• Proceedings of the IEEK Conference
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• 2001.06b
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• pp.25-28
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• 2001

In this paper, we have investigated the effects of gas flow rate, rf power, process pressure and Ar addition on reactive ion etching of InP, InGaAs and InAlAs using Sic14 and Cl$_2$ gases. The etch rates were measured by using a surface profiler. The etched profiles, sidewall roughness, and surface morphology were observed by scanning electron microscopy and by atomic force microscopy. The selective etching of InGaAs to InP and InAlAs was studied by varying the etching parameters. It was found that Cl$_2$ gas is more efficient for the selective etching of InGaAs to InAlAs than SiCl$_4$ gas. The etch selectivity of InGaAs to InAlAs is strongly dependent on the rf power and the process pressure.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.553-553
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• 2009

LFG는 약 4,500kcal/$m^3$의 높은 발열량을 가지는 에너지원으로 활용이 가능한 동시에 GWP가 21인 $CH_4$를 제거함으로써 탄소배출권(CERs) 확보를 통해 CDM 또는 ET 시장에서 유리한 위치를 선점할 수 있다. LFG의 활용기술에는 발전과 중질가스 및 고질가스 형태의 연료로 생산하는 방식이 있다. 하지만 기존의 기술은 LFG의 발생량이 일정규모 이상인 매립지에서 경제성을 가지기 때문에 국내에서는 14곳의 대형 매립지에서만 에너지원으로 활용하고 있다. 그 외 중소규모 매립지에서는 대기중으로 방출하거나 소각하여 처리하므로 가용한 에너지원이 버려지고 있을 뿐만 아니라 지구온난화에 영향을 미친다. 본 연구에서는 중소규모 매립지에서 발생하는 LFG를 경제성을 가지는 에너지원으로 활용하기 위하여 하이드레이트화를 이용한 $CH_4$ 분리, 정제, 수송 연구를 진행하였으며, 이러한 연구의 일환으로 pure $CH_4$를 대상으로 하이드레이트 형성 시 구동력(driving force)에 따른 induction time, growth rate, gas consumption 측정을 통하여 LFG를 이용한 가스 하이드레이트 생산을 위한 운전조건 선정을 위한 기본 자료로 사용하고자 한다.

• Kyungpook Mathematical Journal
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• v.47 no.4
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• pp.455-471
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• 2007

The magnetohydrodynamic axisymmetric instability of a streaming gas jet surrounded by bounded fluid with non-uniform field has been developed. The problem is formulated, solved and the boundary conditions are applied across the interfaces. The eigenvalue relation is derived and discussed analytically and the results are confirmed numerically. Some reported works are recovered as limiting cases from the present general results. The streaming has a destabilizing effect for all short and long wavelengths. The capillary force is stabilizing for short wavelengths but it is destabilizing for long wavelengths. The axial magnetic fields interior the gas and fluid media are stabilizing. The transverse field is destabilizing for all wavelengths. The radii ratio of the gas and fluid cylinders plays an important role for stabilizing the model and made it more realistic one than the full liquid jet or/and the ordinary hollow jet. The numerical analysis clarify the stable and unstable domains based on different values of the various parameters of the problem.

• Proceedings of the KIEE Conference
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• 1999.07a
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• pp.372-375
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• 1999

This paper presents an arc(hot-gas flow field) analysis method in GCB. This method includes the Lorentz's force due to magnetic field, turbulent viscous effect and radiation heat transfer which are indispensable to the analysis of hot-gas flow. To verify the applicability of the Proposed method, steady state hot-Eas flow analysis within a simplified interrupter has been carried out. Inlet boundary pressure values were assumed to be 9.0atm and 12.0atm. For each inlet boundary condition, three cases of hot-gas flow field analyses were performed according to the values of arc currents which were assumed to be D.C 0.6kA. 1.0kA and 2.0kA. The results revealed that the arc radius at nozzle throat has been concentrated by increasing the pressure of nozzle upstream and that the maximum temperature of arc core has been decreased along to nozzle exit and the high temperature lesion come to be wide in nozzle downstream. From these results, it is confirmed that the proposed method will be applicable to predict the large current interruption capability of GCB.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.16 no.5
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• pp.40-46
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• 2017

A plasma gas control apparatus for semiconductor plasma etching processes securely holds a cathode for forming a plasma, confines the plasma during the plasma etching process, and discharges gas after etching. It is a key part of the etching process. With the advancement of semiconductor technology, there is increasing interest in parts for semiconductor manufacturing that directly affect wafers. Accordingly, in order to replace the plasma gas control device with a CVD-SiC material superior in mechanical properties to existing SiCs (Sintered-SiC, RB-SiC), a study on the grinding characteristics of CVD-SiC was carried out. It is confirmed that the optimal grinding condition was obtained when the result table feed rate was 2 m/min and the infeed depth was $5{\mu}m$.

• Journal of the Korean institute of surface engineering
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• v.31 no.3
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• pp.171-176
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• 1998

Transparent conducting ITO (Indium Tin Oxide) thin films were prepared on soda lime glass by reactive dc magnetron sputtering mothod. The maaterial properties were measured by the X-ray diffraction meter (XRD) and atomic force microscopy (AFM) scanning. As a resuIts, the (400) park for $O_2 gas rate 2% grows uniquely as the preferred orientaon. However, the (400) peak exists at $O_2 gas rate 5% as well as the (222) peak appears abruptly as the main orietation. Both <100> and <111> grain alignments are consisted simultaneously in the XRE pattern of ITO thin films. The electrical charcteristics were esimated by the electrical resistivity, optical transmission, and Hall mobillty, ect. The resistivity of ITO thin film deposited at 4cm from the substrate center is increased from $2\times10^-4$ to $8\times10^-4\Omega$cm as a function of $O_2$ gas pressure (0~5%). The optical transmission curves with a rising of $O_2$ gas rate become shifted into longer wavelength range.

• Journal of the Korean Society of Industry Convergence
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• v.25 no.5
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• pp.835-842
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• 2022

In this study, the membrane degassing process of the sweep gas - vacuum combination type was proposed for ammonia wastewater treatment. The effect of pH, initial ammonia concentration and scale-up on ammonia degassing performance was investigated. As a result, as the pH and the initial ammonia concentration increased, the degassing permeate flux was improved. On the other hand, the ammonia mass transfer coefficient increased as the initial ammonia reduced, which seems to be due to the driving force of the sweep gas-vacuum combination type membrane degassing system proposed in this study. In addition, 80 mg NH₃/min of the ammonia degassing rate was achieved using a 6×28 inch size module. Better degassing performance is expected if consideration for maintaining vacuum pressure is involved in the scale-up design.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.12
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• pp.913-919
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• 2015

A supercavitating vehicle has a speed of more than 300 km/h in water. A numerical analysis of the flow around a supercavitating vehicle must deal with a multiphase flow consisting of the water, vapor and exhaust gas because the vehicle is powered by roket propulsion. The effect of the exhaust gas on the vehicle is an important part in the study of the performance of the supercavitating vehicle. In the present study, the effect of the exhaust gas on the drag of vehicle was investigated by conducting numerical analysis. When there is no exhaust gas, drag of vehicle is affected by re-entrant. In the case with rocket propulsion, the exhaust gas reduces the influence of re-entrant. The exhaust gas also creates Mach disk and it changes drag profile.

• Journal of the Korean Society for Heat Treatment
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• v.25 no.6
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• pp.279-282
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• 2012

$SnO_2$ thin films were prepared on the Si substrate by radio frequency (RF) magnetron sputtering and then surface of the films were irradiated with intense Ar ion beam to investigate the effect of Ar ion irradiation on the properties and hydrogen gas sensitivity of the films. From atomic force microscope observation, it is supposed that intense Ar bombardments promote rough surface and increase gas sensitivity of $SnO_2$ films for hydrogen gas. The films that Ar ion beam irradiated at 6 keV show the higher sensitivity than the films were irradiated at 3 keV and 9 keV. These results suggest that the $SnO_2$ thin films irradiated with optimized Ar ion beam are promising for practical high-performance hydrogen gas sensors.

• Journal of the Korean Institute of Gas
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• v.14 no.5
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• pp.13-18
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• 2010

This paper presents the development of an integrated control and safety management system for 9% nickel steel LNG storage tank. The new system added the measuring equipment of pressure, displacement and force compared to the conventional measurement and control system. The measured data has simultaneously been processed by integrating and analyzing with new control equipments and safety management systems. The integrated control and safety management system, which may increase a safety and efficiency of a super-large full containment LNG storage tank, added additional pressure gauges and new displacement/force sensors at the outer side wall and a welding zone of a stiffener and top girder of an inner tank, and the inner side wall of a corner protection tank. The displacement and force sensors may provide failure clues of 9% nickel steel structures such as an inner tank and a corner protection, and a LNG leakage from the inner tank. The conventional leak sensor may not provide proper information on 9% nickel steel tank fracture even though LNG is leaked until the leak detector, which is placed at the insulation area between an inner tank and a corner protection tank, sends a warning signal. Thus, the new integrated control and safety management system is to collect and analyze the temperature, pressure, displacement, force, and LNG density, which are related to the tank system safety and leakage control from the inner tank. The digital data are also measured from control systems such as displacement and force of 9% nickel steel tank safety, LNG level and density, cool-down process, leakage, and pressure controls.