• Journal of Sensor Science and Technology
• /
• v.33 no.3
• /
• pp.125-133
• /
• 2024

Gas chromatography (GC) separation technology and metal oxide semiconductor (MOS) gas sensors have been integrated for the effective analysis of volatile sulfur compounds (VSCs) such as H₂S, CH₃SH, (CH₃)₂S, and (CH₃)₂S₂. The separation and detection characteristics of the GC/MOS system using diluted standard gases were investigated for the qualitative and quantitative analysis of VSCs. The typical concentrations of the standard gases were 0.1, 0.5, 1.0, 5.0, and 10.0 ppm. The GC/MOS system successfully separated H₂S, CH₃SH, (CH₃)₂S, and (CH₃)₂S₂ using a celite-filled column. The reproducibility of the retention time measurements was at a 3% relative standard deviation level, and the correlation coefficient (R²) for the VSC concentration was greater than 0.99. In addition, the chromatograms of single and mixed gases were almost identical.

• KSBB Journal
• /
• v.13 no.5
• /
• pp.477-482
• /
• 1998

A biosensor with PZT piezoelectric ceramic crystal was developed for the detection of formaldehyde gas. Poled PZT piezoelectric ceramic disk was made from ZrO2, TiO2 and Nb2O5, together with the addition of PbO and polyvinyl alcohol, through various processes of mixing, calcination drying, crushing, forming, sintering, polishing, ion coating and poling. Oscillator circuit of sensor was made of operational amplifier(AD811AN). Formaldehyde dehydrogenase was immobilized onto a piezoelectic ceramic crystal, together with the cofactors, reduced glutathione and nicotinamide adenine dinucleotide. The effect of flow rate on the sensitivity was determined by varing the flow rate of carrier gas from 24.7mL/min to 111.7mL/min through detector cell. The results indicated that as the flow rate was increased, the recovery rate was increased. And a significant increase in the sensitivity was observed in enhanced flow rate of carrier gas. Frequency difference(ΔF) of immobilized PZT piezoelectic disk increased proportionally to the concentration gas and reproduced to repeated exposures of formaldehyde gas(28ppm, Δ68Hz).

• Journal of Sensor Science and Technology
• /
• v.32 no.2
• /
• pp.75-81
• /
• 2023

The significance of gas sensors has been emphasized in various industries and applications, owing to the growing significance of environmental, social, and governance (ESG) management in corporate operations. In particular, the monitoring of hazardous gas leakages and detection of fugitive emissions have recently garnered significant attention across several industrial sectors. As industrial workplaces evolve to ensure the safety of their working environments and reduce greenhouse gas emissions, the demand for high-performance gas sensors in industrial sectors dealing with toxic substances is on the rise. However, conventional gas-sensing systems have limitations in monitoring fugitive gas leakages at both critical and subcritical concentrations in complex environments. To overcome these difficulties, recent studies in the field of gas sensors have employed techniques such as mobile robotic olfaction, remote optical sensing, chemical grid sensing, and remote acoustic sensing. This review highlights the significant progress made in various technologies that have enabled accurate and real-time mapping of gas distribution and localization of hazardous gas sources. These recent advancements in gas-sensing technology have shed light on the future role of gas-detection systems in industrial safety.

• Transactions on Electrical and Electronic Materials
• /
• v.14 no.5
• /
• pp.254-257
• /
• 2013

In-situ optical emission spectroscopy (OES) is employed for PECVD chamber monitoring. OES is used as an addon sensor to monitoring and cleaning end point detection (EPD). On monitoring plasma chemistry using OES, the process gas and by-product gas are simultaneously monitored. Principal component analysis (PCA) enhances the capability of end point detection using OES data. Through chamber cleaning monitoring using OES, cleaning time is reduced by 53%, in general. Therefore, the gas usage of fluorine is also reduced, so satisfying Green Fab challenge in semiconductor manufacturing.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
• /
• 2004.11a
• /
• pp.207-212
• /
• 2004

• Applied Chemistry for Engineering
• /
• v.32 no.1
• /
• pp.42-48
• /
• 2021

In this study, a sensor for detection of nitric oxide (NO) gas was developed using petroleum pitch-based activated carbon which was synthesized from pyrolysis fuel oil (PFO). Polyethylene terephthalate (PET) was added to increase molecular weight by stimulating a polymerization of components in PFO during the pitch synthesis process. The increase in the molecular weight of pitch contributed to the improvement of textural properties of activated carbon, such as the specific surface area and micropore volume. It also enhanced the sensitivity of NO gas sensor based on the activated carbon. In addition, the effect of PET addition during the pitch synthesis on the surface oxygen content and conductivity of activated carbon was investigated. Finally, the correlation of the sensitivity with physical properties of activated carbon was analyzed.

• Journal of the Korean Institute of Gas
• /
• v.20 no.5
• /
• pp.104-111
• /
• 2016

Recently, the quantities of chemical material are increasing in chemical industries. At that time, release accident is increasing due to aging of equipment, mechanical failure, human error, etc. and industrial complexes found community properties in a specific area. For that matter, chemical release accident can lead to hight probability of large disaster. There is a need to analyze the boundaries optimal sensor placement calculated by selecting release scenarios through release condition and wether condition in a chemical process for release detection and response. This paper is to investigate chlorine release accident scenarios using COMSOL. Through accident scenarios, a numerical calculation is studied to determine optimized sensor placement with weight of detection probability, detection time and concentration. In addition, validity of sensor placement is improved by robustness analysis about unpredicted accident scenarios. Therefore, this verifies our studies can be effectively applicable on any process. As mention above, the result of this study can help to place mobile sensor, to track gas release based concentration data.

• Journal of Sensor Science and Technology
• /
• v.22 no.4
• /
• pp.302-307
• /
• 2013

The Sb-doped $SnO_2$ nanowire network sensors were prepared by thermal evaporation of the mixtures between tin and antimony powders. Pure $SnO_2$ nanowire networks showed high sensor resistance in air ($99M{\Omega}$), similar gas responses to 4 diffferent gases (5 ppm $C_2H_5OH$, CO, $H_2$, and trimethylamine), and very sluggish recovery speed (90% recovery time > 800 s). In contrast, 2 wt% Sb-doped $SnO_2$ showed the selective detection toward $C_2H_5OH$ and trimethylamine, relatively low resistance ($176k{\Omega}$) for facile measurement, and ultrafast recovery speed (90% recovery times: 6 - 18 s). The change of gas sensing charactersitics by Sb doping was discussed in relation to gas sensing mechanism.

• Transactions on Electrical and Electronic Materials
• /
• v.16 no.6
• /
• pp.334-337
• /
• 2015

Pure ZnO, ZnO nanowires doped with 3 wt.% Ga (3GZO) and doped with 3 wt.% Ag (3SZO) were grown by a hot-walled pulse laser deposition (HW-PLD) technique. The optical and chemical properties of Ga and Ag doped nanowires was analyzed. Nanowires were determined to be under 200 nm in diameter and several μm in length. Change of significant resistance was observed and the gas detection sensitivities of ZnO, 3GZO and 3SZO nanawires were compared. The sensitivities of ZnO, 3GZO, and 3SZO nanowire sensors were measured at 300℃ for 1 ppm of ethanol gas at 97%, 48%, and 203%, respectively.

• Korean Journal of Pharmacognosy
• /
• v.20 no.4
• /
• pp.205-214
• /
• 1989

The sensing of odour compounds in gas phase is an attractive target in recent sensor technology. Based on the finding that a plant leaf can respond to various gas molecules by changing its potential, biosensing system using a plant leaf has been investigated for the detection of odour compounds. A leaf of some plant species responded to odour compounds directly by changing its potential $5{\sim}10\;mV$. That the leaf was actually sensing an odour was much more remarkably detected from the difference between the response profile to pure $CO_2$ gas and that to $CO_2$ gas containing odour compounds. Then the quantitative study (ppb level) is now being performed on the response of a tobacco leaf to benzyl acetate; a component of jasminelike odours. The concept of biosensing and its significance are also described from the viewpoint of sensor technology.