• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.45-56
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• 2002

A pneumatic servo system requiring a fine gap control in a photo-electric sensor which is used for a LCD array detection device is introduced. The gap controlled by the pneumatic servo system remains within around 50~80 ${\mu}{\textrm}{m}$, and the system possesses an effect to eliminate undesirable particles on the LCD plate by blowing air out. The air flow rate is initially controlled by a servo valve and expanded by a booster valve, thus the controlled air pressure contributes to maintaining an appropriate gap between the LCD plate and photo-electric sensor An air floating plate of two degrees of freedom is designed and fabricated, and a fine tilting motion control is also implemented by assigning different gap commands. The pressure control and direct gap control are proposed, and each performance is verified experimentally.

• Transactions of the Society of Information Storage Systems
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• v.3 no.1
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• pp.1-4
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• 2007

A high density optical data storage device has been required for many years. In the field of the optical data storage, a near-field recording (NFR) technology is considered as a next generation one for achieving the high data density. Due to an evanescent wave effect occurred under 100nm distance which is the excessively small distance between the SIL and the disc, the most significant and difficult problem in this technology is to maintain a gap between a solid immersion lens (SIL) and a disc. Also, maintaining the gap under at least 50nm is required in the NFR gap servo system to use the evanescent wave effect efficiently. There are some institutes that have shown the novel gap servo control. In general, they use a mode switching servo method which consists of approach, hand-over and gap control mode. However there is a critical problem such as an overshoot at the tuning point from the approach mode to the hand-over mode, which may cause a collision between the SIL and the disc. In this paper, we show our NFR system and an improved gap servo system using an exponential function as the approach mode which can reduce the overshoot.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.111.2-111
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• 2001

The research focuses on controlling a gap to measure the surface defect in semi-conductor fabrication device. The measurement is available accompanying a near field image gap control. In this article, a pneumatic servo system is adopted for the near field gap control. The advantage of the pneumatic servo system is on the preventing the possibility of contacting the device to the wapper surface, fence arising fatal damage. Furthermore, the air from the pneumatic system blows the some particle on the wapper during controlling. The target gap is less than 20 $\mu$m and the gap should keep same amount while the device moves around the surface. The experiment by the pneumatic servo control system is done by employing a simple PID control, and the tracking performance is remarkably verified. The target gap is set from 10 $\mu$m to 100 $\mu$m ...

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.12-13
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• 2005

Near field recording (NFR) technology with SIL has been thought as the most promising generation optical storage device. A gap distance between the SIL and the disc should be controlled to be 20${\~}$40nm. We observed gap error signal in our NFR test-bed using a blue LD (405nm). The digital gap servo filter and control algorithm were developed to maintain a constant air gap by adopting a conventional actuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.1031-1032
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• 2007

Gap servo NF (Near Field) system is one of technologies to reduce beam spot size by increasing NA (Numerical Aperture) of lens. To achieve higher NA, SIL (Solid Immersion Lens) is used. In the case of using a blue LD (405 nm) as the light source the gap distance should be controlled under 100 nm with much tighter margin. Because of very small gap distance between SIL bottom and the surface of media, relative tilt tolerance is limited. In this paper, we presented 2-axis tilt mechanism for skew adjustment within small tilt margin.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.5 s.110
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• pp.479-484
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• 2006

This paper presents an active control of the aperture type near-field storage head. In order to achieve a fast and accurate control, a dual servo control algorithm is applied. Based on the big difference in time constants of two actuators, they are used independently. With the combination fine and coarse actuator, the disk is rotated up to 10 rpm speed until the gap is controlled within 100 nm. From the experimental results, the feasibility and the performance of active dual servo gap control is proved.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.837-842
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• 2007

Information storage devices using disks have a disk vibration at the frequency which is equivalent to the disk rotational speed. They also have a track vibration due to the disk eccentricity at the same frequency. In near field recording systems, the former affects the air-gap servo and the latter affects the tracking servo. In this paper, we introduce a novel control algorithm based on the internal model principle to both servos. A controller block designed by the principle is connected to the base lead-lag type compensator in parallel in order to cancel the repeatable run-out due to the disk vibration or eccentricity. Simulation and practical application of the algorithm on a near field recording system show good servo performance.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.6 s.123
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• pp.539-546
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• 2007

Information storage devices using disks have a disk vibration at the frequency which is equivalent to the disk rotational speed. They also have a track vibration due to the disk eccentricity at the same frequency. In near field recording systems, the former affects the air-gap servo and the latter affects the tracking servo. In this paper, we introduce a novel control algorithm based on the internal model principle to both servos. A controller block designed by the principle is connected to the base lead-lag type compensator in parallel in order to cancel the repeatable run-out due to the disk vibration or eccentricity. Simulation and practical application of the algorithm on a near field recording system show good servo performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.875-878
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• 2005

This paper presents active control of aperture type near-field storage head. In order to achieve fast and accurate control, dual servo control algorithm is applied. Based on the big difference in time constant, we seperate two actuator and control independently. With the combination of fine and coarse actuator, gap is controlled within 100nm until the disk rotates upto 10 rpm speed. From the experimental results, the feasibility and performance of active gap control is proved.

• Transactions of the Society of Information Storage Systems
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• v.5 no.1
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• pp.41-46
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• 2009

In SIL-based NFR servo systems, the residual error and the overshoot that are occurred in the process of the modes-witching servo which consists of approach, gap-control modes, and safety mode are reduced by using PID controller. However, the design method of conventional PID controller is not sufficient for the stable air gap control system. Therefore, the optimal PID controller using LQR manner is more useful to find the designed parameters of PID controller. In this paper, we show that the performance of the optimal PID controller is better than that of the lead-lag controller.