• Title/Summary/Keyword: Formation/dissociation

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Investigation of PEG(polyethyleneglycol) Removal Mechanism during UV/O2 Gas Phase Cleaning for Silicon Technology (UV/O2 가스상 세정을 이용한 실리콘 웨이퍼상의 PEG 반응기구의 관찰)

  • Kwon, Sung-Ku;Kim, Do-Hyun;Kim, Ki-Dong;Lee, Seung-Heun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.11
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    • pp.985-993
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    • 2006
  • An experiment to find out the removal mechanism of PEG(polyethyleneglycol) by using UV-enhanced $O_2$ GPC (gas phase cleaning) at low substrate temperature below $200^{\circ}C$ was executed under various process conditions, such as substrate temperature, UV exposure, and $O_2$ gas. The possibility of using $UV/O_2$ GPC as a low-temperature in-situ cleaning tool for organic removal was confirmed by the removal of a PEG film with a thickness of about 200 nm within 150 sec at a substrate temperature of $200^{\circ}C$. Synergistic effects by combining photo-dissociation and photo oxidation can only remove the entire PEG film without residues within experimental splits. In $UV/O_2$ GPC with substrate temperatures higher than the glass transition temperature, the substantial increase in the PEG removal rate can be explained by surface-wave formation. The photo-dissociation of PEG film by UV exposure results in the formation of end aldehyde by dissociation of back-bone chain and direct decomposition of light molecules. The role of oxygen is forming peroxide radicals and/or terminating the dis-proportionation reaction by forming peroxide.

Photofragment Translational Spectroscopy of CH₂I₂ at 304 nm: Polarization Dependence and Energy Partitioning

  • 정광우;Temer S. Ahmadi;Mostafa A. El-Sayed
    • Bulletin of the Korean Chemical Society
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    • v.18 no.12
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    • pp.1274-1280
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    • 1997
  • The photodissociation dynamics of CH2I2 has been studied at 304 nm by state-selective photofragment translational spectroscopy. Velocity distributions, anisotropy parameters, and relative quantum yields are obtained for the ground I(2P3/2) and spin-orbit excited state I*(2P1/2) iodine atoms, which are produced from photodissociation of CH2I2 at this wavelength. These processes are found to occur via B1 ← A1 type electronic transitions. The quantum yield of I*(2P1/2) is determined to be 0.25, indicating that the formation of ground state iodine is clearly the favored dissociation channel in the 304 nm wavelength region. From the angular distribution of dissociation products, the anisotropy parameters are determined to be β(I)=0.4 for the I(2P3/2) and β(I*)=0.55 for the I*(2P1/2) which substantially differ from the limiting value of 1.13. The positive values of anisotropy parameter, however, show that the primary processes for I and I* formation channels proceed dominantly via a transition which is parallel to I-I axis. The above results are interpreted in terms of dual path formation of iodine atoms from two different excited states, i.e., a direct and an indirect dissociation via curve crossing between these states. The translational energy distributions of recoil fragments reveal that a large fraction of the available energy goes into the internal excitation of the CH2I photofragment; < Eint > /Eavl=0.80 and 0.82 for the I and I* formation channels, respectively. The quantitative analysis for the energy partitioning of available energy into the photofragments is used to compare the experimental results with the prediction of direct impulsive model for photodissociation dynamics.

Stability Constants of Copper Sulfa-Drug Complexes in Dimethylformamide Aqueous Solution (Dimethylformamide 수용액중에서의 Sulfa제-Cu 착화합물의 안정도정수)

  • 이왕규
    • YAKHAK HOEJI
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    • v.9 no.1_2
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    • pp.4-7
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    • 1965
  • Acid dissociation constants of sulfamethoxypyridazine, sulfadimethoxine, sulfamerazine, sulfathiazole and sulfadiazine, and stability constants for formation of copper chelate were calculated from their titration curves in 80% dimethylformamide with ionic strength 0.1 at $25{\deg}$ It was found that the acid dissociation constants (pKa) of sulfa-drugs were in the range of 9.33 - 10.05, and the stability constants (log $k_{1}$, $k_{2})$ of their copper chelates were in the range of 9.33-9.71.

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Study on $SF_6$ hydrate Formation and Dissociation Behavior inside of Bench-scale High Pressure Reactor (Bench-scale 고압반응기 내의 미세액적분사에 따른 $SF_6$ 하이드레이트 형성 거동 연구)

  • Moon, Dong-hyun;Lee, Jae-jeong;Shin, Hyung-Joon;Lee, Ju-Dong;Lee, Gang-Woo
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.687-690
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    • 2009
  • 본 연구에서는 가스 하이드레이트 형성과정에서 발생할 수 있는 유도지체시간을 줄이고 전체 가스 저장량과 반응 속도의 향상을 위하여 이류체 분사 방식을 이용하여 물분자의 액적을 최소화하는 실험을 통하여, 미세액적 분사에 따른 하이드레이트 형성 시간을 확인하였으며, 반응기 내부의 온도 변화를 확인하여 반응기 내부의 하이드레이트 형성 거동을 확인하고 이를 통하여 상용화를 위한 반응기 설계의 기초 자료로 활용하고자 하였다.

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Investigation on the Self-preservation Effect of Natural Gas Hydrates (천연가스 하이드레이트의 자기보존 효과 연구)

  • Lee, Jong-Won;Lee, Ju Dong
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.123.2-123.2
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    • 2011
  • Self-preservation effect was identified by means of macroscopic dissociation experiments after keeping natural gas hydrate samples at 258 K for 15 days. The hydrate samples were formed using synthetic natural gas hydrate whose compositions are 90% $CH_4$, 7% $C_2H_6$, and 3% $C_3H_8$. In addition, during the formation, heavy hydrocarbons of propane and ethane are found to occupy hydrate cages in a more favorable way than methane so as to change the gas composition after hydrate formation. Experimental results obtained in this study can provide useful information on applications of natural gas hydrate for storing or transporting natural gas in the form of solid hydrate.

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Low Temperature Dissociation of SiOx by Gold

  • Lee, Gyeong-Jae;Yang, Mi-Hyeon;Yogesh, Kumar;Im, Gyu-Uk;Gang, Tae-Hui;Jeong, Seok-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.140.1-140.1
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    • 2013
  • The native silicon-oxide (SiOx) layer at the metal/Silicon interface acts as an electrical resistance to the metal contact of devices. Various methods are proposed for removing this layer, such as sputtering before metal contact formation or high temperature annealing. We studied the chemical evolution of the Au/SiOx/Si system during the annealing at $500^{\circ}C$ using a spatially resolved photoelectron emission method. Scanning photoelectron emission microscopy (SPEM) and core level spectra from local area of the sample show the inhomogeneous oxidation and formation of silicide of Au, as well as valence band spectra reveals the role of Au atoms during the dissociation process of SiOx.

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Decarbonylation of the 2-Hydroxypyridine Radical Cation: A Computational Study

  • Choe, Joong Chul
    • Bulletin of the Korean Chemical Society
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    • v.35 no.10
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    • pp.3021-3024
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    • 2014
  • The potential energy surface (PES) for the dissociation of the 2-hydroxypyridine (2-HP) radical cation was determined from G3//B3LYP calculations, including the loss of CO, HCN, and HNC. The formation of the 1H-pyrrole radical cation by decarbonylation through a more stable tautomer, the 2-pyridone (2-PY) radical cation, was the most favorable dissociation pathway. Kinetic analysis by the Rice-Ramsperger-Kassel-Marcus model calculations was carried out based on the obtained PES. It is proposed that the dissociation occurs after a rapid tautomerization to 2-$PY^{{\cdot}+}$, and that most of the ions generated by ionization of 2-HP have the structure of 2-$PY^{{\cdot}+}$ at equilibrium above the tautomerization barrier.

Absorbtion Spectroscopy, Molecular Dynamics Calculations, and Multivariate Curve Resolution on the Phthalocyanine Aggregation

  • Ajloo, Davood;Ghadamgahi, Maryam;Shaheri, Freshte;Zarei, Kobra
    • Bulletin of the Korean Chemical Society
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    • v.35 no.5
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    • pp.1440-1448
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    • 2014
  • Co(II)-tetrasulfonated phthalocyanine (CoTSP) is known to be aggregated to dimer at high concentration levels in water. A study on the aggregation of CoTSP using multivariate curve resolution analysis of the visible absorbance spectra over a concentration range of 30, 40 and 50 ${\mu}M$ in the presence of dimethyl sulfoxide (DMSO), dimethyl formamide (DMF), acetonitrile (AN) and ethanol (EtOH) in the concentration range of 0 to 3.57 M is conducted. A hard modeling-based multivariate curve resolution method was applied to determine the dissociation constants of the CoTSP aggregates at various temperatures ranging from 25, 45 and $65^{\circ}C$ and in the presence of various co-solvents. Dissociation constant for aggregation was increased and then decrease by temperature and concentration of phthalocyanine, respectively. Utilizing the vant Hoff relation, the enthalpy and entropy of the dissociation equilibriums were calculated. For the dissociation of both aggregates, the enthalpy and entropy changes were positive and negative, respectively. Molecular dynamics simulation of cosolvent effect on CoTSP aggregation was done to confirm spectroscopy results. Results of radial distribution function (RDF), root mean square deviation (RMSD) and distance curves confirmed more effect of polar solvent to decrease monomer formation.

Dissociation of the Phenylarsane Molecular Ion: A Theoretical Study

  • Kim, Sun-Young;Choe, Joong-Chul
    • Bulletin of the Korean Chemical Society
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    • v.31 no.9
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    • pp.2588-2592
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    • 2010
  • The potential energy surfaces (PESs) for the primary and secondary dissociations of the phenylarsane molecular ion (1a) were determined from the quantum chemical calculations using the G3(MP2)//B3LYP method. Several pathways for the loss of $H{\cdot}$ were determined and occurred though rearrangements as well as through direct bond cleavages. The kinetic analysis based on the PES for the primary dissociation showed that the loss of $H_2$ was more favored than the loss of $H{\cdot}$, but the $H{\cdot}$. loss competed with the $H_2$ loss at high energies. The bicyclic isomer, 7-arsa-norcaradiene radical cation, was formed through the 1,2 shift of an $\alpha$-H of 1a and played an important role as an intermediate for the further rearrangements in the loss of $H{\cdot}$ and the losses of $As{\cdot}$ and AsH. The reaction pathways for the formation of the major products in the secondary dissociations of $[M-H]^+$ and $[M-H_2]^{+\cdot}$. were examined. The theoretical prediction explained the previous experimental results for the dissociation at high energies but not the dissociation at low energies.