• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1993.11a
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• pp.109-111
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• 1993

We reported the fabrication and thermal cross-linking of the LB files on porous substrates. The monolayers of the polymers which polyion-conplexed with PAA at the air-water interface can be transferred onto solid substrates such as porous fluorocarbon membrane filter and quartz crystal microbalance. The properties of the monolayers and the LB films investigated by $\pi$-A isothem, FT-IR, and SEM will be discussed. In addition, it was attempted to investigate the reaction of polymer LB films in the organic gas surrounding by the use of LB technique.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.86-90
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• 2006

Nanoimprint lithography (NIL) is a novel method to fabricate nanometer scale patterns. It is a simple process with low cost, high throughput and high resolution. NIL process creates patterns by the mechanical deformation of imprint resist and physical contact process. This physical contact process causes the stiction between the resist and the stamp. Stiction becomes a key issue especially in the stamps including narrow pattern size and wide area during NIL process development. The antistiction layer coating using fluorocarbon is very effective to prevent this problem and ensure successful NIL. In this paper, the concept of antistiction coating is explained and different preparation methods for nanoimprinting are briefly discussed.

• Journal of Mechanical Science and Technology
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• v.17 no.7
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• pp.1063-1072
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• 2003

Direct immersion cooling has been considered as one of the promising methods to cool high power density chips. A fluorocarbon liquid such as FC-72, which is chemically and electrically compatible with microelectronic components, is known to be a proper coolant for direct immersion cooling. However, boiling in this dielectric fluid is characterized by its small value of the critical heat flux. In this experimental study, we tried to enhance the critical heat flux by increasing the nucleate boiling area in the heat spreader (Conductive Immersion Cooling Module). Heat nux of 2 MW/㎡ was successfully removed at the heat source temperature below 78$^{\circ}C$ in FC-72. Some modified boiling curves at high heat flux were obtained from these modules. Also, the concept of conduction path length is very important in enhancing the critical heat flux by increasing the heat spreader surface area where nucleate boiling occurs.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.5
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• pp.424-429
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• 2008

Surface wettability in terms of the size of the micro nano structures has been examined. To evaluate the influence of the nano structures on the contact angles, we fabricated two different kinds of structures: squarepillar-type microstructure with nano-protrusions and without nano-protrusions. Microstructure and nanostructure arrays were fabricated by deep reactive ion etching (DRIE) and reactive ion etching (RIE) processes, respectively. And plasma polymerized fluorocarbon (PPFC) was finally deposited onto the fabricated structures. Average value of the measured contact angles from microstructures with nanoprotrusions was $6.37^{\circ}$ higher than that from microstructures without nano-protrusions. This result indicates that the nano-protrusions give a crucial effect to increase the contact angle.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.216-219
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• 1996

Polytetrafluoroethylene is very suitable for insulation materials because of it's high thermal and chemical stability, high electrical resistance and low loss factor. But almost all kinds of pure fluoroplastic cannot endure long time in the high temperature arc environment breaking high voltage and current In this study, inorganic materials such as BN, TiO$_2$ and Al$_2$O$_3$ were filled in the polytetrafluoroethylene to improve arc resistance. The electrical properties, arc resistant properties and light reflectance of the composites were investigated.

• Journal of the Korean Society of Clothing and Textiles
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• v.19 no.2
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• pp.317-328
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• 1995

The objective of this study was to determine the effects of low temperature plasma on the surface properties of polyester fabric with respect to wettability and water repellency. Highly wettable polyester fabric surfaces were obtained by oxygen treatment. The improved wettabililty of oxygen plasma treated fabrics decreased with aging time up to 30 days, and then the wettability remained relatively constant and still exhibited significant improvement compared to that of untreated polyester. Water repellency was significantly improved by tetratfluorocarbon plasma treatment. Such an improvement appears due to introduced fluo\ulcornerrine atoms or a thin fluorocarbon film on the fiber surface. Water repellency remained constant in fact, even after 150 days.

• Textile Coloration and Finishing
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• v.10 no.1
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• pp.33-37
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• 1998

It is rather important in the water and oil repellent finishing for wool fabric what kind of water-repellent agents will be used. In many cases, Fluorocarbon-based water-repellent agents(eg.Oleophobol-S), the surface tensions of which very low, were recom-mended on account of good water and oil repellencies. In repellent finishing, fabrics were padded in a bath which contained aqueous solution of water-repellent agents, and wetting agents, followed by drying and curing. The most suitable treating condition for excellent repellency was as follows Fabrics were padded at liquor pick-up ratio of 50%, with aqueous solution which contained $30g/\ell$ of water-repellent agents, and $40g/\ell$ of wetting agents. And the padded fabrics were dried at $110^\circ{C}$ for 1 minute, and cured at $160^\circ{C}$ for 2 minutes. For the fabrics, water and oil repellencies and durability to repeated dry-cleanings are observed.

• Textile Coloration and Finishing
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• v.23 no.2
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• pp.100-106
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• 2011

UV-curable water-repellent finish was carried out to impart one-side repellency to the PET fabrics using a formulation of a UV-active fluorocarbon agent and a water soluble photoinitiator. The aqueous formulation was padded on the PET fabrics and it was subsequently UV-cured. The unirradiated side of the cured fabrics was made to wetteable to water by the prolonged UV/ozone irradiation. The influence of photoinitiator concentration, agent concentration and UV energy for photodegradation on the performance of the finished fabrics were investigated. The difference in the functional property of front and back sides was examined by measuring water repellency at each side of the treated fabrics, which resulted in four rating difference between two-side. The UV-cured and photodegraded PET surfaces were characterized by ATR, ESCA and FE-SEM.

• Proceedings of the KIEE Conference
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• 2000.11c
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• pp.583-585
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• 2000

This study reports the fluidic handling method using hydrophobic patterns inside PDMS microchannels. In order to obtain hydrophobic patterns, we pattern fluorcarbon(FC) film surfaces by lift-off process. FC films are deposited by spin coating method and plasma polymerization method. Hydrophobic surfaces are used as the barriers to control fluid flow. Injected liquid is spontaneously filled up inside PDMS-microchannels by the capillary action. Liquid flow stops when it meets hydrophobic regions which can be the barrier against fluid flow. Then, again, when liquid is pressurized externally, liquid can move toward another hydrophilic region by external air pressure. Contact angle analyses are performed on fluorocarbon films to estimate the wettability of film surfaces.