• Journal of the Semiconductor & Display Technology
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• v.9 no.4
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• pp.19-23
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• 2010

Nanoimprint lithography (NIL) is one of the most versatile and promising technology for micro/nano-patterning due to its simplicity, high throughput and low cost. Recently, one of the major trends of NIL is large-area patterning. Especially, the research of the application of NIL to TFT-LCD field has been increasing. Technical difficulties to keep the uniformity of the residual layer, however, become severer as the imprinting area increases. In this paper we performed a numerical study for a large area NIL (the $2^nd$ generation TFT-LCD glass substrate ($370{\times}470$ mm)) by using finite element method. First, a simple model considering the surrounding wall was established in order to simulate effectively and reduce the computing time. Then, the volume of fluid (VOF) and grid deformation method were utilized to calculate the free surfaces of the resist flow based on an Eulerian grid system. From the simulation, the velocity fields and the imprinting pressure during the filling process in the NIL were analyzed, and the effect of the surrounding wall and the uniformity of residual layer were investigated.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.1
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• pp.363-366
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• 2005

A micro flow sensor on silicon substrate allows the fabrication of small components where many different functions can be integrated so that the functionality of the sensors can be increased. Further more, due to the small size of the elements the sensors can be quite fast. A thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. In normal, a mass flow sensor is composed of a central heater and a pair of temperature sensing elements around the heater. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensors and a central heater was proposed and numerically simulated by the Finite difference formulation to confirm the feasibility of the flow sensor structure.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.5
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• pp.238-242
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• 2001

In this paper, we extracted design parameters for re-entrant mode microstrip directional coupler using FE(finite element) calculations. The microstrip directional coupler suffers from a poor directivity due to effect of the inhomogeneous dielectric including both dielectric substrate and air in microstrip transmission lines. Thus, the phase velocity of even mode is not equal to that of odd mode. In order to improve the directivity of microstrip directional coupler, a novel re-entrant mode microstrip directional coupler was employed. In microstrip configuration, the high directivity can be reached by matching the even- and odd-mode effective phase velocities. Through the values of capacitance obtained from 2-dimensional FE calculations, the phase velocities for each mode and the design parameter were extracted for the proposed parallel coupled-line configuration. Based on the extracted design parameter with phase matching condition, we designed and fabricated a 30dB directional coupler at 0.85GHz. Experimental results show good performance with excellent, isolation and directivity.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.114-120
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• 2012

This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.6
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• pp.457-466
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• 2014

This paper presents an analytic and numerical simulation of the generation and propagation of pico-second ultrasound with nano-scale wavelength, enabling the production of bulk waves in thin films. An analytic model of laser-matter interaction and elasto-dynamic wave propagation is introduced to calculate the elastic strain pulse in microstructures. The model includes the laser-pulse absorption on the material surface, heat transfer from a photon to the elastic energy of a phonon, and acoustic wave propagation to formulate the governing equations of ultra-short ultrasound. The excitation and propagation of acoustic pulses produced by ultra-short laser pulses are numerically simulated for an aluminum substrate using the finite-difference method and compared with the analytical solution. Furthermore, Fourier analysis was performed to investigate the frequency spectrum of the simulated elastic wave pulse. It is concluded that a pico-second bulk wave with a very high frequency of up to hundreds of gigahertz is successfully generated in metals using a 100-fs laser pulse and that it can be propagated in the direction of thickness for thickness less than 100 nm.

• Journal of Korea Society of Industrial Information Systems
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• v.4 no.1
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• pp.110-116
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• 1999

In this paper, signal processing is utilized to reduce the computational time which is one of weak point of FDTD(finite difference time domain) method. Compared with the direct FDTD. combination of FDTD and signal processing achieves the same type of accuracy in much shorter time The combination method spends 140 minutes to analyze the frequence characteristics of the microstrip lowpass filter while the direct FDTD consumes about 900 minutes. To verify the obtained results, microstrip lowpass filter is fabricated on dielectric substrate and the measured results are compared with the analyzed results. It is shown that measured results are in good agreement with the theoretical results.

• Journal of the Semiconductor & Display Technology
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• v.9 no.2
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• pp.91-96
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• 2010

In recent years there have been considerable attentions on nanoimprint lithography (NIL) by the display device and semiconductor industry due to its potential abilities that enable cost-effective and high-throughput nanofabrication. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper we consider the roll-to-plate type imprinting process. In the process a glass mold, which is placed upon the 2nd generation TFT-LCD glass sized substrate(370${\yen}$470 mm), is rolled by a rubber roller to achieve a uniform residual layer. The pressure distribution on the glass mold by rolling of the rubber roller is crucial information to analyze mold deformation, transferred pattern quality, uniformity of residual layer and so forth. In this paper the quantitative pressure distribution induced by rolling of the rubber roller was calculated with finite element analysis under the assumption of Neo-Hookean hyperelastic constitutive relation. Additionally the numerical results were verified by the experiments.

• Korean Journal of Materials Research
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• v.29 no.6
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• pp.371-377
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• 2019

A flexible piezoelectric energy harvester(f-PEH) that converts tiny mechanical and vibrational energy resources into electric signals without any restraints is drawing attention as a self-powered source to operate flexible electronic systems. In particular, the nanocomposites-based f-PEHs fabricated by a simple and low-cost spin-coating method show a mechanically stable and high output performance compared to only piezoelectric polymers or perovskite thin films. Here, the non-piezoelectric polymer matrix of the nanocomposite-based f-PEH is replaced by a P(VDF-TrFE) piezoelectric polymer to improve the output performance generated from the f-PEH. The piezoelectric hybrid nanocomposite is produced by distributing the perovskite PZT nanoparticles inside the piezoelectric elastomer; subsequently, the piezoelectric hybrid material is spin-coated onto a thin metal substrate to achieve a nanocomposite-based f-PEH. A fabricated energy device after a two-step poling process shows a maximum output voltage of 9.4 V and a current of 160 nA under repeated mechanical bending. Finite element analysis(FEA) simulation results support the experimental results.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.3
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• pp.309-313
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• 2024

The key to determining the lifetime of OLED device is how much brightness can be maintained. It can be said that there are internal and external causes for the degradation of OLED devices. The most important cause of internal degradation is bonding and degradation in the excited state due to the electrochemical instability of organic materials. The structure of OLED modeled in this paper consists of a cathode layer, electron injection layer (EIL), electron transport layer (ETL), light emission layer, hole transport layer (HTL), hole injection layer (HIL), and anode layer on a glass substrate from top to bottom. It was confirmed that the temperature generated in OLED was distributed around the maximum of 343.15 K centered on the emission layer. It can be seen that the heat distribution generated in the presented OLED structure has an asymmetrically high temperature distribution toward the cathode, which is believed to be because the sizes of the cathode and positive electrode are asymmetric. Therefore, when designing OLED, it is believed that designing the structures of the cathode and anode electrodes as symmetrically as possible can ensure uniform heat distribution, maintain uniform luminance of OLED, and extend the lifetime. The thermal distribution of OLED was analyzed using the finite element method according to Comsol 5.2.

• ETRI Journal
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• v.46 no.4
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• pp.581-594
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• 2024

In this study, a planar printed circuit board (PCB) coil with FR4 substrate was designed and simulated using the finite element method, and the results were analyzed in the frequency domain. This coil can be used in wireless power transfer (WPT) as a transmitter or receiver, eliminating wires. It can also be used as the receiver in radio frequency energy-harvesting (RF-EH) systems by optimizing the planar PCB coil to convert radio-wave energy into electricity, and it can be employed as an excitation (transmitter) or receiver coil in nuclear magnetic resonance (NMR) spectroscopy. This PCB coil can replace the conventional coil, yielding a reduced occupied volume, a fine-tuned design, reduced weight, and increased efficiency. Based on the calculated gain, power, and electromagnetic and electric field results, this planar PCB coil can be implemented in WPT, NMR spectroscopy, and RF-EH devices with minor changes. In applications such as NMR spectroscopy, it can be used as a transceiver planar PCB coil. In this design, at frequencies of 915 MHz and 40 MHz with 5 mm between coils, we received powers of 287.3 μW and 480 μW, respectively, which are suitable for an NMR coil or RF-EH system.