• Title/Summary/Keyword: Fill ratio

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차세대 STI Gap Fill 방법의 연구

  • Yu, Jin-Hyeok;Kim, Hui-Dae;Han, Jeong-Hun;Gang, Dae-Bong;Lee, Dae-U;Seo, Seung-Hun;Lee, Nae-Eung;Son, Jong-Won
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.04a
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    • pp.151-152
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    • 2007
  • 최근들어 Device 크기가 100nm 이하로 줄어듦에 따라 High Density Plasma Chemical Vapor Deposition(HDP-CVD) 기술로는 100nm 이하의 gap에 Aspect ratio가 6:1 이상 되는 STI(Shallow Trench Isolation) 구조를 Void 없이 채우는 것이 불가능해 지고 있다. 이를 극복하기 위하여 여러 방면으로 연구가 수행되어지고 있다. 그 방법 중의 하나인 Dep/Etch/Dep Cycle이 이번 연구에서 사용되었으며, 일반적인 HDP CVD보다 더 낮은 압력에서 증착과 식각이 수행되었다. 그 결과 다른 여러 방법들보다 좋은 막질을 얻을 수 있었으며, Gap fill 성능을 향상 시킬 수 있었다.

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SILICON DIOXIDE FILMS FOR INTERMETAL DIELECTRIC APPLICATIONS DEPOSITED BY AN ECR HIGH DENSITY PLASMA SYSTEM

  • Denison, D.R.;Harshbarger, W.R.
    • Journal of the Korean Vacuum Society
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    • v.4 no.S1
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    • pp.130-137
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    • 1995
  • Deopsition of thermal quality SiO2 using a high density plasma ECR CVD process has been demonstrated to give void and seam free gap fill of high aspect ratio metallization structures with a simple oxygen-silane chemistry. This is achieved by continuous sputter etching of the film during the deposition process. A two-step process is utilized to deposit a composite layer for higher manufacturing efficiency. The first step, which has a deposition rate of approximately 0.5 $\mu$m/min., is used to provide complete gap fill between the metal lines. The second step, which has a deposition rate of up to 1.5 $\mu$m/min., is used to deposit a total thickness of 2.0$\mu$m for the intermetal dielectric film. The topography of this composite film is very compatible with subsequent chemicl mechanical polishing(CMP) planarization processing.

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Compaction Management Criteria for Fill Materials of Concrete Faced Rockfill Dam (CFRD 축조재료의 다짐관리 기준)

  • Kim, Yong-Seong;Park, Han-Gyu;Lim, Heui-Dae
    • Proceedings of the Korean Society of Agricultural Engineers Conference
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    • 2005.10a
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    • pp.343-348
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    • 2005
  • In this study, construction modulus, void ratio and settlement characteristics of 38 CFRD in domestic and foreign countries was investigated from monitoring data and the effect of field dry density and void ratio to dam body was analyzed. The standard void ratio of CFRD that can be easily used for dam designer and field engineer was proposed from the monitoring data. It was conformed that we can get the degree of compaction needed for reasonable compaction of dam body by calculating the field dry density from inverse operation of the standard void ratio. It was thought that the standard void ratio of CFRD is 0.2 as shape factor is under 4 and is 0.28 as shape factor is over 4.

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Characteristics Analysis of Principal Stress Ratio in Concrete Faced Rockfill Dam Using a Model Test (모형실험에 의한 콘크리트 표면차수벽형 석괴댐의 주응력비 특성 분석)

  • Kim Yong-Seong
    • Journal of The Korean Society of Agricultural Engineers
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    • v.48 no.4
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    • pp.33-40
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    • 2006
  • In present study, the principal stress condition needed to conduct cubical large-scale triaxial test which can reflect three dimensional stress condition (or plain strain condition) in a dam was investigated by performing model test and numerical analysis and the principal stress ratio varying with the height of CFRD was examined. Also, the principal stress ratio in CFRD body was investigated from the monitoring results of horizontal and vertical earth pressure gages, installed in the center zone and lower part of transition zone of the dam body, respectively, in order to consider the principal stress condition in the large-scale triaxial test to model the behavior of CFRD. The result of the study indicated that the principal stress ratio decreased gradually from the lower to the upper part in the dam body for its center axis and was about 0.5 and 0.2 in the lower and upper part, respectively.

A Study on the Settlement Characteristics of Fill Dam (FILL DAM의 침하특성(沈下特性)에 관(關)한 연구(硏究))

  • Moon, Tae Wan;Kang, Yea Mook
    • Korean Journal of Agricultural Science
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    • v.12 no.2
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    • pp.282-291
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    • 1985
  • In order to investigate the settlement characteristics of fill dam with decomposed granite is used as a embankment material instead of conventional clay collected behavoir of Andong dam and analyzed. Andong dam is the use of decomposed granite in the embankment material, and various type of gauges were installed in dam to measure a pore pressure, interval vertical settlement, dam crest settlement, relative settlement, surface settlement and internal horizontal movement. The results were summerized as follows; 1. With the increase of embankment loading, the settlement of core zone during construction increased with linear and under the effective stress $7kg/cm^2$ vertical settlement ratio ranged between 0.1 and 0.8% approximately and showed smaller value than that of fill dam with clay were used as a embankment material. 2. Though embankment loading was increased with about over central part of embankment height, the settlement of core zone in the lower part of the embankment was influenced slightly. 3. Pore pressure responsed sensitively with the increase of coefficient of permeability in core zone and settlement increased with pore pressure were dispersed. 4. During construction relative settlement in the lower part of the embankment has the largest influence on magnitude of the relative density and after construction settlement showed larger value in the core zone which has the largest compression height. 5. Settlement distribution of dam crest showed larger value in the central part, maximum section of dam, but smaller value in near the abutment.

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Heat Penetration of Canned Oyster Mushroom (느타리버섯 통조림의 전열특성)

  • Lee, Dong-Sun;Park, Noh-Hyeon;Shin, Dong-Hwa;Min, Byong-Yong
    • Korean Journal of Food Science and Technology
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    • v.16 no.2
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    • pp.206-210
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    • 1984
  • Heat penetration pattern of canned oyster mushroom(Pleurotus astreatus) was monitored for processing variables-can size, heating temperature and solid fill fraction, and its effects on sterilization condition was reviewed. The $f_h$ value decreased sharply with decrease of solid fill fraction and then became stable from certain solid fill fraction unique to can size. Heat penetration was a little faster at higher heating temperature with lower $f_h$ value. As viewed from $f_h$ value, convection started at higher solid fill fraction with higher length/diameter ratio, and $f_h$ values decreased to about 1.0 with decrease of solid fill fraction. From standpoint of overall cost, retorting time and energy consumption, solid fill fraction of 3/5 was optimum for all can sizes considered.

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ENHANCED EXEMPLAR BASED INPAINTING USING PATCH RATIO

  • KIM, SANGYEON;MOON, NAMSIK;KANG, MYUNGJOO
    • Journal of the Korean Society for Industrial and Applied Mathematics
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    • v.22 no.2
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    • pp.91-100
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    • 2018
  • In this paper, we propose a new method for template matching, patch ratio, to inpaint unknown pixels. Before this paper, many inpainting methods used sum of squared differences(SSD) or sum of absolute differences(SAD) to calculate distance between patches and it was very useful for closest patches for the template that we want to fill in. However, those methods don't consider about geometric similarity and that causes unnatural inpainting results for human visuality. Patch ratio can cover the geometric problem and moreover computational cost is less than using SSD or SAD. It is guaranteed about finding the most similar patches by Cauchy-Schwarz inequality. For ignoring unnecessary process, we compare only selected candidates by priority calculations. Exeperimental results show that the proposed algorithm is more efficent than Criminisi's one.

UY Ursae Majoris: An A-Subtype W UMa System with a Very Large Fill-Out Factor and an Extreme Mass Ratio

  • Kim, Chun-Hwey;Song, Mi-Hwa;Park, Jang-Ho;Jeong, Min-Ji;Kim, Hye-Young;Han, Cheongho
    • Journal of Astronomy and Space Sciences
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    • v.36 no.4
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    • pp.265-281
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    • 2019
  • We present new BVRI light curves of UY UMa with no O'Connell effect and a flat bottom secondary eclipse. Light curve synthesis with the Wilson-Devinney code gives a new solution, which is quite different from the previous study: UY UMa is an A-subtype over-contact binary with a small mass ratio of q = 0.21, a high inclination of 81°.4, a small temperature difference of ΔT=18°, a large fill-out factor of f = 0.61, and a third light of approximately 10% of the total systemic light. The absolute dimensions were newly determined. Seventeen new times of minimum light have been calculated from our observations. The period study indicates that the orbital period has intricately varied in a secular period increase in which two cyclical terms with periods of 12y.0 and 46y.3 are superposed. The secular period increase was interpreted to be due to a conservative mass transfer of 2.68 × 10-8 M/yr from the less massive to the more massive star. The cyclical components are discussed in terms of double-light time contributions from two additional bound stars. The statistical relations of Yang & Qian (2015) among the physical parameters of 45 deep, low mass ratio contact binaries were revisited by using the physical parameters of UY UMa and 25 Kepler contact binaries provided by Şenavci et al. (2016).

A Fundamental Study on the Methane Conversion of Agriculture, Forestry and Fisheries Wastes (농·축 ·수산 폐기물의 메탄전환에 관한 기초연구)

  • Hong, Soon-Seok;Park, Sang-Jeon;Hong, Chong-Joon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.6 no.1
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    • pp.31-42
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    • 1998
  • A fundamental study on methane conversion for the collection organic wastes of agriculture, forestry and fishers was performed in a laboratory scale. As a result, selected Run B sample were obtained 18.41 C/N Ratio and 168.96 mg/L TCOD; Under the biochemical methane potential test, theoretical and actual methane generation was 313.6 mg/L VS added and 234.2 mg/L VS added, respectively; However, methane conversion from Run B were occurred 74% by anaerobic digestion. By the first order reaction kinetics, kinetic constant were $0.2476d^{-1}$ for Run B. Three steps fill-up filter reactor was evaluated methane content 16% up to promote than blank reactor; TCOD and SCOD have reduced 44.7% and 44.2%, respectively.

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Field test and numerical study of the effect of shield tail-grouting parameters on surface settlement

  • Shao, Xiaokang;Yang, Zhiyong;Jiang, Yusheng;Yang, Xing;Qi, Weiqiang
    • Geomechanics and Engineering
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    • v.29 no.5
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    • pp.509-522
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    • 2022
  • Tail-grouting is an effective measure in shield engineering for filling the gap at the shield tail to reduce ground deformation. However, the gap-filling ratio affects the value of the gap parameters, leading to different surface settlements. It is impossible to adjust the fill ratio indiscriminately to study its effect, because the allowable adjustment range of the grouting quantity is limited to ensure construction site safety. In this study, taking the shield tunnel section between Chaoyanggang Station and Shilihe Station of Beijing Metro Line 17 as an example, the correlation between the tail-grouting parameter and the surface settlement is investigated and the optimal grouting quantity is evaluated. This site is suitable for conducting field tests to reduce the tail-grouting quantity of shield tunneling over a large range. In addition, the shield tunneling under different grouting parameters was simulated. Furthermore, we analyzed the evolution law of the surface settlement under different grouting parameters and obtained the difference in the settlement parameters for each construction stage. The results obtained indicate that the characteristics of the grout affect the development of the surface settlement. Therefore, reducing the setting time or increasing the initial strength of the grout could effectively suppress the development of surface subsidence. As the fill ratio decreases, the loose zone of the soil above the tunnel expands, and the soil deformation is easily transmitted to the surface. Meanwhile, owing to insufficient grout support, the lateral pressure on the tunnel segments is significantly reduced, and the segment moves considerably after being removed from the shield tail.