• 제목/요약/키워드: Film defect

검색결과 390건 처리시간 0.029초

바이어스 조건하에서 증착한 a-C:H 박막을 이용한 액정배향 효과 (LC Alignment Effects using a-C:H Thin Film as Working Gas at Bias Condition)

  • 황정연;조용민;서대식;노순준;백홍구
    • 한국전기전자재료학회논문지
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    • 제16권11호
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    • pp.1019-1022
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    • 2003
  • We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of a-C:H thin film as working gas at 30W rf bias condition. A high pretilt angle of about 5$^{\circ}$ by ion beam(IB) exposure on the a-C:H thin film surface was measured. A good LC alignment by the IB alignment method on the a-C:H thin film surface was observed at annealing temperature of 250$^{\circ}C$, and the alignment defect of the NLC was observed above annealing temperature of 300$^{\circ}C$. Consequently, the high LC pretilt angle and the good thermal stability of LC alignment by the IB alignment method on the a-C:H thin film surface as working gas at 30W rf bias condition can be achieved.

Binder Film을 이용한 LTCC Sheet 적층 (Lamination of LTCC Sheet Using Binder Film)

  • 신효순;최용석;박은태
    • 한국세라믹학회지
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    • 제43권4호
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    • pp.253-258
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    • 2006
  • In the lamination process of multi-layer ceramic modules, the occurrence of delamination comes into repeatedly. To completely improve the lamination process of LTCC sheets, a binder film was introduced between the layers. The binder film did not originate the delamination until the thickness under $40{\mu}m$. After lamination, the thickness of the binder film was determined by the infilteraion of binder by the pressure, and after the bake-out, was dependent on the decomposition of binder resin. Any detectable defect was not observed in the multilayer structure with Ag inner electrodes.

단일전구체(1,3-DSB)에 의한 저온 SiC박막 성장에 관한 연구 (A Study on the Low Temperature Growth of SiC Film with a 1,3-DSB Precursor)

  • 양재웅;노대호;윤진국;김재수
    • 한국표면공학회지
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    • 제36권2호
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    • pp.141-147
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    • 2003
  • Silicon carbide thin film was deposited in APCVD and LPCVD system with 1,3-DSB precursor 1,3-DSB is the single precursor to deposit SiC on Si at low temperature. SiC film was deposited at $850^{\circ}C$ lower than ordinary temperature ($1000~1200^{\circ}C$) in CVD process. SiC thin film glowed to high oriented (111) plane in APCVD system. In LPCVD system, SiC film groved to preferred (220) plane at same temperature. This discrepancy between preferred planes can be described by the difference of deposition mechanism. Amorphous phase and crystal defect were observed in APCVD system with the main growth mechanism of mass transport limited region. But in LPCVD system, we got the SIC film of uniform, faceted structure and high quality.

흉부X선사진(胸部X線寫眞)에 나타나는 감감현상(減感現象)에 관(關)한 연구(硏究) (A Study on Appearances of Desensitized Phenomenon in Chest Roentgenography)

  • 경광현;허준
    • 대한방사선기술학회지:방사선기술과학
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    • 제2권1호
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    • pp.23-29
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    • 1979
  • Roentgenographic film has to be handled with greatest care during removal from the packing, loading of the cassettes and loading of the hanger. In the case of prior to or after exposed film is handled with mechanical pressure in darkroom, the most common phenomena are desensitization or sensitization on roentgenographic film. In order to observe these defect occurring on, it, the author studied on change of the densities where the mechanical pressure reached to the roentgenographic film. 1. The optimal minimum and maximum densities in routine chest x-ray film are from 0.25 to 1.47 2. The dependence of the desensitization occurring on film upon the bent degree of film is in the portion to bent degree over $10^{\circ}$ 3. Appearances of the desensitization on film by the curved degree of film is inverse proportion to it's degree below intervals of 3cm. 4. The more unexposed film is bent with nail tip and is pressured with palm, the more desensitization it was appeared upon film size and pressure weight. 5. The most serious area of desensitization produced by many types of mechanical pressure is in the portion of lung apex and outside lung fields. 6. The tendency of desensitization due to mechanical pressure on unexposed film is more serious than sensitization on exposed film in the view of radiologic diagnosis.

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공압출 다층 플라스틱 필름 라인을 위한 결함 검사 시스템 (An Inspection System for Multilayer Co-Extrusion Blown Plastic Film Line)

  • 한종우;무하마드 타릭 마흐무드;최영규
    • 반도체디스플레이기술학회지
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    • 제11권2호
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    • pp.45-51
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    • 2012
  • Multilayer co-extrusion blown film construction is a popular technique for producing plastic films for various packaging industries. Automated detection of defective films can improve the quality of film production process. In this paper, we propose a film inspection system that can detect and classify film defects robustly. In our system, first, film images are acquired through a high speed line-scan camera under an appropriate lighting system. In order to detect and classify film defects, an inspection algorithm is developed. The algorithm divides the typical film defects into two groups: intensity-based and texture-based. Intensity-based defects are classified based on geometric features. Whereas, to classify texture-based defects, a texture analysis technique based on local binary pattern (LBP) is adopted. Experimental results revealed that our film inspection system is effective in detecting and classifying defects for the multilayer co-extrusion blown film construction line.

집속이온빔장치와 주사전자현미경을 이용한 박막 트랜지스터 구조불량의 3차원 해석 (Three Dimensional Reconstruction of Structural Defect of Thin Film Transistor Device by using Dual-Beam Focused Ion Beam and Scanning Electron Microscopy)

  • 김지수;이석열;이임수;김재열
    • Applied Microscopy
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    • 제39권4호
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    • pp.349-354
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    • 2009
  • TFT-LCD의 구조불량이 발생한 박막 트랜지스터에 대해서 집속이온빔 가공장치(Dual-beam FIB/SEM)를 이용하여 연속절편법(Serial sectioning)과 일련의 연속적인 2차원 주사전자현미경 이미지를 얻었고, IMOD 소프트웨어를 통해서 3차원 구조구현(3D reconstruction) 연구를 하였다. 3차원 구조구현 결과, Gate막과 Data막이 접합되어 있는 불량이 관찰되었다. 두 막이 접합되어서 ON/OFF 역할을 하는 Gate의 기능이 상실되었고, Data신호는 Drain을 통해서 투명전극에 전류를 공급하여 계속 빛나는 선 불량(line defect)이 발생한 것으로 판단된다. 이 논문의 결과인 집속이온빔 가공장치(Dual-Beam FIB/SEM)를 이용한 3차원 구조구현 연구와 연속절편법, 주사전자현미경 이미지작업, 이미지 프로세싱에 대한 결과는 향후 연구의 기초자료로 활용될 수 있을 것으로 판단된다.

CMP 패드 컨디셔닝 온도에 따른 산화막의 연마특성 (CMP Properties of Oxide Film with Various Pad Conditioning Temperatures)

  • 최권우;김남훈;서용진;이우선
    • 한국전기전자재료학회논문지
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    • 제18권4호
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    • pp.297-302
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    • 2005
  • Chemical mechanical polishing(CMP) performances can be optimized by several process parameters such as equipment and consumables (pad, backing film and slurry). Pad properties are important in determining removal rate and planarization ability of a CMP process. It is investigated the performance of oxide CMP process using commercial silica slurry after the pad conditioning temperature was varied. Conditioning process with the high temperature made the slurry be unrestricted to flow and be hold, which made the removal rate of oxide film increase. The pad became softer and flexible as the conditioning temperature increases. Then the softer pad provided the better surface planarity of oxide film without defect.

DLC 박막을 이용한 액정 배향 효과 (Liquid Crystal Alignment Effects using a DLC Thin Film)

  • 조용민;황정연;서대식;노순준;이대규;백홍구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.346-349
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    • 2001
  • We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of diamond like carbon (DLC) thin film. A high pretilt angle of about $4^{\circ}$ was measured by ion beam(IB) exposure on the DLC thin film surface. A good LC alignment was observed by the IB alignment method on the DLC thin film surface at annealing temperature of $200^{\circ}C$, and the alignment defect of the NLC was observed above annealing temperature of $220^{\circ}C$. Consequently, the high NLC pretilt angle and the good thermal stability of LC alignment can be achieved by the IB alignment method on the DLC thin film surface.

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The optimization of new alignment films in the TNLC for low image-sticking

  • Lee, Jong-Hyun;Yi, Jun-Sin;Jung, Hwan-Kyung;Lee, Seung-Guk;Nam, Hyo-Hak;Nam, Yoon-Joung;Choi, Sung-Woo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.513-516
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    • 2007
  • We introduce a new copolymer alignment film made by bridge-building structure. It is a better film to decrease the image-sticking level in LCD displays. It is noted that the image-sticking was decreased by preventing ion mixing between inter-layers through high hardness. We have investigated the electrical characteristics such as pretilt angle, Residual DC, VHR by changing cure temperature and process delay time conditions of the new alignment film. In this paper, we have investigated the solution for the deep-rooted image defect and incidentally got a contrast ratio improvement by high anchoring force and hardness elevation through the new copolymer alignment film.

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Diamond-Like-Carbon 박막표면에 UV 배향법을 이용한 액정 배향 효과에 관한 연구 (A Study on Liquid Crystal Alignment effects by UV Alignment Method on a Diamond-Like-Carbon Thin Film Surface)

  • 황정연;조용민;서대식
    • 한국전기전자재료학회논문지
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    • 제16권3호
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    • pp.214-218
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    • 2003
  • We studied the nematic liquid crystal (NLC) aligning capabilities by the UV alignment method on a diamond like carbon (DLC) thin film surface A good LC alignment by UV exposure on the DLC thin film surface at 200${\AA}$ of layer thickness was achieved. Also, a good LC alignment by the UV alignment method on the DLC thin film surface was observed at annealing temperature of 180$^{\circ}C$. However, the alignment defect of the NLC was observed above annealing temperature of 200$^{\circ}C$. Consequently, the good thermal stability of LC alignment by the UV alignment method o the DLC thin film surface can be achieved.