• Title/Summary/Keyword: Fine-pitch

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Developing improvement technology in pre-etching process for the Shadow Mask quality of flat color TV

  • Park, Jong-Moo;Park, Kwang-Ho;Jung, Hyo-Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.1164-1167
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    • 2003
  • Recently CRT is getting flatted, As change of CRT trend from normal type to Flat type, the material of Shadow Mask was also changed from AK(Aluminum Killed) to Invar(Fe-Ni alloy) materials Until now we have used just AK(Aluminum Killed) for normal type TV(not flat type), but main raw material of shadow mask component was changed. . However recently Invar(Fe-Ni alloy) materials, which has advantage of Low Thermal Expansion and High Strength, has been developed as well as applying in mass production as CRT's trend has become more flat and fine pitch. As main raw material of shadow mask component was changed, conditions of process were changed. One of them, the importance of pre-etching process (assistant process for developing & etching) is improved because there are so many particles in the pre-etching bath because of Ni compounds. Since the solubility of Ni in pre-etching solvent is very low related to Fe's, so the compounds of Ni happen to make particles.(the solubility of Fe is twenty times Ni's) that particles happen to make process troubles and NG productions so to clear the particles we had to established high cost filtering system, but it is useless. As time goes by the quantity of particles (Ni compounds) was increased because of the capability of filtering system was not enough, the particles was produced continuous in bath, and it make quality problems. Hence we tried to develop the new pre-etching solution to remove the particles (Ni compounds) and to cost down the filtering system's running cost. But in improving the solution we discovered the new pre-etching solution made the PR developing better. In former solution there were three kinds of chemistry (COOH)2 , H2O2 , H2S04 .first the function of (COOH)2 is drilling the surface of Invar, during this mechanism Ni compounds occurred. Second the function of H202 is removing the PR fringe (half UV exposure zone on PR(PVA)), Third the function of H2S04 is the catalysis of (COOH)2 In those, (COOH)2 was the main reason to make the Ni compounds. So to improve the solutions we had to change (COOH)2 to the other material. the chemistry we improved was a complex chemistry based on H2S04 . after using this chemistry the particles problem was disappeared and there was another advantage cut down the PR fringe. The New solution made the function of H202 better so the PR developing improved. To be direct the catalyst of the new solution helped the H202. anyway First thing after change the solution the quality of shadow Mask for flat color TV was improved & the yield also improved. But the more important thing is how to control the new solution. So we accepted the new concept which was the degree of freshness. The degree of freshness is based on non-reacted solution which was 100% ( the degree of freshness) and calculated the melted Ni quantity as time goes by. So we made the gauging liner plot. In conclusion, many companies tried to make fine pitched Shadow Mask ,generally to make quality jump up it needed a lot of cost & persons .in this case the shift of core material made it possible.

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The Effect of Electroplating Parameters on the Compositions and Morphologies of Sn-Ag Bumps (Sn-Ag 범프의 조성과 표면 형상에 영향을 미치는 도금 인자들에 관한 연구)

  • Kim, Jong-Yeon;Yoo, Jin;Bae, Jin-Soo;Lee, Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.4
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    • pp.73-79
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    • 2003
  • With the variation of Ag concentration in bath, current density, duty cycle, additive and agitation for electroplating of Sn-Ag solder, the compositions and the morphologies of solder were studied. It was possible to controll Ag content in Sn-Ag solder by varying Ag concentration in bath and current density. The microstructure size of Sn-Ag solder decreased with increasing current density. Duty cycle of pulse electroplating and quantity of additive affected on Ag content of deposit and surface roughness. In this work eutectic Sn-Ag solder bumps with fine pitch of 30 $\mu\textrm{m}$ and height of 15 $\mu\textrm{m}$ was formed successfully. The Ag content of electrodeposited solder was confirmed by EDS and WDS analyses and the surface morphologies was analyzed by SEM and 3D surface analyzer.

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A Study on Electroless Palladium Layer Characteristics and Its Diffusion in the Electroless Palladium Immersion Gold (EPIG) Surface Treatment for Fine Pitch Flip Chip Package (미세피치 플립칩 패키지 구현을 위한 EPIG 표면처리에서의 무전해 팔라듐 피막특성 및 확산에 관한 연구)

  • Hur, Jin-Young;Lee, Chang-Myeon;Koo, Seok-Bon;Jeon, Jun-Mi;Lee, Hong-Kee
    • Journal of the Korean institute of surface engineering
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    • v.50 no.3
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    • pp.170-176
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    • 2017
  • EPIG (Electroless Pd/immersion Au) process was studied to replace ENIG (electroless Ni/immersion Au) and ENEPIG (electroless Ni/electroless Pd/immersion Au) processes for bump surface treatment used in high reliable flip chip packages. The palladium and gold layers formed by EPIG process were uniform with thickness of 125 nm and 34.5 nm, respectively. EPAG (Electroless Pd/autocatalytic Au) also produced even layers of palladium and gold with the thickness of 115 nm and 100 nm. TEM results exhibited that the gold layer in EPIG surface had crystalline structure while the palladium layer was amorphous one. After annealing at 250 nm, XPS analysis indicated that the palladium layer with thickness more than 22~33 nm could act as a diffusion barrier of copper interconnects. As a result of comparing the chip shear strength obtained from ENIG and EPIG surfaces, it was confirmed that the bonding strength was similar each other as 12.337 kg and 12.330 kg, respectively.

The Study on Fine-Pitch Pattern Formation Using epoxy bonding film Surface modification and Semi-additive Method (Epoxy Bonding Film 표면 개질과 도금공정을 이용한 미세패턴형성에 관한 연구)

  • Kim, Wan-Joong;Park, Se-Hoon;Jung, Yeon-Kyung;Lee, Woo-Sung;Park, Jong-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.165-165
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    • 2009
  • 현재 반도체나 이동통신 분야는 사용자의 요구에 따라 PCB의 회로선폭이 갈수록 좁아지고 있다. 이러한 정밀 부품을 제조하기 위한 제조공정에서 각광받기 시작한 기술 중 하나가 대기압 플라즈마 기술이다. 본 연구에서는 미세패턴 형성이 가능한 에폭시 본딩 필름위에 무전해 도금공정을 통한 패턴 도금법을 이용하여 패턴을 형성하였고, 형성된 패턴에 대기압 플라즈마 처리 횟수에 따른 접촉각(Contact Angle)과 Peel Strength의 변화를 분석하였다. 또한 에폭시 본딩 필름을 이용한 Build-up공정을 거쳐 Micro Via를 형성하여 대기압 플라즈마 처리 횟수에 따른 Via 표면을 분석하였다. 대기압 플라즈마 기술은 진공식에 비해 소규모 장비를 이용한 전처리가 가능하고, 초기 설비비용을 절감하는데 탁월한 효과가 있어 널리 사용하는 기술 중 하나이다. 이 연구를 통하여 대기압 플라즈마 처리 횟수에 따른 표면에너지의 변화로 인한 접촉각이 좋아지는 것을 알 수 있으며, 대기압 플라즈마 처리를 한 패턴표면이 친수성으로 변하면서 현상된 드라이 필름 사이로 도금액이 원활히 공급되어서 미세패턴 모양이 우수하게 구현되었음을 알 수 있었다. 또한 Via Filling에도 뛰어난 효과가 있었음을 확인할 수 있었다.

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Prosodic Boundary Effects on the V-to-V Lingual Movement in Korean

  • Cho, Tae-Hong;Yoon, Yeo-Min;Kim, Sa-Hyang
    • Phonetics and Speech Sciences
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    • v.2 no.3
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    • pp.101-113
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    • 2010
  • The present study investigated how the kinematics of the /a/-to-/i/ tongue movement in Korean would be influenced by prosodic boundary. The /a/-to-/i/ sequence was used as 'transboundary' test materials which occurred across a prosodic boundary as in /ilnjəʃ$^h$a/ # / minsakwae/ ('일년차#민사과에' 'the first year worker' # 'dept. of civil affairs'). It also tested whether the V-to-V tongue movement would be further influenced by its syllable structure with /m/ which was placed either in the coda condition (/am#i/) or in the onset condition (/a#mi). Results of an EMA (Electromagnetic Articulagraphy) study showed that kinematical parameters such as the movement distance (displacement), the movement duration, and the movement velocity (speed) all varied as a function of the boundary strength, showing an articulatory strengthening pattern of a "larger, longer and faster" movement. Interestingly, however, the larger, longer and faster pattern associated with boundary marking in Korean has often been observed with stress (prominence) marking in English. It was proposed that language-specific prosodic systems induce different ways in which phonetics and prosody interact: Korean, as a language without lexical stress and pitch accent, has more degree of freedom to express prosodic strengthening, while languages such as English have constraints, so that some strengthening patterns are reserved for lexical stress. The V-to-V tongue movement was also found to be influenced by the intervening consonant /m/'s syllable affiliation, showing a more preboundary lengthening of the tongue movement when /m/ was part of the preboundary syllable (/am#i/). The results, together, show that the fine-grained phonetic details do not simply arise as low-level physical phenomena, but reflect higher-level linguistic structures, such as syllable and prosodic structures. It was also discussed how the boundary-induced kinematic patterns could be accounted for in terms of the task dynamic model and the theory of the prosodic gesture ($\pi$-gesture).

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A Study of Properties of Sn-3Ag-0.5Cu Solder Based on Phosphorous Content of Electroless Ni-P Layer (Sn-3Ag-0.5Cu Solder에 대한 무전해 Ni-P층의 P함량에 따른 특성 연구)

  • Shin, An-Seob;Ok, Dae-Yool;Jeong, Gi-Ho;Kim, Min-Ju;Park, Chang-Sik;Kong, Jin-Ho;Heo, Cheol-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.6
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    • pp.481-486
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    • 2010
  • ENIG (electroless Ni immersion gold) is one of surface finishing which has been most widely used in fine pitch SMT (surface mount technology) and BGA (ball grid array) packaging process. The reliability for package bondability is mainly affected by interfacial reaction between solder and surface finishing. Since the behavior of IMC (intermetallic compound), or the interfacial reaction between Ni and solder, affects to some product reliabilities such as solderability and bondability, understanding behavior of IMC should be important issue. Thus, we studied the properties of ENIG with P contents (9 wt% and 13 wt%), where the P contents is one of main factors in formation of IMC layer. The effect of P content was discussed using the results obtained from FE-SEM(field-emission scanning electron microscope), EPMA(electron probe micro analyzer), EDS(energy dispersive spectroscopy) and Dual-FIB(focused ion beam). Especially, we observed needle type irregular IMC layer with decreasing Ni contents under high P contents (13 wt%). Also, we found how IMC layer affects to bondability with forming continuous Kirkendall voids and thick P-rich layer.

5.0 inch WVGA Top Emission AMOLED Display for PDA

  • Lee, Kwan-Hee;Ryu, Seoung-Yoon;Park, Sang-Il;Ryu, Do-Hyung;Kim, Hun;Song, Seung-Yong;Chung, Bo-Yong;Park, Yong-Sung;Kang, Tae-Wook;Kim, Sang-Chul;Cho, Yu-Sung;Park, Jin-Woo;Kwon, Jang-Hyuk;Chung, Ho-Kyoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.7-10
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    • 2003
  • Samsung SDI has developed a full color 5.0" WVGA AMOLED display with top emission and a super fine pitch of 0.1365mm(l86ppi), the world's highest resolution OLED display ever reported to date. Scan driver circuits and demux circuit were integrated into the display panel, using low temperature poly-Si TFT CMOS technology, and data driver circuit were mounted using COG chips. Peak luminescence was greater than 300cd/ $m^2$ with power consumption of 500mW with 30% of the pixels on illuminated.

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Studies for ENIG surface behavior of FCBGA through the time by using water dip test method

  • Shin, An-Seob;Kim, Jeom-Sik;Ok, Dae-Yool;Jeong, Gi-Ho;Park, Chang-Sik;Heo, Cheol-Ho;Lee, Kum-Ro
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.412-412
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    • 2008
  • ENIG(Electroless Nickel Immersion Gold)is a surface treatment method that is used most widely at fine pitch's SMT and BGA packaging process. ENIG has good diffusion barrier of Ni against solder and good wettability due to Au finish. But when the discoloration occurred on the Au finish of ENIG, some key characteristics related to the quality and reliability of PCB such as bondability, solderability and electrical flowing of packaging process could be deteriorated. In this paper, we have performed the water dip test ($88^{\circ}C$ purified water) which accelerates the galvanic corrosion of Ni diffused from the Ni-P layer. That is, the excessive oxidation of the Ni layer could result in non-wetting of the solder because the flux may not be able to remove excessive oxides. Though Au discoloration have been reported to be caused by Ni oxides in many literature, it is still open to verify and discuss The microstructures and chemical compositions have been investigated using FE-SEM, TEM, FIB, EDS and XPS. As a result, authors have found that the Au discoloration in ENIG type is severely caused by the oxidation of the Ni and the mechanism of Au discoloration can be confirmed through the experiment result of water dip test.

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Epoxy-based Interconnection Materials and Process Technology Trends for Semiconductor Packaging (반도체 패키징용 에폭시 기반 접합 소재 및 공정 기술 동향)

  • Eom, Y.S.;Choi, K.S.;Choi, G.M.;Jang, K.S.;Joo, J.H.;Lee, C.M.;Moon, S.H.;Moon, J.T.
    • Electronics and Telecommunications Trends
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    • v.35 no.4
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    • pp.1-10
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    • 2020
  • Since the 1960s, semiconductor packaging technology has developed into electrical joining techniques using lead frames or C4 bumps using tin-lead solder compositions based on traditional reflow processes. To meet the demands of a highly integrated semiconductor device, high reliability, high productivity, and an eco-friendly simplified process, packaging technology was required to use new materials and processes such as lead-free solder, epoxy-based non cleaning interconnection material, and laser based high-speed processes. For next generation semiconductor packaging, the study status of two epoxy-based interconnection materials such as fluxing and hybrid underfills along with a laser-assisted bonding process were introduced for fine pitch semiconductor applications. The fluxing underfill is a solvent-free and non-washing epoxy-based material, which combines the underfill role and fluxing function of the Surface Mounting Technology (SMT) process. The hybrid underfill is a mixture of the above fluxing underfill and lead-free solder powder. For low-heat-resistant substrate applications such as polyethylene terephthalate (PET) and high productivity, laser-assisted bonding technology is introduced with two epoxy-based underfill materials. Fluxing and hybrid underfills as next-generation semiconductor packaging materials along with laser-assisted bonding as a new process are expected to play an active role in next-generation large displays and Augmented Reality (AR) and Virtual Reality (VR) markets.

An Ultra-precision Lathe for Large-area Micro-structured Roll Molds (대면적 미세패턴 롤 금형 가공용 초정밀 롤 선반 개발)

  • Oh, Jeong Seok;Song, Chang Kyu;Hwang, Jooho;Shim, Jong Youp;Park, Chun Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.12
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    • pp.1303-1312
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    • 2013
  • We report an ultra-precision lathe designed to machine micron-scale features on a large-area roll mold. The lathe can machine rolls up to 600 mm in diameter and 2,500 mm in length. All axes use hydrostatic oil bearings to exploit the high-precision, stiffness, and damping characteristics. The headstock spindle and rotary tooling table are driven by frameless direct drive motors, while coreless linear motors are used for the two linear axes. Finite element method modeling reveals that the effects of structural deformation on the machining accuracy are less than $1{\mu}m$. The results of thermal testing show that the maximum temperature rise at the spindle outer surface is approximately $0.5^{\circ}C$. Finally, performance evaluations of the error motion, micro-positioning capability, and fine-pitch machining demonstrate that the lathe is capable of producing optical-quality surfaces with micron-scale patterns with feature sizes as small as $20{\mu}m$ on a large-area roll mold.