• 제목/요약/키워드: Flow Impedance

검색결과 235건 처리시간 0.026초

가스 유량 변화에 따른 식각 공정 결과: VI Probe 활용 가능성 제안 (Gas Flow Rate Dependency of Etching Result: Use of VI Probe for Process Monitoring)

  • 송완수;홍상진
    • 반도체디스플레이기술학회지
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    • 제20권3호
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    • pp.27-31
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    • 2021
  • VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

심장의 수축운동과 관상동맥 혈류와의 위상차가 관상동맥 혈관의 동맥경화 민감성에 미치는 영향 (Influence of Cardiac Contraction and its Phase Angle with Coronary Blood flow on Atherosclerosis of Coronary Artery)

  • 김민철;이종선;김찬중;권혁문
    • 대한의용생체공학회:의공학회지
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    • 제23권6호
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    • pp.437-449
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    • 2002
  • 관상동맥은 체순환 동맥과 비교하여 매우 다른 유동조건을 갖는다. 본 연구에서는 이러한 관상동맥의 유동조건이 다른 혈관과 비교하여 동맥경화의 생성과 발전에 어떤 영향을 미치는지를 협착된 혈관 모델의 혈류역학적 전산유체해석을 통해 분석하였다. 연구 결과, 협착된 관상동맥 모델의 유동장과 벽면전단응력의 분포는 복부 대동맥 및 고동맥과 비교하여 큰 차이점을 보였다. 관상동맥은 혈관 지름이 혈류량에 비해 상대적으로 작으므로 큰 벽면전단응력값을 보이는 반면에, 혈관 협착부 목 후방부에 하나의 보텍스만 보이는 단순한 유동장 분포를 보였다. 한편, 복부대동맥과 고동맥 모델은 협착부 목 전반부와 후방부에 여러 개의 보텍스를 나타내는 복잡한 유동장을 형성하였다. 관상동맥 모델에서는 임피던스 페이즈앵글이 음의 큰 값을 가질 때에 벽면전단응력의 크기가 증가하고 재순환영역이 증가함이 관찰되었다. 그러므로 심장의 수축운동과 -110。에 이르는 관상동맥의 큰 음의 임피던스 페이즈앵글 값은 동맥경화를 촉진시키는 유동환경을 조성함을 알 수 있었다.

피압 단순 관로 체제에서의 인버스 임피던스를 이용한 수압기반 유속추정기술 (A pressure based flow velocity estimation technique using inverse impedance for simple pressurized pipeline systems)

  • 이정섭;고동원;최두용;김상현
    • 상하수도학회지
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    • 제36권4호
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    • pp.219-228
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    • 2022
  • In this study, we propose a flow velocity evaluation scheme based on pressure measurement in pressurized pipeline systems. Conservation of mass and momentum equations can be decomposed into mean and perturbation of pressure head and flowrate, which provide the pressure head and flowrate relationship between upstream and donwstream point in pressurized pipeline system. The inverse impedance formulations were derived to address measured pressure at downstream to evaluation of flow velocity or pressure at any point of system. The convolution of response function to pressure head in downstream valve provides the flow velocity response in any point of the simple pipeline system. Simulation comparison between traditional method of characteristics and the proposed method provide good agreements between two distinct approaches.

Knowledge-Based Approach Using Support Vector Machine for Transmission Line Distance Relay Co-ordination

  • Ravikumar, B.;Thukaram, D.;Khincha, H.P.
    • Journal of Electrical Engineering and Technology
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    • 제3권3호
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    • pp.363-372
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    • 2008
  • In this paper, knowledge-based approach using Support Vector Machines (SVMs) are used for estimating the coordinated zonal settings of a distance relay. The approach depends on the detailed simulation studies of apparent impedance loci as seen by distance relay during disturbance, considering various operating conditions including fault resistance. In a distance relay, the impedance loci given at the relay location is obtained from extensive transient stability studies. SVMs are used as a pattern classifier for obtaining distance relay co-ordination. The scheme utilizes the apparent impedance values observed during a fault as inputs. An improved performance with the use of SVMs, keeping the reach when faced with different fault conditions as well as system power flow changes, are illustrated with an equivalent 265 bus system of a practical Indian Western Grid.

흡음재의 특성임피던스와 전파상수의 새로운 결정방법 (A New Method for Measuring Characteristic Impedance and Propagation Constant of Sound-Absorbing Materials)

  • 황철호;정성수;은희준
    • 소음진동
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    • 제7권5호
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    • pp.781-787
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    • 1997
  • A new method is presented to determine two fundamental acoustic quantities of sound-absorbing materials such as characteristic impedance and propagation constant. In this study, the surface acoustic impedances of sound-absorbing materials are measured using the impedance tube and the anechoic chamber to determine the above acoustic quantities. The measured results are given for two typical sound-absorbing materials(glass wool and urethane foam) int the frequency range between 150 and 1, 600 Hz. The results are verified by other two known methods, which are Smith & Parrott method and Utsuno et al. method. The absorption coefficients calculated from the empirical models(Miki model for glass wool and Jung model for urethane foam) and two quantities by present method are in good agreement with the measured values.

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효율적인 생체 임피던스 신호 측정에 관한 연구 (Effective Body Signal Measurement with the Bioelectric Impedance Analysis)

  • 오세용;이영우
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2005년도 추계종합학술대회
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    • pp.689-692
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    • 2005
  • 생체 전기 임피던스법(Bioelectrical Impedance Analysis, BIA)은 신체의 체수분량을 측정하고 이를 바탕으로 체지방량을 측정할 수 있다. 이를 효율적으로 측정하기 위해서 4개의 전극을 손바닥에 위치 시키고 전류(50kHz, 800uA)를 신체에 흘려 보내 전압과 캐패시턴스를 측정하고 기본 파라미터인 키, 몸무게, 나이와 성별을 입력하여 체지방량을 측정하는 방법을 제안하였다.

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2상류용 전류형식 전자기유량계 이론 및 환상류에서의 3차원 가상포텐셜 분포의 수치적 계산 (Theory of a Current-Type Electromagnetic Flowmeter for Two-Phase Flow and Numerical Computation of the 3D Virtual Potential Distributions for Annular Flow)

  • 오병도;김무환;안예찬
    • 대한기계학회논문집B
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    • 제27권6호
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    • pp.714-725
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    • 2003
  • The theory of the current-type electromagnetic flowmeter for a high temporal resolution was developed for two-phase flow measurements. To predict the output of the current-type flowmeter, the three-dimensional virtual potential distribution C and the newly introduced flow pattern coefficient f were derived and computed. The output of flowmeter depends on the liquid conductivity (sensitive to temperature) and flow configurations of the two-phase flow with the sinusoidal excitation over 100 Hz. The flow pattern coefficient was specially devised to separate the dependency on the flow configuration of the two-phase flow from that on the liquid conductivity which can be expressed with the calibration of single-phase flow. Using the finite difference method, the three-dimensional virtual potential distributions were computed for the electrode of finite size. By taking derivative of the virtual potential, the weight functions were evaluated and compared with existing analytic series solution for the point-electrode. There was a reasonable correspondence between the present and existing results. In addition, the flow pattern coefficients were evaluated for annular flows with various film thicknesses, and compared with the experimental results by the impedance spectroscopy. The numerical results agreed well with the experimental data.

Impedance Parameter Variations at Intravenous (IV) Infiltration Using Bioelectrical Impedance: A Pilot Study

  • Kim, Jaehyung;Lee, Mansup;Baik, Seungwan;Kim, Gunho;Hwang, Youngjun;Jeon, Gyerok
    • 한국멀티미디어학회논문지
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    • 제20권10호
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    • pp.1678-1688
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    • 2017
  • Infiltration is one of detrimental problems occurring in nursing or medical settings. Early detection of infiltration is essential to minimize the risk of injury from infiltration. To perform a preliminary study on the point of care and automated infiltration detection system, bioelectrical impedance was investigated using bioelectrical impedance analyzer. We would like to report experimental results that allow impedance parameters to effectively distinguish infiltration. Electrodes were attached to both sides of the transparent dressing on the fusion site where IV solution was being infused. Then, impedance parameters before and after infiltration were measured as a function of time and frequency. The experimental results are as follows. After infiltration was intentionally induced by puncturing the vein wall with a needle, the resistance gradually decreased with time. That is, when an alternating current having a frequency of 20 kHz was applied to the electrodes, the resistance gradually decreased with time, reflecting the accumulation of IV solution in the extracellular fluid since the current could not pass through the cell membrane. Impedance parameters and equivalent circuit model for human cell were used to examine the mechanism of current flow before and after infiltration, which could be used for early detection of infiltration.

경과 시간에 따른 청색 형광 OLED의 Impedance 특성 (Impedance Characteristics of Blue Fluorescent OLED According to Elapsed Time)

  • 공도훈;양재웅;주성후
    • 한국표면공학회지
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    • 제50권5호
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    • pp.405-410
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    • 2017
  • In order to study current-voltage-luminance and impedance characteristics according to elapsed time, a blue fluorescent OLED was fabricated. The current density and luminance gradually decreased in accordance with elapsed time and did not emit light after 480 hours, and the threshold voltage increased as time elapsed. The Cole-Cole plot was a semicircular shape of a very large size at 2 V of the applied voltage below the threshold voltage, and the maximum value of the real number impedance did not change greatly from 9314.5 to $9902.2{\Omega}$ as time elapsed. Applied voltages 4, 6, and 8 V above the threshold voltage showed a large change in the real number impedance value at the semicircle end to 9,678.2, 9,826, $9,535.4{\Omega}$ according to the elapsed time from 2,222.5, 183.7, $48.2{\Omega}$ immediately after fabricating the device. By increasing the applied voltage beyond the threshold voltage just after device fabrication, the energy difference between the device and the organic layer was overcome and the current flowed, the maximum value of the real number impedance sharply decreased. As time passed, current did not flow through the element even at high applied voltage due to degradation of the element, and even when the applied voltage was higher than the threshold voltage, it showed an impedance value such as applied voltage equal to or less than the threshold voltage. As a result, it can be learned that the change in the impedance with elapsed time reflects the characteristics due to the degradation of the OLED and can predict the characteristics and lifetime of the OLED.

접촉열전도재를 도포한 접촉열저항 특성연구 (Characterization of Thermal Contact Resistance Doped with Thermal Interface Material)

  • ;;;문병준;이선규
    • 한국정밀공학회지
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    • 제30권9호
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    • pp.943-950
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    • 2013
  • This paper describes the thermal contact resistance and its effect on the performance of thermal interface material. An ASTM D 5470 based apparatus is used to measure the thermal interface resistance. Bulk thermal conductivity of different interface material is measured and compared with manufacturers' data. Also, the effect of grease void in the contact surface is investigated using the same apparatus. The flat type thermal interface tester is proposed and compared with conventional one to consider the effect of lateral heat flow. The results show that bulk thermal conductivity alone is not the basis to select the interface material because high bulk thermal conductivity interface material can have high thermal contact resistance, and that the center voiding affects the thermal interface resistance seriously. On the aspect of heat flow direction, thermal impedance of the lateral heat flow shows higher than that of the longitudinal heat flow by sixteen percent.