Properties of Spin-On-Glass Siloxane Thin Films Fluorine-doped by CF$_4$ Plasma
(CF$_4$ 플라즈마 처리로 불소를 첨가한 실록산 Spin-On-Glass 박막의 특성)
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- Journal of the Korean institute of surface engineering
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- v.34 no.3
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- pp.258-263
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- 2001