• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.434-435
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• 2012

Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

• Journal of Korean Society of Disaster and Security
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• v.10 no.1
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• pp.1-10
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• 2017

Recently, increasing cases of ground subsidence in the urban area has become social issue, and related bill has been passed. Ground subsidence occurs through complex combination of various factors, and numerical analysis of this problem is limited thereby. This is why verification of ground subsidence mechanism has been conducted through physical modelling. Previous researches has been focused on modelling ground subsidence caused by utility pipe defects, and there has been insufficient physical modelling study on ground subsidence caused by various reasons such as groundwater flow and excavation activity. Also, most previous physical modelling studies were performed in 1g condition, which cannot take the in-situ stress condition into the evaluation of the ground subsidence mechanism. Therefore, in this study, physical modelling techniques to simulate various conditions is discussed by studying the previous researches on the ground subsidence mechanism through physical modelling. Also, centrifuge modelling test is suggested in this study as the technique to perform more reliable evaluation of ground subsidence mechanism. Lastly, this study suggests to apply the techniques used in the evaluation of ground subsidence mechanism into Ground Stability Assessment.

• Journal of the Korean Association of Geographic Information Studies
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• v.7 no.4
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• pp.34-45
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• 2004

Existing Semangeum's water balance analysis simplifies whole basin to single basin and achieved volume of effluence that produce by Kajiyama way to foundation. But Semangeum is complicated and various rice-wine strainer supply system. And there is difficulty to apply as elastic when water balance element is changed at free point. Divided to unit possession station for suitable water balance analysis model application to Semangeum in this study. And developed basin water balance model of GIS base that can do details analysis is bite about development and transfer of an appropriation in the budget of basin water resources. Achieved study including abstraction and concept design that use UML (unified modeling language) diagram for details analysis, stream network composition for rice-wine strainer supply system application, preprocessing of GIS base and postprocessing module development, model revision and verification etc. Support of this water balance analysis model is available to establish efficient water resources administration plan through outward flow process analysis of water resources. And support is considered to be possible in more convenient and, reasonable water resources administration way establishment by minimizing manual processing in systematic water resources government official to user and support diversified analysis system.

• Journal of the Korea Society of Computer and Information
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• v.18 no.1
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• pp.149-156
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• 2013

In this paper, Commercial program, STAR-CCM+, was used for computer simulation. And also Multi Inner Stage(MIS) cyclone which especially designed for the real experiments of particle removal efficiency. Under negative pressure condition of outlet, computer simulation was performed to predict the removal efficiency for $5{\mu}m$ and $10{\mu}m$ particles by using a turbulence model and lagrangian method. The simulation results are 55.7% and 64.1% for $5{\mu}m$ and $10{\mu}m$ particles, respectively. To compare the simulation results with the actual test of MIS cyclone, we generated the $SiO_2$ particles by heat reactor. Although removal efficiency of actual tests is 63~76% at different flow rate, the size of $SiO_2$ particles which confirmed by SEM(scanning electron microscope) and WAPS(wide range aerosol particle spectrometer) is too small(15~30nm) to compare each results. And so the alternative experiments were performed by using commercial alumina particles ($5{\mu}m$, $10{\mu}m$ and $20{\mu}m$). It was shown that the actual removal efficiency, 76~95%, from MIS cyclone is higher than simulated one.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.10 no.6
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• pp.15-23
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• 2011

Driving directly in front of the driver of a vehicle driving in front of the vehicle and it is commonly known is affected. Responding to the car in front of the driver and the vehicle in front, and these follow the model is known as Three-Car-Following Model. Platoon vehicles to follow behind the driver's visibility is affected by the a tinted vehicle, and Parameters of the model is estimated to be affected also. In this study, in Three-Car-Followng Model parameters were estimated. and the parameter values differ about whether and how analysis was performed by the level of Visible Light Transmission Percentage. RTK GPS receiving data through field experiment analyzed based on sensitivity of three car by Visible Light Transmission Percentage and ${\gamma}$. And With statistical verification of driving directly in front of the driver in front of the vehicle and that the moving vehicle is influenced also confirmed. Also Visible Light Transmission Percentage is lowered, the vehicle in front of the driver's behavior showed sensitive reactions. In the further need to research for influence analysis of traffic flow capacity by the level of VLT.

• Journal of the Korean Society of Marine Environment & Safety
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• v.23 no.2
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• pp.187-193
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• 2017

This study evaluated tidal stream energy resources according to tidal flow properties around Uido off the west coast of, Jeollanam-do, South Korea. A feasibility study was first carried out through the collection of bathymetry data and tidal phase information. For this simulation, a depth-averaged 2D ADCIRC (Advanced Circulation) model for real sea situations was applied to a Finite Element Method (FEM) approach for tides given the variation of tidal current speed. Hydrodynamics were simulated with 4 major tidal constituents (M2, S2, K1, and O1) after setting up 4 observation points. From the real depth-averaged model simulation results, it was found that the spring tide Higher High Water (HHW) and tidal current speed values at the 4 observation points were about 2.2 m and 1.33 m/s, respectively. The ADCIRC model results were analyzed with reference to the Korea Hydrographic and Oceanographic Agency's (KHOA) observed data for verification. Furthermore, using topographical characteristics via the Tidal Flux Method (TFM), tidal energy density distribution was calculated, indicating a maximum tidal energy density of about $1.75kW/m^2$ for the 5 assessment areas around Uido. The tidal energy density was evaluated with consideration given to topographical characteristics as well as tidal elevation and tidal current speed to determine an optimum tidal farm candidate.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.34 no.1
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• pp.63-66
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• 2008

Sunscreen is usually used by people when they are at the beach or outdoor swimming pools. Since the existing methods of and standards for measuring the effects of blocking ultra violet rays do not employ water resistance test methods, the establishment of a water resistance SPF test method is required. In this study, to standardize the SPF evaluation methods for a water resistant sunscreen, proposed measurement methods in this study were compared with those of foreign countries. Selected water resistance SPF experiments confirmed the product's suitability and a verification test was then conducted by establishing the variables of water resistance SPF measurement methods. In the comparative experiment on water resistance SPF given a water temperature of $23{\sim}32$ degrees centigrade showed that temperature did not have any statistically significant effect on water resistance SPF. The changing water flow also did not have any statistically significant effect on the water resistance SPF. Therefore, continuous 20 min water circulation is deemed appropriate as an alternative to the subject's usual activity.

• Journal of Korean Society of Transportation
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• v.26 no.4
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• pp.205-215
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• 2008

As static traffic assignment has reached its limitation with ITS policy applications and due to the increase of interest in studies of ITS policies since the late 1980's, dynamic traffic assignment has been considered a tool to overcome such limitations. This study used the Dynameq program, which simulates route choice behavior by macroscopic modeling and dynamic network loading and traffic flow by microscopic modeling in consideration of the feasibility of the analysis of practical traffic policy. The essence of this study is to evaluate the feasibility for analysis in practical transportation policy of using the dynamic traffic assignment technique. The study involves the verification of the values estimated from the dynamic traffic assignment with South Korea's expressway network and dynamic O/D data by comparing results with observed link traffic volumes. This study used dynamic O/D data between each toll booth, which can be accurately obtained from the highway Toll Collection System. Then, as an example of its application, exclusive bus-lane policies were analyzed with the dynamic traffic assignment model while considering hourly variations.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4460-4467
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• 2010

Recent advances in computer technology have brought more dependence on software to railway systems and changed to computer systems. Hence, the reliability and safety assurance of the vital software running on the embedded railway system is going to tend toward very critical task. Accordingly, various software test and validation activities are highly recommended in the international standards related railway software. In this paper, we presented an automated analysis tool and standard for software testing coverage in railway system, and presented its result of implementation. We developed the control flow analysis tool estimating test coverage as an important quantitative item for software safety verification in railway software. Also, we proposed judgement standards due to railway S/W Safety Integrity Level(SWSIL) based on analysis of standards in any other field for utilizing developed tool widely at real railway industrial sites. This tool has more advantage of effective measuring various test coverages than other countries, so we can expect railway S/W development and testing technology of real railway industrial sites in Korea.

• Journal of Korean Society of Disaster and Security
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• v.13 no.4
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• pp.65-74
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• 2020

Continuous and accurate instrument of river water usage is needed for sustainable river water management. Although the instrument methods applicable to each point of use of river water are different, more precise direct instrument methods are required at the point of major open channel. Users of river water should select appropriate direct instrument methods to measure usage, but there is a lack of standards and verification research. In this study, the H-Q rating curve method, ultrasonic method, and microwave method were applied directly to the test basin in the upper basin of Mangyeong river, and the accuracy of measurement data was evaluated by comparing absolute error between discharge data calculated by instrument method. When comparing the calculated discharge of point units, the ultrasonic method showed the best results of the actual measurement. Through continuous instrument, the sum of the daily and monthly units was compared, and the ultrasonic and microwave methods were shown to be highly accurate. Based on the results of this study, it is hoped that the appropriate direct measurement method can be selected according to the importance of the river water use facility, considering that the ultrasonic method and the microwave method are relatively costly compared to the water level-flow relationship method.