• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.65-66
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• 2013

최근 개발된 수치해석 알고리즘 및 RF sheath 모델을 적용하여 반도체 식각 공정용 공간 평균 시뮬레이터를 개발하였다. 개발된 시뮬레이터는 전자가열 모듈, 수송 모듈, 그리고 RF sheath 모듈로 구성된다. 유도결합 플라즈마원에 대한 전자가열모듈은 비충돌 과정인 anomalous skin effect가 포함된 Yoon의 모델을 적용하였고, 축전결합 플라즈마원에 대해서는 RF sheath 모델을 수치적으로 풀어 흡수된 파워를 결정하고 수송 모듈과 일관성을 잃지 않게 결합되었다. RF sheath 모듈에서는 Dai의 collisonless sheath 모듈을 적용하였고 RF 펄싱이 적용될 수 있도록 확장하였다. 특히, 식각 공정에 사용되는 fluorocarbon 플라즈마에 대한 데이터베이스를 개발하였고, 또한 진단 데이터와의 비교를 통해 데이터베이스를 최적화하였다.

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.134-139
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• 1998

Amorphous fluorocarbon (a-C:F) is of interest for low dielectric interlayer material, but in this work we applied this material to FED field emitter. N-doped a-C:F films were deposited by inductively coupled plasma chemical vapor deposition (ICPCVD). The Raman spectra were measured to study the film structure and inter-band optical absorption coefficients were measured using Perkin-Elmer UV-VIS-IR spectrophotometer and optical band gap was obtained using Tauc's plot. XPS spectrum and AFM image were investigated to study bond structure and surface morphology. Current-electric field(I-E) characteristic of the film was measured for the characterization of electron emission properties. The optimum doping concentration was found to be [N2]/[CF4]=9% in the gas phase. The turn-on field and the emission current density at $[N_2]/[CF_4]$=9% were found to be 7.34V/$\mu\textrm{m}$ and 16 $\mu\textrm{A}/\textrm{cm}^2$ at 12.8V/$\mu\textrm{m}$, respectively.

• Journal of Electrical Engineering and Technology
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• v.7 no.1
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• pp.91-96
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• 2012

We introduce an understanding of silver (Ag) inkjet overlap-printing characteristics from the viewpoints of cohesion between ink droplets and adhesion between an ink droplet and a surface. The printing characteristics were closely monitored by changing the surface energy to elucidate the effect of adhesion and cohesion on printing instability, such as droplet merging and line bulging. The surface energy of the substrate was changed through the hydrophilization of a hydrophobic fluorocarbon-coated surface. The surface energy and ink wettability of the prepared surfaces were characterized using sessile drop contact angle analysis, and printing instability was observed using an optical microscope after drop-on-demand inkjet printing with a 50% overlap in diameter of deposited singlet patterns. We found that the surface energy is not an appropriate indicator based on the experimental results of Ag ink printing on a hydrofluoric-treated silicon surface. The analytical approach using adhesion and cohesion was helpful in understanding the instability of the inkjet overlap-printing, as adhesion and cohesion represent the direct interfacial relationship between the Ag inks used and the substrate.

• Bulletin of the Korean Chemical Society
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• v.16 no.6
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• pp.493-498
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• 1995

Ultrathin networks of itaconic acid copolymers and poly(allylamine) were produced by a Langmuir-Blodgett (LB) technique employing a double-chain amine as a monolayer template which was subsequently removed by extraction after thermal crosslinking. Itaconic acid copolymers used were copoly (itaconic acid-ethyl vinyl ether) and copoly (itaconic acid-n-butyl vinyl ether). The polyion-complexed monolayers of three components consisting of template amine, itaconic acid copolymer and poly (allylamine) were formed at the air-water interface. The Langmuir film properties have been studied by the surface pressure-area isotherm and fluorescence microscopy. The monolayers were transferred on solid substrates and were characterized by FT-IR spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy (SEM). Two-dimensional polymer networks were formed through imide or amide linkages by heat treatment under vacuum. The heat-treated films were extracted with chloroform after immersion in aq. sodium chloride to remove the template amines. SEM observation of a LB film on a porous fluorocarbon membrane filter with pore diameter of 0.1 μm showed covering of the pores by six layers in the polyion complex state.

• Bulletin of the Korean Chemical Society
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• v.16 no.12
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• pp.1167-1172
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• 1995

A coverage of about 1 μm-sized pores of a membrane filter by four monolayers of maleic acids copolymers and poly(allylamine) (PAA) was attained by Langmuir-Blodgett (LB) technique through a covalent cross-linking followed a polyion complexation at the air-water interface. The copolymers were prepared to have side chains of hydrocarbon tail, carboxyl, and/or oligoether in the repeat unit. The surface pressure-area isotherms showed that the monolayers on an aqueous PAA have more expanded area than on pure water. The monolayers were transferable on a calcium fluoride substrate and a fluorocarbon membrane filter as Y deposition type, and the resulting LB films were characterized by FT-IR spectroscopy and scanning electron microscopy. A polymer network produced through interchain amide formation was confirmed in as-deposited films. The films were heat-treated in order to complete the cross-linking. SEM observation of the heat-treated film on a porous membrane filter showed that the four layer film was sufficiently stable to cover the filter pore of about 1 μm. Immersion of the film in water or in chloroform did not cause any change in its appearance on SEM and in FT-IR spectra.

• International Journal of Air-Conditioning and Refrigeration
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• v.15 no.4
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• pp.182-190
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• 2007

Refrigeration and air-conditioning equipments are indispensable products in this civilized society. However, discharged refrigerants used in the equipments and exhausted carbon dioxide to drive the refrigeration and air-conditioning equipments are related to serious environmental problems and energy problems. Especially, the destroyed ozonosphere by the discharged refrigerants and the increased normal temperature by carbon dioxide and fluorocarbon refrigerants (green house gases) are sounded as serious global problems. For alleviating these problems, environmental-friendly refrigeration and air-conditioning equipments must be developed and will spread soon. To develop new equipment, a suitable refrigerant for each usage must be presented. In this paper, the current state of refrigerants was introduced. And, thermophysical properties of the refrigerants were introduced briefly. From the properties, the refrigerants and refrigeration cycles are promising to be used in the future, were proposed

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.915-922
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• 2017

The study on the thermal and oil resistance rubber composite, 2016. [6] predicted the lifetime of Fluorocarbon Rubber by accelerating aging at high temperature ($150^{\circ}C$, $175^{\circ}C$, $200^{\circ}C$). general rubber products are likely to exhibit different properties depending on the degradation factors such as temperature, humidity, ozone, light, emulsion, mechanical and electrical stress. To solve these problems, We compared the rate of change about tensile strength, elongation rate, volume change rate, weight change rate, thickness change rate, thermal conductivity in low temperature promoting aging on the basis of predictive lifetime of high temperature promoting aging. As a result of the review, the required life expectancy was satisfied, but there was a slight difference in the rate of change between the high-temperature promoted aging life result and the low temperature promoted aging life result. The cause was a reduction in "tensile strength / elongation" and an increase in "volume / weight / thickness" caused by the main chain decomposition of fluorine rubber due to aging at high temperature promoting aging. However, the low temperature promoting aging was caused by the curing reaction of fluorine rubber at $80^{\circ}C$. The tensile strength / elongation and volume / weight / thickness changes were small.

• Transactions on Electrical and Electronic Materials
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• v.2 no.1
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• pp.1-6
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• 2001

$C_{x}F_{y}$ polymer film was deposited in rf and dc Fluorinert vapor ($C_{7}F_{16}$) plasmas. In the plasma phase, the spatial distribution of optical emission spectra and the temporal concentration of decomposed species were monitored, and kinetics of the $C_{7}F_{16}$ decomposition process was discussed. Deposition of $C_{x}F_{y}$ film has been tried on substrates of stainless steel, glass, molybdenum and silicon wafers at room temperature in the vapor pressures of 40 and 100 Pa. The films deposited in the rf plasma showed excellent electrical properties as an insulator for multi-layered interconnection of deep-submicron LSI, i.e. the low dielectric constant ∼2.0, the dielectric strength ∼2 MV/cm and the high deposition rate ∼100nm/min at 100W input power.

• Electrical & Electronic Materials
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• v.9 no.2
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• pp.180-187
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• 1996

The use of preformed copolymers and their cross-linking have been attempted in order to improve the intrinsic fragility of monolayers and Langmuir-Blodgett (LB) films and to make their technological applications. It has shown that an imidization followed a polyion-complexation can stabilize the LB films against heat and solvents. And, when the polymer structure was properly designed, concurrent removal of the alkyl tails together with imide formation could be accomplished. In this paper, the monolayers of the polymers which were polyion-complexed with PAA at the air-water interface can be transferred onto solid substrates such as porous fluorocarbon membranes filter and quartz crystal microbalance. The properties of the monolayers and the LB films will be discussed by .pi.-A isotherms, FT-IR, DSC, deposition ratio, QCM, and SEM. In addition, it was attempted to investigate the response characteristics of polymer LB films to the organic gases by the use of QCM.

• Design & Manufacturing
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• v.6 no.1
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• pp.24-28
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• 2012

Friction and wear affect all processes involved in the extraction of materials and their conversion into finished products in the die applications such as drawing, extrusion etc. Originating phenomenon from the contact surface between the tool and workpiece, they are usually a hindrance to materials process operations which usually result in damaging the tools, increasing energy consumption, the contamination of processed material by wear particles and also some problems associated with technologies to control friction and wear. The most well established method to control friction and wear is by the application of lubricant such as fluorocarbon. Besides, a surface technique so-called surface modification can be applied to solve the tribology problems of the die applications for both the economical and ecological reasons. In this article, we applied DLC(diamond-like carbon) thin film on alumina ceramic for HT test using the PIID(plasma ion immersion deposition), 4 groups of test specimens were tested up to $200^{\circ}C$ which is a little higher than the normal working temperature of die application. Pin-on-disc tribo-tester was used to test the friction and surfaces were characterized by SEM and EDS and else, the morphology changes of DLC coatings were studied. The present work indicated that the DLC had a great potential to reduce the friction and wear in the alumina die application without lubricants.