• 제목/요약/키워드: Flow Mobility

검색결과 276건 처리시간 0.024초

증착 온도 및 수소 유량에 따른 MZO 박막의 구조적 및 전기적 특성 (Structural and Electrical Characteristics of MZO Thin Films Deposited at Different Substrate Temperature and Hydrogen Flow Rate)

  • 이지수;이규만
    • 반도체디스플레이기술학회지
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    • 제17권2호
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    • pp.6-11
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    • 2018
  • In this study, we have studied the effect of substrate temperature and hydrogen flow rate on the characteristics of MZO thin films for the TCO(Transparent conducting oxide). MZO thin films were deposited by RF magnetron sputtering at room temperature and $100^{\circ}C$ with various $H_2$ flow rate(1sccm~4sccm). In order to investigate the effect of hydrogen gas flow rate on the MZo thin film, we experimented with changing the hydrogen in argon mixing gas flow rate from 1.0sccm to 4.0sccm. MZO thin films deposited at room temperature and $100^{\circ}C$ show crystalline structure having (002), (103) preferential orientation. The electrical resistivity of the MZO films deposited at $100^{\circ}C$ was lower than that of the MZO film deposited at room temperature. The decrease of electrical resistivity with increasing substrate temperature was interpreted in terms of the increase of the charge carrier mobility and carrier concentration which seems to be due to the oxygen vacancy generated by the reducing atmosphere in the gas. The average transmittance of the MZO films deposited at room temperature and $100^{\circ}C$ with various hydrogen gas flow was more than 80%.

High performance of ZnO thin film transistors using $SiN_x$ and organic PVP gate dielectrics

  • Kim, Young-Woong;Park, In-Sung;Kim, Young-Bae;Choi, Duck-Kyun
    • 한국결정성장학회지
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    • 제17권5호
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    • pp.187-191
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    • 2007
  • The device performance of ZnO-thin film transistors(ZnO-TFTs) with gate dielectrics of $SiO_2,\;SiN_x$ and Polyvinylphenol(PVP) having a bottom gate configuration were investigated. ZnO-TFTs can induce high device performance with low intrinsic carrier concentration of ZnO only by controlling gas flow rates without additional doping or annealing processes. The field effect mobility and on/off ratio of ZnO-TFTs with $SiN_x$ were $20.2cm^2V^{-1}s^{-1}\;and\;5{\times}10^6$ respectively which is higher than those previously reported. The device adoptable values of the mobility of $1.37cm^2V^{-1}s^{-1}$ and the on/off ratio of $6{\times}10^3$ were evaluated from the device with organic PVP dielectric.

산화물반도체 트랜지스터의 전기적인 특성 (Semiconductor Engineering)

  • 오데레사
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2013년도 추계학술대회
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    • pp.390-392
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    • 2013
  • 본 논문에서는 투명디스플레이를 구현하기 위해 가장 주목받는 ZnO 계열의 산화물반도체의 특성에 대하여 관찰하였다. 알에프 마그네트론 스퍼터링에 의해 증착된 산화물 반도체의 광학적 특성으로부터 전기적인 신호 동작특성의 상호관계를 알아보았다. 박막내의 결합 혹은 불순물이 증가할수록 PL 특성은 장파장 특성이 우세하게 나타났다. SiOC 박막위에서는 에너지 밴드갭이 증가하면서 단파장 특성이 우세하게 나타났다. 트랜지스터의 특성은 기판의 의존도가 높게 나타났다.

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다중BOX분할기법을 이용한 MOS FET의 강반전층내에서의 수직전계해석 (The Vertical Field Analysis within the Strong Inversion of MOS FET using the Multi-box Segmentation Technique)

  • 노영준;김철성
    • 한국통신학회논문지
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    • 제25권8B호
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    • pp.1469-1476
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    • 2000
  • 증가형 MOS FET에서 강반저의 경우 드레인 전류는 모두 드리프트에 기인하여 흐르기 때문에 I-V모델링시 수직전계와 수평전계를 함께 고려하여야한다. 특히 게이트전압 인가시 발생되는 수직전계는 표면이동도에 영향을 크게 주고 이로 인해서 캐리어들의 정상적인 흐름이 저해되는데 본 논문에서 제안한 다중 box분할법에 의하여 반전층의 깊이를 구하여 이동도 모델에 영향을 크게 미치는 반전층 내에서의 수직전계를 수치해석하였다.

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Correlations between the Respiratory Function and Cervical and Lumbar Range of Motion in Elderly People

  • Park, Du-Jin;Kim, Jun-Seok;Hwang, Young-In
    • 대한물리의학회지
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    • 제16권3호
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    • pp.29-36
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    • 2021
  • PURPOSE: The respiratory function and range of joint mobility deteriorate due to aging, respectively, and the respiratory function may be related to the range of joint mobility. To the best of the authors' knowledge, there has been little research on how the deterioration of the range of joint mobility caused by aging is related directly to the respiratory function. This study investigated the relationship between the respiratory function and the range of joint motion in the cervical and lumbar regions of older adults. METHODS: Thirty-two older adults participated in the study. The forced vital capacity (peak expiratory flow: PEF and forced expiratory volume in 1 second: FEV1) and the range of cervical joint motion were assessed in all subjects. The results were analyzed using the Pearson's correlation coefficient. RESULTS: The respiratory function moderately correlated with age. A moderate correlation was observed between FEV1 and right cervical lateral flexion. PEF was moderately correlated with the lumbar lateral flexion. In addition, FEV1 correlated strongly with lumbar lateral flexion. CONCLUSION: The respiratory function was correlated with the cervical and lumbar lateral flexion. Therefore, rehabilitation of the respiratory function should involve improving the limited range of motion of the joints, and a stretching program is needed for older adults.

Effect of boundary mobility on nonlinear pulsatile-flow induced dynamic instability of FG pipes

  • Zhoumi Wang;Yiru Ren;Qingchun Meng
    • Structural Engineering and Mechanics
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    • 제86권6호
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    • pp.751-764
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    • 2023
  • In practical engineering such as aerial refueling pipes, the boundary of the fluid-conveying pipe is difficult to be completely immovable. Pipes under movable and immovable boundaries are controlled by different dominant nonlinear factors, where the boundary mobility will affect the nonlinear dynamic characteristics, which should be focused on for adopting different strategies for vibration suppression and control. The nonlinear dynamic instability characteristics of functionally graded fluid-conveying pipes lying on a viscoelastic foundation under movable and immovable boundary conditions are systematically studied for the first time. Nonlinear factors involving nonlinear inertia and nonlinear curvature for pipes with a movable boundary as well as tensile hardening and nonlinear curvature for pipes with an immovable boundary are comprehensively considered during the derivation of the governing equations of the principal parametric resonance. The stability boundary and amplitude-frequency bifurcation diagrams are obtained by employing the two-step perturbation- incremental harmonic balance method (TSP-IHBM). Results show that the movability of the boundary of the pipe has a great influence on the vibration amplitude, bifurcation topology, and the physical meanings of the stability boundary due to different dominant nonlinear factors. This research has guidance significance for nonlinear dynamic design of fluid-conveying pipe with avoiding in the instability regions.

충남지역 지체장애인의 이동권 실태 및 개선방안 연구 (The Status of Mobility Disadvantaged Persons with Physical Disabilities & Suggested Improvements in Chungnam)

  • 최윤영;양정빈;김자영
    • 융합정보논문지
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    • 제11권4호
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    • pp.130-136
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    • 2021
  • 본 연구는 충남에 거주하는 지체장애인의 이동권 현황을 파악하여, 이들의 이동권을 향상시킬 수 있는 방안을 제시하고자 한다. 이를 위해 2단계에 걸쳐 설문지를 개발하였으며, 일반적 특성, 외출 및 이동현황, 저상버스 및 장애인 콜택시 사용현황, 서비스 개선사항, 광역이동지원센터 관련 문항으로 구성되었다. 연구대상은 충남에 거주하는 지체장애인으로 총 219명이 참여하였다. 조사 결과 응답자 중 54.6%는 매일 외출하였으며, 17.0%는 거의 외출을 하지 않았다. 53.4%의 응답자만 홀로 외출이 가능했으며, 외출하지 않는 주된 이유로는 계단과 대중교통의 불편함을 꼽았다. 응답자 중 26.9%는 저상버스를, 71.1%는 장애인 콜택시를 이용했으며, 이를 위해 각각 66.57분, 42.65분 동안 기다린 것으로 나타났다. 78.7%는 광역지원센터가 필요하다고 한 반면, 49.8%만이 센터를 인지하고 있었다. 연구결과에 기초하여 이동권 향상 방안으로 특별교통수단의 확대, 지체장애인의 보행환경 개선, 광역이동지원센터 기능 활성화 등에 대해 논의하였다.

라디오파 마그네트론 스퍼터링으로 성장한 질소와 알루미늄 도핑된 ZnO 박막의 특성 (Properties of Nitrogen and Aluminum Codoped ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering)

  • 조신호;조선욱
    • 한국표면공학회지
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    • 제41권4호
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    • pp.129-133
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    • 2008
  • Nitrogen and aluminum codoped ZnO(NAZO) thin films were grown on glass substrates with changing the nitrogen flow ratio by radio-frequency magnetron sputtering. The structural, optical, and electrical properties of the NAZO films were investigated. The surface morphologies and the structural properties of the thin films were analyzed by using the X-ray diffraction and scanning electron microscopy. The NAZO thin film, deposited at nitrogen flow ratio of 0%, showed a strongly c-axis preferred orientation and the lowest resistivity of $3.2{\times}10^{-3}{\Omega}cm$. The intensity of ZnO(002) diffraction peak was decreased gradually with increasing the nitrogen flow ratio. The optical properties of the films were measured by UV-VIS spectrophotometer and the optical transmittances for all the samples were found to be an average 90% in the visible range. Based on the transmittance value, the optical bandgap energy for the NAZO thin film deposited at nitrogen flow ratio of 0% was determined to be 3.46 eV. As for the electrical properties, the carrier concentration and the hall mobility were decreased, but the electrical resistivity was increased as the nitrogen flow ratio was increased.

HEMT의 2차원 수치해석 (Two Dimensional Numerical Analysis of HEMT's)

  • 이종람;이재진;맹성재;박성호;박효훈;강태원;김진섭;마동성
    • 대한전자공학회논문지
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    • 제26권11호
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    • pp.1644-1651
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    • 1989
  • In this paper, a two-dimensional numerical analysis of HEMT's with gate length of 0.6um is performed. In this case, Control Volume Formulation method which has been used in the analysis of heat transfer and fluid flow is used as a numerical method. As a mobility model, empirical formula including the velocithy overshoot phenomena is used instead of two-piece mobility model. The results obtained from this numerical analysis(i.e., the region in which cahnnel is formed, the strength of electric field in the channel, the distribution of potential, and the distribution of electron concentration etc.)are in good agreement with the previous analytic results. And our results also show the parasitic MESFET's operation in the range of the high gate voltage.

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FCVA 방법에 의해 제작된 DLC 박막의 질소 첨가에 따른 구조적, 전기적 물성분석 (Characterization of structural and electrical properties of FCVA-produced DLC films as a function of nitrogen incorporation)

  • 장석모;박창균;엄현석;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1393-1395
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    • 2001
  • DLC films are deposited by using a modified FCVA system. Carbon amorphous network, surface roughness, internal compressive stress, resistivity, and Hall mobility are studied as a function of nitrogen flow rate (0 $\sim$ 10 sccm). As the nitrogen content is increased in the carbon network, the size of $sp^2$ clusters is increased, the internal compressive stress is decreased, and the resistivity is remarkably decreased. The RMS values of the surface roughness are measured to be in the range of 0.2$\sim$0.5nm. The Hall mobility of DLC film with 3 sccm of nitrogen added is 3.22 $cm^2/V{\cdot}$s.

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