• E2M - 전기 전자와 첨단 소재
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• 제9권8호
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• pp.836-850
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• 1996

In this study, we have analyzed structural analysis and measured ferroelectric characteristics of PZT thin films prepared by sol gel process with different sintering conditions and different Zr/Ti mot%. When the Zr mot% of PZT thin film was increased, it was found that the remanent. polarization and coercive field were decreased and increased, respectively. Also, the maxium dielectric constant of PZT(50/50) thin film was 786.8. We got double hysteresis(anti-fcrroelectric) curve from PbZrO$_{3}$ thin film. As heating rate goes up, pyrochlore phase of PZT thin film was decreased and dielectric and ferroelectric characteristics were improved. As a result of variation of sintering temperature and time 500.deg. C-800.deg. C and 5 sec.-8 hours, respectively, we got optimal sintering temperature and time. The optimium sintering temperature and time of conventional furnace method and rapid thermal processing method were 650.deg. C-700.deg. C for 30-60 minutes and 700.deg. C/20 seconds-2 minutes, respectively.

• 제어로봇시스템학회논문지
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• 제9권1호
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• pp.22-29
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• 2003

A piezoelectric actuator yields hysteresis effect due to its composed ferroelectric. Hysteresis nonlinearty is neglected when a piezoelectric actuator moves with short stroke. However when it moves with long stroke and high frequency, the hysteresis nonlinearty can not be neglected. The hysteresis nonlinearty of piezoelectric actuator degrades the control performance in precision position control. In this paper, in order to improve the control performance of piezoelectric actuator, an inverse modeling scheme is proposed to compensate the hysteresis nonlinearty. And feedforward - feedback controller is proposed to give a good tracking performance. The Feedforward controller is an inverse hysteresis model, base on neural network and the feedback control is implemented with PID control. To show the feasibility of the proposed controller and hysteresis modeling, some experiments have been carried out. It is concluded that the proposed control scheme gives good tracking performance.

• 한국전기전자재료학회논문지
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• 제18권11호
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• pp.983-989
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• 2005

[ $PZT(Pb(Zr,Ti)O_3)$ ] thin films were deposited by multi-target reactive sputtering method on $RuO_2$ substrates. Pure perovskite phase PZT films could be obtained by introducing Ti-oxide seed layer on the $RuO_2$ substrates prior to PZT film deposition. The PZT films deposited on the $RuO_2$ substrates showed highly voltage-shifted hysteresis loop compared with the films deposited on the Pt substrates. The surface of $RuO_2$ substrate was found to be reduced to metallic Ru in vacuum at elevated temperature, which caused the formation of oxygen vacancies at the initial stage of PZT film deposition and gave rise to the voltage shift in the P-E hysteresis loop of the PZT capacitor. The fatigue characteristics of the PZT capacitors under unipolar wane electric field were different from those under bipolar wane. The fatigue test under unipolar wane showed the increase of polarization. It was thought that the ferroelectric domains which had been pinned by charged defects such as oxygen vacancies and the charged defects were reduced in number by combining with the electrons injected from the electrode under unipolar wave, resulting in the relaxation of the ferroelectric domains and the increase of polarization.

• Transactions on Electrical and Electronic Materials
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• 제15권2호
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• pp.60-65
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• 2014

This article explains the experimental results of ferroelectric polarization switching (FPS) of potassium nitrate ($KNO_3$) with different polymers such as polyvinylidene fluoride (PVDF) and polyvinyl fluoride (PVF) using simple melt-press techniques. To analyze the ferroelectric polarization switching in potassium nitrate ($KNO_3$) composite films at room temperature, we applied the Ishibashi and Takagi theory (based on Avrami model) to the switching current transient. To investigate the dimensionality of domain growth, the ferroelectric polarization switching current (FPS current) was observed from the square - wave bipolar signals across a resistance of $0.1k{\Omega}$ in series with the composite films. The existence of a switching current transient pulse confirmed the ferroelectricity and indicated the stability of the ferroelectric phase (phase III) of $KNO_3$ at room temperature. Polarization hysteresis (P-E) characteristics supported the prominent features of ferroelectric polarization switching in the composite films at room temperature.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2003년도 춘계종합학술대회
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• pp.696-699
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• 2003

본 연구에서는 MDFM (Metal-Dielectric-ferroelectric-Metal) 구조의 강유전체 캐패시터와 수정된 Sawyer-Tower 회로를 접목시켜 강유전체의 이력곡선을 정밀하게 계산하기 위한 모델을 제시하였다. 본 모델은 스위칭 쌍극자 분극의 수학적 표현을 수치적분 알고리즘에 적용하였으며, 강유전체와 하부전극사이에 dielectric 층을 포함시켜 피로특성을 고려할 수 있다. 본 모델의 예측치를 PLT(10) 강유전체 박막의 측정결과와 비교하여 본 모델의 유효성을 입증하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.383-388
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• 2004

A piezoelectric actuator yields hysteresis effect due to its composed ferroelectric. Hysteresis nonlinearty is neglected when a piezoelectric actuator moves with short stroke. However when it moves with long stroke and high frequency, the hysteresis nonlinearty can not be neglected. The hysteresis nonlinearty of piezoelectric actuator degrades the control performance in precision position control. In this paper, in order to improve the control performance of piezoelectric actuator, an inverse modeling scheme is proposed to compensate the hysteresis nonlinearty problem. And feedforward - feedback controller is proposed to give a good tracking performance. The Feedforward controller is inverse hysteresis model, Nueral network and PID control is used as a feedback controller. To show the feasibility of the proposed controller and hysteresis modeling, some experiments have been carried out. It is concluded that the proposed control scheme gives good tracking performance

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.66.3-66
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• 2001

A piezoelectric actuator yields hysteresis effect due to its composed ferroelectric. Hysteresis nonlinearty is neglected when a piezoelectric actuator moves with short stroke. However when it moves with long stroke and high frequency, the hysteresis nonlinearty can not be neglected. The hysteresis nonlinearty of piezoelectric actuator degrades the control performance in precision position control. In this paper, in order to improve the control performance of piezoelectric actuator, an inverse modeling scheme is proposed to compensate the hysteresis nonlinearty problem. And feedforward - feedback controller is proposed to give a good tracking performance. The Feedforward controller is inverse hysteresis model ,and PID control is used ...

• 한국전기전자재료학회논문지
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• 제17권12호
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• pp.1283-1288
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• 2004

Metal-ferroelectric-insulator-semiconductor(WFIS) capacitors using rapid thermal annealed LiNbO$_3$/AlN/Si(100) structure were fabricated and demonstrated nonvolatile memory operations. The capacitors on highly doped Si wafer showed hysteresis behavior like a butterfly shape due to the ferroelectric nature of the LiNbO$_3$ films. The typical dielectric constant value of LiNbO$_3$ film in the MFIS device was about 27, The gate leakage current density of the MFIS capacitor was 10$^{-9}$ A/cm$^2$ order at the electric field of 500 kV/cm. The typical measured remnant polarization(2P$_{r}$) and coercive filed(Ec) values were about 1.2 $\mu$C/cm$^2$ and 120 kV/cm, respectively The ferroelectric capacitors showed no polarization degradation up to 10$^{11}$ switching cycles when subjected to symmetric bipolar voltage pulses of 1 MHz. The switching charges degraded only by 10 % of their initial values after 4 days at room temperature.e.

• Transactions on Electrical and Electronic Materials
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• 제11권6호
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• pp.275-278
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• 2010

We have examined the Ferroelectric properties of $PbZr_{0.4}Ti_{0.6}O_3$ (PZT) grains by monitoring the surface potential through the utilization of Kelvin force microscopy. Hysteretic and time dependent behaviors of small and large grains were compared with each other. The smaller grain yields had smaller values of surface potential. However, the normalized voltage versus surface potential behavior indicates that the smaller grains became saturated earlier with respect to the writing voltages than did the larger grains. On the other hand, the surface potential hysteresis loop obtained from the smaller grains showed a similar shape to what might be obtained from a Zr rich PZT film. In contrast the hysteresis loop of the larger grain looks like that obtained from a Ti-rich film. In addition, the time dependent behaviors of the smaller grains also revealed a better response than the response of larger grains. The overall ferroelectric properties of the smaller grains seem better than corresponding properties for larger grains. The Ti/Zr ratio of the PZT film which was examined in this study was 60/40.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권3호
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• pp.205-212
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• 2002

The growth characteristics of metal-organic chemical vapor deposition (MOCVD) $Pb(Zr_xTi_{1-x})O_3 (PZT) thin films were investigated for the application of high-density ferroelectric random access memories (FRAM) devices beyond 64Mbit density. The supply control of Pb precursor plays the most critical role in order to achieve a reliable process for PZT thin film deposition. We have monitored the changes in the microstructure and electrical properties of films on increasing the Pb precursor supply into the reaction chamber. Under optimized conditions, $Ir/IrO_2/PZT(100nm)/Ir capacitor shows well-saturated hysteresis loops with a remanent polarization (Pr) of $~28{\mu}C/textrm{cm}^2$ and coercive voltage of 0.8V at 2.5V. Other issues such as step coverage, compositional uniformity and low temperature deposition was discussed in viewpoint of actual device application.