ZnO:F films by magnetron sputter-deposition: A comparison of fluorine sources between $ZnF_2$ containing targets and CF4 containing gas mixtures
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- 한국재료학회:학술대회논문집
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- 한국재료학회 2007년도 추계학술발표대회 및
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- pp.49.1-49.1
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- 2007