• 센서학회지
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• 제6권1호
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• pp.72-80
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• 1997

실리콘 공정을 이용하여 마이크로 밸브(valve)를 제작할 때에 역방향 누설 유량은 중요한 문제중 하나이다. 본 논문에서는 플래퍼(flapper)와 노즐(nozzle)을 이용하여 누설 유량이 없는 마이크로 밸브를 설계하고, 실리콘 공정을 이용하여 제작하였다. 제작된 마이크로 밸브의 작동원리는 정방향 압력이 가해질 때에는 유체의 압력이 플래퍼를 위로 밀어서 유체를 흐르게 하고, 역방향 압력이 가해질 때에는 플래퍼를 밀지만 이때는 노즐의 입구에 의해 지지되므로 플래퍼나 노즐이 깨지지 않는 한 유체가 흐를 수 없게 된다. 노즐은 (100) 웨이퍼를 습식식각하여 제작하였고, 플래퍼는 역형상을 $20{\mu}m$만큼 플라즈마 식각장비(RIE)로 수직 식각한 뒤 뒷면에서부터 습식식각을 하여 제작하였다. 제작된 마이크로 플래퍼-노즐 밸브의 정적특성을 해석하였고, 순수를 사용한 실험결과와 비교하였다. 실험결과는 제작된 마이크로 플래퍼-노즐 밸브가 완전한 다이오드적인 특성을 가진다는 것을 보여 주었다.

• 한국자동차공학회논문집
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• 제8권1호
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• pp.54-62
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• 2000

The purpose of this study is to bring out the optimal design factors which effect on dynamic characteristics in the design of flow control servo valve with high response characteristics, and to verify the validity of the design factors. In this study, force feedback type flow control valve with nozzle/flapper and with no drain is studied. And, the effect of the parameters, such as fixed orifice, nozzle diameter, and maximum displacement between nozzle and flapper are analyzed. We have done simulations using the optimal design factors and simulink(Matlab) as a simulation tool, and verified the validity of our simulations by means of comparison our simulation results with an experimental results of another similar valve.

• International Journal of Fluid Machinery and Systems
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• 제10권2호
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• pp.176-188
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• 2017

The nozzle-flapper valves are widely applied as a pilot stage in aerospace and military system. A subject of the analysis presented in this work is to find out a reasonable range of null clearance between the nozzle and flapper. This paper has presented a numerical flow coefficient simulation. In every design point, a parameterized model is created for flow coefficient simulation and cavitation under different conditions with varying gap width and inlet pressure. Moreover, a new test device has been designed to measure the flow coefficient and for visualized cavitation. The numerical simulation and test results both indicate that cavitation intensity gets fierce initially and shrinks finally as the gap width varies from small to large. From the curve, the flow coefficient mostly has experienced three stages: linear throttle section, transition section and saturation section. The appropriate deflection of flapper is recommended to make the gap width drop into the linear throttle section. The flapper-nozzle null clearance is optionally recommended near the range of $D_N/16$. Finally through simulation it is also concluded that the inlet pressure plays a little role in the influence on the flow coefficient.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.161-166
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• 2001

The static characteristics of four-nozzle flapper valves are investigated with both constant flow and constant supply pressure. The ranges, in which linearization of these characteristics would be valid, are discussed. Linearized dynamic model is also derived. Numerical simulations of nonlinear dynamic model are carried out by HyPneu to make an assessment of the effect of input step size in both cases of no-load and blocked-load operation.

• 한국정밀공학회지
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• 제17권2호
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• pp.151-160
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• 2000

An experimental and theoretical analysis for the improvement of dynamic characteristics and design of electro-hydraulic flow control servo valve are performed. The theoretical results are compared with the experimental step responses, and the important design parameters of an electro-hydraulic flow control servo valve are derived by using the simulation program. Simulation parameters of nozzle jet coefficient and orifice and spool valve discharge coefficient are given through experiment. The theoretical and experimental step response curves show that the valve gain depends on the fixed orifice and nozzle $ratio(R_on)$ and is maximum at $R_on=1.$ And drain orifice in the flapper - nozzle return line creates a small back pressure, which improves the performance fur the valve.

• 한국정밀공학회지
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• 제16권2호통권95호
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• pp.50-59
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• 1999

The effect of a variant drain orifice damping on the characteristics of a servovalve flapper-nozzle stage is analyzed. Steady-state characteristics of flapper-nozzle stage and the linearized dynamics of flapper-nozzle assembly with a spool valve show that the variant drain orifice damping could improve such null performance characteristics as null pressure sensitivity and linearity of gain function. Generalized design criterion and a sufficient condition for servovalve stability are also established.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.1053-1057
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• 1996

The purpose of this study is to bring out the optimal design factors which effect on dynamic characteristics in the design of proportional flow control valve with fast response characteristics, and to verify the validity of the design factors In this study, force feedback type flow control valve with nozzle-flapper is studied. And, the influences which fixed orifice, nozzle diameter, and maximum displacement between nozzle and flapper effect on dynamic characteristics are analyzed. We have done simulations using the optimal design factors and simulink(Matlab) as a simulation tool, and verified the validity of our simulations by means of comparison our simulation results with an experimental results of another similar valve.

• 연구논문집
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• 통권26호
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• pp.85-94
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• 1996

The purpose of this study is to bring out the optimal design factors which effect on dynamic characteristics in the design of proportional flow control valve with high response characteristics, and to verify the validity of the design factors. In this study, force feedback type flow control valve with nozzle-flapper is studied. And, the influences which fixed orifice, nozzle diameter, and maximum displacement between nozzle and flapper effect on dynamic characteristics are analyzed. We have done simulations using the optimal design factors and simulink(Matlab) as a simulation tool, and verified the validity of our simulations by means of comparison our simulation results with an experimental results of another similar valve.

• 한국정밀공학회지
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• 제15권12호
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• pp.142-147
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• 1998

Developing robot hands with multi-degree-of-freedom is one of the topics that researchers have recently begun to improve the limitation by adding flexibility and dexterity. In this study, an articulated servo-pneumatic robot hand system with direct-drive joints has been developed whose main feature is the minimization of the dimension. The servo-pneumatic system is advantageous to fabricate a dexterous robot hand system due to the high torque-to-weight and torque-to-volume ratio. This enables the design of a finger joint with an integrated rotary vane type actuator which produces high output torque without reduction gears, being very robust. In order to control the servo-pneumatic finger joints, a miniature proportional valve that can be attached to the robot hand is required. In this paper, a flapper nozzle type 4/3-way proportional directional valve has been designed and tested. The experimental results show that the developed valve can control a finger joint satisfactorily without much vibratory joint movements and acoustic noises.

• 한국소음진동공학회논문집
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• 제20권10호
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• pp.976-982
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• 2010

This paper proposes a novel type of pressure control mechanism which can apply to vehicle ABS (anti-lock braking system) utilizing the piezoactuator based valve system associated with the pressure modulator. As a first step, a flapper-nozzle of a pneumatic valve system is devised by integrating the piezoacuator to the flexible beam structure. The dynamic modeling of the valve system is then undertaken and subsequently the governing equation of pressure control is derived considering the pressure modulator. A sliding mode controller is designed in order to achieve accurate pressure tracking control in the presence of actuator uncertainty as well as input pressure variation. It is shown through computer simulation that an accurate pressure tracking for sinusoidal motion whose magnitude is 40 bar is achieved by utilizing the proposed pressure control mechanism.