• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.100.2-100.2
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• 2015

반도체 산업이 성장하고 기술이 향상됨에 따라 소자의 소형화가 이루어지고 있다. 공정법으로는 atomic layer deposition (ALD), chemical vapor deposition (CVD) 등이 있다. 이러한 공정을 이용하여 수십 nm까지 미세화가 진행되고 있으며, 복잡한 구조의 박막을 실현하기 위해 전구체의 개발이 활발히 진행되고 있다. 전구체의 특성을 비실시간으로 분석하는 방법으로는 질량 분석법, 가스크로마토그래피, 적외선 분광법 등이 있다. 전구체의 특성을 실시간으로 분석하기 위해 Fourier transform infrared spectroscopy (FTIR)내에 attenuated total reflectance (ATR)를 거치시켰다. 본 연구는 구조를 개선한 ATR-FTIR을 이용하여 Tris-(dimethylamino) Zirconium (CpZr) 전구체의 흡착 거동을 분석하였다. ATR용 crystal은 Ge crystal을 사용했으며, 온도를 각각 30, 40, $50^{\circ}C$에서 CpZr 전구체의 흡착특성을 연구했다. 흡착성을 증가시키기 위해 Ge crystal 표면에 $ZrO_2$나노입자를 분포시켜 흡착특성을 비교 분석하였다. 또한 CpZr 전구체가 흡착된 Ge crystal 표면에 오존가스를 주입시킨 후 변화를 관찰하였다. Ge crystal표면에 나노입자를 분포시켜 CpZr 전구체를 흡착한 결과 나노입자를 분포시키지 않았을 때 보다 흡착강도가 높게 나타났다. 또한 CpZr 전구체가 흡착된 Ge crystal 표면에 오존가스를 주입한 결과 C-H 결합이 분해됨을 확인했다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.199-200
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• 2009

This paper describes the electrical properties of polycrystalline (poly) 3C-SiC thin films with different nitrogen doping concentrations. The in-situ-doped poly 3C-SiC thin films were deposited by using atmospheric-pressure chemical vapor deposition (APCVD) at $1200^{\circ}C$ with hexamethyldisilane (HMDS: $Si_2$ $(CH_3)_6)$ as a single precursor and 0 ~ 100 sccm of $N_2$ as the dopant source gas. The peaks of the SiC (111) and the Si-C bonding were observed for the poly 3C-SiC thin films grown on $SiO_2/Si$ substrates by using X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FT-IR) analyses, respectively. The resistivity of the poly 3C-SiC thin films decreased from $8.35\;{\Omega}{\cdot}cm$ for $N_2$ of 0 sccm to $0.014\;{\Omega}{\cdot}cm$ with $N_2$ of 100 sccm. The carrier concentration of the poly 3C-SiC films increased with doping from $3.0819\;{\times}\;10^{17}$ to $2.2994\;{\times}\;10^{19}\;cm^{-3}$, and their electronic mobilities increased from 2.433 to $29.299\;cm^2/V{\cdot}S$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.292-292
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• 2009

OLED(Organic Light Emitting Device)는 LCD(Liquid Crystal Display)의 뒤를 잇는 차세대 디스플레이의 선두주자로서 자체발광형이기 때문에 백라이트 등의 보조광원이 불필요하며, 구동전압이 낮고 넓은 시야각과 빠른 응답속도 등의 특징을 가지고 있다. 또한 플렉서블 기판을 사용할 수 있어 차세대 디스플레이인 플렉서블 디스플레이에 적합하다. 플렉서블한 디스플레이를 만들기 위해서 플라스틱 기판에 OLED 물질을 사용하여 기존에 무겁고, 깨지기 쉬우며, 변형이 불가능한 유리로 만든 소자 보다 더 가볍고 깨지지 않고 변형이 가능한 플렉서블 디스플레이를 제작 할 수 있다. 그러나 플라스틱 기판은 매우 큰 투습율을 가지고 있어 OLED소자에 적용시키면 공기 중의 수분이나 산소와 접촉이 많아져 쉽게 산화되어 소자의 효율 및 수명이 짧아진다. 또한 OLED에 사용되는 유기물도 산소나 수분에 의해 특성이 급격히 저하되기 때문에 산소 및 수분의 차단은 필수적이다. 이러한 단점을 최소화하기 위해서 PECVD(Plasma Enhanced Chemical Vapor Deposition)로 만든 SiON(Silicon Oxynitride) 박막을 차단막(Passivation layer)으로 사용하였다. PECVD를 이용하여 SiON 박막을 증착시킬 때 RF Power, 공정압력, Distance의 변화에 따른 박막의 결정화도, 수분투습도, 광투과도 등의 특성을 FT-IR(Fourier Transform Infrared Spectroscopy), Ellipsometer, UV-visible Spectrophotometer, MOCON를 이용하여 SiON 박막의 특성을 고찰하였다.

• 한국염색가공학회지
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• 제20권6호
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• pp.8-17
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• 2008

Poly (vinyl acetate) (PVAc) was used as a precursor of PVA/PVAc (skin/core) bicomponent. In order to investigate the possibility of PVA particles for electrical applications, PVA/PVAc particles were produced with an emulsifier, SDS (Sodium Dodecyl Sulfate) and an initiator, V-50 (2,2'-azobis(2-amidinopropane)digydrochloride). In this study, we investigated the electrical property of PVA/PVAc (skin/core) particles. The hydroxyl group of the PVA/PVAc (skin./core) was confirmed by the analysis of PVAc and PVA/PVAc (skin/core) using Fourier Transform Infrared Spectroscopy (FT-IR). The zeta-potential of the PVA/PVAc (skin/core) and PVAc has similarity; however, charge control agent (CCA) treated PVA/PVAc (skin/core) particles has lower zeta-potential than untreated PVA/PVAc particles. The zeta-potential (negative values) of the PVA/PVAc (skin/core) were enhanced in proportion to the increased concentration of CCA.

• 한국염색가공학회지
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• 제17권3호
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• pp.16-25
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• 2005

In this research, we investigated hydrolysis of the ester crosslinking on cotton fabric treated with polymer of maleic acid(PMA), citric acid(CA) and combination of polymer of maleic acid and citric acid using Fourier transform infrared spectroscophy. The rate of hydrolysis of the ester crosslinkage increased with pH regardless of the type of polycarboxylic acid used and even after hydrolysis for 256 hour in pH 13_4 solution, the treated fabric retained $10-20\%$ ester crosslinkage. The durability to alkaline hydrolysis of the ester crosslinkage formed by CA was lower than that of by PMA and combination of poly(maleic acid) and citric acid indicating that the ester formed by CA on the cotton fabric is more susceptible to hydrolysis than that formed by PMA and combination of PMA and CA. The total amount of ester and polycarboxylic acid molecules removed from fabric increased with increasing hydrolysis time but the rate of hydrolysis of ester linkage were higher than that of removal of polycarboxylic acid molecule from the fabric. The characteristic of hydrolysis of fabric treated with combination of PMA and CA was related with the mixing ratio of PMA and CA in treating fabric.

• 접착 및 계면
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• 제10권1호
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• pp.17-22
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• 2009

Polymer thin films were prepared by radio frequency (RF) plasma polymerization of phthalic anhydride (PA). First, monomer vaporization temperature ($100{\sim}160^{\circ}C$) was optimized by evaluating the thermal properties of thin films using differential scanning calorimeter (DSC) and measuring the root-mean-square (RMS) roughness with atomic force microscope (AFM) at the fixed plasma power of 10 W and time of 5 min in a continuous-wave (CW) mode. Plasma power (5~20 W) was then optimized by measuring the film solubility in solvents such as toluene, acetone, dimethylsulfoxide (DMSO) and 1 methylpyrrolidine (NMP). Next, pulsed mode plasma polymerization was also studied by varying the duty cycle of on-time (5, 20%) under optimized conditions of continuous-wave (CW) mode ($120^{\circ}C$, 10 W) in order to increase the anhydride functional groups. Finally, polymer thin films were characterized by Fourier transform infrared spectroscopy (FT-IR), thermogravimetric analyzer (TGA) and ${\alpha}$-step.

• Korean Chemical Engineering Research
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• 제52권2호
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• pp.209-213
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• 2014

A graft copolymer of poly(vinyl chloride)-g-poly(oxyethylene methacrylate) (PVC-g-POEM) was synthesized via atom transfer radical polymerization (ATRP) and used as a structure-directing agent to prepare $Al@Fe_2O_3$ core-shell nanocomposites through a sol-gel process. The amphiphilic property of PVC-g-POEM allows for good dispersion of Al particles and leads to specific interaction with iron ethoxide, a precursor of $Fe_2O_3$. Secondary bonding interaction in the sol-gel composites was characterized by Fourier transform-infrared (FT-IR) spectroscopy. The well-organized morphology of $Al@Fe_2O_3$ core-shell nanocomposites was observed using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Energy dispersive X-ray (EDX) and X-ray diffraction (XRD) were used to analyze the elemental composition and crystallization structure of the composites.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.137-137
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• 2008

In-situ doped polycrystalline 3C-SiC thin films were deposited by APCVD at $1200^{\circ}C$ using HMDS(hexamethyildisilane: $Si_2(CH_3)_6)$) as Si and C precursor, and 0 ~ 100 sccm $N_2$ as the dopant source gas. The peak of SiC is appeared in polycrystalline 3C-SiC thin films grown on $SiO_2$/Si substrates in XRD(X-ray diffraction) and FT-IR(Fourier transform infrared spectroscopy) analyses. The resistivity of polycrystalline 3C-SiC thin films decreased from 8.35 $\Omega{\cdot}cm$ with $N_2$ of 0 sccm to 0.014 $\Omega{\cdot}cm$ with 100 sccm. The carrier concentration of poly 3C-SiC films increased with doping from $3.0819\times10^{17}$ to $2.2994\times10^{19}cm^{-3}$ and their electronic mobilities increased from 2.433 to 29.299 $cm^2/V{\cdot}S$, respectively.

• 한국세라믹학회지
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• 제49권1호
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• pp.111-117
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• 2012

Dependencies of thermal properties on the crystallization behavior of $0.9CaMgSi_2O_6-0.1MgSiO_3$ glass-ceramics were investigated as a function of heat-treatment temperature from $750^{\circ}C$ to $950^{\circ}C$. The crystallization behavior of the specimens depended on the heat-treatment temperature, which could be evaluated by differential thermal analysis (DTA), Fourier transform infrared spectroscopy (FT-IR), and X-ray diffraction (XRD) analysis by the Rietveld-reference intensity ratio (RIR) combined procedure. With an increase of the heat-treatment temperature, the thermal conductivity and thermal diffusivity of the heat-treated specimens increased. These results could be attributed to the increase of crystallization with heat-treatment temperature. However, the specific heat capacity of the heat-treated specimens was not affected by the heat-treatment temperature. The thermal conductivities measured from $25^{\circ}C$ to $100^{\circ}C$ were also discussed for application to lighting-emitting diode (LED) packages and substrate materials.

• 한국세라믹학회지
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• 제47권4호
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• pp.302-307
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• 2010

This study aims to synthesize emerald-green malayaite pigments using $CaCO_3$, $SiO_2$, $SnO_2$ and $V_2O_5$. For this purpose, the optimum composition is $CaV_{0.25}Sn_{0.687}SiO_5$ and heating condition is at $1250^{\circ}C$ for 6 h of soaking time. The samples were characterized by X-ray diffraction (XRD), the Fourier Transform Infrared Spectrometers(FT-IR), the Raman Spectrometer, Scanning Electron Microscope(SEM) and the UV/Vis spectroscopy. The substituted V ion for Sn was observed to be quadrivalence. The analytical results of the synthesized pigment showed the tetragonal crystal, a typical form of Malayaite, and the particle size to be approximately $5{\sim}10\;{\mu}m$. The color in lime glaze added 12 wt% pigment was emerald green, and CIE Lab parameters are $L^*=67.73$, $a^*=-12.39$ and $b^*=9.28$.