• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1902-1907
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• 2008

The current work presents a design and fabrication technique for a microchannel system to measure the local temperature distribution inside microchannel. This micro channel system fabricated by MEMS technique is integrated with a heater and an array of temperature sensors so that detailed heat transfer phenomena inside micro-scale channel can be studied. Materials widely used in semiconductor process were selected to fabricate a heater and temperature sensors on a silicon wafer. On these heater and sensors a channel wall was fabricated with SU-8. The friction constant and the local Nusselt number distribution measured for the deionized water flow in the microchannel is presented.

• Transactions on Electrical and Electronic Materials
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• v.7 no.2
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• pp.58-61
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• 2006

Carefully designed ZnO nanowire-film hybrid nanostructure, composed of a bottom ZnO film, ZnO nanowire arrays, and a top ZnO film, was consecutively fabricated by adjusting the supersaturation conditions using a metal-organic chemical vapor deposition (MOCVD) to utilize the vertically aligned ZnO nanowires as the oxygen sensors. The decrease of current flow through ZnO nanowire arrays increasing oxygen pressure showed the high potential for the application of the ZnO hybrid nanostructure to the oxygen sensors. In addition, it was confirmed that the oxygen sensing characteristics of this hybrid nanostructure were attributed to the defects near the surface of the nanowires.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.495-496
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• 1998

The measurement of the amplitude and phase of electric fields on high voltage transmission lines is important for several reasons including a) Metering and determination of power flow, b) protective relaying. and c) fault sensing. The work reported here is directed toward a major improvement to optically based, electric-field sensors. This is a signal processing based technique for overcoming the instabilities of conventional, optically-based, electric-field sensors to changes in optical power or temperature.

• Journal of Sensor Science and Technology
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• v.30 no.1
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• pp.30-35
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• 2021

To operate an underwater robot in an environment with fluid flow, it is necessary to recognize the speed and direction of the fluid and implement motion control based on these characteristics. Fish have a lateral line that performs this function. In this study, to develop an artificial lateral line sensor that mimics a fish, we developed a method to measure the flow speed and the incident angle of the fluid using a pressure sensor. Several experiments were conducted, and based on the results, the tendency according to the change in the flow speed and the incident angle of the fluid was confirmed. It is believed that additional research can aid in the development of an artificial lateral line sensor.

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.1-6
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• 1995

Polycrystalline Si films have been used in many applications such as thin film transistors(TFT), image sensors and LSI applications. In this research deposition of Si films at low temperatures with remote plasma enhanced CVD from Si2H6-SiF4-H2 on SiO2 was studied and their crystallinity was investigated. It was condluded that growth of crystalline Si films was favorable with (1) low Si2H6 flow rates, (2) moderate plasma power, (3) moderate SiF4 flow rates, (4) moderate substrate temperature, and (5) suitable method of surface cleaning.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.146-153
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• 2006

Acceleration sensors have widely been used in the various fields of industry. In recent years, micromachining accelerometers have been developed and commercialized by the micromachining technique or MEMS technique. Typical structure of such sensors consist of a cantilever beam and a vibrating mass fabricated on Si wafers using etching. This study investigates the feasibility of powder blasting technique for microfabrication of sensor structures made of the pyrex glass alternating the existing Si based acceleration sensor. First, as preliminary experiment, effect of blasting pressure, mass flow rate of abrasive and no. of nozzle scanning on erosion depth of pyrex and soda lime glass is studied. Then the optimal blasting conditions are chosen for pyrex sensor. Structure dimensions of designed glass sensor are 2.9mm and 0.7mm for the cantilever beam length and width and 1.7mm for the side of square mass. Mask material is from aluminium sheet of 0.5mm in thickness. Machining results showed that tolerance errors of basic dimensions of glass sensor ranged from 3um in minimum to 20um in maximum. This results imply the powder blasting can be applied for micromachining of glass acceleration sensors alternating the exiting Si based sensors.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.2
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• pp.1-10
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• 2020

The technology and market size of image sensors continue to develop thanks to the release of image sensors that exceed 100 million pixels in 2019 and expansion of black box camera markets for vehicles in addition to existing mobile applications. We review the technology flow of image sensors that have been constantly evolving for 40 years since Hitachi launched a 200,000-pixel image sensor in 1979. Although CCD has made inroads into image sensor market for a while based on good picture quality, CMOS image sensor (CIS) with active pixels has made inroads into the market as semiconductor technology continues to develop, since the electrons generated by the incident light are converted to the electric signals in the pixel, and the power consumption is low. CIS image sensors with superior characteristics such as high resolution, high sensitivity, low power consumption, low noise and vivid color continue to be released as the new technologies are incorporated. At present, new types of structures such as Backside Illumination and Isolation Cell have been adopted, with better sensitivity and high S/N ratio. In the future, new photoconductive materials are expected to be adopted as a light absorption part in place of the pn junction.

• Current Optics and Photonics
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• v.6 no.2
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• pp.137-142
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• 2022

Leak detection is one of the most important challenges in condition monitoring of water pipelines. Fiber Bragg grating (FBG) sensors offer an attractive technique to detect leak signals. In this paper, leak measurements were conducted on a water distribution pilot plant with a length of 270 m and a diameter of 100 mm. FBG sensors were installed on the pipeline surface and used to detect leak vibration signals. The leak was demonstrated with 1-, 2-, 3-, and 4-mm diameter leak holes in four different pipe types. The frequency response of leak signals was analyzed by fast Fourier transform analysis in real time. In the experiment, the frequency range of leak signals was approximately 340-440 Hz. The frequency shifts of leak signals according to the pipe type and the size of the leak hole were demonstrated at a pressure of 1.8 bar and a flow rate of 25.51 m³/h. Results show that frequency shifts detected by FBG sensors can be used to detect leaks in pipelines.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.30 no.3
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• pp.143-148
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• 2018

In this study the performance and humidity variation for 2 unit cells connected in series were experimentally measured. The relative flow direction of hydrogen and air was changed from parallel flow to counter flow. Internal humidity distribution was then measured by 5 embedded sensors on each channel. In all experimental conditions, the former unit cell showed a better performance and the gap is noted to be higher when counter flow is applied. The performance was noted to be higher at high humidification case in the parallel flow. However, in the counter flow, the difference of performance according to the humidification is negligible. Hydrogen and air are discharged from the PEMFC unsaturated with water vapor at parallel flow/low humidification condition, which explains lower performance of the PEMFC than other conditions. The humidities in hydrogen and air streams of counter flow were noted to increase rapidly even at low humidification condition and the consequential even hydration of membrane is the reason of higher performance.

• Journal of Drive and Control
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• v.20 no.4
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• pp.123-132
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• 2023

In disaster situations, to facilitate rapid drainage, electric underwater pumps are installed manually. This poses a high risk of electric shock accidents due to a short circuit, and a lot of time is required for hose connection and installation of electrical devices. To solve these problems, a Venturi pump using the venturi effect without external power is used. However, Venturi pumps that operate without external power make it difficult to install flow sensors such as electric devices; consequently, it is difficult to check the real-time flow rate. This paper proposes a flow estimation logic to replace the function of the flow sensor for the venturi pump . To develop the flow estimation logic, the flow characteristics of the venturi pump, according to the operating conditions, were checked. After that, the relationship with the flow rate of the venturi pump was defined using a pressure sensor corresponding to a low-cost sensor. Finally, an analysis of the estimation error was performed using the developed flow estimation logic.