• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.233-233
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• 2010

Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

• Journal of the Korean Magnetics Society
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• v.3 no.3
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• pp.185-189
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• 1993

급속응고법으로 제작된 비정질 $Fe_{85-x}Co_{x}Zr_{7}B_{7}Cu_{1}$ 합금의 열처리에 따른 구조 및 자기특성이 조사되었다. 비정질 $Fe_{85-x}Co_{x}Zr_{7}B_{7}Cu_{1}$ 합금은 $600^{\circ}C$이하의 열처리온도에서 약 10 nm의 초미세결정립이 형성된다. $600^{\circ}C$이상의 열처리 조건에서는 결정립크기가 급격히 증가하여 자기특성을 열화시킨다. $Fe_{85-x}Co_{x}Zr_{7}B_{7}Cu_{1}$ 합금의 최적열처리온도는 Fe-Zr-B초미세결정립합금에 비하여 낮으며, 결정립크기 또한 감소한다. 이는 Cu의 첨가에 기인하는 것으로 판단된다. 최적열처리조건에서 $Fe_{80}Co_{5}Zr_{7}B_{7}Cu_{1}$ 초미세결정립합금의 포화자화 및 f=50 kHz, $B_{m}=0.2\;T$에서 측정한 투자율 및 철손은 각각 157.3 emu/g(1.5 T), $1.8{\times}10^{4}$ 및 13 W/kg으로 자기특성이 가장 우수하다.

• Molecules and Cells
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• v.46 no.12
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• pp.736-742
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• 2023

NifB, a radical S-adenosylmethionine (SAM) enzyme, is pivotal in the biosynthesis of the iron-molybdenum cofactor (FeMo-co), commonly referred to as the M-cluster. This cofactor, located within the active site of nitrogenase, is essential for the conversion of dinitrogen (N₂) to NH₃. Recognized as the most intricate metallocluster in nature, FeMo-co biosynthesis involves multiple proteins and a sequence of steps. Of particular significance, NifB directs the fusion of two [Fe₄S₄] clusters to assemble the 8Fe core, while also incorporating an interstitial carbide. Although NifB has been extensively studied, its molecular mechanisms remain elusive. In this review, we explore recent structural analyses of NifB and provide a comprehensive overview of the established catalytic mechanisms. We propose prospective directions for future research, emphasizing the relevance to biochemistry, agriculture, and environmental science. The goal of this review is to lay a solid foundation for future endeavors aimed at elucidating the atomic details of FeMo-co biosynthesis.

• Journal of Magnetics
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• v.4 no.2
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• pp.60-64
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• 1999

The addition of Co into $Nd_4Fe_{77.5-x}Co_x(HfGa)_yB_{18.5}(0$\leq$x$\leq$5, y=0, 0.5)4 was found to enhance the magnetic properties of $Fe_3B/Nd_2Fe_{14}B$ nanocomposite magnets. The enhancement resulted from the fact that Co retarded the crystallization of $\alpha$-Fe or Fe3B but accelerated that $Nd_2Fe_{14}B$. The decreased interval between the onset of crystallization temperature of Fe3B and $Nd_2Fe_{14}B$. phases enabled the grain growth of each phase to be uniform dufing a post annealing of the melt spun ribbons. The addition of 3~5 at. % Co into ternary composition $Md_4Fe_{77.5}B_{18.5}$ increased the coercivity (iHc) from 3.27 to 3.54 kOe with the enhanced remanence value (4$\pi$Mr) around 11.54 kG. From the ribbon magnets of Nd4Fe71.5Co5Hf0.5B18.5 made at 26 m/sec and annealed at 68$0^{\circ}C$ for 10 min, the magnetic properties of Br=11.54 kG, iHc=3.54 kOe, and (BH)max=14.35 MGOe were obtained from volume production line.

• Journal of the Korean Magnetics Society
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• v.5 no.5
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• pp.427-431
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• 1995

The influence of Nd and B contents on the magnetic properties and structures of ${\alpha}-Fe$ based Nd-(Fe,Co)-B-Mo-Cu alloys was investigated. $Nd_{4}{(Fe_{0.9}Co_{0.1})}_{92-x}B_{x}Mo_{3}Cu_{1}$ and $Nd_{x}{(Fe_{0.9}Co_{0.1})}_{86-x}B_{10}Mo_{3}Cu_{1}$ amorphous alloys prepared by rapid solidification process were crystallized to form nanocrystalline structure. The increase of B content in $Nd_{4}{(Fe_{0.9}Co_{0.1})}_{92-x}B_{x}Mo_{3}Cu_{1}$ nanocrystalline resulted in the change of stucture of soft phase in the sequence of ${\alpha}-Fe$->${\alpha}-Fe+Fe_{3}B$->$Fe_{3}B$. The coercivitis of the alloys were increased with increasing B content and was 263 kA/m at x=18. On the contrary, the remanence has shown an opposite trends. The increase of Nd content in $Nd_{x}{(Fe_{0.9}Co_{0.1})}_{86-x}B_{10}Mo_{3}Cu_{1}$ nanocrystalline containing ${\alpha}-Fe$ as main phase had no effect on the structure and improved coercivity up to 256 kA/m. However, the remanence was decreased from 1.4 T to 1.15 T according to the increase of Nd content.

• Proceedings of the Korean Magnestics Society Conference
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• 2012.11a
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• pp.63-64
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• 2012

• Journal of the Korean Magnetics Society
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• v.21 no.6
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• pp.214-218
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• 2011

In this study, we have systematically investigated the effect of sputtering conditions on the microstructural properties of Ag/CoFeB thin film on MgO substrate. It was found that the crystallinity and surface roughness of the Ag film strongly depends on the Ar sputtering pressure and sputtering power. Epitaxial growth of Ag(100) film on MgO(100) substrate was achieved under the sputtering conditions of high sputtering power and elevated temperature. XRR (X-ray reflectivity) and high-resolution TEM (transmission electron microscopy) measurements also revealed the interfacial roughening in the Ag/CoFeB interface due to the island structure formation and intermixing between Ag and CoFeB.

• Journal of the Korean Chemical Society
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• v.38 no.4
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• pp.276-282
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• 1994

Perovskite-type mixed oxides LaBO$_3$(B = Mn, Fe, Co) were prepared by citrate sol-gel method in $air(850^{\circ}C$, 24h). The oxygen stoichiometries and structures of these oxides were determined by XRD and TPR results as followings; LaMnO$_{3.16}$(a = 5.507, c = 13.329 $\AA$, hexagonal), LaFeO$_{3.17}$(a = 5.554, b = 5.555, c = 7.863 $\AA$, orthorhomibic), LaCoO$_{3.0}$(a = 5.436, c = 13.095 $\AA$, hexagonal). The temperature programmed reduction(TPR) experiments in static 300 torr H$_2$ atmosphere shows that the reduction reaction of LaBO$_3$(B = Mn, Fe, Co) proceeds into two stages, and thermal stabilities of these oxides decreased in the order of LaMnO$_3$ > LaFeO$_3$ > LaCoO$_3$. According to the kinetic analysis the lowest activation energy was obtained for LaCoO$_3$.

• Journal of the Korean Magnetics Society
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• v.21 no.1
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• pp.10-14
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• 2011

We have measured the ferromagnetic resonance (FMR) signal in as deposited and $400^{\circ}C$ annealed CoFeB/MgO thin film to investigate the annealing effect on magnetic anisotropies and FMR linewidth (${\Delta}H_{PP}$). The uniaxial anisotropy field ($H_{K1}$) was only observed in the as deposited sample. Whereas, in the $400^{\circ}C$ annealed sample, the biaxial anisotropy field ($H_{K2}$) was additionally observed in accompany with uniaxial anisotropy field ($H_{K1}$). The appearance of biaxial anisotropy fields was originated from the crystalline growth of bcc CoFeB(001) from the MgO(001) interface and by the B diffusion during thermal annealing. Also, the ${\Delta}H_{PP}$ of $400^{\circ}C$ annealed sample was increased compared with that of as deposited sample, which was due to the broad distribution of the magnetization axis by the biaxial anisotropy.

• Journal of the Korean Magnetics Society
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• v.18 no.3
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• pp.85-88
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• 2008

We calculated the electronic structures of substituted cobalt nitrides, that is $FeCo_3N$ and $NiCo_3Ni$, by using the all electron fullpotential linearized augmented plane-wave (FLAPW) energy band method, and investigated the influence on the magnetic properties of $Co_4N$ due to the substitution of Co atom located at corner sites by iron and nickel atoms. We found that the magnetic moments of CoII atoms located at the face-center positions in these compounds are almost same to that of $Co_4N$. The magnetic moments of Fe and Ni atoms in $FeCo_3N$ and $NiCo_3Ni$ are 3.086 and $0.795\;{\mu}_B$, and they have the localized nature of magnetism.