• Title/Summary/Keyword: Field heat

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Surface reaction of $HfO_2$ etched in inductively coupled $BCl_3$ plasma ($BCl_3$ 유도결합 플라즈마를 이용하여 식각된 $HfO_2$ 박막의 표면 반응 연구)

  • Kim, Dong-Pyo;Um, Doo-Seunng;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.477-477
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    • 2008
  • For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

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Rigorous Modeling and Simulation of Multi-tubular Reactor for Water Gas Shift Reaction (Water Gas Shift Reaction을 위한 Multi-tubular Reactor 모델링 및 모사)

  • Park, Junyong;Choi, Youngjae;Kim, Kihyun;Oh, Min
    • Korean Chemical Engineering Research
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    • v.46 no.5
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    • pp.931-937
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    • 2008
  • Rigorous multiscale modelling and simulation of the MTR for WGSR was carried out to accurately predict the behavior of process variables and the reactor performance. The MTR consists of 4 fixed bed tube reactors packed with heterogeneous catalysts, as well as surrounding shell part for the cooling purpose. Considering that fluid flow field and reaction kinetics give a great influence on the reactor performance, employing multiscale methodology encompassing Computational Fluid Dynamics (CFD) and process modeling was natural and, in a sense, inevitable conclusion. Inlet and outlet temperature of the reactant fluid at the tube side was $345^{\circ}C$ and $390^{\circ}C$, respectively and the CO conversion at the exit of the tube side with these conditions approached to about 0.89. At the shell side, the inlet and outlet temperature of the cooling fluid, which flows counter-currently to tube flow, was $190^{\circ}C$ and $240^{\circ}C$. From this heat exchange, the energy saving was achieved for the flow at shell side and temperature of the tube side was properly controlled to obtain high CO conversion. The simulation results from this research were accurately comparable to the experimental data from various papers.

Discharge header design inside a reactor pool for flow stability in a research reactor

  • Yoon, Hyungi;Choi, Yongseok;Seo, Kyoungwoo;Kim, Seonghoon
    • Nuclear Engineering and Technology
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    • v.52 no.10
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    • pp.2204-2220
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    • 2020
  • An open-pool type research reactor is designed and operated considering the accessibility around the pool top area to enhance the reactor utilization. The reactor structure assembly is placed at the bottom of the pool and filled with water as a primary coolant for the core cooling and radiation shielding. Most radioactive materials are generated from the fuel assemblies in the reactor core and circulated with the primary coolant. If the primary coolant goes up to the pool surface, the radiation level increases around the working area near the top of the pool. Hence, the hot water layer is designed and formed at the upper part of the pool to suppress the rising of the primary coolant to the pool surface. The temperature gradient is established from the hot water layer to the primary coolant. As this temperature gradient suppresses the circulation of the primary coolant at the upper region of the pool, the radioactive primary coolant rising up directly to the pool surface is minimized. Water mixing between these layers is reduced because the hot water layer is formed above the primary coolant with a higher temperature. The radiation level above the pool surface area is maintained as low as reasonably achievable since the radioactive materials in the primary coolant are trapped under the hot water layer. The key to maintaining the stable hot water layer and keeping the radiation level low on the pool surface is to have a stable flow of the primary coolant. In the research reactor with a downward core flow, the primary coolant is dumped into the reactor pool and goes to the reactor core through the flow guide structure. Flow fields of the primary coolant at the lower region of the reactor pool are largely affected by the dumped primary coolant. Simple, circular, and duct type discharge headers are designed to control the flow fields and make the primary coolant flow stable in the reactor pool. In this research, flow fields of the primary coolant and hot water layer are numerically simulated in the reactor pool. The heat transfer rate, temperature, and velocity fields are taken into consideration to determine the formation of the stable hot water layer and primary coolant flow. The bulk Richardson number is used to evaluate the stability of the flow field. A duct type discharge header is finally chosen to dump the primary coolant into the reactor pool. The bulk Richardson number should be higher than 2.7 and the temperature of the hot water layer should be 1 ℃ higher than the temperature of the primary coolant to maintain the stability of the stratified thermal layer.

Simulation of the High Frequency Hyperthermia for Tumor Treatment (종양치료용 고주파 열치료 인체적용 시뮬레이션)

  • Lee, Kang-Yeon;Jung, Byung-Geun;Kim, Ji-won;Park, Jeong-Suk;Jeong, Byeong-Ho
    • Journal of the Korea Convergence Society
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    • v.9 no.3
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    • pp.257-263
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    • 2018
  • Hyperthermia supplies RF high-frequency energy above 1MHz to the tumor tissue through the electrodes. And the temperature of the tumor tissue is increased to $42^{\circ}C$ or more to cause thermal necrosis. A mathematical model can be derived a human body model for absorption and transmission of electromagnetic energy in the human model and It is possible to evaluate the distribution of temperature fields in biological tissues. In this paper, we build the human model based on the adult standard model of the geometric shape of the 3D model and use the FVM code. It is assumed that Joule heat is supplied to the anatomical model to simulate the magnetic field induced by the external electrode and the temperature distribution was analyzed for 0-1,200 seconds. As a result of the simulation, it was confirmed that the transferred energy progressively penetrates from the edge of the electrode to the pulmonary tumors and from the skin surface to the subcutaneous layer.

Numerical Sudy on Bubbling Fluidized Bed Reactor for Fast Pyrolysis of Waste Lignocelluosic Biomass (폐목질계 바이오매스의 급속열분해 기포유동층 반응기에 대한 수치해석적 연구)

  • Lee, Ji Eun;Choi, Hang Seok
    • Journal of Korean Society of Environmental Engineers
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    • v.35 no.10
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    • pp.710-716
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    • 2013
  • New and renewable energy sources have drawn attention because of climate change. Many studies have been carried out in waste-to-energy field. Fast pyrolysis of waste lignocelluosic biomass is one of the waste-to-energy technologies. Bubbling fluidized bed (BFB) reactor is widely used for fast pyrolysis of the biomass. In BFB pyrolyzer, bubble behavior influences on the chemical reaction. Accordingly, in the present study, hydrodynamic characteristics and fast pyrolysis reaction of waste lignocellulosic biomass occurring in a BFB pyrolyzer are scrutinized. The computational fluid dynamics (CFD) simulation of the fast pyrolysis reactor is carried out by using Eulerian-Granular approach. And two-stage semi-global kinetics is applied for modeling the fast pyrolysis reaction of waste lignocellulosic biomass. To summarize, generation and ascendant motion of bubbles in the bed affect particle behavior. Thus biomass particles are well mixed with hot sand and consequent rapid heat transfer occurs from sand to biomass particles. As a result, primary reaction is observed throughout the bed. And reaction rate of tar formation is the highest. Consequently, tar accounts for 66wt.% of the product gas. However, secondary reaction occurs mostly in the freeboard. Therefore, it is considered that bubble behavior and particle motions hardly influences on the secondary reaction.

Antibiotic Properties of Helicosporium sp. KCTC 0635BP to Rhizoctonia solani AG2-2 IV (Rhizoctonia solani AG2-2 IV에 대한 Helicosporium sp. KCTC 0635BP의 항균활성)

  • Lee, Sang Myeong;Kim, Dong Soo;Lee, Kwang-Soo;Lee, Chong-Kyu;Lee, Dong Woon
    • Weed & Turfgrass Science
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    • v.2 no.2
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    • pp.202-206
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    • 2013
  • Biocontrol potential of an isolate of Helicosporium spp. against Rhizoctonia solani, Fusarium oxysporium and Phytophthora drechsleri was evaluated in vitro and in vivo. A selected biocontrol agent designated as Helicosporium 0635BP strongly inhibited growth and lysed mycelium of Rhizoctonia solani and Fusarium oxysporium on PDA. Autoclaved culture filtrate of the agent also completely inhibited growth of the turfgrass large patch pathogen, R. solani AG2-2 IV at the concentration of 50 ml $L^{-1}$. The pathogen was killed when dipped under the 20% filtrate for four hours or 50% for one hr. In a field trial, plots applied with the crude or times diluted culture filtrate showed 100% control efficacy of the turfgrass large patch as a chemical applied for a comparison. Results indicated that Helicosporium 0635BP is a promising biocontrol agent on control of the turfgrass large patch disease and its culture filtrate contained unknown heat suitable antifungal substance (s). Further studies on mass production, purification and identification of the unknown compound (s) are in progress for practical use.

Recrystallization TEP Behavior of Zr-based alloy by addition of Nb and Sn (Nb과 Sn 첨가에 따른 Zr 합금의 재결정 및 TEP 거동)

  • Jeong, Heung-Sik;O, Yeong-Min;Jeong, Yong-Hwan;Kim, Seon-Jin
    • Korean Journal of Materials Research
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    • v.11 no.2
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    • pp.104-114
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    • 2001
  • To investigate the effects of the addition of Nb and Sn on the recrystallization of Zr- Sn-Nb alloys, both Vickers micro-hardness test and TEP measurement were carried out on cold-worked specimens annealed at various temperatures from $300^{\circ}C$ to 75$0^{\circ}C$. The microstructures of heat treated specimens were analyzed by optical microscope, SEM, and TEM. The study of microhardness and microstructures showed that both recrystallization process and grain growth were retarded as the activation energy was increased by the addition of Nb and Sn. Especially, the addition of Sn was more effective on retarding recrystallization. Precipitates were formed more easily when Nb was added because the solubility of Nb into Zr is lower than that of Sn. However, the recrystallization process was affected more by Sn than Nb because the strain field formed by substitutional Sn repressed the dislocation movement. TEP was increased due to the decrease of electron scattering as recovery and recrystallization were proceeded and saturated when the recrystallization completed. However, when precipitates formed, TEP was increased because the decrease of solute concentration near the precipitates caused the decrease of electron scattering.

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Exposure of Outdoor Workers to Particulate Matter in Construction Sites (건설업 옥외작업장 근로자의 미세먼지 노출 실태 조사)

  • Kim, Seung Won;Lee, Ga Hyun;Phee, Young Gyu;Yang, Won-Ho;Ha, Wonchul;Park, Hyunghee
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.27 no.1
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    • pp.46-58
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    • 2017
  • Objectives: Particulate matter (PM) at construction sites mostly originates from either construction activities or the atmospheric environment. This study was conducted to evaluate the exposure level to PM and the contribution ratio of atmosphere sources at construction sites. Methods: We reviewed literature and governmental systems related to PM exposure in occupational settings and summarized them. In the field evaluation, five construction sites and one golf course were selected: two from Gyeonggi-do Province and four from North Gyeongsang-do Province. For each site, personal samples from outdoor construction workers and area samples from the outdoor area around the construction site office were collected according to construction work types. PM concentrations reported from nearby National Ambient Air Monitoring Stations were recorded. Respirable dust concentrations, respirable silica concentrations, and several metal concentrations including Cd, Cr, Pb, and As were monitored over four months. In the end we suggested how to manage particulate matter exposure at construction sites. Results: There was little literature reporting on exposure levels of construction workers to PM. Respirable dust concentrations measured in Gyeonggi-do Province were higher than those measured in North Gyeongsang-do Province. The geometric means of respirable dust concentrations in personal samples and area samples were $37.89{\mu}g/m^3$ and $92.86{\mu}g/m^3$, respectively. The respirable dust concentrations were higher than the PM concentrations reported from nearby National Ambient Air Monitoring Station. The geometric means of respirable silica concentrations of personal samples and area samples were $1.3{\mu}g/m^3$ and $1.1{\mu}g/m^3$, respectively. All metal concentrations were lower than 10% of individual Korean occupational exposure limits. Conclusions: Assuming that personal samples consisted of ambient PM and dust originating from work activities and area samples only collected ambient PM, we concluded that the dust exposure of outdoor construction workers originated 40.8% from the atmosphere and 59.2% from construction activities. PM exposure at construction sites should be controlled by employers, as in the case of outdoor heat stress. The Korean government needs to consider setting an occupational exposure limit for respirable dust.

Biological Control of Crown Gall

  • Kerr, Allen;Biggs, John;Ophel, Kathy
    • Proceedings of the Korean Society of Plant Pathology Conference
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    • 1994.06a
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    • pp.11-26
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    • 1994
  • Crown gall of stonefruit and nut trees is one of the very few plant diseases subject to efficient biological control. The disease is caused by the soil-inhabiting bacteria Agrobacterium tumefaciens and Agrobacterium rhizogenes and the original control organism was a non-pathogenic isolate of A. rhizogenes strain K84. Control is achieved by dipping planting material in a cell suspension of strain K84 which specifically inhibits pathogenic strains containing a nopaline Ti plasmid. Because the agrocin 84-encoding plasmid (pAgK84) is conjugative, it can be transmitted from the control strain to pathogenic strains which, as a result, become immune to agrocin 84 and cannot be controlled. To prevent this happening, the transfer genes on pAgK84 were located and then largely eliminated by recombinant DNA technology. The resulting construct, strain K1026, is transfer deficient but controls crown gall just as effectively as does strain K84. Field data from Spain confirm that pAgK84 can transfer to pathogenic recipients from strain K84 but not from strain K1026. The latter has been registered in Australia as a pesticide and is the first genetically engineered organism in the world to be released fro commercial use. It is recommended as a replacement for strain K84 to prevent a breakdown in the effectiveness of biological control of crown gall. Several reports indicate that both strains K84 and K1026 sometimes control crown gall pathogens that are resistant to agrocin 84. A possible reason for this is that both strains produce a second antibiotic called 434 which inhibits growth of nearly all isolates of A. rhizogenes, both pathogens and non-pathogens. Crown gall of grapevine is caused by another species, Agrobacterium vitis. It is resistant to agrocin 84 and cannot be controlled by strains K84 or K1026. It is different from other crown gall pathogens in several characteristics, including the fact that, although a rhizosphere coloniser, its also lives systemically in the vascular tissue of grapevine. Pathogen free propagating material can be obtained from tissue culture or, less surely, by heat therapy of dormant cuttings. A number of laboratories are searching for a biocontrol strain that will prevent, or at least delay, reinfection. A non-pathogenic A. vitis strain F/25 from South Africa looks very promising in this regard.

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Study on Probabilistic Analysis for Fire·Explosion Accidents of LPG Vaporizer with Jet Fire (Jet Fire를 수반한 국내외 LPG 기화기의 화재·폭발사고에 관한 확률론적 분석에 관한 연구)

  • Ko, Jae-Sun
    • Fire Science and Engineering
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    • v.26 no.4
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    • pp.31-41
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    • 2012
  • This study collected 5,100 cases of gas accident occurred in Korea for 14 years from 1995 to 2008, established Database and based on it, analyzed them by detailed forms and reasons. As the result of analyzing the whole city gas accidents with Poisson analysis, the item of "Careless work-Explosion-Pipeline' showed the highest rate of accidents for the next 5 years. And, "Joint Losening and corrosion-Release-Pipeline" showed the lowest rate of accident. In addition, for the result of analyzing only accidents related to LPG vaporizer, "LPG-Vaporizer-Fire" showed the highest rate of accident and "LPG-Vaporizer-Products Faults" showed the lowest rate of accident. Also, as the result of comparing and analyzing foreign LPG accident accompanied by Jet fire, facility's defect which is liquid outflow cut-off device and heat exchanger's defect were analyzed as the main reason causing jet fire, like the case of Korea, but the number of accidents for the next 5 years was the highest in "LPG-Mechanical-Jet fire" and "LPG-Mechanical-Vapor Cloud" showed the highest rate of accidents. By grafting Poisson distribution theory onto gas accident expecting program of the future, it's expected to suggest consistent standard and be used as the scale which can be used in actual field.