• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.9 s.252
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• pp.1160-1165
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• 2006

In this paper, the 2-dimensional uniaxial force sensors array is introduced to detect the distributed force using fiber Bragg gratings. Uniaxial force transducer was designed to avoid the chirping and micro bending which degrade the performance of the sensor. The Brags wavelength shift of the sensor was estimated using the finite element analysis. Using this uniaxial force sensor, the uniaxial force sensors array $(3{\times}3)$ was fabricated, and the Performance of this sensors array was evaluated. The Presented sensors may has very simple configuration and its wiring is very simple compared with any other force sensors arrays.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.121-126
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• 2012

Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is $200{\mu}m$ and $190{\mu}m$, respectively. The gap between sensing elements is only $10{\mu}m$. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with $10{\mu}m$ alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1035-1036
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• 2013

• Journal of Sensor Science and Technology
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• v.11 no.4
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• pp.200-208
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• 2002

This paper represents the development of an array-type flexible tactile sensor using PVDF(polyvinylidene fluoride) film and flexible circuitry. The tactile sensor which has $8{\times}8$ taxels is made by using PVDF film and FPC(flexible printed circuit) technique. Experimental results on static and dynamic properties are obtained by applying arbitrary forces and frequencies generated by the shaker. In the static characteristics, the threshold and the linearity of the sensor are investigated. Also dynamic response of the sensor subjected to the variable frequencies is examined. The signals of a contact force to the tactile sensor are sensed and processed in the DSP system in which the signals are digitalized and filtered. Finally, the signals are integrated for taking the force profile. The processed signals of the outputs of the sensor are visualized on a personal computer, the shape and force distribution of the contacted object are obtained using two and three-dimensional image in real time. The reasonable performance for the detection of contact state is verified through the experiment.

• Journal of Mechanical Science and Technology
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• v.16 no.10
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• pp.1222-1228
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• 2002

This research is the development of a flexible tactile sensor array for service robots using PVDF (polyvinylidene fluoride) film for the detection of a contact state in real time. The prototype of the tactile sensor which has 8${\times}$8 array using PVDF film was fabricated. In the fabrication procedure, the electrode patterns and the common electrode of the thin conductive tape were attached to both sides of the 281$\mu\textrm{m}$ thickness PVDF film using conductive adhesive. The sensor was covered with polyester film for insulation and attached to the rubber base for a stable structure. The proposed fabrication method is simple and easy to make the sensor. The sensor has the advantages in the implementing for practical applications because its structure is flexible and the shape of the each tactile element can be designed arbitrarily. The signals of a contact force to the tactile sensor were sensed and processed in the DSP system in which the signals are digitized and filtered. Finally, the signals were integrated for taking the force profile. The processed signals of the output of the sensor were visualized in a personal computer, and the shape and force distribution of the contact object were obtained. The reasonable performance for the detection of the contact state was verified through the sensing examples.

• Journal of the Korean institute of surface engineering
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• v.52 no.5
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• pp.239-245
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• 2019

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause large discrepancies of contact force and feature sizes. We report a capacitive proximity sensor built-in with the TBN array for leveling an arrayed polymer pen array. The device allows alignment between an array of writing tips and the writing substrate without contact and contamination. The angular sensitivity of the sensor is $0.05^{\circ}$ for an array with maximum tip-to-tip separation of 100 mm.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.552-555
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• 1996

In this paper, we present a force control of a five-axes robot, using an impedance model. Tasks such as assembly, grinding, and deburring, which involve extensive contact with the environment, are better handled by controlling the forces of interaction between the manipulator and the environment. The five-link articulated robot is equipped with a wrist force sensor which consists of an array of strain gauges and can delineate the three components of the vector force along the three axes of the sensor coordinate frame, and the three components of the torque about these axes. For the precise control of the contact force, impedance models of a robot and the environment are defined. Experimental results are shown.

• Journal of Sensor Science and Technology
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• v.13 no.5
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• pp.378-382
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• 2004

A micromachined fluidic structure for the introduction of liquid samples into a chip-based sensor array composed of individually addressable polymeric microbeads has been developed. The structure consists of a separately attached cover glass, a single silicon chip having micromachined channels and microbead storage cavities, and a glass carver. In our sensor array, transduction occurs via colorimetric and fluorescence changes to receptors and indicator molecules that are covalently attached to termination sites on the polymeric microbeads. Data streams are acquired for each of the individual microbeads using a CCD. One of the key parts of the structure is a passive fluid introduction system driven only by capillary force. The velocity of penetration of a horizontal capillary for the device having a rectangular cross section has been derived, and it is quite similar to the Washburn Equation calculated for a pipe with a circular cross section having uniform radius. The test results show that this system is useful in a ${\mu}$-TAS and biomedical applications.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.142-149
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• 2009

This paper proposes and demonstrates novel flexible contact force sensing devices for 3-dimensional force measurement. To realize the sensor, polyimide and polydimethylsiloxane are used as a substrate, which makes it flexible. Thin-film metal strain gauges, which are incorporated into the polymer, are used for measuring the three-dimensional contact forces. The force sensor characteristics are evaluated against normal and shear load. The fabricated force sensor can measure normal loads up to 4N. The sensor output signals are saturated against load over 4N. Shear loads can be detected by different voltage drops in strain gauges. The device has no fragile structures; therefore, it can be used as a ground reaction force sensor for balance control in humanoid robots. Four force sensors are assembled and placed in the four corners of the robot's sole. By increasing bump dimensions, the force sensor can measure load up to 20N. When loads are exerted on the sole, the ground reaction force can be measured by these four sensors. The measured forces can be used in the balance control of biped locomotion system.

• Journal of Electrical Engineering and Technology
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• v.13 no.4
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• pp.1732-1739
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• 2018

With the explosion of digital devices, interaction technologies between human and devices are required more than ever. Especially, hand gesture recognition is advantageous in that it can be easily used. It is divided into the two groups: the contact sensor and the non-contact sensor. Compared with non-contact gesture recognition, the advantage of contact gesture recognition is that it is able to classify gestures that disappear from the sensor's sight. Also, since there is direct contacted with the user, relatively accurate information can be acquired. Electromyography (EMG) and force-sensitive resistors (FSRs) are the typical methods used for contact gesture recognition based on muscle activities. The sensors, however, are generally too sensitive to environmental disturbances such as electrical noises, electromagnetic signals and so on. In this paper, we propose a novel contact gesture recognition method based on Flexible Epidermal Tactile Sensor Array (FETSA) that is used to measure electrical signals according to movements of the wrist. To recognize gestures using FETSA, we extracted feature sets, and the gestures were subsequently classified using the support vector machine. The performance of the proposed gesture recognition method is very promising in comparison with two previous non-contact and contact gesture recognition studies.