• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.288-289
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• 2011

Indium Tin Oxide (ITO) is a typical highly Transparent Conductive Oxide (TCO) currently used as a transparent electrode material. Most widely used deposition method is the sputtering process for ITO film deposition because it has a high deposition rate, allows accurate control of the film thickness and easy deposition process and high electrical/optical properties. However, to apply high quality ITO thin film in a flexible microelectronic device using a plastic substrate, conventional DC magnetron sputtering (DMS) processed ITO thin film is not suitable because it needs a high temperature thermal annealing process to obtain high optical transmittance and low resistivity, while the generally plastic substrates has low glass transition temperatures. In the room temperature sputtering process, the electrical property degradation of ITO thin film is caused by negative oxygen ions effect. This high energy negative oxygen ions(about over 100eV) can be critical physical bombardment damages against the formation of the ITO thin film, and this damage does not recover in the room temperature process that does not offer thermal annealing. Hence new ITO deposition process that can provide the high electrical/optical properties of the ITO film at room temperature is needed. To solve these limitations we develop the Magnetic Field Shielded Sputtering (MFSS) system. The MFSS is based on DMS and it has the plasma limiter, which compose the permanent magnet array (Fig.1). During the ITO thin film deposition in the MFSS process, the electrons in the plasma are trapped by the magnetic field at the plasma limiters. The plasma limiter, which has a negative potential in the MFSS process, prevents to the damage by negative oxygen ions bombardment, and increases the heat(-) up effect by the Ar ions in the bulk plasma. Fig. 2. shows the electrical properties of the MFSS ITO thin film and DMS ITO thin film at room temperature. With the increase of the sputtering pressure, the resistivity of DMS ITO increases. On the other hand, the resistivity of the MFSS ITO slightly increases and becomes lower than that of the DMS ITO at all sputtering pressures. The lowest resistivity of the DMS ITO is $1.0{\times}10-3{\Omega}{\cdot}cm$ and that of the MFSS ITO is $4.5{\times}10-4{\Omega}{\cdot}cm$. This resistivity difference is caused by the carrier mobility. The carrier mobility of the MFSS ITO is 40 $cm^2/V{\cdot}s$, which is significantly higher than that of the DMS ITO (10 $cm^2/V{\cdot}s$). The low resistivity and high carrier mobility of the MFSS ITO are due to the magnetic field shielded effect. In addition, although not shown in this paper, the roughness of the MFSS ITO thin film is lower than that of the DMS ITO thin film, and TEM, XRD and XPS analysis of the MFSS ITO show the nano-crystalline structure. As a result, the MFSS process can effectively prevent to the high energy negative oxygen ions bombardment and supply activation energies by accelerating Ar ions in the plasma; therefore, high quality ITO can be deposited at room temperature.

• Polymer(Korea)
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• v.33 no.3
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• pp.207-212
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• 2009

The precursor polyimide of the photoreactive polyimides(PI-SP6 and PI-SP12) was prepared from a derivative of 2, 2, 2-trifluoroethane dianhydride and 3,3'-dihydroxy-4,4'-diaminobiphenyl. PI-SP6 and PI-SP12 were then prepared by the polymer reactions of the precursor polyimide with photoreactive 2-styrylpyridine alkylene (hexylene and dodecylene) derivatives, respectively. The photoreactive polymers were soluble in organic solvents. The polymers showed the initial decomposition temperatures around $350^{\circ}C$. The glass transition temperatures of PI-SP6 and PI-SP12 were found to be $130^{\circ}C$ and $85^{\circ}C$, respectively. This result means that the latter polymer is more flexible than the former polymer. Their transmittance in the film state was 90% at $250^{\circ}C$, which indicates that the photosensitive polyimides with thermal stability have high optical transparency even at the high temperature. The respective dichroic ratios of PI-SP6 and PI-SP12 were found to be 0.01 and 0.03 at an exposure energy of $1.5\;J/cm^2$. This result suggests that the latter polymer with larger flexibility compared to the former polymer is more effective for the photoalignment.

• Journal of the Korean institute of surface engineering
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• v.39 no.3
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• pp.93-97
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• 2006

Polymer light emitting diodes (PLEDs) are expected to be commercialized as next generation displays by advantages of the fast response time, low driving voltage and easy manufacturing process for large sized flexible display. Generally, the electrical and optical properties of PLEDs are affected by the surface conditions of transparent electrode. The PLED devices with ITO/PEDOT:PSS/PVK/PFO-poss/LiF/Al structures were prepared by using the spin coating method. For this, PEDOT:PSS(poly(3,4-ethylenedioxythiophene):poly(styrene sulfolnate)) Al 4083 and PVK(N-vinylcabozole) were used as hole injection and transport layers. The PFO-poss(poly(9,9-dioctylfluorene)) was used as the emitting layer. The dependence of $O_2$ plasma treatment of ITO electrode on the electrical and optical properties of PLEDs were investigated. The sheet resistances increased slightly with an improved surface roughness of ITO electrode as the RF power increased during $O_2$ plasma treatment. The PLED devices prepared on the ITO/Glass substrates, which were plasma-treated at 40 watt in RF power for 30 seconds under 40 mtorr $O_2$ pressure, showed the maximum external emission efficiency of 0.86 lm/W and the maximum luminance of $250\;cd/m^2$, respectively. The CIE color coordinates are ranged $X\;=\;0.13{\sim}0.18$ and $Y\;=\;0.10{\sim}0.16$, showing blue color. emission.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.158-158
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• 2016

최근 화석연료의 고갈과 환경 보전 및 에너지 절약에 대한 관심이 높아짐에 따라 화석연료의 소비를 최소화하고 실내조건을 쾌적하게 유지하려는 연구가 진행되고 있다. 국내의 경우 전체 에너지 소비의 30%이상을 차지하고 있는 건물부문에서의 에너지 소비를 줄이기 위한 활발한 연구가 진행되고 있으며 이에 따른 에너지절약 소재개발이 활발하게 진행되고 있다. 1975년 이후 여러 차례에 걸친 단열강화 조치를 통해 건물에서의 에너지 소모를 줄이고 있었으나 건물의 외벽에 대한 사항으로 한정되어있었고, 또한 건물의 창 면적이 증가함에 따라 창을 통한 열손실량과 열획득량이 더욱 증가하게 되었다. 이러한 문제를 해결하기 위해 열반사유리에 대한 많은 연구가 진행되고 있다. 열반사유리는 근적외선(열선)영역의 빛을 반사시켜 실내의 열손실량 및 외부에서의 열획득량을 감소시켜 에너지의 소비를 줄일 수 있는 유리을 말한다. 이러한 열반사유리은 fresnel 방정식을 통해 빛의 파장대에 따른 반사율 및 투과도를 예측할 수 있는데, 다층박막구조인 Oxide-Metal-Oxide(OMO)구조는 Oxide의 높은 굴절률과 Metal의 낮은 굴절률을 통해 가시광영역대의 높은 투과도와 근적외선 영역의 높은 반사율을 얻을 수 있다. 또한 Metal층을 삽입함으로서 flexible한 코팅이 가능하고, 높은 carrier density와 mobility로 표면 플라즈몬 공명을 통해 특정 파장대의 반사율을 높일 수 있으므로 많은 연구가 진행되고 있다. $TiO_2$는 고굴절률 및 낮은 광흡수성의 특성을 가지는 산화물반도체로 기존의 $In_2O_3$계 산화물에 비해 값이 싸고 높은 안정성과 광촉매특성을 보이므로 외부에 노출된 환경에 적합한 재료이다. Ag는 저굴절률과 낮은 광흡수성을 가지는 재료로 금속층에 적합하다. 본 연구에서는 fresnel 방정식을 통해 반사도 및 투과도를 예측하고 마그네트론 스퍼터링법으로 다층박막을 열선인 적외선 영역에서의 반사율 및 반사 효율을 평가하였다. Index-matching 시뮬레이션을 통해 $TiO_2/Ag/TiO_2$ 다층박막의 투과도와 반사도를 이론적으로 검토하였다. 시뮬레이션 프로그램은 Macleod프로그램을 이용하였고 재료 각각의 굴절률은 Ellipsometry를 이용하여 측정하였다. 두께 40 nm 와 8 ~ 16 nm를 가지는 $TiO_2$층과 Ag층을 각각 RF/DC 마그네트론 스퍼터링법을 이용하여 Glass기판 위에 증착하였다. 직경 3 in 의 $TiO_2$, Ag 소결체 타깃을 이용하였고 스퍼터링 파워는 각각 200 W, 50 W로 설정하였고, 스퍼터링 가스는 Ar가스의 유량을 20 sccm으로 설정하였다. 작업압력은 모두 1 Pa로 설정하였고 타깃 표면의 불순물 및 이물질 제거를 위해 Pre-sputtering을 10분 진행하였다. 박막의 두께는 reflectometer와 Alphastep을 이용하여 측정하였고 Hall effect measurement를 이용하여 비저항, carrier density, mobility등 전기적 특성을 측정하였다. 또한 UV-VIS spectrometer와 USPM-RU-W NIR Micro-Spectrophotometer를 통해 광학적 특성을 측정하였고 계산 값과 비교분석하였다. 또한 열반사 특성을 평가하기 위해 직접 set-up한 장비를 이용하였다. 단열 박스에 샘플을 장착해 적외선 램프를 조사하였을 때의 열 반사효율을 평가하였고, IR Camera를 이용하여 단열 박스 내부의 온도 변화를 관찰하였다.

• Composites Research
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• v.34 no.3
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• pp.192-198
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• 2021

Due to enormous market growing of electric vehicles without combustion engine, reducing unwanted BSR (buzz, squeak, and rattle) noise is highly demanded for vehicle quality and performance. Particularly, innerbelt weatherstrips which not only block wind noise, rain, and dust from outside, but also reduce noise and vibration of door glass and vehicle are required to exhibit high damping properties for improved BSR performance of the vehicle. Thermoplastic elastomers (TPEs), which can be recycled and have lighter weight than thermoset elastomers, are receiving much attention for weatherstrip material, but TPEs exhibit low material damping and compression set causing frictional noise and vibration between the door glass and the weatherstrip. In this study, high damping EPDM (ethylene-propylene-diene monomer)/PP (polypropylene) thermoplastic vulcanizates (TPV) were investigated by varying EPDM/PP ratio and ENB (ethylidene norbornene) fraction in EPDM. Viscoelastic properties of TPV materials were characterized by assuming that the material damping is directly related to the viscoelasticity. The optimum material damping factor (tanδ peak 0.611) was achieved with low PP ratio (14 wt%) and high ENB fraction (8.9 wt%), which was increased by 140% compared to the reference (tanδ 0.254). The improved damping is believed due to high fraction of flexible EPDM chains and higher interfacial slippage area of EPDM particles generated by increasing ENB fraction in EPDM. The stick-slip test was conducted to characterize frictional noise and vibration of the TPV weatherstrip. With improved TPV material damping, the acceleration peak of frictional vibration decreased by about 57.9%. This finding can not only improve BSR performance of electric vehicles by designing material damping of weatherstrips but also contribute to various structural applications such as urban air mobility or aircrafts, which require lightweight and high damping properties.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.4
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• pp.83-89
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• 2020

For the past few decades, as part of efforts to protect the environment where fossil fuels, which have been a key energy resource for mankind, are becoming increasingly depleted and pollution due to industrial development, ecofriendly secondary batteries, hydrogen generating energy devices, energy storage systems, and many other new energy technologies are being developed. Among them, the lithium-ion battery (LIB) is considered to be a next-generation energy device suitable for application as a large-capacity battery and capable of industrial application due to its high energy density and long lifespan. However, considering the growing battery market such as eco-friendly electric vehicles and drones, it is expected that a large amount of battery waste will spill out from some point due to the end of life. In order to prepare for this situation, development of a process for recovering lithium and various valuable metals from waste batteries is required, and at the same time, a plan to recycle them is socially required. In this study, we introduce a nanoscale pattern transfer printing (NTP) process of Li2CO3, a representative anode material for lithium ion batteries, one of the strategic materials for recycling waste batteries. First, Li2CO3 powder was formed by pressing in a vacuum, and a 3-inch sputter target for very pure Li2CO3 thin film deposition was successfully produced through high-temperature sintering. The target was mounted on a sputtering device, and a well-ordered Li2CO3 line pattern with a width of 250 nm was successfully obtained on the Si substrate using the NTP process. In addition, based on the nTP method, the periodic Li2CO3 line patterns were formed on the surfaces of metal, glass, flexible polymer substrates, and even curved goggles. These results are expected to be applied to the thin films of various functional materials used in battery devices in the future, and is also expected to be particularly helpful in improving the performance of lithium-ion battery devices on various substrates.