• 제목/요약/키워드: Filling Phase

검색결과 170건 처리시간 0.033초

Laser CVD $SiO_2$ 막의 Step Coverage에 관한 연구 (Step Coverage of Laser CVD Deposited $SiO_2$ Films)

  • 박종욱;김상욱;천영일;박지순;강희복;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 하계학술대회 논문집
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    • pp.155-157
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    • 1991
  • This paper describe a Laser CVD technology which realizes planarized interlevel dielectrics in sub-micron VLSI's. This technology comprises sub-micron gap filling with $SiO_2$ films between metal lines. Laser CVD process conditions have been investigated to improve step coverage of interlevel dielectrics. An ArF(193nm) Excimer Laser was used to excite and dissociate gas phase $SiH_4\;and\;N_2O$ molecules. The Laser CVD by $N_2O\;and \;SiH_4$. mixture gases has realized conformal deposition above the temperature of $300^{\circ}C$, as a result sub-micron gaps were buried with $SiO_2$ films.

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초음파 분사 열분해 장치에서 제조된 $TiO_2/SiO_2$ 복합 분체의 UV 차단 효과 (UV Blocking Effect of $TiO_2/SiO_2$ Composite Powders Prepared by Ultrasonic Spray Pyrolysis)

  • 이동규;이진화;김동식
    • 한국응용과학기술학회지
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    • 제22권3호
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    • pp.281-288
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    • 2005
  • The silica nanoparticles were used as support of catalyst, filling material, electronic assembler, thin film material, and sensor material. And, the titania nanoparticles were used as pigment, dielectric substance, sensor and photocatalyst. In this paper, the spherical composite particles of $TiO_2/SiO_2$with narrow size distribution and phase pure were synthesized by ultrasonic spray pyrolysis method from $TiOSO_4$ and colloidal silica solution. Using ultrasonic apparatus, this starting solution was vaporized to droplets, and these droplets were induced into tube furnace by carrier gas. The resulting composite powder was characterized by scanning electron microscopy, X-ray diffraction analysis, TG-DTA, in vitro sun protection factor(SPF) and BET surface area analysis.

Radial Velocity and Photometric Study of the Long Period Interaction Binary AQ Cas

  • Lee, Yong-Sam-;Chun, Yong-Woo;Jeong, Jang-Hae
    • 한국우주과학회:학술대회논문집(한국우주과학회보)
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    • 한국우주과학회 1992년도 한국우주과학회보 제1권1호
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    • pp.15-15
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    • 1992
  • AQ Cassiopeiae (BD+61`0242, uv=10, Sp=B3+Bg) is a totally eclipsing binary system with the obital period of about 12 days. 71 was observed for 15 nights in 1985 with the1.8-m telescope at the DAO, employing a Reticon and a three-stage image tube attached to the spectrograph. And also, photometric observations of AQ Cas had been made inUBv for six years from 1982 to 1988 at Yonsei University Observatory(YUO). This work includes UBV observations obtained at YUO as a part of The Ten-Year Observing Program(1982-1992). Double lined radial, velocity curves and Ufv light curves of AQC as are constructed. The light curves and radial velocity curves show a strong evidence of circumstellar matter or mass stream. It is clear at the phases of just outside externaleclipse contacts, particularly at phase 0.8-0.9, shown in Figures 1 and 2. A solution by combining the radial velocity and photometric curves of the binary was obtained with the Wilson-Devinney Code. We found that the system is semi-detached with the coolcomponent filling its Roche lobe. The absolute dimensions of AQ Cas are calculated. The result shows that this system consists of two massive and subgiant stars.

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스퍼터된 바나듐 산화막의 구조적 특성에 미치는 산소 분압의 효과 (Effects of Oxygen Partial Pressure on the Structural Properties of Sputtered Vanadium Oxide Thin Films)

  • 최복길;최용남;최창규;권광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.435-438
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    • 2001
  • Thin films of vanadium oxide(VO$\sub$x/) have been deposited by r.f. magnetron sputtering from V$_2$O$\sub$5/ target in gas mixture of argon and oxygen. The oxygen/(oxygen+argon) partial pressure ratio is changed from 0% to 8%. Crystal structure, chemical composition and bonding properties of films sputter-deposited under different oxygen gas pressures are characterized through XRO, XPS, RBS and FTIR measurements. All the films prepared below 8% O$_2$ are amorphous, and those prepared without oxygen are gray indicating the presence of V$_2$O$\sub$$_4$/ phase in the films. V$_2$O$\sub$5/ and lower oxides co-exist in sputter-deposited films and as the oxygen partial pressure is increased the films become more stoichiometric V$_2$O$\sub$5/. The increase of O/V ratio with increasing oxygen gas pressure is attributed to the partial filling of oxygen vacancies through diffusion. It is observed that the oxygen atoms. located on the V-O plane of V$_2$O$\sub$5/ layer participate more readily in the oxidation process.

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배플의 높이 변화에 따른 3 차원 사각 탱크 내부의 슬로싱 현상에 관한 수치적 연구 (Numerical Study on Liquid Sloshing in the Three-dimensional Rectangular Tank with Various Baffle Heights)

  • 이창열;윤현식;정재환
    • 대한조선학회논문집
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    • 제47권1호
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    • pp.38-46
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    • 2010
  • This study aims at investigating the effect of the baffle height on the liquid sloshing in the three-dimensional (3D) rectangular tank. In order to simulate the 3D incompressible viscous two-phase flow in the 3D tank with partially filled liquid, the present study has adopted the volume of fluid (VOF) method based on the finite-volume method which has been well verified by comparing with the results of the relevant previous researches. The ratio of the baffle height ($h_B$) to filling level (h) has been changed in the range of $0{\leq}h_B/h{\leq}1.2$ to observe the effect on the impact loads on the side wall and free surface behavior. Generally, as baffle height increases, the impact pressure on the wall decreases and the deformation of free surface becomes weaker. However it seemed that a critical ratio of the baffle height existed to reveal the lowest impact pressure on the wall. Consequently, $h_B/h=0.8$ among $h_B/hs$ considered in the study showed the lowest impact pressure.

Global distribution of far-ultraviolet emission from the highly ionized gas in the Milky Way

  • Jo, Young-Soo;Seon, Kwang-Il;Min, Kyoung-Wook;Edelstein, Jerry;Han, Wonyong
    • 천문학회보
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    • 제43권1호
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    • pp.43.2-44
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    • 2018
  • One of the keys to interpreting the characteristics and evolution of interstellar medium in the Milky Way is to understand the distribution of hot gas ($10^5-10^6K$). Gases in this phase are difficult to observe because they are in low density and lack of easily observable tracers. Hot gases are observed mainly in the emission of the FUV ($912-1800{\AA}$), EUV ($80-912{\AA}$), and X-rays (T> $10^6K$) of which attenuation is very high. Of these, FUV emission lines originated from high-stage ions such as O VI and C IV can be the most effective tracers of hot gases. To determine the spatial distribution of O VI and C IV emissions, we have analyzed the spectra obtained from FIMS (Far-ultraviolet IMaging Spectrograph), which covers about 80 percent of the sky. The hot gas volume filling factor, which varies widely from 0.1 to 0.9 depending on the supernova explosion frequency and the evolution model, has been calculated from the O VI and C IV maps. The hot gas generation models has been verified from the global distribution of O VI and C IV emissions, and a new complementary model has been proposed in this study.

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터보프롭 항공기의 스핀/실속 회복장치 설계 (Design for Spin/Stall Recovery Parachute System of Turbo-prop Airplane)

  • 이동훈;노병찬;강명각;강경우;이주하
    • 한국항공우주학회지
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    • 제40권8호
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    • pp.726-736
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    • 2012
  • 본 논문은 KC-100 소형민항기의 스핀시험을 위해 장착될 스핀회복장치의 설계 및 지상활주 전개 시험에 대해 기술하였다. 스핀회복장치에 대한 상세 설계 단계에서 공력, 구조, 안정성, 조종성 등에 대한 해석적 결과를 토대로 낙하산 단위면적당 라이저 길이, 낙하산 다공성, 낙하산 펼침 시간, 및 전개방법 등의 설계 변수를 결정했다. 본 시스템의 검증을 위해 항공기에 스핀회복장치를 장착한 상태에서 기능점검 후 KC-100 고속활주 중 스핀슈트 전개를 수행했다.

동진광산의 지질과 금은광화작용 (Geology and Gold-Silver Mineralization of Dongjin Mine)

  • 정재일;김선영
    • 자원환경지질
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    • 제29권3호
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    • pp.395-405
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    • 1996
  • The Donjin deposits which is located in the Chinan Basin, are emplaced along $N10{\sim}40^{\circ}E$ trending fissure sets. So it is a sort of fissure-filling ore deposits. The results of paragenetic studies suggest two stages of hydrothermal mineralization; stage I: base-metal sulfides stage, stage II: late base-metal sulfides, electrum and silver-bearing sulfosalts stage. Au: Ag ratios of the electrums show that Ag atomic% are higher than that of Au. The temperature and salinity of the Donjin deposits estimated from fluid inclusion and sulfur isotope geothermometry are as follows; stage I: $240{\sim}315^{\circ}C$, 2.4~7.1 NaCl eq. wt.%, stage II: $190{\sim}268^{\circ}C$, 4.6~8.4 NaCl eq. wt.%. The estimated oxygen and sulfur fugacity during first stage mineralization, based on phase relation of associated minerals, range from $10^{-35}{\sim}10^{-39.7}$ atm. and$10^{-11}{\sim}10^{-13.4}$ atm., respectively. All these evidences suggest that the Dongjin deposits are polymetallic meso-epithermal ore deposits.

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주조용 합금으로서 Mg-Y-X (X=Al or Mm) 합금의 주조성 및 크리프 성질에 관한 연구 (Study on Castability and Creep Properties of Mg-Zn-Y-X (X=Al or Mm) Alloys as Casting Alloy)

  • 임현규;이주연;김원태;김도향
    • 한국주조공학회지
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    • 제26권1호
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    • pp.34-39
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    • 2006
  • In the present study, the possibility of Mg-Zn-Y alloys as high temperature casting alloys has been investigated. The fluidity of alloys containing yttrium were better than that of commercial AZ91 alloy because the oxide layer on the surface reduced the reaction between melt, and air and mold, which would reduce the resistance during the process of filling the mold. However, this oxide film reduced the hot-tearing resistance. In the case of ZAW942, this alloy exhibited fluidity and hot-tearing resistance better than AZ91 alloy. Because of thermally stable quasicrystal and other phases obstructed the movement of grains, the creep resistance of alloys containing rare earth elements more than 2 wt% was better than that of AZ91 alloy.

Effects of Polyamidoamine Dendrimers on the Catalytic Layers of a Membrane Electrode Assembly in Fuel Cells

  • Lee Jin Hwa;Won Jongok;Oh In Hwan;Ha Heung Yong;Cho Eun Ae;Kang Yong Soo
    • Macromolecular Research
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    • 제14권1호
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    • pp.101-106
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    • 2006
  • The transport of reactant gas, electrons and protons at the three phase interfaces in the catalytic layers of membrane electrode assemblies (MEAs) in proton exchange, membrane fuel cells (PEMFCs) must be optimized to provide efficient transport to and from the electrochemical reactions in the solid polymer electrolyte. The aim of reducing proton transport loss in the catalytic layer by increasing the volume of the conducting medium can be achieved by filling the voids in the layer with small-sized electrolytes, such as dendrimers. Generation 1.5 and 3.5 polyamidoamine (PAMAM) dendrimer electrolytes are well-controlled, nanometer-sized materials with many peripheral ionic exchange, -COOH groups and were used for this purpose in this study. The electrochemically active surface area of the deposited catalyst material was also investigated using cyclic voltammetry, and by analyzing the Pt-H oxidation peak. The performances of the fuel cells with added PAMAM dendrimers were found to be comparable to that of a fuel cell using MEA, although the Pt utilization was reduced by the adsorption of the dendrimers to the catalytic layer.