• Korean Journal of Materials Research
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• v.22 no.11
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• pp.609-614
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• 2012

We report on the NO gas sensing properties of non-directional ZnO nanofibers synthesized using a typical electrospinning technique. These non-directional ZnO nanofibers were electrospun on an $SiO_2$/Si substrate from a solution containing poly vinyl alcohol (PVA) and zinc nitrate hexahydrate dissolved in distilled water. Calcination processing of the ZnO/PVA composite nanofibers resulted in a random network of polycrystalline ZnO nanofibers of 50 nm to 100 nm in diameter. The diameter of the nanofibers was found to depend primarily on the solution viscosity; a proper viscosity was maintained by adding PVA to fabricate uniform ZnO nanofibers. Microstructural measurements using scanning electron microscopy revealed that our synthesized ZnO nanofibers after calcination had coarser surface morphology than those before calcination, indicating that the calcination processing was sufficient to remove organic contents. From the gas sensing response measurements for various NO gas concentrations in dry air at several working temperatures, it was found that gas sensors based on electrospun ZnO nanofibers showed quite good responses, exhibiting a maximum sensitivity to NO gas in dry air at an operating temperature of $200^{\circ}C$. In particular, the non-directional electrospun ZnO nanofiber gas sensors were found to have a good NO gas detection limit of sub-ppm levels in dry air. These results illustrate that non-directional electrospun ZnO nanofibers are promising for use in low-cost, high-performance practical NO gas sensors.

• Journal of the Semiconductor & Display Technology
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• v.19 no.2
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• pp.51-54
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• 2020

To develop gas-distinguishing sensor system, it is highly required to integrate multiple sensors for effective detection of a single targeted gas or mixture of gases. In addition, it is important to collect the reliable data from individual sensors into one integrated measuring device. Collecting the data of toxic gases on the spot should be done without inhalation. We suggest simple wirelessly running system for data collection that guarantees both reliability of data sources and safety. Here, we made a multi-gas measuring instrument(device) combined with Bluetooth module which provides a safe and precise big data accumulation system.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.6
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• pp.297-303
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• 2002

We have developed an on-line ultrasonic detector to monitor partial discharge in an operating transformer. The ultrasonic sensor has 150[KHz] resonance frequency and contains a pre-amplifier with 60[㏈] gain. The on-line ultrasonic detector has 50~300[KHz] frequency band-pass filter to remove electrical and mechanical noises from the transformer. This detector has an ultrasonic signal discrimination algorithm which discriminates ultrasonic signals due to partial discharge in a transformer. A moving average method of ultrasonic signal number was employed to effectively monitor the increasing trend of the partial discharge. This paper describes an experience of partial discharge detection in a 154[㎸] operating transformer using an ultrasonic detector. With regards to gas analysis in oil, C2H2 gas was produced with a warning level in this transformer We detected ultrasonic signals on the transformer steel wall, and estimated the position of partial discharge. With further inspection, we found carbonized marks due to partial discharge on the supporting bolt which fastens the windings.

• Ceramist
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• v.21 no.2
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• pp.38-48
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• 2018

This paper reports a comprehensive review of the state-of-the-art in research on the enhancement of sensing properties for the detection of gases in exhaled breath. Daily health monitoring and early diagnosis of specific diseases via the analysis of exhaled breath is possible. Because biomarkers in exhaled breath are emitted in a very small amount, it is necessary to develop highly sensitive gas sensors. In recent years, a number of researches have been carried out using various strategies for the enhancement of sensing properties such as doping, catalyst, hollow sphere, heterojunction, size effect. We introduced each strategy and summarized recent progress on sensing properties for detection of biomarkers in exhaled breath.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.3
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• pp.149-155
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• 2016

Early detection of toxic gases, such as volatile organic compounds (VOCs), is important for safety and environmental protection. However, the conventional detection methods require long-term measurement times and expensive equipment. In this study, we propose a thin-film-type chemical sensor for VOCs, which consists of self-assembled monosize nanoparticles for 3-D photonic crystal structures and polydimthylsiloxane (PDMS) film. It is operated without any external power source, is truly portable, and has a fast response time. The structure color of the sensor changes when it is exposed to VOCs, because VOCs induce a swelling of the PDMS. Therefore, using this principle of color change, we can create a thin-film sensor for immediate detection of various types of VOCs. The proposed device evidences that a fast response time of just seconds, along with a clear color change, are successfully observed when the sensor is exposed to gas-phase VOCs.

• Journal of Sensor Science and Technology
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• v.20 no.1
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• pp.1-7
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• 2011

Undoped and Sb-doped $SnO_2$ nanofibers were prepared by electrospinning and their responses to $H_2$, CO, $CH_4$, $C_3H_8$, and $C_2H_5OH$ were measured. In the undoped $SnO_2$ nanofibers, the gas response ($R_a/R_g$, $R_a$: resistance in air, $R_g$: resistance in gas) to 100 ppm $C_2H_5OH$ was very high(33.9), while that to the other gases ranged from 1.6 to 2.2. By doping with 2.65 wt% Sb, the response to 100 ppm $C_2H_5OH$ was decreased to 4.5, whereas the response to $H_2$ was increased to 3.0. This demonstrates the possibility of detecting a high $H_2$ concentration with minimum interference from $C_2H_5OH$ and the potential to control the gas selectivity by Sb doping.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.389-396
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• 2022

Quartz crystal microbalance (QCM) based sensors are used for various applications owing to advantages such as excellent accuracy and precision, rapid response, and tiny footprint. Traditional applications of QCM-based sensors include biological sensing and thin-film thickness monitoring. Recently, QCMs have been used as functional material for novel physical and chemical detections, and with improved device design. QCM-based sensors are garnering considerable attention in particulate matter sensing and electric nose application. This review covers the challenges and solutions in physical, chemical, and biological sensing applications. First, various physical sensing applications are introduced. Secondly, the toxic gas and chemical detection studies are outlined, focusing on introducing a coating method for uniform sensing film and sensing materials for a minimal damping effect. Lastly, the biological and medical sensing applications, which use the monomolecularly decorating method for biomolecule recognition and a brief description of the overall measuring system, are also discussed.

• Journal of IKEEE
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• v.19 no.4
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• pp.541-547
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• 2015

In current semiconductor manufacturing, as the feature size of integrated circuit (IC) devices continuously shrinks, detecting endpoint in plasma etching process is more difficult than before. For endpoint detection, various kinds of sensors are installed in semiconductor manufacturing equipments, and sensor data are gathered with predefined sampling rate. Generally, detecting endpoint is performed using OES data of by-product. In this study, OES data of both by-product and etchant gas are used to improve reliability of endpoint detection. For the OES data pre-processing, a combination of Signal to Noise Ratio (SNR) and Principal Component Analysis (PCA),are used. Polynomial Regression and Expanded Hidden Markov model (eHMM) technique are applied to pre-processed OES data to detect endpoint.

• Journal of Sensor Science and Technology
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• v.23 no.4
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• pp.266-271
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• 2014

Chemical sensors are used in various industrial facilities such high-risk and prevent the leakage of substances, important in life and environmental protection and the safe use of industry, used for management. In particular, high-temperature environments such as power generation equipment of the rotating part due to leakage generated by the various oil, power plants Shut Down, fire, work environment (exposure to various chemical solution and gas leak) and various water, air and soil pollution causes. Thus, over the long term through various channels such as crops and groundwater contamination caused by the slow, serious adverse effect on the ecosystem. In this paper, synthetic lube oil and high pressure hydraulic fluid leakage and immediately detect a new Printed Electronic implementation of technology-based film-type sensors, and its performance test. Thus, industrial accidents and environmental pollution and for early detection of problems, large accidents can be prevented. Experimental results of the synthetic lube oil and high pressure hydraulic fluid solution after the contact time depending on the experiment and the oil solution of the sensor material of the conductive porous PE resistance value by a chemical reaction could be confirmed that rapid increase. Also implemented in the film-type oil sensor electrical resistance change over time of the reaction rate and the synthetic lube oil is about 2 minutes or less, the high pressure hydraulic fluid is less than about 1 minute was. Therefore, more high-pressure hydraulic fluid such as a low volatility synthetic lube oils are the resistance change and the reaction rate was confirmed to be the slowest.