evaluated using the thrust bearing tester for measuring friction surface temperature and the coefficient of friction at the thrust slide-bearing as a function of normal loads up to 4,000 N and orbiting speed up to 3,200 rpm. It is found that the coefficient of friction increases with decreasing orbiting speed and normal force. The friction coefficient of carbon nano-oil is 0.015, while that of pure oil is 0.023 under the conditions of refrigerant gas R-22 at the pressure of 5 bars. It is believed that carbon nano-particles can be coated on the friction surfaces and the interaction of nano-particles between surfaces can be improved the lubrication in the friction surfaces. Carbon nano-oilenhances the characteristics of the anti-wear and friction at the thrust slide-bearing of scroll compressors.

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