• Title/Summary/Keyword: FeCoB

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Study on the HDDR Characteristics of the Nd-Fe(-Co)-B(-Ga-Zr)-type Alloys

  • Shon, S.W.;Kwon, H.W.;Kang, D.I.;Kim, Yoon.B.;Jeung, W.Y.
    • Journal of Magnetics
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    • v.4 no.4
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    • pp.131-135
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    • 1999
  • The HDDR characteristics of the Nd-Fe-B-type isotropic and anisotropic HDDR alloys were investigated using three types of alloys: alloy A $(Nd_{12.6}Fe_{81.4}B_6), alloy B (Nd_{12.6}Fe_{81.3}B_6Zr_{0.1}), and alloy C (Nd_{12.6}Fe_{68.8}Co_{11.5}B_6Ga_{1.0}Zr_{0.1}$). The alloy A is featured with the isotropic HDDR character, while alloy B and C are featured with the anisotropic HDDR character. Hydrogenation and disproportionation characteristics of the alloys were examined using DTA under hydrogen gas. Recombination characteristics of the alloys were examined by observing the coercivity variation as a function of recombination time. The present study revealed that the alloy C exhibits slightly higher hydrogenation and disproportionation temperatures compared to the alloy A and B. Recombination of the anisotropic alloy B and C takes place more rapidly with respect to the isotropic alloy A. The intrinsic coercivities of the recombined materials rapidly increased with increasing the recombination time and then showed a peak, after which the coercivities decreased gradually. The degraded coercivity was, however, recovered significantly on prolonged recombination treatment. Compared with the isotropic HDDR alloy A the anisotropic HDDR alloy B and C are notable for their greater recovery of coercivity. The significant recovery of coercivity was accounted for the in terms of the development of well-defined smooth grain boundary between the recombined grains on prolonged recombination.

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Magnetic anisotropy of Al/Tb-Fe-Co multilayer thin films (Al/Tb-Fe-Co 다층박막의 자기적 이방특성)

  • 김명한;문정탁;신웅식;임기조
    • Electrical & Electronic Materials
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    • v.5 no.1
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    • pp.8-13
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    • 1992
  • 일련의 Al/Tb-Fe-Co 다층박막 시편이 DC마그네트론 스퍼터링에 의해 제조되었다. 이 박막들은 (xA/yB)n의 형태이고 여기서 x와 y는 각각 Al 및 Tb-Fe-Co 박막의 두께를 나타내고 n은 각 박막의 수를 나타낸다. 각 박막의 두께는 2~40nm이다. Al과 Tb-Fe-Co박막의 두께변화에 따른 다층박막의 자기적 성질이 vibration sample magnetometry(VSM)에 의해 측정되었다. 이들 다층박막은 동일한 스퍼터링조건에서 제조되고 수평 자기적 이방성 특성을 보이고 있는 단층 Tb-Fe-Co박막을 기준시편으로 하여 자기적 성질이 비교되었다. 다층박막 시스템에서는 현저한 계면 또는 박막두께의 효과가 발견되었으며 이들 효과에 의해 단층박막의 수평자기체가 다층박막에서는 강한 수직자기체로 변화되는 것을 알 수 있고, 또한 Al과 Tb-Fe-Co합금 경계구역에 스퍼터링에 따른 약 2nm두께의 dead layer가 존재함이 입증 되었다.

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Effects of Etch Parameters on Etching of CoFeB Thin Films in $CH_4/O_2/Ar$ Mix

  • Lee, Tea-Young;Lee, Il-Hoon;Chung, Chee-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.390-390
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    • 2012
  • Information technology industries has grown rapidly and demanded alternative memories for the next generation. The most popular random access memory, dynamic random-access memory (DRAM), has many advantages as a memory, but it could not meet the demands from the current of developed industries. One of highlighted alternative memories is magnetic random-access memory (MRAM). It has many advantages like low power consumption, huge storage, high operating speed, and non-volatile properties. MRAM consists of magnetic-tunnel-junction (MTJ) stack which is a key part of it and has various magnetic thin films like CoFeB, FePt, IrMn, and so on. Each magnetic thin film is difficult to be etched without any damages and react with chemical species in plasma. For improving the etching process, a high density plasma etching process was employed. Moreover, the previous etching gases were highly corrosive and dangerous. Therefore, the safety etching gases are needed to be developed. In this research, the etch characteristics of CoFeB magnetic thin films were studied by using an inductively coupled plasma reactive ion etching in $CH_4/O_2/Ar$ gas mixes. TiN thin films were used as a hardmask on CoFeB thin films. The concentrations of $O_2$ in $CH_4/O_2/Ar$ gas mix were varied, and then, the rf coil power, gas pressure, and dc-bias voltage. The etch rates and the selectivity were obtained by a surface profiler and the etch profiles were observed by a field emission scanning electron microscopy. X-ray photoelectron spectroscopy was employed to reveal the etch mechanism.

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Synthesis and Formation Mechanism of ZrTiO4 Gray Pigment (ZrTiO4계 Gray 안료 합성과 형성기구)

  • Hwang, Dong-Ha;Lee, Byung-Ha
    • Journal of the Korean Ceramic Society
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    • v.49 no.1
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    • pp.84-89
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    • 2012
  • Attempts were made to develop a stable gray pigment at reducing atmosphere, substituting Ti in $ZrTiO_4$ with Mn, Fe, Co and Cu The pigment synthesized at $1300~1500^{\circ}C$ by solid state method with the composition of $ZrTi_{1-x-y}A_xB_yO_4$ (x = y = 0.005, 0.015, 0.035, 0.055, 0.075, 0.095, 0.115, 0.135, 0.155, 0.175 and 0.195 mole, A = Mn(III), Fe(III), Co(II, III) and Cu(II) (chromophores), B = Sb (counterion). The pigments were fired at $1400^{\circ}C$ for 3 h with substitute amount changes of Mn, Fe, Co and Cu to $ZrTiO_4$ crystals, and analyzed by Raman spectroscopy to figure out substitute limits. Results indicated 0.035 mole for Mn, 0.115 mole for Fe, 0.015 mole for Co and 0.015 mole for Cu as substitute limits, respectively. Figs. 1, 2, 3, and 4 represent each substitute pigments of Mn, Fe, Co and Cu. Synthesized pigment was applied to a lime and a lime-magnesia glaze at 7 wt% each, and fired at reducing atmosphere of $1240^{\circ}C$, soaking time 1h. Gray color was obtained with CIE-$L^*a^*b^*$ values at 44.55, -0.65, 1.19(Mn), 40.36, -0.90, 0.30(Fe), 42.63, -0.03, -1.49(Cu) and -40.79, -0.28, -0.91(Co), respectively.

Catalytic Combustion of Benzene over Perovskite-type Oxides Prepared Using Malic Acid Method (능금산법으로 제조된 페롭스카이트형 산화물에서 벤젠의 촉매연소반응)

  • Jung, Won-Young;Hong, Seong-Soo
    • Clean Technology
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    • v.18 no.3
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    • pp.259-264
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    • 2012
  • Perovskite-type oxides were successfully prepared using malic acid method, characterized by TG/DTA, XRD, XPS, TEM and $H_2$-TPR and their catalytic activities for the combustion of benzene were determined. Almost of catalyst showed perovskite crystalline phase and 15-70 nm particle size. The $LaMnO_3$ catalysts showed the highest activity and the conversion reaches almost 100% at $350^{\circ}C$. The catalysts were modified to enhance the activity through substitution of metal into the A or B site of the perovskite oxides. In the $LaMnO_3$-type catalyst, the partial substitution of Sr into site the A-site enhanced the catalytic activity in the benzene combustion. In addition, the partial substitution of Co or Cu into site the B-site also enhanced the catalytic activity and the catalytic activity was in the order of Co > Cu > Fe in the $LaMn_{1-x}B_xO_3$ (B = Co, Fe, Cu) type catalyst.

FeCoB Films with Large Saturation Magnetization and High Magnetic Anisotropy Field to Attain High Ferromagnetic Resonance Frequency

  • Nakagawa, Shigeki;Hirata, Ken-Ichiro
    • Journal of Magnetics
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    • v.18 no.2
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    • pp.155-158
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    • 2013
  • FeCoB films were being prepared on a Ru underlayer by using the oblique incidence of sputtered and back-scattered particles which have a high in-plane magnetic anisotropy field $H_k$ above 400 Oe. It is suitable to attain such deposition condition when facing targets sputtering system. The in-plane X-ray diffraction analysis clarified that there is anisotropic residual stress which is the origin of the high in-plane magnetic anisotropy. The directional crystalline alignment and inclination of crystallite growth were also observed. Such anisotropic crystalline structures may affect the anisotropic residual stress in the films. The B content of 5.6 at.% was appropriate to induce such anisotropic residual stress and $H_k$ of 410 Oe in this experiment. The film with B content of 6 at.% possessed large saturation magnetization of 22 kG and high $H_k$ of 500 Oe. The film exhibited high ferromagnetic resonance frequency of 9.2 GHz.

Magnetic properties of Sr-ferrite by La-Co substitution (La-Co 치환량에 따른 스트론튬 페라이트의 자기특성)

  • 장세동
    • Resources Recycling
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    • v.11 no.5
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    • pp.16-20
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    • 2002
  • This experiment was carried out to examine the effects of La-Co substitution on Sr-ferrite. The magnetic properties of calcined and sintered materials varied with the substitutional amount of La and Co elements in Sr-ferrite. Anisotropy field and coercivity for Sr ferrite were increased with raising La-Co substitution amounts. The microstructure observation for Sr ferrite substituted by La-Co revealed that La-Co inhabited grain growth during calcination and promoted lateral grain growth during sintering. The relationship between $B_{r}$ and $_{i}$ /$H_{c}$ for La-Co substituted Sr-ferrite was found to be $B_{r}$$≒0.097_{i}$ /$H_{c}$/+4500. In case of $SrFe_{12}$ $O_{19}$, $B_{r} was 4090 G and $_{ i}$$H_{c}$ was 3560 Oe, but $B_{r}$ was 4080 G and and $_{i}$ $H_{c}$ was 4800 Oe for $Sr_{0.7}$ $La_{0.3}$ $Fe_{11.7}$ /$Co_{0.3}$ $O_{19}$.