• 제목/요약/키워드: Fine stage

검색결과 518건 처리시간 0.027초

미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니플레이션 시스템 (A Piezo-driven Fine Manipulation System Based on Flexure Hinges for Manipulating Micro Parts)

  • 최기봉;이재종;김기홍;고국원
    • 제어로봇시스템학회논문지
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    • 제15권9호
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    • pp.881-886
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    • 2009
  • This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

2단계 배합방법이 순환잔골재 혼입 모르타르의 압축강도에 미치는 영향 (Contribution of Two-Stage Mixing Approach on Compressive Strength of Mortar Made of Recycled Fine Aggregate)

  • 김유진;김규원;정철우
    • 한국건설순환자원학회논문집
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    • 제8권4호
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    • pp.490-497
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    • 2020
  • 본 연구는 순환잔골재의 사용 촉진을 위한 궁극의 해결방안 중 하나인 구조용 콘크리트의 골재로 사용될 수 있는 가능성을 확인하기 위하여 진행되었다. 순환잔골재의 함수상태 변화에 따라, 2단계 배합방법 및 변형된 형태의 2단계 배합방법을 적용한 모르타르의 강도가 세척사로 제조된 일반배합 모르타르의 강도에 근접하는지를 확인하여, 2단계 배합의 활용성을 증명하고자 하였다. 본 연구의 결과에 따르면, 골재의 함수상태에 의한 영향은 물시멘트비 0.3인 경우에만 발현되었고, 물시멘트비 0.5인 경우에는 명확한 경향을 찾을 수 없었으나, 2단계 배합방법이 순환잔골재 혼입 모르타르의 강도증진에 기여할 수 있는 가능성은 확인하였다. 또한 기존의 2단계 배합방법에 비해 시멘트 페이스트를 먼저 배합한 후, 순환잔골재를 투입한 변형된 형태의 2단계 배합방법을 활용하는 것이 순환잔골재 혼입 모르타르의 강도발현에 더욱 효과적인 것으로 나타났다.

초정밀 3축 이송 스테이지의 설계, 모델링 및 해석 (Design, Modeling and Analysis of a 3-axis Fine Positioning Stage)

  • 강중옥;서문훈;한창수;홍성욱
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 추계학술대회 논문집
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    • pp.989-992
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    • 2002
  • This paper presents a procedure far design, modeling and analysis of a fine positioning stage. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs (the flexure hinges). An experimental design procedure is applied to determine optimum design variables for flexure hinges. The optimum variables are validated through a numerical test. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage.

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나노 정밀도 스캐닝 용 공기베어링과 보이스 코일 모터의 초정밀 이중 스테이지 설계 및 제어 (Design and Control of Ultra-precision Dual Stage with Air bearings and Voice coil motor for nm scanning system)

  • 김기현;최영만;김정재;이문구;이석원;권대갑
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1883-1886
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    • 2005
  • In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

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분급 플라이애쉬의 포졸란반응 특성 (Pozzolanic reaction of classified fly ash)

  • 이승헌;황해정
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2006년도 추계 학술발표회 논문집
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    • pp.753-756
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    • 2006
  • This paper discussed pozzolanic reaction properties of classified fly ashes by using of electrostatic precipitator. Blaine values of fly ashes at hoppers are respectively about 3000(ordinary), 5000(fine) and 8000cm2/g(super-fine). The pozzolanic reactivity of fly ash at early stage and at later stage are respectively related to the related to the fineness and the glass content of fly ash. But the early hydration of cement was retarded by addition of super fine fly ashes. the adiabatic temperature rise of mortar containing fly ash is increased with the fineness of fly ashes.

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정렬오차 추정 필터에 기반한 비전 정렬 시스템의 고속 정밀제어 (Fast and Fine Control of a Visual Alignment Systems Based on the Misalignment Estimation Filter)

  • 정해민;황재웅;권상주
    • 제어로봇시스템학회논문지
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    • 제16권12호
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    • pp.1233-1240
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    • 2010
  • In the flat panel display and semiconductor industries, the visual alignment system is considered as a core technology which determines the productivity of a manufacturing line. It consists of the vision system to extract the centroids of alignment marks and the stage control system to compensate the alignment error. In this paper, we develop a Kalman filter algorithm to estimate the alignment mark postures and propose a coarse-fine alignment control method which utilizes both original fine images and reduced coarse ones in the visual feedback. The error compensation trajectory for the distributed joint servos of the alignment stage is generated in terms of the inverse kinematic solution for the misalignment in task space. In constructing the estimation algorithm, the equation of motion for the alignment marks is given by using the forward kinematics of alignment stage. Secondly, the measurements for the alignment mark centroids are obtained from the reduced images by applying the geometric template matching. As a result, the proposed Kalman filter based coarse-fine alignment control method enables a considerable reduction of alignment time.

해사의 기본성질과 잔골재로서의 이용 방안에 관한 연구 (A Study on the Characteristics of Beach Sand as Fine aggregate of Concrete)

  • 황경구;전현우
    • 한국농공학회지
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    • 제18권4호
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    • pp.4265-4273
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    • 1976
  • 1. Fine aggregates of concrete are very important for the construction works and construction cost determination. Most of fine aggregates are from the river sand, but the amount of storage in the river side is steadily decreasing due to continuous construction works. Therefore, another source of fine aggregates is needed to meet increasied demand of sand. 2. Beach sand is a possible source of fine aggregates. But rust of steel bar is caused by CL-chemical of beach sand. Therefore, desalinization of beach sand is requested to get durable reinforced concrete. Economical methods of desalinization are as follows. (a) Flooding and drainage method. (b) Washing of beach sand with water supply and mixing. (c) Spreading of beach sand on the land and leaching by rain water for a few month. 3. Hardening of concrete with beach sand is accelerated due to salt, Thus early stage strength increase leads to make cracks. Also later stage strength decreases and durability becomes worse. By using appropriate admixture, the quality of concrete can be improved.

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3단 구성의 디지털 DLL 회로 (All Digital DLL with Three Phase Tuning Stages)

  • 박철우;강진구
    • 전기전자학회논문지
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    • 제6권1호
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    • pp.21-29
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    • 2002
  • 본 논문에서는 전부 디지털 회로로 구성된 고 해상도의 DLL(Delay Locked Loop)를 제안하였다. 제안된 회로는 위상 검출기, 지연 선택 블록, 그리고 각각의 지연 체인을 가지는 Coarse, Fine 그리고 Ultra Fine 위상조정 블록의 삼 단의 형식으로 되어 있다. 첫 번째 단은 Ultra Fine 위상조정블록으로 고 해상도를 얻기 위하여 Vernier Delay Line을 사용하였다. 두 번째와 세 번째 단은 Coarse와 Fine 위상조정블록으로 각각의 단위 지연 체인을 이루는 단위 지연 소자의 해상도 만큼의 위상 제어를 하게 되며, 두 단은 상당히 비슷한 구조를 이루고 있다. 회로는 HSPICE를 이용하여 공급 전압이 3.3V인 $0.35{\mu}m$ CMOS 공정으로 시뮬레이션 되었다. 시뮬레이션 결과 회로의 해상도를 약 10ps로 높일 수 있었으며, 동작 범위는 250MHz에서 800MHz 이다.

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여과 성능향상을 위한 이단이층 복합여과시스템의 공정선정 연구 (A Study on the Process Selection for Two-stage and Dual Media Filtration System for Improving Filtration Performance)

  • 송시범;조민;남상호;우달식
    • 상하수도학회지
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    • 제21권2호
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    • pp.203-214
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    • 2007
  • This study aimed at researching the process selection for two-stage and dual media filtration system, as a technology substituting the existing sand filter without expanding the site when retrofitting an old filter bed or designing a new one. In order to select the process for optimum complex filtration system, three running conditions have been tested. Test results demonstrated that Run 3 in which the 1st stage was filled with anthracite and coarse sand, and the 2nd stage was filled up with activated carbon and fine sand reduced the head loss and the load of turbidity substances. Also, Run 3 showed better performance in removing TOC, particle counts, THMFP and HAAFP, compared to other two conditions. 99 % of Cryptosporidium was removed. Bisphenol-A was rarely removed from the 1st stage of coarse sand and 2nd stage of fine sand, but 99 % of it was removed from the 2nd stage of activated carbon. In conclusion, when it is required to retrofit an old rapid filter bed or design a new one for the purpose of improving filtration performance, the following two-stage and dual media filtration system is suggested: the 1st stage of filter bed needs to be filled up with coarse sand to remove turbidity as the pretreatment for extending duration of filtering, the top part of 2nd stage needs to be filled up with granular activated caron to remove dissolved organic matters and others as the main process, and finally the bottom part of 2nd stage needs to be filled up with fine sand as the finishing process.