• 제목/요약/키워드: Ga doping

검색결과 224건 처리시간 0.032초

극한 환경용 반도체 기술 동향 (Technical Trends of Semiconductors for Harsh Environments)

  • 장우진;문재경;이형석;임종원;백용순
    • 전자통신동향분석
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    • 제33권6호
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    • pp.12-23
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    • 2018
  • In this paper, we review the technical trends of diamond and gallium oxide ($Ga_2O_3$) semiconductor technologies among ultra-wide bandgap semiconductor technologies for harsh environments. Diamond exhibits some of the most extreme physical properties such as a wide bandgap, high breakdown field, high electron mobility, and high thermal conductivity, yet its practical use in harsh environments has been limited owing to its scarcity, expense, and small-sized substrate. In addition, the difficulty of n-type doping through ion implantation into diamond is an obstacle to the normally-off operation of transistors. $Ga_2O_3$ also has material properties such as a wide bandgap, high breakdown field, and high working temperature superior to that of silicon, gallium arsenide, gallium nitride, silicon carbide, and so on. In addition, $Ga_2O_3$ bulk crystal growth has developed dramatically. Although the bulk growth is still relatively immature, a 2-inch substrate can already be purchased, whereas 4- and 6-inch substrates are currently under development. Owing to the rapid development of $Ga_2O_3$ bulk and epitaxy growth, device results have quickly followed. We look briefly into diamond and $Ga_2O_3$ semiconductor devices and epitaxy results that can be applied to harsh environments.

GaN 기반 LED구조의 p-GaN층 성장온도에 따른 광학적, 결정학적 특성 평가 (Optical and microstructural behaviors in the GaN-based LEDs structures with the p-GaN layers grown at different growth temperatures)

  • 공보현;김동찬;김영이;한원석;안철현;최미경;조형균;이주영;김홍승
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.144-144
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    • 2008
  • Blue light emitting diode structures consisting of the InGaN/GaN multiple quantum wells were grown by metalorganic chemical vapor deposition at different growth temperatures for the p-GaN contact layers and the influence of growth temperature on the emission and microstructural properties was investigated. The I-V and electroluminescence measurements showed that the sample with a p-GaN layer grown at $1084^{\circ}C$ had a lower electrical turn-on voltage and series resistance, andenhanced output power despite the low photoluminescence intensity. Transmission electron microscopy (TEM) revealed that the intense electro luminescence was due to the formation of a p-GaN layer with an even distribution of Mg dopants, which was confirmed by TEM image contrast and strain evaluations. These results suggest that the growth temperature should be optimized carefully to ensurethe homogeneous distribution of Mg as well as the total Mg contents in the growth of the p-type layer.

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Terahertz Detection Characteristics of Low-Temperature Grown InGaAs/InAlAs Multi Quantum Well

  • 박동우;한임식;김창수;노삼규;지영빈;태인;이기주;김진수;김종수
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.317-318
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    • 2013
  • Terahertz (THz) wave는 광학 영역과 방송파 영역 사이에 광대역 주파수 스펙트럼을 차지하고 있다. X선과는 달리 비이온화 광원으로 직진성, 투과성, 낮은 에너지 (meV)를 가지고 있어 비파괴적이고 무해한 장점을 지니고 있다. 본 연구에서는 In0.53Ga0.47As:Be/In0.52Al0.48As의 multi quantum well (MQW)을 Semi-insulting InP:Fe substrate 위에 active layer의 두께와 적층을 변화주어서 성장하였고Au (200 nm)/Ti (30 nm)의 금속전극으로 공정을 하였다. Ti:Sapphire femtosecond pulse laser를 조사하여 THz time-domain spectrometer 시스템을 이용하여 광전도검출법으로 THz 검출 특성을 연구하였다. THz 검출은 짧은 전하수명과 높은 저항을 요구한다. LTInGaAs의 경우 AsGa antisite로 인하여 짧은 전하수명을 얻게 되면 n-type의 높은 전하밀도를 가지게 되어서 저항이 낮아지게 된다. 높은 저항을 만들기 위하여 Be doping을 이용하여 과잉의 전자들을 보상하고 InAlAs layer를 삽입시켜 보다 높은 저항을 얻었다. LT-InGaAs:Be는 LT-GaAs보다 1/70 정도의 amplitude를 보이는데 LT-InGaAs/InAlAs MQW의 경우 LT-GaAs 대비 약 3/4 정도의 큰 amplitude를 얻었다. 또 active layer의 두께가 얇고 적층이 많을수록 신호가 커지는 것을 알 수 있었다. 이는 상대적으로 band gap이 큰 InAlAs층이 더 높은 저항을 만든 것으로 사료된다.

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Surface Engineering of GaN Photoelectrode by NH3 Treatment for Solar Water Oxidation

  • Soon Hyung Kang;Jun-Seok Ha
    • Journal of Electrochemical Science and Technology
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    • 제14권4호
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    • pp.388-396
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    • 2023
  • Photoelectrochemical (PEC) water splitting is a vital source of clean and sustainable hydrogen energy. Moreover, the large-scale H2 production is currently necessary, while long-term stability and high PEC activity still remain important issues. In this study, a GaN-based photoelectrode was modified by an additional NH3 treatment (900℃ for 10 min) and its PEC behavior was monitored. The bare GaN exhibited a highly crystalline wurtzite structure with the (002) plane and the optical bandgap was approximately 3.2 eV. In comparison, the NH3-treated GaN film exhibited slightly reduced crystallinity and a small improvement in light absorption, resulting from the lattice stress or cracks induced by the excessive N supply. The minor surface nanotexturing created more surface area, providing electroactive reacting sites. From the surface XPS analysis, the formation of an N-Ga-O phase on the surface region of the GaN film was confirmed, which suppressed the charge recombination process and the positive shift of EFB. Therefore, these effects boosted the PEC activity of the NH3-treated GaN film, with J values of approximately 0.35 and 0.78 mA·cm-2 at 0.0 and 1.23 VRHE, respectively, and an onset potential (Von) of -0.24 VRHE. In addition, there was an approximate 50% improvement in the J value within the highly applied potential region with a positive shift of Von. This result could be explained by the increased nanotexturing on the surface structure, the newly formed defect/trap states correlated to the positive Von shift, and the formation of a GaOxN1-x phase, which partially blocked the charge recombination reaction.

Epitaxial Layer Design for High Performance GaAs pHEMT SPDT MMIC Switches

  • Oh, Jung-Hun;Mun, Jae-Kyoung;Rhee, Jin-Koo;Kim, Sam-Dong
    • ETRI Journal
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    • 제31권3호
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    • pp.342-344
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    • 2009
  • From a hydrodynamic device simulation for the pseudomorphic high electron mobility transistors (pHEMTs), we observe an increase of maximum extrinsic transconductance and a decrease of source-drain capacitances. This gives rise to an enhancement of the switching speed and isolation characteristics as the upper-to-lower planar-doping ratios (UTLPDR) increase. On the basis of simulation results, we fabricate single-pole-double-throw transmitter/receiver monolithic microwave integrated circuit (MMIC) switches with the pHEMTs of two different UTLPDRs (4:1 and 1:2). The MMIC switch with a 4:1 UTLPDR shows about 2.9 dB higher isolation and approximately 2.5 times faster switching speed than those with a 1:2 UTLPDR.

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Comparison of Optical Properties of Ga-doped and Ag-doped ZnO Nanowire Measured at Low Temperature

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • 제15권5호
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    • pp.262-264
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    • 2014
  • Pristine ZnO, 3 wt.% Ga-doped (3GZO) and 3 wt.% Ag-doped (3SZO) ZnO nanowires (NWs) were grown using the hot-walled pulse laser deposition (HW-PLD) technique. The doping of Ga and Ag in ZnO NWs was observed by analyzing the optical and chemical properties. We optimized the synthesis conditions, including processing temperature, time, gas flow, and distance between target and substrate for the growth of pristine and doped ZnO NWs. The diameter and length of pristine and doped ZnO NWs were controlled under 200 nm and several ${\mu}m$, respectively. Low temperature photoluminescence (PL) was performed to observe the optical property of doped NWs. We clearly observed the shift of the near band edge (NBE) emission by using low temperature PL. In the case of 3GZO and 3SZO NWs, the center photon energy of the NBE emissions shifted to low energy direction using the Burstein Moss effect. A strong donor-bound exciton peak was found in 3 GZO NWs, while an acceptor-bound exciton peak was found in 3SZO NWs. X-ray photoelectron spectroscopy (XPS) also indicated that the shift of binding energy was mainly attributed to the interaction between the metal ion and ZnO NWs.

Improving Electrochemical Properties of LiFePO4 by Doping with Gallium

  • Nguyen, Van Hiep;Park, Ju-Young;Gu, Hal-Bon
    • Transactions on Electrical and Electronic Materials
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    • 제15권6호
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    • pp.320-323
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    • 2014
  • Ga-doped $LiFePO_4$ cathode materials were synthesized using a hydrothermal method. The microstructural characteristics and electrochemical performances were systematically investigated using field emission scanning electron microscopy, high-resolution X-ray diffraction, energy dispersive X-ray spectroscopy, charge-discharge cycling, cyclic voltammetry, and electrochemical impedance spectroscopy. Among the as-prepared samples, $LiFe_{0.96}Ga_{0.04}PO_4$ demonstrates the best electrochemical properties in terms of discharge capacity, electrochemical reversibility, and cycling performance with an initial discharge capacity of $125mAh\;g^{-1}$ and high lithium ion diffusion coefficient of $1.38{\times}10^{-14}cm^2s^{-1}$ (whereas for $LiFePO_4$, these were $113mAh\;g^{-1}$ and $8.09{\times}10^{-15}cm^2\;s^{-1}$, respectively). The improved electrochemical performance can be attributed to the facilitation of Li+ ion effective diffusion induced by $Ga^{3+}$ substitution.

$In_{0.53}(Al_xGa_{1-x})_{0.47}As$의 전자와 정공 이동도의 실험식 추출 (Extraction of empirical formulas for electron and hole mobility in $In_{0.53}(Al_xGa_{1-x})_{0.47}As$)

  • 이경락;황성범;송정근
    • E2M - 전기 전자와 첨단 소재
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    • 제9권6호
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    • pp.564-571
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    • 1996
  • We calculated the drift-velocities of electrons and holes of I $n_{0.53}$(A $l_{x}$G $a_{1-x}$ )$_{0.47}$As, which is used for semiconductor materials of high performance HBTs, along with the various doping concentrations and Al mole fractions as well as the electric fields by Monte Carlo experiment. Especially, for the valence bands the accuracy of hole-drift-velocity was improved in the consideration of intervalley scattering due to the inelastic scattering of acoustic phonon. From the results the empirical formulas of the low- and high field mobility of electrons and holes were extracted by using nonlinear least square fitting method. The accuracy of the formulas was proved by comparing the formula of low-field electron mobility as well as drift-velocity of I $n_{0.53}$ G $a_{0.47}$As and of low-field hole mobility of GaAs with the measured values, where the error was below 10%. For the high-field mobilities of electron and hole the results calculated by the formulas were very well matched with the MC experimental results except at the narrow field range where the electrons produced the velocity overshoot and the corresponding error was about 30%.0%. 30%.0%.

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Preparation and Characterization of Doped $Fe_2O_3$ and GaAs Photosemiconductive Electrodes for $CO_2$ Fixation

  • Kim, Il Kwang;Lee, Seong Jae;Kim, Min Su;Jeong, Seung Il;Park, Byung Sun;Kim, Youn Geun
    • 분석과학
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    • 제8권4호
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    • pp.669-674
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    • 1995
  • The preparation and characterization of photosemiconductive electrodes of GaAs and of $Fe_2O_3$ doped with MgO or CaO were investigated. The doped $Fe_2O_3$ photosemiconductive electrodes were prepared from thin films sintered at temperatures from 1,100 to $1,450^{\circ}C$, and rapidly quenched in distilled water. The surfaces of the electrodes containing both corundum structure of $Fe_2O_3$ and spinel structure of $Mg_xFe_{3-x}O_4$ or $Ca_xFe_{3-x}O_4$ were analyzed by X-ray diffraction and scanning electron microscopy. The cathodic and anodic photocurrents on these electrodes indicated a critical doping amount of 5-11 wt. %. The photocurrents were enhanced when GaAs electrodes were treated with methylene violet the anodic photo-currents were temporarial enhanced and changed to the cathodic ptotocurrents after the surface was dryed.

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Fe가 Doping 된 LaGaO3 폐롭스카이트 혼합 전도체의 제조 및 코팅에 따른 산소투과 성능 향상 (Fabrication of Fe-doped LaGaO3 Perovskite Mixed Conductor and Improvement of Oxygen Permeability by Screen Printing Coating)

  • 임경태;조통래;이기성;우상국;박기배;김종원
    • 한국수소및신에너지학회논문집
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    • 제12권2호
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    • pp.137-146
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    • 2001
  • 고상 반응법을 이용하여 $La_{0.7}Sr_{0.3}Ga_{0.6}Fe_{0.4}O_{3-{\delta}}$ 분말을 합성하고 혼합전도체 분리막을 소결하여 제조하였다. 제조된 분리막은 $LaGaO_3$에 일치하는 폐롭스카이트 결정구조를 나타내었으며 95% 이상의 높은 상대밀도를 나타내었다. 스크린 프린팅 방법으로 $La_{0.6}Sr_{0.4}CoO_{3-{\delta}}$ 후막을 disk의 양 표면에 코팅하였으며 코팅 막은 비교적 치밀한 미세구조를 나타내었다. 코팅되지 않은 분리막과 코팅된 분리막의 산소투과 성능을 비교 실험한 결과 $850^{\circ}C$에서 동일한 두께의 코팅된 분리막의 정상상태 산소 투과 유속이 $0.7{m{\ell}}/min.cm^2$ 정도로 코팅되지 않은 분리막에 비해 약 2~3배로 높게 나타났다.

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