• Title/Summary/Keyword: GaAsP

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Study on the Breakdown Simulation for InAlAs/InGaAs/GaAs MHEMTs with an InP-etchstop Layer (InP 식각정지층을 갖는 InAlAs/InGaAs/GaAs MHEMT 소자의 항복 특성 시뮬레이션에 관한 연구)

  • Son, Myung Sik
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.2
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    • pp.53-57
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    • 2012
  • This paper is for accurately simulating the breakdown of MHEMTs with an InP-etchstop layer. 2D-Hydrodynamic simulation parameters are investigated and calibrated for the InP-epitaxy layer. With these calibrated parameters, simulations are performed and analyzed for the breakdown of devices with an InP-etchstop layer. In the paper, the impact-ionization coefficients, the mobility degradation due to doping concentration, and the saturation velocity for InP-epitaxy layer are newly calibrated for more accurate breakdown simulation.

Properties of photoluminescence and time-resolved photoluminescence in doped GaAs (도핑된 GaAs의 형광 및 시간분해 형광 특성)

  • 추장희;서정철;유성규;신은주;이주인;김동호
    • Korean Journal of Optics and Photonics
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    • v.8 no.3
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    • pp.213-217
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    • 1997
  • We have measured photoluminescence (PL) and time-resolved PL in doped-GaAs. As increasing doping concentration, the PL spectra of n-type GaAs shift to higher energies while the PL spectra of p-type GaAs shift to lower energies than the bandgap of the undoped GaAs. The contribution of the Burstein-Moss effect overrules the band-gap narrowing in n-type GaAs, contrary to p-type GaAs. The PL rise time and decay time become shorter as increasing doping concentration. The PL rise and decay time in doped-GaAs depend on the type of majority carriers and their concentrations, which imply that the carrier-carrier interaction plays an important role in the energy relaxation processes.

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Fabrication and electrical properties of InGaAs/InP reaonant tunneling diode (InGaAs/InP 송명 터널다이오드의 제작과 전기적 특성)

  • 유병수;이우선
    • Electrical & Electronic Materials
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    • v.6 no.4
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    • pp.324-328
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    • 1993
  • 본 논문에서는 전자파 디바이스의 고속화를 위해서 OMVPE를 이용하여 InGaAs/InP공명 터널 다이오드를 제작하고 전기적특성을 연구하였다. 공명 터널 다이오드의 전압-전류특성, 장벽폭에 따른 P/V비와 RTD의 양자 우물 효과가 연구되었는데 P/V비는 장벽폭이 증가함에 따라서 지수함수적인 감소를 보였다.

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Ordering in InGaAsP Epitaxial Layers Grown by low Pressure metalorganic Chemical Vapor Deposition (저압 MOCVD 방법으로 성장된 InGaAsP 에피층에서의 ordering 현상)

  • 김대연;문영부;이태완;윤의준;이정용;정현식
    • Journal of the Korean Vacuum Society
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    • v.7 no.3
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    • pp.187-194
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    • 1998
  • InGaAsP epitaxial layers lattice matched to InP were grown at 600 and $620^{\circ}C$ by low pressure metalorganic chemical vapor deposition. Solid phase composition of group III was controlled by the diffusion flux gas phase to the reachion surface. For the case of group V, the difference of As and P vapor pressure and pyrolysis efficiency of $PH_3$and $AsH_3$ mainly determined their in corporation into solid. An abnormal behavior of peak energy shift was observed below 75K in temperature variant photoluminescence study. This abnormal behavior was explained by the difference in order of ordering which makes spatial variation of energy gap in InGaAsP layer and this explanation was supported by the analyses of transmission electron microscopy and transmission spectroscopy.

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Liquid Phase Epitaxial Growth of GaAs on InP Substrates (액상에피택시 방법에 의한 InP기판상의 GaAs 이종접합 박막 성장)

  • Kim, Dong-Geun;Lee, Hyeong-Jong;Im, Gi-Yeong;Jang, Seong-Ju;Jang, Seong-Ju;Kim, Jong-Bin;Lee, Byeong-Taek
    • Korean Journal of Materials Research
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    • v.4 no.5
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    • pp.600-607
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    • 1994
  • Optimum exper~mental conditions were established for the growth of heteroepitaxial GaAs layers on InP using liquid phase epitaxy (LPE) technique. Results showed that the optimum growth temperature was $720^{\circ}C$ at a cooling rate of $0.5^{\circ}C$/min. Surface morphology of the grown layers significantly improved by addition of about 0.005wt% Se to the Ga growth melt, which effectively suppressed melt-back of InP substrates into the melt during the initial stage of growth. It was observed that the quality of GaAs layers also improved substantially when the substrates patterned with grating structure were used, as determined by the (400) double crystal X-ray diffraction. The transmission electron microscopy observation indicated t.hat the misfit dislocations interact with each other at the grating region, resulting in a lower dislocation density in the upper GaAs layer.

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Design and fabrication of GaAs HBT ICs for 10-Gb/s optical communication system (10-Gb/s 광통신시스템을 위한 GaAs HBT IC의 설계 및 제작)

  • 박성호;이태우;김영석;기현철;송기문;박문평;평광위
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.3
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    • pp.52-59
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    • 1997
  • Design and performance of principal four ICs for the 10-Gb/s optical communication system are presented. AlGaAs/GaAs HBTs are basic devices to implement a laser diode driver, apre-amplifier, and a limiting amplifier, and GaInP/GaAs HBTs are used for an AGC amplifier. We fbricated 11.5-GHz LD driver, a pre-amplifier, and a limiting amplifier, an dGaInP/GaAs HBTs are used for an AGC amplifier. We fabricated LD deriver, 10.5 GHz pre amplifier, 7.2 GHz AGC amplifier, and 10.3 GHz limiting amplifier, optimized circuit design and the stabilized MMIC fabrication process.

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Comparison of Selective and Non-Selective Dry Etching of GaAs/AlGaAs and GaAs/InGaP using Planar Inductively Coupled Plasmas (평판형 유도결합 플라즈마를 이용한 GaAs/AlGaAs 및 GaAs/InGaP 의 선택적 및 비선택적 건식식각의 비교)

  • Park, Min-Yeong;Choe, Chung-Gi;Ryu, Hyeon-U;No, Ho-Seop;Mun, Jun-Hui;Yu, Seung-Yeol;Im, Wan-Tae;Lee, Je-Won;Jo, Gwan-Sik;Jeon, Min-Hyeon;Song, Han-Jeong;Baek, In-Gyu;Gwon, Min-Cheol;Park, Geon-Su;Yun, Jin-Seong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2005.05a
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    • pp.73-73
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    • 2005
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Flexible InGaP/GaAs Double-Junction Solar Cells Transferred onto Thin Metal Film (InGaP/GaAs 이중접합 기반의 고효율 플렉시블 태양전지 제조기술 연구)

  • Moon, Seungpil;Kim, Youngjo;Kim, Kangho;Kim, Chang Zoo;Jung, Sang Hyun;Shin, Hyun-Beom;Park, Kyung Ho;Park, Won-Kyu;Ahn, Yeon-Shik;Kang, Ho Kwan
    • Current Photovoltaic Research
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    • v.4 no.3
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    • pp.108-113
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    • 2016
  • III-V compound semiconductor based thin film solar cells promise relatively higher power conversion efficiencies and better device reliability. In general, the thin film III-V solar cells are fabricated by an epitaxial lift-off process, which requires an $Al_xGa_{1-x}As$ ($x{\geq}0.8$) sacrificial layer and an inverted solar cell structure. However, the device performance of the inversely grown solar cell could be degraded due to the different internal diffusion conditions. In this study, InGaP/GaAs double-junction solar cells are inversely grown by MOCVD on GaAs (100) substrates. The thickness of the GaAs base layer is reduced to minimize the thermal budget during the growth. A wide band gap p-AlGaAs/n-InGaP tunnel junction structure is employed to connect the two subcells with minimal electrical loss. The solar cell structures are transferred on to thin metal films formed by Au electroplating. An AlAs layer with a thickness of 20 nm is used as a sacrificial layer, which is removed by a HF:Acetone (1:1) solution during the epitaxial lift-off process. As a result, the flexible InGaP/GaAs solar cell was fabricated successfully with an efficiency of 27.79% under AM1.5G illumination. The efficiency was kept at almost the same value after bending tests of 1,000 cycles with a radius of curvature of 10 mm.

양자점 태양전지구조내 결함상태와 광전변환 특성인자와의 상관관계 분석

  • Lee, Gyeong-Su;Lee, Dong-Uk;Kim, Eun-Gyu;Choe, Won-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.329.2-329.2
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    • 2014
  • 지난 수년간 태양전지의 광전변환효율을 높이기 위해 자가 조립된 InAs 또는 GaSb와 같은 양자점을 GaAs 단일 p-n 접합에 적용하는 연구를 개발해 왔다. 그러나 양자점의 흡수 단면적에 의한 광 흡수도는 양자점층을 수십 층을 쌓으면 증가하지만 활성층에 결함을 생성시킨다. 생성된 결함은 운반자트랩으로 작용하여 태양전지의 광전변환효율을 감소시킨다. 본 실험에서는 양자점이 적용된 태양전지와 적용되지 않은 태양전지의 광전변환 효율을 비교하고, 깊은준위 과도용량 분광법을 이용하여 결함상태를 측정 및 비교함으로써, 활성층 내부에 생성된 결함이 광전변환 효율에 미치는 영향을 분석하였다. 소자구조는 분자선 증착 방법을 이용하여, 먼저 n+-형 GaAs기판위에 n+-형 GaAs를 250 nm 증착한 후, 도핑이 되지 않은 GaAs활성층을 $1{\mu}m$ 두께로 증착하였다. 마지막으로 n+ 와 p+-형 GaAs를 각각 50, 750 nm 증착함으로써 p-i-n구조를형성하였다. 여기서, n+-형 GaAs 과 p+-형 GaAs의 도핑농도는 동일하게 $5{\times}1018cm-3$로 하였다. 또한 양자점을 태양전지 활성층에 20층을 형성하였다. 이때 p-i-n 태양전지 와 양자점 태양전지의 광전변환 효율은 각각 5.54, 4.22 % 를 나타내었다. p-i-n 태양전지의 개방 전압과 단락전류는 847 mV, 8,81 mA이며 양자점 태양전지는 847 mV, 6.62mA로 확인되었다. 태양전지의 전기적 특성을 측정하기 위해 소자구조 위에 Au(300nm)/Pt(30nm)/Ti(30nm)의 전극을 전자빔증착장치로 증착하였으며, 메사에칭으로 직경 $300{\mu}m$의 태양전지 구조를 제작하였다. 정전용량-전압 특성 및 깊은준위 과도용량 분광법을 이용하여 태양전지의 결함분석 및 이에 따른 광전변환 특성인자와의 상관관계를 논의할 것이다.

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Influences of Spinodal Decomposition of InGaAsP Layer on Photoluminescence Characteristics (InGaAsP 에피막의 Spinodal분해 조직구조가 Photoluminescence 특성에 미치는 영향)

  • Lee, Jong-Won
    • Korean Journal of Materials Research
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    • v.5 no.8
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    • pp.936-944
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    • 1995
  • The effects of Spinodal decomposition induced phase separated microstructure of InGaAsP/InP heterostructure on photoluminescence(PL) intensity and FWHM(full-width at half maximum) were investigated in this study. Lattice mismatches were measured by double crystal x-ray diffractometer, and the microstructures of phase separated InGaAsP were observed by transmission electron microscopy. It was found that the misfit stress calculated from lattice mismatch was related to the periodicity of Spinodal modulation. Strong dependence of PL intensity and FWHM on the modulation periodicity was also found. For systematic understanding of these observations, the interaction elastic strain energy function induced by misfit stress was proposed. The calculation illustrated that the microstructure of the epilayer such as Spinodal decomposition played an important role in determining the optoelectronic properties such as PL intensity and PL FWHM.

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