• 제목/요약/키워드: Film Delamination

검색결과 84건 처리시간 0.028초

Gap-Fill Characteristics and Film Properties of DMDMOS Fabricated by an F-CVD System

  • Lee, Woojin;Fukazawa, Atsuki;Choa, Yong-Ho
    • 한국재료학회지
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    • 제26권9호
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    • pp.455-459
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    • 2016
  • The deposition process for the gap-filling of sub-micrometer trenches using DMDMOS, $(CH_3)_2Si(OCH_3)_2$, and $C_xH_yO_z$ by flowable chemical vapor deposition (F-CVD) is presented. We obtained low-k films that possess superior gap-filling properties on trench patterns without voids or delamination. The newly developed technique for the gap-filling of submicrometer features will have a great impact on IMD and STI for the next generation of microelectronic devices. Moreover, this bottom up gap-fill mode is expected to be universal in other chemical vapor deposition systems.

Four Point Bending Test for Adhesion Testing of Packaging Strictures: A Review

  • Mahan, Kenny;Han, Bongtae
    • 마이크로전자및패키징학회지
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    • 제21권4호
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    • pp.33-39
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    • 2014
  • To establish the reliability of a packaging structures, adhesion testing of key interfaces is a critical task. Due to the material mismatch, the interface may be prone to delamination failure due to conditions during the manufacturing of the product or just from the day-to-day use. To assess the reliability of the interface adhesion strength testing can be performed during the design phase of the product. One test method of interest is the four-point bending (4PB) adhesion strength test method. This test method has been implemented in a variety of situations to evaluate the adhesion strength of interfaces in bimaterial structures to the interfaces within thin film multilayer stacks. This article presents a review of the 4PB adhesion strength testing method and key implementations of the technique in regards to semiconductor packaging.

틸팅차량용 탄소섬유직물/에폭시 복합재의 혼합모우드 층간파괴인성 평가 (Evaluation of Mixed-mode Interlaminar Fracture Toughness of Carbon Fabric/Epoxy Composites for Tilting Train Carbody)

  • 윤성호;허광수;오진오;이상진;정종철;김정석
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2005년도 추계학술발표대회 논문집
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    • pp.256-259
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    • 2005
  • Mixed-mode interlaminar fracture toughness of carbon fabric/epoxy composites, which are applicable to tilting train carbody, was evaluated through the MMB (Mixed-mode bending) test. Specimens were made of CF3327 plain woven fabric with epoxy and a starter delamination at one end was made by inserting Teflon film with the thickness of 12.5 μ m. Mixed-mode interlaminar fracture test was conducted for 6 types of specimens with the mode II ratio of 20 ,35, 50, 65, 80, 90%. Also crack propagating behaviors and fractured surfaces were examined through an optical travelling scope and a scanning electron microscope, respectively.

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틸팅열차 차체8 탄소섬유직물/에폭시 복합재의 모우드 II 층간파괴인성 평가 (Evaluation of Mode II Interlaminar Fracture Toughness for Carbon Fabric/Epoxy Composites for Tilting Train Carbody)

  • 윤성모;이은동;허광수;정종절;신광복
    • 한국철도학회논문집
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    • 제8권2호
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    • pp.195-201
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    • 2005
  • Mode II interlaminar fracture behaviors of carbon fabric/epoxy composites, which are applicable to tilting train carbodies, was investigated by the ENF (End notched flexure) test. The specimens were made of CF3327 plain woven fabric with epoxy and a starter delamination at one end was made by inserting Teflon film with the thickness of 12.5$mu$m or 25.0$mu$m. The equation for mode II interlaminar fracture toughness was suggested based on the effective crack length from the compliance of load-displacement curve. Mode II interlaminar fracture toughness was evaluated for several types of the specimens. Also crack propagating behaviors and fracture surfaces were examined through an optical travelling scope and a scanning electron microscope.

옻칠의 품등 구분 (II) 과학적 방법에 의한 옻칠의 품등 구분 (Grade Classification of Urushi Lacquer (II) Grade Classification of Urushi Lacquer by Scientific Methods)

  • 노정관;김윤근
    • 한국가구학회지
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    • 제19권5호
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    • pp.307-318
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    • 2008
  • Scientific methods for grading urushi lacquer includes general properties (viscosity, pH etc), and quantitative analysis of moisture, urushiol, gum, laccase content etc, and properties of coating layer such as set to touch drying time, gloss, color difference, delamination strength, tensile strength of film. The grading results evaluated by scientific method showed n order with chinese urushi lacquer (E) > domestic urushi lacquer (A) > japanese urushi lacquer (C) > chinese urushi lacquer (D) > domestic urushi lacquer (B). It is different from hose of traditional methods. Therefore, a more accurate grading of urushi lacquer should be ade by combining traditional method with scientific method.

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Design and Simulation of Heating Rubber Roller for Laminating Process

  • Hur, Shin;Woo, Chang Su
    • Elastomers and Composites
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    • 제51권4호
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    • pp.280-285
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    • 2016
  • The purpose of this study is to get optimum design and operation conditions of the heating rubber roller for laminating process. The cause of performance degradation of heating rubber roller is delamination of rubber on metal tube, rubber aging due to high temperature. We measured the material properties of thermal expansion, thermal conductivity, specific heat and density and analyzed thermal distributions of rubber layer using finite element method. As a result of heat/flow analysis, the density distribution of heating coil must shorten the stabilization time by reducing the temperature deviation on the length direction at the temperature rising section after increasing the density of the area contacting with the laminate film at the center part which is an opposite of the current composition while enabling to maintain the temperature of heater to be consistent while maintaining the temperature deviation to be low when heat loss is created. Finally, we determined optimum heating method of heating rubber roller.

가화천교 내염보수를 위한 전기방식공법 적용 (Repair of Ka-Hwa Highway Bridge damaged by Chloride Attack applied Cathodic Protection)

  • 한복규;지한상;정해문;안태송
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2005년도 봄학술 발표회 논문집(I)
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    • pp.519-522
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    • 2005
  • Ka-Hwa highway bridge, located in a corrosive marine environment, had been examined the current condition of reinforcement corrosion in concrete throughout half-cell potentials, electrical resistivity, chloride contamination of concrete, and visual observation. According to the test, the chloride corrosion reinforced concrete structure is not only the protecting film around the reinforcement is deteriorated but also corrosion activity develops, for example, delamination areas of concrete. The purpose of this paper is to report the effects of Ka-Hwa highway bridge damaged by chlodide attack and to present the results of repair of Ka-Hwa highway concrete bridge in domestic marine environment.

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일방향 복합재료 single-lap 접합 조인트의 파괴 특성 (Fracture Characteristics Unidirectional Composite Single-Lap Bonded Joints)

  • 김광수;유재석;장영순;이영무
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2004년도 춘계학술발표대회 논문집
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    • pp.232-236
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    • 2004
  • The fracture characteristics of unidirectional composite single-lap bonded joints were investigated experimentally and numerically. The effects of bonding method, surface roughness, bondline thickness and the existence of fillet on the failure characteristics and strength of bonded single-lap joints were evaluated experimentally. The failure process, failure mode and the behavior of load-displacement curve was apparently different according to bonding method. The failure load of the specimen co-cured without adhesive was definitely superior to other types of specimens but the specimens co-cured with adhesive film had a less strength than secondary bonded specimens. In the secondary bonded specimens, the lower value of surface roughness and existence of fillet improved the strength of specimens. The strain energy release rates calculated by geometric nonlinear finite element analyses and Virtual Crack Closure Technique for the secondary bonded specimens considering the three types of initial cracks - comer crack, edge crack and delamination crack - were consistent with the test results.

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전기해체 접착제 (A review on electrically debonding Adhesives)

  • 정종구
    • 접착 및 계면
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    • 제19권2호
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    • pp.84-94
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    • 2018
  • Electrically debonding adhesives[EDA], one of the controlled delamination materials[CDM] is reviewed. CDM can be defined as the ability to separate adhesive bonded assemblies without causing damage to the substrates. Its application includes electronics, medical surgery, dentistry, building and general manufacturing where the opportunity to separate assemblies is important. There are several important mechanisms of EDAs; faradaic reaction, phase separation and anode detachment, cathodic debonding, gas emission mechanism, and mechanical stresses. These mechanisms are reviewed with various research results. Since the mechanism behind the electrochemical debonding of adhesives is not well understood, this review aims to help the research scientists in the industries. Finally, new applications of EDA are introduced as new business opportunity.

질소 이온주입법에 의한 BN박막의 계면구조 개선 및 밀착력 향상 (Modification and adhesion improvement of BN interfacial layers by Post-$N^+$implantation)

  • 변응선;이성훈;이상로;이구현;한승희;이응직;윤재홍
    • 한국진공학회지
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    • 제8권2호
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    • pp.158-158
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    • 1999
  • ME-ARE법에 의해 합성된 c-BN 박막의 초기성장층 및 이의 계면구조를 개선하고 밀착력을 향상 시키고자 후처리로서 질소이온을 주입$(PSII-N^+)$하였다. 이온 주입량이 c-BN 박막의 미세구조, 계면구조에 미치는 영향에 대하여 조사하였으며 이와 함께 박막의 경도 및 박리특성에 미치는 효과를 고찰하였다. 질소이온 주입시 약 $5.0{\times}10_15atoms/cm^2$ 이상의 주입량에서부터 IR스펙트럼의 변화가 보이기 시작하였으며 $5.0{\times}10_16atoms/cm^2$ 이상의 주입량 이상에서부터 급격한 c-BN$c-BN{\to}h-BN$상전환이 일어났다. HRTEM관찰 결과, 이온주입에 의해 $sp^2$ 결합을 하고 있는 취약한 초기성장층의 결정구조 개선을 확인할 수 있었으며 이온주입된 박막의 경도 및 박리거동을 비교하여 이온주입 및 주입량에 따른 경도 및 박리 상관관계를 설명하였다.